SE454705B - Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum - Google Patents

Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum

Info

Publication number: SE454705B
Authority: SE; Sweden
Prior art keywords: carbide; evaporated; coating; cutting tool; titanium
Prior art date: 1983-08-25

Application number

SE8501521A

Other languages

English (en)

Swedish (sv)

Other versions

SE8501521D0 (sv

SE8501521L (sv

Inventor

A G Gavrilov

L S Guzei

V P Zhed

E I Kurbatova

V N Panin

A K Sinelschikov

V G Padalka

Original Assignee

Vni Instrument Inst

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-08-25

Filing date

1985-03-27

Publication date

1988-05-24

1985-03-27 Application filed by Vni Instrument Inst filed Critical Vni Instrument Inst

1985-03-27 Publication of SE8501521D0 publication Critical patent/SE8501521D0/xx

1985-03-27 Publication of SE8501521L publication Critical patent/SE8501521L/

1988-05-24 Publication of SE454705B publication Critical patent/SE454705B/sv

Links

238000000576 coating method Methods 0.000 title claims description 44
239000011248 coating agent Substances 0.000 title claims description 41
238000000034 method Methods 0.000 title claims description 40
239000000463 material Substances 0.000 claims description 64
238000005520 cutting process Methods 0.000 claims description 45
239000010936 titanium Substances 0.000 claims description 23
229910052719 titanium Inorganic materials 0.000 claims description 21
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 16
229910052750 molybdenum Inorganic materials 0.000 claims description 13
229910000831 Steel Inorganic materials 0.000 claims description 12
239000010959 steel Substances 0.000 claims description 12
229910045601 alloy Inorganic materials 0.000 claims description 11
239000000956 alloy Substances 0.000 claims description 11
239000011733 molybdenum Substances 0.000 claims description 11
229910052799 carbon Inorganic materials 0.000 claims description 10
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
238000010891 electric arc Methods 0.000 claims description 9
150000002500 ions Chemical class 0.000 claims description 8
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
229910001069 Ti alloy Inorganic materials 0.000 claims description 5
NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
239000003575 carbonaceous material Substances 0.000 claims description 3
238000004544 sputter deposition Methods 0.000 claims description 3
238000006243 chemical reaction Methods 0.000 claims description 2
239000000203 mixture Substances 0.000 description 13
-1 titanium ions Chemical class 0.000 description 11
239000007789 gas Substances 0.000 description 6
238000005553 drilling Methods 0.000 description 5
229910052782 aluminium Inorganic materials 0.000 description 4
239000000470 constituent Substances 0.000 description 4
230000015572 biosynthetic process Effects 0.000 description 3
239000000356 contaminant Substances 0.000 description 3
238000005755 formation reaction Methods 0.000 description 3
229920006395 saturated elastomer Polymers 0.000 description 3
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
229910052796 boron Inorganic materials 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
238000010438 heat treatment Methods 0.000 description 2
MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 1
241001086826 Branta bernicla Species 0.000 description 1
241000283707 Capra Species 0.000 description 1
229910003178 Mo2C Inorganic materials 0.000 description 1
229910039444 MoC Inorganic materials 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
239000008199 coating composition Substances 0.000 description 1
238000013329 compounding Methods 0.000 description 1
238000009833 condensation Methods 0.000 description 1
230000005494 condensation Effects 0.000 description 1
238000011109 contamination Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000010410 dusting Methods 0.000 description 1
238000004880 explosion Methods 0.000 description 1
239000002360 explosive Substances 0.000 description 1
239000004744 fabric Substances 0.000 description 1
239000000446 fuel Substances 0.000 description 1
239000002737 fuel gas Substances 0.000 description 1
231100001261 hazardous Toxicity 0.000 description 1
239000004615 ingredient Substances 0.000 description 1
238000010849 ion bombardment Methods 0.000 description 1
238000003754 machining Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
150000004767 nitrides Chemical class 0.000 description 1
238000001556 precipitation Methods 0.000 description 1
ZMRUPTIKESYGQW-UHFFFAOYSA-N propranolol hydrochloride Chemical compound [H+].[Cl-].C1=CC=C2C(OCC(O)CNC(C)C)=CC=CC2=C1 ZMRUPTIKESYGQW-UHFFFAOYSA-N 0.000 description 1
108090000623 proteins and genes Proteins 0.000 description 1
238000004080 punching Methods 0.000 description 1
239000007790 solid phase Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Drilling Tools (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Food-Manufacturing Devices (AREA)
Materials For Medical Uses (AREA)

SE8501521A 1983-08-25 1985-03-27 Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum SE454705B (sv)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SU1983/000030 WO1985001071A1 (fr)	1983-08-25	1983-08-25	Procede de depot d'un revetement

Publications (3)

Publication Number	Publication Date
SE8501521D0 SE8501521D0 (sv)	1985-03-27
SE8501521L SE8501521L (sv)	1985-03-27
SE454705B true SE454705B (sv)	1988-05-24

Family

ID=21616808

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE8501521A SE454705B (sv)	1983-08-25	1985-03-27	Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum

Country Status (15)

Country	Link
JP (1)	JPS60502110A (da)
AT (1)	AT382892B (da)
AU (1)	AU559857B2 (da)
BR (1)	BR8307748A (da)
CA (1)	CA1216252A (da)
CH (1)	CH666054A5 (da)
DE (1)	DE3390523C2 (da)
DK (1)	DK159385D0 (da)
FI (1)	FI80296C (da)
FR (1)	FR2557595B1 (da)
GB (1)	GB2155044B (da)
NL (1)	NL8320315A (da)
NO (1)	NO851558L (da)
SE (1)	SE454705B (da)
WO (1)	WO1985001071A1 (da)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH669347A5 (da) *	1986-05-28	1989-03-15	Vni Instrument Inst
CH671238A5 (da) *	1986-11-06	1989-08-15	Vni Instrument Inst
AT388394B (de) *	1987-01-09	1989-06-12	Vni Instrument Inst	Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) *	1987-01-20	1989-05-26	Instr I	Procede de fabrication d'outils de coupe
WO1991000374A1 (de) *	1989-06-27	1991-01-10	Hauzer Holding Bv	Verfahren und vorrichtung zur beschichtung von substraten
EP0404973A1 (de) *	1989-06-27	1991-01-02	Hauzer Holding B.V.	Verfahren und Vorrichtung zur Beschichtung von Substraten
CN100348776C (zh) *	2000-06-30	2007-11-14	圣戈本磨料股份有限公司	用金属涂覆超级磨料的方法
ES2374864T3 (es)	2009-03-30	2012-02-22	Oerlikon Trading Ag, Trübbach	Método para pretratar sustratos para métodos pvd.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3428546A (en) *	1966-09-27	1969-02-18	Atomic Energy Commission	Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) *	1972-03-13	1975-05-13	Granville Phillips Co	Anti-wear thin film coatings and method for making same
US3912826A (en) *	1972-08-21	1975-10-14	Airco Inc	Method of physical vapor deposition
CA1041881A (en) *	1974-09-11	1978-11-07	Niels N. Engel	Coated steel product and process of producing the same
US4163071A (en) *	1977-07-05	1979-07-31	Union Carbide Corp	Method for forming hard wear-resistant coatings
JPS5462183A (en) *	1977-10-26	1979-05-18	Seiko Epson Corp	Outside parts for pocket watch
DE3030149C3 (de) *	1979-08-09	1996-12-19	Mitsubishi Materials Corp	Schneidplättchen und Verfahren zu seiner Herstellung

1983
- 1983-08-25 AT AT0908483A patent/AT382892B/de not_active IP Right Cessation
- 1983-08-25 AU AU20735/83A patent/AU559857B2/en not_active Ceased
- 1983-08-25 DE DE19833390523 patent/DE3390523C2/de not_active Expired - Lifetime
- 1983-08-25 NL NL8320315A patent/NL8320315A/nl not_active Application Discontinuation
- 1983-08-25 CH CH1660/85A patent/CH666054A5/de not_active IP Right Cessation
- 1983-08-25 WO PCT/SU1983/000030 patent/WO1985001071A1/ru not_active Ceased
- 1983-08-25 BR BR8307748A patent/BR8307748A/pt not_active IP Right Cessation
- 1983-08-25 JP JP83503277A patent/JPS60502110A/ja active Pending
- 1983-08-25 GB GB08508273A patent/GB2155044B/en not_active Expired
- 1983-12-29 FR FR8321028A patent/FR2557595B1/fr not_active Expired
1984
- 1984-01-04 CA CA000444620A patent/CA1216252A/en not_active Expired
1985
- 1985-03-27 SE SE8501521A patent/SE454705B/sv not_active IP Right Cessation
- 1985-04-09 DK DK159385A patent/DK159385D0/da not_active IP Right Cessation
- 1985-04-12 FI FI851485A patent/FI80296C/fi not_active IP Right Cessation
- 1985-04-18 NO NO851558A patent/NO851558L/no unknown

Also Published As

Publication number	Publication date
NO851558L (no)	1985-04-18
DK159385A (da)	1985-04-09
GB2155044B (en)	1987-11-18
AT382892B (de)	1987-04-27
FR2557595B1 (fr)	1986-07-11
DE3390523T1 (de)	1985-08-08
WO1985001071A1 (fr)	1985-03-14
FI80296C (fi)	1990-05-10
FI851485L (fi)	1985-04-12
FI851485A0 (fi)	1985-04-12
CA1216252A (en)	1987-01-06
FR2557595A1 (fr)	1985-07-05
SE8501521D0 (sv)	1985-03-27
SE8501521L (sv)	1985-03-27
FI80296B (fi)	1990-01-31
DK159385D0 (da)	1985-04-09
NL8320315A (nl)	1985-07-01
AU559857B2 (en)	1987-03-19
ATA908483A (de)	1986-09-15
JPS60502110A (ja)	1985-12-05
BR8307748A (pt)	1985-07-02
CH666054A5 (de)	1988-06-30
AU2073583A (en)	1985-03-29
DE3390523C2 (de)	1990-01-18
GB2155044A (en)	1985-09-18

Legal Events

Date

Code

Title

Description

1995-01-31

NUG

Patent has lapsed

Ref document number: 8501521-2

Effective date: 19930307

Format of ref document f/p: F

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