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Application filed by Siemens AgfiledCriticalSiemens Ag
Publication of CH320560ApublicationCriticalpatent/CH320560A/de
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
CH320560D1953-05-061954-04-20Anordnung zur Kompensation des axialen Astigmatismus von Elektronenlinsen
CH320560A
(de)