FR902802A - Microscope électronique ou ionique à trois étages - Google Patents

Microscope électronique ou ionique à trois étages

Info

Publication number
FR902802A
FR902802A FR902802DA FR902802A FR 902802 A FR902802 A FR 902802A FR 902802D A FR902802D A FR 902802DA FR 902802 A FR902802 A FR 902802A
Authority
FR
France
Prior art keywords
ion microscope
stage electron
electron
stage
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application granted granted Critical
Publication of FR902802A publication Critical patent/FR902802A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR902802D 1943-01-15 1944-03-18 Microscope électronique ou ionique à trois étages Expired FR902802A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE296463X 1943-01-15

Publications (1)

Publication Number Publication Date
FR902802A true FR902802A (fr) 1945-09-13

Family

ID=6090392

Family Applications (1)

Application Number Title Priority Date Filing Date
FR902802D Expired FR902802A (fr) 1943-01-15 1944-03-18 Microscope électronique ou ionique à trois étages

Country Status (2)

Country Link
CH (1) CH296463A (fr)
FR (1) FR902802A (fr)

Also Published As

Publication number Publication date
CH296463A (de) 1954-02-15

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