CH558085A - Verfahren zur herstellung integrierter schaltungen. - Google Patents
Verfahren zur herstellung integrierter schaltungen.Info
- Publication number
- CH558085A CH558085A CH599473A CH599473A CH558085A CH 558085 A CH558085 A CH 558085A CH 599473 A CH599473 A CH 599473A CH 599473 A CH599473 A CH 599473A CH 558085 A CH558085 A CH 558085A
- Authority
- CH
- Switzerland
- Prior art keywords
- integrated circuits
- manufacturing integrated
- manufacturing
- circuits
- integrated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/021—Manufacture or treatment of air gaps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/20—Air gaps
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24774672A | 1972-04-26 | 1972-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH558085A true CH558085A (de) | 1975-01-15 |
Family
ID=22936199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH599473A CH558085A (de) | 1972-04-26 | 1973-04-26 | Verfahren zur herstellung integrierter schaltungen. |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4955285A (de) |
| CH (1) | CH558085A (de) |
| DE (1) | DE2320449A1 (de) |
| GB (1) | GB1394160A (de) |
-
1973
- 1973-04-09 GB GB1694273A patent/GB1394160A/en not_active Expired
- 1973-04-21 DE DE2320449A patent/DE2320449A1/de active Pending
- 1973-04-26 JP JP48046767A patent/JPS4955285A/ja active Pending
- 1973-04-26 CH CH599473A patent/CH558085A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| GB1394160A (en) | 1975-05-14 |
| JPS4955285A (de) | 1974-05-29 |
| DE2320449A1 (de) | 1973-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |