CH479411A - Vorrichtung zum Beschichten - Google Patents

Vorrichtung zum Beschichten

Info

Publication number
CH479411A
CH479411A CH1577968A CH1577968A CH479411A CH 479411 A CH479411 A CH 479411A CH 1577968 A CH1577968 A CH 1577968A CH 1577968 A CH1577968 A CH 1577968A CH 479411 A CH479411 A CH 479411A
Authority
CH
Switzerland
Prior art keywords
coating
Prior art date
Application number
CH1577968A
Other languages
English (en)
Inventor
Richard Skinner James
Francis Herte Lawrence
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH479411A publication Critical patent/CH479411A/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D53/00—Making other particular articles
    • B21D53/60—Making other particular articles cutlery wares; garden tools or the like
    • B21D53/64—Making other particular articles cutlery wares; garden tools or the like knives; scissors; cutting blades
    • B21D53/645—Making other particular articles cutlery wares; garden tools or the like knives; scissors; cutting blades safety razor blades
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1577968A 1967-10-23 1968-10-22 Vorrichtung zum Beschichten CH479411A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67716067A 1967-10-23 1967-10-23

Publications (1)

Publication Number Publication Date
CH479411A true CH479411A (de) 1969-10-15

Family

ID=24717583

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1577968A CH479411A (de) 1967-10-23 1968-10-22 Vorrichtung zum Beschichten

Country Status (5)

Country Link
US (1) US3562140A (de)
CH (1) CH479411A (de)
DE (1) DE1781319A1 (de)
FR (1) FR1589781A (de)
GB (1) GB1240700A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422718A1 (de) * 1984-06-19 1986-01-09 Plasmainvent AG, Zug Vakuum-plasma-beschichtungsanlage

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652443A (en) * 1970-08-25 1972-03-28 Gillette Co Deposition apparatus
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
US4661233A (en) * 1985-07-05 1987-04-28 Westinghouse Electric Corp. Cathode/ground shield arrangement in a sputter coating apparatus
US4610775A (en) * 1985-07-26 1986-09-09 Westinghouse Electric Corp. Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber
US4909695A (en) * 1986-04-04 1990-03-20 Materials Research Corporation Method and apparatus for handling and processing wafer-like materials
US5124013A (en) * 1988-02-08 1992-06-23 Optical Coating Laboratory, Inc. High ratio planetary drive system and method for vacuum chamber
US5958134A (en) * 1995-06-07 1999-09-28 Tokyo Electron Limited Process equipment with simultaneous or sequential deposition and etching capabilities
AU2074097A (en) * 1996-03-04 1997-09-22 Polar Materials, Inc. Method for bulk coating using a plasma process
JP3192642B2 (ja) * 1998-10-02 2001-07-30 住友特殊金属株式会社 表面処理用支持部材、表面処理用ホルダー、並びに表面処理方法
US6749764B1 (en) * 2000-11-14 2004-06-15 Tru-Si Technologies, Inc. Plasma processing comprising three rotational motions of an article being processed
SE527180C2 (sv) * 2003-08-12 2006-01-17 Sandvik Intellectual Property Rakel- eller schaberblad med nötningsbeständigt skikt samt metod för tillverkning därav
TWI280986B (en) * 2004-04-30 2007-05-11 Hon Hai Prec Ind Co Ltd Vacuum vapor deposition apparatus
EP1815040B1 (de) * 2004-09-08 2016-01-06 BIC Violex S.A. Verfahren zur abscheidung einer schicht auf einer rasierklingenkante und rasierklinge
US20070224350A1 (en) * 2006-03-21 2007-09-27 Sandvik Intellectual Property Ab Edge coating in continuous deposition line

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422718A1 (de) * 1984-06-19 1986-01-09 Plasmainvent AG, Zug Vakuum-plasma-beschichtungsanlage

Also Published As

Publication number Publication date
DE1781319A1 (de) 1970-12-03
US3562140A (en) 1971-02-09
GB1240700A (en) 1971-07-28
FR1589781A (de) 1970-04-06

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Legal Events

Date Code Title Description
PL Patent ceased