CH479161A - Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums - Google Patents

Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums

Info

Publication number
CH479161A
CH479161A CH1199567A CH1199567A CH479161A CH 479161 A CH479161 A CH 479161A CH 1199567 A CH1199567 A CH 1199567A CH 1199567 A CH1199567 A CH 1199567A CH 479161 A CH479161 A CH 479161A
Authority
CH
Switzerland
Prior art keywords
creating
maintaining
high vacuum
getter pump
ion getter
Prior art date
Application number
CH1199567A
Other languages
English (en)
Inventor
Schoenhuber Max-Josef Ing Dr
Original Assignee
Schoenhuber Max Josef Dr Ing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schoenhuber Max Josef Dr Ing filed Critical Schoenhuber Max Josef Dr Ing
Priority to CH1199567A priority Critical patent/CH479161A/de
Priority to DE19671539151 priority patent/DE1539151C/de
Priority to US750442A priority patent/US3489336A/en
Priority to NL6811185A priority patent/NL6811185A/xx
Priority to GB39096/68A priority patent/GB1188615A/en
Priority to FR1577681D priority patent/FR1577681A/fr
Priority to CH1643068A priority patent/CH488288A/de
Publication of CH479161A publication Critical patent/CH479161A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH1199567A 1967-08-25 1967-08-25 Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums CH479161A (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CH1199567A CH479161A (de) 1967-08-25 1967-08-25 Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums
DE19671539151 DE1539151C (de) 1967-08-25 1967-09-21 Ionen-Getterpumpe
US750442A US3489336A (en) 1967-08-25 1968-08-05 Getter-ion pump for producing and maintaining a high vacuum
NL6811185A NL6811185A (de) 1967-08-25 1968-08-07
GB39096/68A GB1188615A (en) 1967-08-25 1968-08-15 Improvements in or relating to getter ion pumps
FR1577681D FR1577681A (de) 1967-08-25 1968-08-21
CH1643068A CH488288A (de) 1967-08-25 1968-11-01 Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1199567A CH479161A (de) 1967-08-25 1967-08-25 Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums

Publications (1)

Publication Number Publication Date
CH479161A true CH479161A (de) 1969-09-30

Family

ID=4378845

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1199567A CH479161A (de) 1967-08-25 1967-08-25 Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums

Country Status (5)

Country Link
US (1) US3489336A (de)
CH (1) CH479161A (de)
FR (1) FR1577681A (de)
GB (1) GB1188615A (de)
NL (1) NL6811185A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694691A (en) * 1970-11-23 1972-09-26 Gen Electric Sublimation getter pump with cathode trigger means
US4167370A (en) * 1976-11-01 1979-09-11 Massachusetts Institute Of Technology Method of an apparatus for self-sustaining high vacuum in a high voltage environment
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US20180306175A1 (en) * 2017-04-25 2018-10-25 Edwards Vacuum Llc Magnetic focusing in an ion pump using internal ferrous materials

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3070283A (en) * 1959-06-15 1962-12-25 Ultek Corp Vacuum pump
DE1201945B (de) * 1962-06-08 1965-09-30 Heraeus Gmbh W C Zerstaeubungs-Vakuumpumpe

Also Published As

Publication number Publication date
GB1188615A (en) 1970-04-22
DE1539151A1 (de) 1970-10-22
NL6811185A (de) 1969-02-27
DE1539151B2 (de) 1972-06-29
FR1577681A (de) 1969-08-08
US3489336A (en) 1970-01-13

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Legal Events

Date Code Title Description
PL Patent ceased