JPS4955285A - - Google Patents
Info
- Publication number
- JPS4955285A JPS4955285A JP48046767A JP4676773A JPS4955285A JP S4955285 A JPS4955285 A JP S4955285A JP 48046767 A JP48046767 A JP 48046767A JP 4676773 A JP4676773 A JP 4676773A JP S4955285 A JPS4955285 A JP S4955285A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/021—Manufacture or treatment of air gaps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/20—Air gaps
Landscapes
- Element Separation (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24774672A | 1972-04-26 | 1972-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4955285A true JPS4955285A (de) | 1974-05-29 |
Family
ID=22936199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48046767A Pending JPS4955285A (de) | 1972-04-26 | 1973-04-26 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4955285A (de) |
| CH (1) | CH558085A (de) |
| DE (1) | DE2320449A1 (de) |
| GB (1) | GB1394160A (de) |
-
1973
- 1973-04-09 GB GB1694273A patent/GB1394160A/en not_active Expired
- 1973-04-21 DE DE2320449A patent/DE2320449A1/de active Pending
- 1973-04-26 CH CH599473A patent/CH558085A/de not_active IP Right Cessation
- 1973-04-26 JP JP48046767A patent/JPS4955285A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CH558085A (de) | 1975-01-15 |
| GB1394160A (en) | 1975-05-14 |
| DE2320449A1 (de) | 1973-11-15 |