CH296463A - Dreistufiges Korpuskularstrahlmikroskop. - Google Patents

Dreistufiges Korpuskularstrahlmikroskop.

Info

Publication number
CH296463A
CH296463A CH296463DA CH296463A CH 296463 A CH296463 A CH 296463A CH 296463D A CH296463D A CH 296463DA CH 296463 A CH296463 A CH 296463A
Authority
CH
Switzerland
Prior art keywords
stage
beam microscope
corpuscular beam
corpuscular
microscope
Prior art date
Application number
Other languages
English (en)
Inventor
Aktiengesellschaft Siem Halske
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH296463A publication Critical patent/CH296463A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH296463D 1943-01-15 1944-01-05 Dreistufiges Korpuskularstrahlmikroskop. CH296463A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE296463X 1943-01-15

Publications (1)

Publication Number Publication Date
CH296463A true CH296463A (de) 1954-02-15

Family

ID=6090392

Family Applications (1)

Application Number Title Priority Date Filing Date
CH296463D CH296463A (de) 1943-01-15 1944-01-05 Dreistufiges Korpuskularstrahlmikroskop.

Country Status (2)

Country Link
CH (1) CH296463A (de)
FR (1) FR902802A (de)

Also Published As

Publication number Publication date
FR902802A (fr) 1945-09-13

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