CH416158A - Process for the layer breakdown of solids - Google Patents

Process for the layer breakdown of solids

Info

Publication number
CH416158A
CH416158A CH1242560A CH1242560A CH416158A CH 416158 A CH416158 A CH 416158A CH 1242560 A CH1242560 A CH 1242560A CH 1242560 A CH1242560 A CH 1242560A CH 416158 A CH416158 A CH 416158A
Authority
CH
Switzerland
Prior art keywords
solids
layer breakdown
breakdown
layer
Prior art date
Application number
CH1242560A
Other languages
German (de)
Inventor
Fritz Dr Grasenick
Jakopic Erich
Otto Dr Reiter
Ziegelbecker Rudolf
Original Assignee
Fritz Dr Grasenick
Jakopic Erich
Otto Dr Reiter
Ziegelbecker Rudolf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fritz Dr Grasenick, Jakopic Erich, Otto Dr Reiter, Ziegelbecker Rudolf filed Critical Fritz Dr Grasenick
Publication of CH416158A publication Critical patent/CH416158A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • ing And Chemical Polishing (AREA)
CH1242560A 1959-10-28 1960-10-27 Process for the layer breakdown of solids CH416158A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT777159A AT222385B (en) 1959-10-28 1959-10-28 Process for the layer breakdown of solids

Publications (1)

Publication Number Publication Date
CH416158A true CH416158A (en) 1966-06-30

Family

ID=3599312

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1242560A CH416158A (en) 1959-10-28 1960-10-27 Process for the layer breakdown of solids

Country Status (5)

Country Link
AT (1) AT222385B (en)
CH (1) CH416158A (en)
DE (1) DE1293479B (en)
GB (1) GB972774A (en)
SE (1) SE303203B (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE524672A (en) * 1952-11-29 1900-01-01
US2829070A (en) * 1955-04-27 1958-04-01 Du Pont Treatment of synthetic linear polyester structures and product

Also Published As

Publication number Publication date
GB972774A (en) 1964-10-14
SE303203B (en) 1968-08-19
AT222385B (en) 1962-07-25
DE1293479B (en) 1969-04-24

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