CH666054A5 - Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. - Google Patents

Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. Download PDF

Info

Publication number: CH666054A5
Authority: CH; Switzerland
Prior art keywords: carbide; evaporating; coating; titanium; forming substance
Prior art date: 1983-08-25

Application number

CH1660/85A

Other languages

German (de)

English (en)

Inventor

Alexei Georgievich Gavrilov

Leonid Stepanovich Guzei

Viktor Petrovich Zhed

Elena Ivanovna Kurbatova

Vyacheslav Nikolaevich Panin

Andrei Karlovich Sinelschikov

Valentin Glebovich Padalka

Original Assignee

Vni Instrument Inst

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-08-25

Filing date

1983-08-25

Publication date

1988-06-30

1983-08-25 Application filed by Vni Instrument Inst filed Critical Vni Instrument Inst

1988-06-30 Publication of CH666054A5 publication Critical patent/CH666054A5/de

Links

238000000576 coating method Methods 0.000 title claims description 35
239000011248 coating agent Substances 0.000 title claims description 32
238000000034 method Methods 0.000 title claims description 23
239000000126 substance Substances 0.000 claims description 29
238000001704 evaporation Methods 0.000 claims description 24
239000010936 titanium Substances 0.000 claims description 23
239000000463 material Substances 0.000 claims description 21
229910052719 titanium Inorganic materials 0.000 claims description 21
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 15
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
229910052799 carbon Inorganic materials 0.000 claims description 14
230000015572 biosynthetic process Effects 0.000 claims description 11
229910052750 molybdenum Inorganic materials 0.000 claims description 10
229910045601 alloy Inorganic materials 0.000 claims description 9
239000000956 alloy Substances 0.000 claims description 9
238000005520 cutting process Methods 0.000 claims description 9
239000011733 molybdenum Substances 0.000 claims description 9
150000002500 ions Chemical class 0.000 claims description 8
238000006243 chemical reaction Methods 0.000 claims description 7
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
229910001069 Ti alloy Inorganic materials 0.000 claims description 4
238000009833 condensation Methods 0.000 claims description 3
230000005494 condensation Effects 0.000 claims description 3
238000010891 electric arc Methods 0.000 claims description 3
XOUPWBJVJFQSLK-UHFFFAOYSA-J titanium(4+);tetranitrite Chemical compound [Ti+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O XOUPWBJVJFQSLK-UHFFFAOYSA-J 0.000 claims 1
239000000203 mixture Substances 0.000 description 16
238000012360 testing method Methods 0.000 description 12
-1 titanium ions Chemical class 0.000 description 11
229910000831 Steel Inorganic materials 0.000 description 9
239000010959 steel Substances 0.000 description 9
238000010438 heat treatment Methods 0.000 description 7
NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
229910052782 aluminium Inorganic materials 0.000 description 3
238000004880 explosion Methods 0.000 description 3
239000007789 gas Substances 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 2
229910039444 MoC Inorganic materials 0.000 description 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
230000008020 evaporation Effects 0.000 description 2
238000005555 metalworking Methods 0.000 description 2
MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
101100008044 Caenorhabditis elegans cut-1 gene Proteins 0.000 description 1
229910002110 ceramic alloy Inorganic materials 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
239000013078 crystal Substances 0.000 description 1
230000001934 delay Effects 0.000 description 1
238000005553 drilling Methods 0.000 description 1
239000002360 explosive Substances 0.000 description 1
239000012535 impurity Substances 0.000 description 1
238000002844 melting Methods 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000001556 precipitation Methods 0.000 description 1
230000008016 vaporization Effects 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Drilling Tools (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Materials For Medical Uses (AREA)
Food-Manufacturing Devices (AREA)

CH1660/85A 1983-08-25 1983-08-25 Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. CH666054A5 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SU1983/000030 WO1985001071A1 (fr)	1983-08-25	1983-08-25	Procede de depot d'un revetement

Publications (1)

Publication Number	Publication Date
CH666054A5 true CH666054A5 (de)	1988-06-30

Family

ID=21616808

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH1660/85A CH666054A5 (de)	1983-08-25	1983-08-25	Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges.

Country Status (15)

Country	Link
JP (1)	JPS60502110A (da)
AT (1)	AT382892B (da)
AU (1)	AU559857B2 (da)
BR (1)	BR8307748A (da)
CA (1)	CA1216252A (da)
CH (1)	CH666054A5 (da)
DE (1)	DE3390523C2 (da)
DK (1)	DK159385D0 (da)
FI (1)	FI80296C (da)
FR (1)	FR2557595B1 (da)
GB (1)	GB2155044B (da)
NL (1)	NL8320315A (da)
NO (1)	NO851558L (da)
SE (1)	SE454705B (da)
WO (1)	WO1985001071A1 (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3941918A1 (de) *	1989-06-27	1991-01-03	Hauzer Holding	Verfahren und vorrichtung zur beschichtung von substraten

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE453369C (sv) *	1986-05-28	1989-10-16	Vni Instrument Inst	Slitbestaendig belaeggning foer skaerverktyg och foerfarande foer paafoerande av belaeggningen
CH671238A5 (da) *	1986-11-06	1989-08-15	Vni Instrument Inst
AT388394B (de) *	1987-01-09	1989-06-12	Vni Instrument Inst	Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) *	1987-01-20	1989-05-26	Instr I	Procede de fabrication d'outils de coupe
US5306407A (en) *	1989-06-27	1994-04-26	Hauzer Holding Bv	Method and apparatus for coating substrates
RU2247794C2 (ru) *	2000-06-30	2005-03-10	Сент-Гобэн Абразивс, Инк.	Способ покрытия суперабразива металлом
ATE527390T1 (de)	2009-03-30	2011-10-15	Oerlikon Trading Ag	Verfahren zur vorbehandlung von substraten fuer pvd verfahren

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3428546A (en) *	1966-09-27	1969-02-18	Atomic Energy Commission	Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) *	1972-03-13	1975-05-13	Granville Phillips Co	Anti-wear thin film coatings and method for making same
US3912826A (en) *	1972-08-21	1975-10-14	Airco Inc	Method of physical vapor deposition
CA1041881A (en) *	1974-09-11	1978-11-07	Niels N. Engel	Coated steel product and process of producing the same
US4163071A (en) *	1977-07-05	1979-07-31	Union Carbide Corp	Method for forming hard wear-resistant coatings
JPS5462183A (en) *	1977-10-26	1979-05-18	Seiko Epson Corp	Outside parts for pocket watch
DE3030149C3 (de) *	1979-08-09	1996-12-19	Mitsubishi Materials Corp	Schneidplättchen und Verfahren zu seiner Herstellung

1983
- 1983-08-25 NL NL8320315A patent/NL8320315A/nl not_active Application Discontinuation
- 1983-08-25 JP JP83503277A patent/JPS60502110A/ja active Pending
- 1983-08-25 GB GB08508273A patent/GB2155044B/en not_active Expired
- 1983-08-25 DE DE19833390523 patent/DE3390523C2/de not_active Expired - Lifetime
- 1983-08-25 WO PCT/SU1983/000030 patent/WO1985001071A1/ru not_active Ceased
- 1983-08-25 AT AT0908483A patent/AT382892B/de not_active IP Right Cessation
- 1983-08-25 CH CH1660/85A patent/CH666054A5/de not_active IP Right Cessation
- 1983-08-25 AU AU20735/83A patent/AU559857B2/en not_active Ceased
- 1983-08-25 BR BR8307748A patent/BR8307748A/pt not_active IP Right Cessation
- 1983-12-29 FR FR8321028A patent/FR2557595B1/fr not_active Expired
1984
- 1984-01-04 CA CA000444620A patent/CA1216252A/en not_active Expired
1985
- 1985-03-27 SE SE8501521A patent/SE454705B/sv not_active IP Right Cessation
- 1985-04-09 DK DK159385A patent/DK159385D0/da not_active IP Right Cessation
- 1985-04-12 FI FI851485A patent/FI80296C/fi not_active IP Right Cessation
- 1985-04-18 NO NO851558A patent/NO851558L/no unknown

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3941918A1 (de) *	1989-06-27	1991-01-03	Hauzer Holding	Verfahren und vorrichtung zur beschichtung von substraten

Also Published As

Publication number	Publication date
FI80296B (fi)	1990-01-31
GB2155044B (en)	1987-11-18
FR2557595B1 (fr)	1986-07-11
FI851485A0 (fi)	1985-04-12
NL8320315A (nl)	1985-07-01
ATA908483A (de)	1986-09-15
BR8307748A (pt)	1985-07-02
GB2155044A (en)	1985-09-18
DE3390523T1 (de)	1985-08-08
SE454705B (sv)	1988-05-24
FI80296C (fi)	1990-05-10
NO851558L (no)	1985-04-18
DE3390523C2 (de)	1990-01-18
AU2073583A (en)	1985-03-29
AU559857B2 (en)	1987-03-19
FI851485L (fi)	1985-04-12
DK159385A (da)	1985-04-09
AT382892B (de)	1987-04-27
WO1985001071A1 (fr)	1985-03-14
FR2557595A1 (fr)	1985-07-05
JPS60502110A (ja)	1985-12-05
SE8501521L (sv)	1985-03-27
DK159385D0 (da)	1985-04-09
CA1216252A (en)	1987-01-06
SE8501521D0 (sv)	1985-03-27

Legal Events

Date	Code	Title	Description
1994-04-29	PL	Patent ceased
2024-10-31	PL	Patent ceased

Publication	Publication Date	Title
DE3144192C2 (de)	1983-12-29	Verfahren zum Bedampfen einer Oberfläche mit Hartstoffen und Anwendung des Verfahrens
EP0496053B1 (de)	1995-07-26	Beschichtetes hochverschleissfestes Werkzeug und physikalisches Beschichtungsverfahren zur Beschichtung von hochverschleissfesten Werkzeugen
DE19546357C2 (de)	2002-05-08	Harte Beschichtung mit ausgezeichneter Abriebsbeständigkeit zur Substratbeschichtung
EP0306612B1 (de)	1991-07-17	Verfahren zur Aufbringung von Schichten auf Substraten
EP1078110B1 (de)	2002-11-27	Werkzeug oder maschinenbauteil und verfahren zu dessen herstellung sowie vakuumbehandlungsanlage
DE3841731C1 (en)	1990-04-12	Process for coating a tool base, and tool produced by this process
DE3117299C2 (da)	1994-10-20
EP0668938B1 (de)	1996-09-04	Werkzeug und verfahren zur beschichtung eines werkzeuggrundkörpers
DE10210839B4 (de)	2018-07-05	Harte Mehrlagenbeschichtung und Verwendung der harten Mehrlagenbeschichtung
CH669347A5 (da)	1989-03-15
DE19609647A1 (de)	1997-09-18	Hartstoffschicht
DE2523435C2 (de)	1984-10-31	Verfahren und Vorrichtungen zum Plasma-Flammspritzen
EP0284854A1 (de)	1988-10-05	Mischnitrid-Schichten mit wenigstens zwei Metallen und Verfahren zu deren Herstellung
EP0303161B1 (de)	1994-04-06	Verfahren zum Aufbringen von Überzügen auf Gegenstände mittels magnetfeldunterstützter Kathodenzerstäubung im Vakuum
DE3620901A1 (de)	1988-01-14	Schneidwerkzeug
CH659967A5 (de)	1987-03-13	Mehrschichtueberzug fuer spanabhebendes werkzeug.
EP0352545B1 (de)	1993-11-03	PVD-Beschichtung sowie Verfahren zu deren Aufbringung
CH686767A5 (de)	1996-06-28	Beschichtetes Werkzeug und dessen Verwendung.
EP0200088B1 (de)	1989-01-25	Verschleissfester beschichteter Hartmetallkörper und Verfahren zu seiner Herstellung
DE3390523C2 (de)	1990-01-18	Verfahren zum Auftragen einer Beschichtung auf dieOberfl{che eines spanenden Werkzeugs
DE3030149C3 (de)	1996-12-19	Schneidplättchen und Verfahren zu seiner Herstellung
DE10320652A1 (de)	2004-12-02	Werkzeug, insbesondere Schneidwerkzeug und Verfahren zur CVD-Abscheidung einer zweiphasigen Schicht auf einem Substratkörper
DE3390522C2 (de)	1987-10-15	Spanendes Werkzeug und Verfahren zu dessen Herstellung
EP1722003A1 (de)	2006-11-15	Legierter Körper als Target für das PVD-Verfahren, Verfahren zur Herstellung des legierten Körpers und PVD-Verfahren mit dem legierten Körper
DE19815677A1 (de)	1999-10-14	Verbundkörper und Verfahren zu dessen Herstellung

CH666054A5 - Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (1)

Publications (1)

Family

ID=21616808

Family Applications (1)

Country Status (15)

Cited By (1)

Families Citing this family (7)

Family Cites Families (7)

Cited By (1)

Also Published As

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Legal Events