CH337585A - Electrostatic lens for corpuscular beam devices - Google Patents
Electrostatic lens for corpuscular beam devicesInfo
- Publication number
- CH337585A CH337585A CH337585DA CH337585A CH 337585 A CH337585 A CH 337585A CH 337585D A CH337585D A CH 337585DA CH 337585 A CH337585 A CH 337585A
- Authority
- CH
- Switzerland
- Prior art keywords
- electrostatic lens
- beam devices
- corpuscular beam
- corpuscular
- devices
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1164993X | 1956-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH337585A true CH337585A (en) | 1959-04-15 |
Family
ID=4560923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH337585D CH337585A (en) | 1956-02-28 | 1956-02-28 | Electrostatic lens for corpuscular beam devices |
Country Status (3)
| Country | Link |
|---|---|
| CH (1) | CH337585A (en) |
| DE (1) | DE1062844B (en) |
| FR (1) | FR1164993A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3036659A1 (en) * | 1980-09-29 | 1982-05-13 | Siemens AG, 1000 Berlin und 8000 München | BODY BEAM BLOCKING SYSTEM |
| US9980562B2 (en) | 2014-07-18 | 2018-05-29 | Carl H. Schulman | Tray table apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE914168C (en) * | 1943-03-12 | 1954-06-28 | Aeg | Electron microscope, in particular over microscope, with at least partially electrostatic lenses |
| DE909608C (en) * | 1943-04-03 | 1954-04-22 | Aeg | Over microscope |
| DE876568C (en) * | 1951-03-14 | 1953-05-15 | Zeiss Opton Optische Werke Obe | Electrostatic electron lens |
-
1956
- 1956-02-28 CH CH337585D patent/CH337585A/en unknown
-
1957
- 1957-01-14 DE DET13097A patent/DE1062844B/en active Pending
- 1957-01-23 FR FR1164993D patent/FR1164993A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1062844B (en) | 1959-08-06 |
| FR1164993A (en) | 1958-10-16 |
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