CH432662A - Verfahren zur Herstellung von Gallium-Arsenid-Transistoren - Google Patents

Verfahren zur Herstellung von Gallium-Arsenid-Transistoren

Info

Publication number
CH432662A
CH432662A CH981565A CH981565A CH432662A CH 432662 A CH432662 A CH 432662A CH 981565 A CH981565 A CH 981565A CH 981565 A CH981565 A CH 981565A CH 432662 A CH432662 A CH 432662A
Authority
CH
Switzerland
Prior art keywords
gallium arsenide
manufacturing gallium
arsenide transistors
transistors
manufacturing
Prior art date
Application number
CH981565A
Other languages
English (en)
Inventor
Richard Antell George
Original Assignee
Itt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itt filed Critical Itt
Publication of CH432662A publication Critical patent/CH432662A/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/854—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs further characterised by the dopants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/12—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/15—Silicon on sapphire SOS
CH981565A 1964-07-14 1965-07-13 Verfahren zur Herstellung von Gallium-Arsenid-Transistoren CH432662A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB28953/64A GB1037199A (en) 1964-07-14 1964-07-14 Improvements in or relating to transistor manufacture

Publications (1)

Publication Number Publication Date
CH432662A true CH432662A (de) 1967-03-31

Family

ID=10283872

Family Applications (1)

Application Number Title Priority Date Filing Date
CH981565A CH432662A (de) 1964-07-14 1965-07-13 Verfahren zur Herstellung von Gallium-Arsenid-Transistoren

Country Status (7)

Country Link
US (1) US3352725A (de)
BE (1) BE666784A (de)
CH (1) CH432662A (de)
DE (1) DE1271841B (de)
FR (1) FR1439728A (de)
GB (1) GB1037199A (de)
NL (1) NL6508999A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484854A (en) * 1966-10-17 1969-12-16 Westinghouse Electric Corp Processing semiconductor materials
US3541678A (en) * 1967-08-01 1970-11-24 United Aircraft Corp Method of making a gallium arsenide integrated circuit
US3728784A (en) * 1971-04-15 1973-04-24 Monsanto Co Fabrication of semiconductor devices
US3728785A (en) * 1971-04-15 1973-04-24 Monsanto Co Fabrication of semiconductor devices
US3798083A (en) * 1971-04-15 1974-03-19 Monsanto Co Fabrication of semiconductor devices
GB1446592A (en) * 1973-01-09 1976-08-18 English Electric Valve Co Ltd Dynode structures
FR2288390A1 (fr) * 1974-10-18 1976-05-14 Thomson Csf Procede de realisation d'une structure semi-conductrice pour hyperfrequence et composant electronique ainsi obtenu
US4058413A (en) * 1976-05-13 1977-11-15 The United States Of America As Represented By The Secretary Of The Air Force Ion implantation method for the fabrication of gallium arsenide semiconductor devices utilizing an aluminum nitride protective capping layer
GB1569369A (en) * 1977-04-01 1980-06-11 Standard Telephones Cables Ltd Injection lasers
DE3170644D1 (en) * 1980-11-29 1985-06-27 Toshiba Kk Method of filling a groove in a semiconductor substrate
US10880088B1 (en) 2018-10-16 2020-12-29 Sprint Communications Company L.P. Data communication target control with contact tokens
CN119764162B (zh) * 2025-03-04 2025-05-13 忻州中科晶电信息材料有限公司 一种掺杂镉元素的砷化镓晶片及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE506110A (de) * 1950-09-29
GB807995A (en) * 1955-09-02 1959-01-28 Gen Electric Co Ltd Improvements in or relating to the production of semiconductor bodies
US3189800A (en) * 1959-12-14 1965-06-15 Westinghouse Electric Corp Multi-region two-terminal semiconductor device
GB1052379A (de) * 1963-03-28 1900-01-01
US3255056A (en) * 1963-05-20 1966-06-07 Rca Corp Method of forming semiconductor junction
US3401508A (en) * 1965-08-02 1968-09-17 Int Harvester Co Cotton harvester with means for automatically cleaning trash screen

Also Published As

Publication number Publication date
FR1439728A (fr) 1966-05-20
BE666784A (de) 1966-01-13
DE1271841B (de) 1968-07-04
NL6508999A (de) 1966-01-17
US3352725A (en) 1967-11-14
GB1037199A (en) 1966-07-27

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