CH620946A5 - Method and appliance for continuous coating by means of cathode sputtering - Google Patents
Method and appliance for continuous coating by means of cathode sputtering Download PDFInfo
- Publication number
- CH620946A5 CH620946A5 CH1306677A CH1306677A CH620946A5 CH 620946 A5 CH620946 A5 CH 620946A5 CH 1306677 A CH1306677 A CH 1306677A CH 1306677 A CH1306677 A CH 1306677A CH 620946 A5 CH620946 A5 CH 620946A5
- Authority
- CH
- Switzerland
- Prior art keywords
- substrates
- magazine
- chamber
- pollination
- lock chamber
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000000576 coating method Methods 0.000 title claims description 12
- 239000011248 coating agent Substances 0.000 title claims description 8
- 238000004544 sputter deposition Methods 0.000 title claims 3
- 239000000758 substrate Substances 0.000 claims description 123
- 230000010152 pollination Effects 0.000 claims description 62
- 239000000969 carrier Substances 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000010410 dusting Methods 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009997 thermal pre-treatment Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Breeding Of Plants And Reproduction By Means Of Culturing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762653736 DE2653736A1 (de) | 1976-11-26 | 1976-11-26 | Verfahren und vorrichtung zur kontinuierlichen beschichtung von glas- oder keramiksubstraten mittels kathodenzerstaeubung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH620946A5 true CH620946A5 (en) | 1980-12-31 |
Family
ID=5994034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1306677A CH620946A5 (en) | 1976-11-26 | 1977-10-27 | Method and appliance for continuous coating by means of cathode sputtering |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5367684A (it) |
| CH (1) | CH620946A5 (it) |
| DE (1) | DE2653736A1 (it) |
| FR (1) | FR2372243A1 (it) |
| IT (1) | IT1089022B (it) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119672A (ja) * | 1984-11-14 | 1986-06-06 | Ulvac Corp | ロ−ドロツク室のベント方法 |
| US4640221A (en) * | 1985-10-30 | 1987-02-03 | International Business Machines Corporation | Vacuum deposition system with improved mass flow control |
| JPS6461645A (en) * | 1987-09-01 | 1989-03-08 | Yasuda Susumu | Dangerous harmful gas detecting method |
| DE102007022431A1 (de) * | 2007-05-09 | 2008-11-13 | Leybold Optics Gmbh | Behandlungssystem für flache Substrate |
| DE102008056125A1 (de) * | 2008-11-06 | 2010-05-12 | Leybold Optics Gmbh | Testglaswechselsystem zur selektiven Beschichtung und optischen Messung von Schichteigenschaften in einer Vakuumbeschichtungsanlage |
| CN111926306B (zh) * | 2020-09-22 | 2020-12-22 | 上海陛通半导体能源科技股份有限公司 | 基于多工艺腔传送的沉积设备及晶圆沉积方法 |
| CN114823432B (zh) * | 2022-06-28 | 2022-09-02 | 江苏邑文微电子科技有限公司 | 半导体真空传输平台及其控制方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1321861A (en) * | 1970-01-13 | 1973-07-04 | Ultra Electronics Ltd | Vacuum deposition |
| DE2116190C3 (de) * | 1971-04-02 | 1979-08-30 | Flachglas Ag Delog-Detag, 4650 Gelsenkirchen | Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung |
-
1976
- 1976-11-26 DE DE19762653736 patent/DE2653736A1/de not_active Withdrawn
-
1977
- 1977-10-27 CH CH1306677A patent/CH620946A5/de not_active IP Right Cessation
- 1977-11-21 FR FR7734925A patent/FR2372243A1/fr not_active Withdrawn
- 1977-11-24 IT IT2998477A patent/IT1089022B/it active
- 1977-11-25 JP JP14144577A patent/JPS5367684A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IT1089022B (it) | 1985-06-10 |
| DE2653736A1 (de) | 1978-06-01 |
| FR2372243A1 (fr) | 1978-06-23 |
| JPS5367684A (en) | 1978-06-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |