GB972774A - Improvements in and relating to strata decomposition of solid substances - Google Patents
Improvements in and relating to strata decomposition of solid substancesInfo
- Publication number
- GB972774A GB972774A GB3707860A GB3707860A GB972774A GB 972774 A GB972774 A GB 972774A GB 3707860 A GB3707860 A GB 3707860A GB 3707860 A GB3707860 A GB 3707860A GB 972774 A GB972774 A GB 972774A
- Authority
- GB
- United Kingdom
- Prior art keywords
- gas
- decomposition
- oct
- cooled
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000354 decomposition reaction Methods 0.000 title abstract 3
- 239000007787 solid Substances 0.000 title abstract 2
- 239000000126 substance Substances 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 8
- 239000000463 material Substances 0.000 abstract 3
- 239000011368 organic material Substances 0.000 abstract 2
- 238000001994 activation Methods 0.000 abstract 1
- 230000004913 activation Effects 0.000 abstract 1
- 125000004429 atom Chemical group 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 238000007725 thermal activation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- ing And Chemical Polishing (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
972,774. Etching. F. GRASENICK, E. JAKOPIC, O. REITER, and R. ZIEGELBECKER. Oct. 28, 1960 [Oct. 28, 1959], No. 37078/60. Heading B6J. [Also in Division H1] Solid substances such as organic materials, and particularly high polymers, are subjected to surface decomposition by the action of at least one activated gas, the decomposition taking place solely on the exposed surface of the material and at a temperature below that at which thermal activation of the gas occurs. The organic material P is placed on a carrier 2, which may be heated or cooled, in an evacuated container 1 and a gas e.g. oxygen or hydrogen, is passed through the container at sub-atmospheric pressure. A high-frequency coil 3 provides a field which activates the gas, i.e. raises the energy level of at least some of the electrons in the outer shells of the gas atoms from the ground level, so that it diffuses into the material P and decomposes it on the surface only, the reaction products being either gaseous or easily removable. The material P is screened from the high-frequency field by a grid 4 and the plate or carrier 2 may be heated or cooled. The activation may alternatively be produced by ultra-violet rays or electrons acting on the gas and in addition an electric or magnetic field may be applied to increase the interspersion of the gas particles. Electrodes may be used and the ions sucked off from the gas plasma.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT777159A AT222385B (en) | 1959-10-28 | 1959-10-28 | Process for the layer breakdown of solids |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB972774A true GB972774A (en) | 1964-10-14 |
Family
ID=3599312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3707860A Expired GB972774A (en) | 1959-10-28 | 1960-10-28 | Improvements in and relating to strata decomposition of solid substances |
Country Status (5)
| Country | Link |
|---|---|
| AT (1) | AT222385B (en) |
| CH (1) | CH416158A (en) |
| DE (1) | DE1293479B (en) |
| GB (1) | GB972774A (en) |
| SE (1) | SE303203B (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE524672A (en) * | 1952-11-29 | 1900-01-01 | ||
| US2829070A (en) * | 1955-04-27 | 1958-04-01 | Du Pont | Treatment of synthetic linear polyester structures and product |
-
1959
- 1959-10-28 AT AT777159A patent/AT222385B/en active
-
1960
- 1960-10-26 SE SE1029060A patent/SE303203B/xx unknown
- 1960-10-27 CH CH1242560A patent/CH416158A/en unknown
- 1960-10-27 DE DE1960G0030804 patent/DE1293479B/en active Pending
- 1960-10-28 GB GB3707860A patent/GB972774A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1293479B (en) | 1969-04-24 |
| AT222385B (en) | 1962-07-25 |
| SE303203B (en) | 1968-08-19 |
| CH416158A (en) | 1966-06-30 |
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