CH337585A - Elektrostatische Linse für Korpuskularstrahlapparate - Google Patents

Elektrostatische Linse für Korpuskularstrahlapparate

Info

Publication number
CH337585A
CH337585A CH337585DA CH337585A CH 337585 A CH337585 A CH 337585A CH 337585D A CH337585D A CH 337585DA CH 337585 A CH337585 A CH 337585A
Authority
CH
Switzerland
Prior art keywords
electrostatic lens
beam devices
corpuscular beam
corpuscular
devices
Prior art date
Application number
Other languages
English (en)
Inventor
Lienhard Dr Wegmann
Original Assignee
Trueb Taeuber & Co Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trueb Taeuber & Co Ag filed Critical Trueb Taeuber & Co Ag
Publication of CH337585A publication Critical patent/CH337585A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
CH337585D 1956-02-28 1956-02-28 Elektrostatische Linse für Korpuskularstrahlapparate CH337585A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1164993X 1956-02-28

Publications (1)

Publication Number Publication Date
CH337585A true CH337585A (de) 1959-04-15

Family

ID=4560923

Family Applications (1)

Application Number Title Priority Date Filing Date
CH337585D CH337585A (de) 1956-02-28 1956-02-28 Elektrostatische Linse für Korpuskularstrahlapparate

Country Status (3)

Country Link
CH (1) CH337585A (de)
DE (1) DE1062844B (de)
FR (1) FR1164993A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036659A1 (de) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahl-austastsystem
US9980562B2 (en) 2014-07-18 2018-05-29 Carl H. Schulman Tray table apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE914168C (de) * 1943-03-12 1954-06-28 Aeg Elektronenmikroskop, insbesondere UEbermikroskop, mit wenigstens teilweise elektrostatisch wirkenden Linsen
DE909608C (de) * 1943-04-03 1954-04-22 Aeg UEbermikroskop
DE876568C (de) * 1951-03-14 1953-05-15 Zeiss Opton Optische Werke Obe Elektrostatische Elektronenlinse

Also Published As

Publication number Publication date
FR1164993A (fr) 1958-10-16
DE1062844B (de) 1959-08-06

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