CN102403194A - Mesh processing device - Google Patents

Abstract

The invention relates to a web processing device. The device comprises: a first chamber comprising an inclined door arranged in the conveying direction of the mesh and a mesh inlet and a mesh outlet formed in the door; a compression unit compressing the mesh towards the direction of the door to seal the mesh inlet; and an O-ring elastically deformed to seal the mesh inlet between the compression unit and the door. The web processing apparatus is advantageous in that it is possible to perform various treatments on the web while keeping the web in a vacuum or isolation state by a simple method.

Description

Web treatment device

technical field

The present invention relates to a web processing device, and more particularly, to a web processing device that maintains a chamber in a sealed state to perform various treatments.

Background technique

Mesh refers to a substrate, which is movable and consists of soft materials such as woven fabrics, non-woven fabrics, modular woven fabrics, yarns, plastic films, metal foils, metal coils, etc.

Various treatments can be performed on the web while it is moving or at rest. For example, these treatments include: treatment of depositing metals or oxides under vacuum, coating of special materials on the mesh or special treatment of the mesh in a specific atmosphere, assembling two meshes, etc. . Therefore, it is necessary to treat the mesh in a state where it is isolated from the outside, so that the mesh can be treated under vacuum or a specific atmosphere.

A flexible display is a flat panel display device formed using a bendable substrate such as a plastic substrate, and can be bent, folded, or deformed into a roll shape while maintaining high-quality display characteristics. Therefore, currently, flexible displays are attracting attention from all over the world as a next-generation technology. The flexible display device is made of a thin flexible substrate that can be bent or rolled up a few centimeters like paper without losing the characteristics of existing display devices. Unlike rigid displays made of existing glass substrates, flexible displays are light, thin, high-strength, impact-resistant, and free to bend. In order to manufacture this kind of flexible display (mesh) in a roll-to-roll or roll-to-sheet manner, the flexible substrate is moved or stopped under vacuum. Various processes are performed under it, such as thin film transistor (Thin Film Transistor, TFT) array processing, sealing distribution, assembly, etc.

However, for the manufacture of flexible displays, there is no sealing equipment that can perform various processes on the mesh, such as vacuum deposition, sealing distribution, assembly, while keeping the mesh in a vacuum or isolation state by a simple method. wait.

Contents of the invention

In order to improve upon the prior art and meet one or more of the needs outlined above, an aspect of the present invention is to provide a web handling device that can maintain the web under vacuum or isolation while , for thin film deposition, distribution, assembly and other processing.

According to an aspect of the present invention, the web processing device includes: a first chamber including an inclined door arranged in the conveying direction of the web and a web inlet and a web opening formed in the door. a compression unit, which compresses the mesh toward the door to seal the mesh inlet; and an O-ring, which elastically deforms to seal the mesh inlet between the compression unit and the door.

In one embodiment, the mesh may be a flexible substrate for a display device.

In one embodiment, a part of the mesh compressed by the compressing unit and the door may be an edge between display panels formed on the mesh.

In one embodiment, the mesh may be made of a plastic material including at least one of PET, PEN, PES, PAR, PC, COC, PS and PI or a metal material including stainless steel.

In one embodiment, the first chamber may be part of a vacuum assembly unit.

In one embodiment, the compression unit is drivable by an actuator.

In one embodiment, the compressing unit may have rounded corners to prevent the compressing unit from damaging the mesh when compressing the mesh.

In one embodiment, the door may have rounded corners to prevent the compression unit from damaging the mesh when compressing the mesh.

In one embodiment, the first chamber may be a vacuum chamber.

In one embodiment, the device may further include a mesh angle adjusting unit, which is used to adjust the inclination of the mesh, so as to facilitate the compressing unit to compress the mesh.

In one embodiment, the web angle adjustment unit may include rollers.

In one embodiment, the O-ring may be inserted into an O-ring groove of the compression unit or an O-ring groove of the door.

In one embodiment, the apparatus may further comprise a processing chamber connected to the first chamber.

In one embodiment, the processing chamber may be maintained at a higher vacuum than that of the first chamber.

In one embodiment, the first chamber may be divided into two or more chambers to maintain a vacuum of the processing chamber.

In one embodiment, the device may further include vertically movable buffer rollers to adjust the length of the web in the standby state by changing the moving route of the web in the first chamber.

In one embodiment, the vacuum chamber may be part of a vacuum assembly unit that assembles the two webs.

Description of drawings

The above and other aspects, features and advantages of the present invention will be more clearly understood by the following description of the embodiments given in conjunction with the accompanying drawings, wherein,

1 is a side view of a web treatment device according to an embodiment of the present invention;

2 is a partial perspective view of a portion (door) of a web processing device according to an embodiment of the present invention;

Figure 3 is a cross-sectional view of various installation examples of O-rings;

4 is a cross-sectional view of an example of an installation method of an O-ring;

5 is a cross-sectional view of the opening/closing operation of the mesh inlet of the device according to an embodiment of the present invention;

Fig. 6 is an enlarged view of part A in Fig. 5;

7 is a schematic view of a system for manufacturing flexible liquid crystal displays in a roll-to-roll or roll-to-sheet manner;

8 is a cross-sectional view of a web treatment device according to another embodiment of the present invention;

9 is a cross-sectional view of a first chamber according to an embodiment of the present invention;

Figure 10 is a schematic view of a buffer function according to an embodiment of the present invention; and,

Figure 11 is a schematic view of various configurations for buffering.

Detailed ways

Embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

1 is a side view of a web processing device according to an embodiment of the present invention, and FIG. 2 is a partial perspective view of a part (door) of the web processing device according to an embodiment of the present invention.

Referring to FIGS. 1 and 2 , a web processing device according to an embodiment includes a first chamber 100 , a web inlet 102 , a web outlet 104 , a door 106 , a compression unit 108 and an O-ring 110 . The device according to the present invention can be applied to various web-based film forming processes for flexible liquid crystal displays or flexible organic electroluminescent diode displays, flexible display manufacturing (such as vacuum assembly) processes, and the like. Also, in semiconductor processing, chemical etching, ultrapure cleaning, and drying are performed in wet process benches, where components for each process are formed within a single space segment. A thermal chemical solution is contained in a container for wet etching, from which chemical fumes are generated. As such, chemical fumes can flow into adjacent components if the exhaust is not performed effectively. Here, the device can also be used to isolate chemical fumes generated during semiconductor wet processes and the like. In addition, the web treatment device according to the present invention can be used for all treatments that must be performed in isolation from the outside world.

The web W can be made of any material. For example, the mesh can be formed from any conductive active material, including, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethylene Ethersulfone (Polyether Sulfone, PES), polyacrylate (Polyacrylate, PAR), polycarbonate (Polycarbonate, PC), cycloolefin copolymer (Cycloolefin Copolymer, COC), polystyrene (Polystyrene, PS) and polyimide Plastic materials of at least one of amines (Polyimide, PI), woven or non-woven fabrics, combined woven fabrics and yarns, and metal materials including stainless steel, etc.

The gate 106 is inclined at a predetermined angle θ in the conveying direction of the web. This configuration improves the sealing efficiency of the first chamber 100 by increasing the compression efficiency of the compression unit 108 described below. The door 106 may be part of the wall of the first chamber 100 or formed separately.

When the compressing unit 108 compresses the web W toward the door 106 , any component that can be compressed to seal the door 106 can be used as the O-ring 110 . O-rings may be polygonal including rectangles as well as circles. Since the O-ring 110 is in contact with the mesh W, any material that has good sealing performance and does not damage the mesh can be used as the O-ring. For example, the O-ring can be made of rubber materials, such as Nitrile Butadiene Rubber (NBR), EPDM (Ethylene-Propylene-DieneMonomer, EPDM) rubber, silicone rubber, natural rubber, fluorine rubber, perfluororubber, etc. production. Here, additives such as TiO ₂ , BaSO ₄ , SiO _{2 ,} etc. may be added to the rubber material to enhance the properties of the rubber material.

The compression unit 108 may be plate-shaped and driven by the actuator 112 to compress the web W. As shown in FIG. Actuator 112 may be an electric actuator or a pneumatic actuator, and is not limited thereto. The compression unit 108 may be made of a material including at least one of metal, rubber, ceramic, and plastic, and is not limited thereto. The compression unit 108 serves as a gate of the mesh inlet 102 and can be driven by the actuator in a state of being connected to or separated from the first chamber 100 . The compression unit 108 and the actuator 112 may be part of a component connected (mounted) to the first chamber 100 or may be a separate component (device) to the first chamber 100 .

The first chamber 100 may be a vacuum chamber or other chambers for processing under a special atmosphere, such as nitrogen, argon, carbon dioxide gas. When the first chamber is a vacuum chamber, the chamber is evacuated by a vacuum pump 124 . When the first chamber is a chamber for processing under a special atmosphere, various high-pressure tanks (not shown) are connected to the first chamber 100 through pipes. In addition, special processes such as thin film deposition, assembly, distribution, etc. may be performed in the first chamber 100 or another chamber connected to the first chamber 100 . In the latter case, the first chamber 100 can be used as a load lock vacuum chamber.

The compression unit 118, door 116 and actuator 122 arranged near the mesh outlet 104 are basically the same as the compression unit, door and actuator arranged near the mesh inlet 102, and will not be repeated here. Accordingly, embodiments of the present invention will be described with respect to the mesh inlet 102 only.

Fig. 3 is a cross-sectional view of various installation examples of an O-ring.

Referring to Figure 3, the O-ring 110 can be assembled only on the door 106 [see Figure 3(A)], or only on the compression unit 108 [see Figure 3(B)], or on the door 106 and the compression unit 108 are assembled [see Figure 3(C)]. When the O-rings 110 are fitted on both the door 106 and the compression unit 108, the O-rings 110a and 110b must be fitted so as not to overlap each other. For this configuration, in FIG. 3(C), the O-ring 110a fitted on the door 106 has a larger size than the O-ring 110b fitted on the compression unit 108, that is, (installation of the O-ring 110a The spacing is larger than that of the O-ring 110b) (D1<D2), so that when compressed by the compression unit 108, the O-ring 110b fitted on the compression unit 108 can be located inside the O-ring 110a fitted on the door 106. It should be understood that the o-ring 110b fitted on the compression unit 108 is larger than the o-ring 110a on the door 106 .

Fig. 4 is a cross-sectional view of an O-ring installation method.

As shown in FIG. 4 , an O-ring 110 is insertable into an O-ring groove 106 a formed on the door 106 . When the O-ring 110 is assembled to the compression unit 108 , the compression unit 108 may also have an O-ring groove that is substantially the same in function and configuration as the O-ring groove 106 a formed on the door 106 . Accordingly, embodiments of the present invention will be described in conjunction with the O-ring groove 106a of the door 106 .

The O-ring 110 may have a circular cross section [see FIG. 4(A)], an elliptical cross section [see FIG. 4(B)], and other shaped cross sections, and is not limited thereto. The O-ring groove 106a may have various cross-sections, such as quadrangular cross-section, rectangular cross-section, parallelepiped cross-section, triangular cross-section, circular cross-section, elliptical cross-section and the like. In addition, in order to improve the sealing characteristics of the O-ring 110, the portion 110a of the O-ring 110 protruding from the O-ring groove 106a may be in a convex shape (D) or a shape including a plurality of protrusions and grooves (C ).

5 is a cross-sectional view of an opening/closing operation of a mesh inlet of a device according to an embodiment of the present invention, and FIG. 6 is an enlarged view of part A in FIG. 5 . FIG. 5 shows that when the web W enters the web inlet 102 , the inclination (entry angle) of the web W is adjusted to effectively compress the web W by the compression unit 108 . Here, the inclination of the web W may be adjusted by a plurality of web angle adjustment units. In this embodiment, the inclination of the web is adjusted by the second roller 132 . However, it should be noted that the adjustment of the inclination of the net is not limited to a specific method. For example, instead of the second roller 132, another component could be fitted to the door 106 to compress the web.

5 and 6, when the door is opened [see FIG. 5(A)], the web W supported or conveyed by the first roller 130, the second roller 132, and the third roller 134 has a uniform height. In order to close the mesh inlet 102 [see FIG. 5(B)], the compression unit 108 is moved in the direction of the mesh inlet 102 by means of the actuator 112 . Here, the second roller 132 may compress the web W while or before the compression unit 108 moves, so as to facilitate the compression of the compression unit 108 .

The door 106 may have smooth rounded corners 106b so that when the mesh is compressed to seal, the compressed mesh can enter the mesh inlet 102 without damage. The compression unit 108 may also have smooth rounded corners 108b so that when compressed by the compression unit 108, the web W can pass over the edge of the compression unit 108 without being damaged.

FIG. 7 is a schematic diagram of a system for manufacturing flexible liquid crystal displays in a roll-to-roll or roll-to-sheet manner.

Referring to FIG. 7 , the first unwinder 152 continuously supplies the first web W1 (first flexible substrate) wound into a roll shape. The first mesh W1 can be made of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyacrylate (PAR), polycarbonate (PC), cycloolefin copolymer (COC), polystyrene (PS) and polyimide (PI) at least one plastic material. In order to efficiently carry out conveyance and subsequent processing, the tension of the first web W1 must be maintained within a constant range. At least one load cell 154 may be disposed in the conveying direction of the first web W1 to measure and adjust the tension of the first web W1. Since the first web W1 is deformed into a curved shape during movement (transportation), at least one web guide 156 can be provided in the conveying direction of the first web W1 to guide the first web The bar W1 is adjusted in a fixed position.

First, the color filter 158 is formed on the first web W1. However, when the first web W1 has the color filter 158 formed in advance, the process of forming the color filter 158 may be omitted. In addition, a common electrode (not shown) and a black matrix may be further formed on the first mesh W1. Then, a first alignment film 160 is formed on one surface of the first web W1 by a first alignment film forming unit (not shown). The color filter 158, the first alignment film 160, etc. may be formed on the upper or lower surface of the first web W1.

The second unwinder 202 continuously supplies the second web W2 (second flexible substrate) wound into a roll shape. As mentioned above, at least one load cell 204 for adjusting the tension of the second web W2 and at least one web guide for positioning the second web W2 are arranged in the conveying direction of the second web W2 device 206. The second web W2 may be made of the same or different material as that of the first web W1.

First, a thin film transistor (TFT) array 208 is formed on the upper surface of the second web W2 by a typical process for forming a TFT array. However, when the second web W2 has the TFT array formed in advance, the process of forming the TFT array can be omitted. In addition, since passive matrix liquid crystal displays replace active matrix liquid crystal displays, transparent electrode patterns can be formed instead of TFT arrays. Next, a second alignment film 210 is formed by a second alignment film forming unit (not shown). The type and formation method of the second alignment film 210 are the same as those of the first alignment film 160 . Then, on the upper surface of the second flexible substrate with the second alignment film 210, the liquid crystal dispenser (not shown) and the liquid crystal dispenser (not shown) can be separately Sealed distribution processing, short material distribution processing and liquid crystal distribution processing. Here, the short material distribution processing can be omitted. In addition, the order of the sealing dispensing process, the short charge dispensing process, and the liquid crystal dispensing process may be changed. Furthermore, although this embodiment describes the liquid crystal dispensing process before assembling the upper and lower substrates, the liquid crystal injection process can be performed after vacuum assembly without the liquid crystal dispensing process.

The sealing and dispensing process is a process of forming a sealant, the short material dispensing process forms the short material 214 , and the liquid crystal dispensing process provides liquid crystals through a liquid crystal dropping process (ODF) method. A spacer forming unit (not shown) is used to form the spacer 216 . Then, the upper and lower substrates respectively formed on the first web W1 and the second web W2 are calibrated and assembled by the assembly unit 300, followed by curing the sealant, cutting the assembled substrates into individual The processing of the liquid crystal cell, and the processing of connecting the polarizer plate. In addition, the system can be equipped with multiple rollers R100, R102, R104, R106, R108, R110, R112, R200, R202, R204, R206, R208 in the conveying direction of the first web W1 and the second web W2 , R210, R212, and some rollers can be driven rollers driven by motors.

Here, it is difficult to perform sealed dispensing, short-stock dispensing, and liquid crystal dispensing under vacuum, and it is very difficult to perform overall roll-to-roll processing in a vacuum chamber. Therefore, assembly processing can be performed solely under vacuum. So far, the assembly unit 300 is equipped with a vacuum chamber and needs to be isolated (sealed) from the outside. In addition, deposition of various metal elements or insulating materials for TFT array processing is also very advantageously performed under vacuum.

Fig. 8 is a cross-sectional view of a web processing device according to another embodiment of the present invention, and Fig. 9 is a cross-sectional view of a first chamber according to an embodiment of the present invention. The device shown in Fig. 8 can be applied to various film forming processes of mesh-based flexible liquid crystal displays and flexible organic electroluminescent diode displays, etc., and can constitute a whole vacuum assembly unit or a partial vacuum assembly unit. In addition, the device according to this embodiment can be applied to perform any processing regarding a mesh in a state of being isolated from the outside. The web treatment apparatus according to this embodiment includes a first chamber 500, a treatment chamber 600, a second chamber 700, and vacuum pumps 504, 604, 704 connected to the respective chambers. In addition to the vacuum pumps 504, 604, 704, high-pressure tanks can also be connected to the chamber to form various atmospheres as required.

The first chamber 500 is equipped with a door 506 which may be formed in a part of the wall surface of the first chamber 500 or formed as a separate structure. The gate 506 is inclined in the direction in which the web W is conveyed. The door 506 is fitted with a mesh inlet 502 which can also be used as a mesh outlet 550 for the first chamber, as shown in FIG. 8 . Alternatively, a separate mesh outlet may be fitted on the processing chamber 600 . The opening/closing of the mesh and the configuration of the O-ring and the door 506 of the first chamber 500 are the same as those in the above-mentioned embodiments, and will not be repeated here.

For example, when fabricating a flexible liquid crystal display, the web W includes a treatment area 2002 (see FIG. 10 ) on one surface thereof for performing various treatments such as thin film deposition, etching, seal dispensing, and the like. In addition, the web W includes a panel portion X (see FIG. 10 ), which becomes the upper or lower substrate of the liquid crystal display, and a boundary portion Y (see FIG. 10 ) between the panels. The border portion Y (see FIG. 10) is neither processed nor constituted by any pattern. The portion of the web W compressed by the compression unit 508 and the door 506 at the web inlet 502 becomes a boundary portion Y between the panels (see FIG. 10 ). Assembling this structure prevents damage to patterns, films, or sealants formed on the mesh by the compression of the compression unit 508 and the gate 506 . Obviously, this description also applies to other processes and processes for manufacturing flexible liquid crystal displays.

After a predetermined process is completed in the process chamber 600, the web W moves to the second chamber through the mesh outlet of the process chamber (or through the mesh inlet 650 of the second chamber). Here, the door 708, mesh outlet 702, compression unit 708, and actuator 712 assembled on the second chamber 700 are substantially the same as those described above near the mesh inlet. , so it will not be repeated here.

The vacuum pumps 504, 604, 704 connected to the respective chambers can be selected according to the degree of vacuum required. For example, rotary pumps, such as dry-running rotary vane pumps or oil-filled rotary vane pumps, are used to achieve lower vacuum levels. Multi-stage rotary vane pumps, multi-stage steam ejectors, piston pumps, diffusion pumps or the like can be used to achieve moderate vacuum levels. Diffusion pumps, turbomolecular pumps, absorption pumps, cryogenic cooling pumps or the like can be used to obtain higher vacuums. Turbomolecular pumps, cryogenic cooling pumps, absorption pumps or the like can be used to achieve ultra-high vacuums.

Generally, since the first chamber 500 and the second chamber 700 need to keep the processing chamber at a higher vacuum degree, the vacuum degree of the first chamber 500 and the second chamber 700 is required to be lower than that of the processing chamber 600 . Therefore, as shown in FIG. 9, when the mesh is close to the vacuum chamber 600, the first chamber 500 or the second chamber 700 may be divided into two or more chambers and may be configured to have a gradually increasing vacuum degree. Figure 9 shows an example of a first chamber 500 divided into two chambers 500a and 500b connected to vacuum pumps 504a and 540b, respectively.

On the other hand, the first chamber 500 and the second chamber 700 may be load lock chambers. That is, if the mesh inlet 502 of the door 506 and the mesh outlet 702 of the second chamber are opened every time the mesh is processed in the chamber 600, it is difficult to keep the chamber 600 degrees of vacuum. Therefore, the first chamber 500 or the second chamber 700 may have a buffer function to accommodate a predetermined length of mesh therein.

Fig. 10 is a schematic view of a buffer function according to an embodiment of the present invention. The equipment providing this function may be located in the first chamber or the second chamber.

The buffer rollers R3 and R4 are configured to move vertically by a motor (not shown) connected thereto. That is, when the buffer rollers R3 and R4 move downward, the length of the web W to be accommodated in the first chamber 500 increases with the moving distance of the buffer rollers. In order to make the web W undergo subsequent processing after predetermined processing in the processing chamber 600 , the buffer rollers R3 and R4 move upward so that the web W enters the processing chamber 600 for subsequent processing. To this end, the first chamber 500, the processing chamber 600 or the second chamber 700 may be equipped with at least one driving roller capable of moving the web W. Referring to FIG.

On the other hand, each of the rollers R1, R2, R3, R4, R5, R6 including buffer rollers may have a dumbbell shape consisting of a smaller-diameter center portion and a larger-diameter edge portion to protect the web W Various material layers or patterns on the region 2002 are processed. That is, in the center portion A of the processing area 2002 where the web W is present, the roller R1 etc. may only be in contact with the edge B of the second flexible substrate 200 instead of the entire web W. More preferably, the roller is in contact with a portion of the web W that is outside the alignment marks 2004 of the web W. The edge B of the web W may be formed with through holes 2006 to maintain the tension of the web W and position the web W after cutting.

On the other hand, the plane of the web W, that is, the lower surface of the web W in FIG. 10 where the treatment area 2002 does not exist, has no problem in terms of contact between the plane and the rollers. Therefore, in addition to dumbbell-shaped rollers, cylindrical rollers with equal diameters may be preferably used to support or transport the web W. That is, the rollers R3, R4 and R6 may be dumbbell rollers, and the rollers R1, R2, R5 and R7 may be cylindrical rollers.

Figure 11 is a schematic view of various configurations for buffering. The equipment performing the buffer function can be arranged in the first chamber or the second chamber.

Referring to FIG. 11(A), two buffer rollers R12 and R14 are vertically movable to adjust the length of the web W. Referring to FIG. The remaining two rollers R10 and R16 are used to support and transport the web W. Although the buffer rollers also support and convey the web W, these rollers have an independent function of adjusting the length of the web W, and therefore are called "buffer rollers" for convenience. Referring to FIG. 11(B), four buffer rollers R22, R24, R26 and R28 can provide the buffer function. The remaining two rollers R20 and R29 are used to support and transport the web W. Alternatively, as shown in FIG. 11(C), a single buffer roller R32 may be used to provide the buffer function. The remaining two rollers R30 and R34 are used to support and transport the web W. Here, all the rollers including buffer rollers and ordinary rollers to be arranged to face the processing area of the web W may be dumbbell-shaped rollers.

In this way, according to the embodiment of the present invention, the web processing apparatus is advantageous in that it can perform various treatments on the web while maintaining the web in a vacuum or insulated state by a simple method. In addition, the web processing device can make it easier to maintain a vacuum or a specific atmosphere in the processing chamber through a load-lock vacuum chamber, buffer rollers, and the like.

Although the present invention has been described with respect to some embodiments, those skilled in the art should understand that these embodiments are given by way of illustration only, without departing from the spirit and scope of the present invention. Various modifications, changes and changes may be made. The scope of protection of the present invention should be limited only by the appended claims and their equivalents.

Claims (17)

1. A net treatment device, comprising: A first chamber comprising an inclined door fitted in the web conveying direction and a web inlet and a web outlet formed in the door; a compression unit compressing the mesh towards the door to seal the mesh inlet; and O-ring, deforms elastically to seal the mesh inlet between the compression unit and the door. 2. The device according to claim 1, wherein the mesh is a flexible substrate for a display device. 3. The apparatus of claim 2, wherein a portion of the mesh compressed by the compressing unit and the door is an edge between display panels formed on the mesh. 4. The device according to claim 1, wherein the mesh is made of a plastic material comprising at least one of PET, PEN, PES, PAR, PC, COC, PS and PI or a metal material comprising stainless steel production. 5. The device of claim 1, wherein the first chamber is part of a vacuum assembled unit. 6. The device of claim 1, wherein the compression unit is driven by an actuator. 7. The device of claim 1, wherein the compressing unit has rounded corners to prevent the compressing unit from damaging the mesh when compressing the mesh. 8. The device of claim 1, wherein the door has rounded corners to prevent the compression unit from damaging the mesh when compressing the mesh. 9. The device of claim 1, wherein the first chamber is a vacuum chamber. 10. The device according to claim 1, further comprising a mesh angle adjustment unit, which is used to adjust the inclination of the mesh to facilitate the compression of the compression unit the mesh. 11. The device of claim 9, wherein the web angle adjustment unit comprises a roller. 12. The apparatus of claim 1, wherein the O-ring is inserted into an O-ring groove of the compression unit or an O-ring groove of the door. 13. The apparatus of claim 1, further comprising: a processing chamber connected to the first chamber. 14. The apparatus of claim 13, wherein the processing chamber is maintained at a higher vacuum than the first chamber. 15. The apparatus of claim 13, wherein the first chamber is divided into two or more chambers to maintain a vacuum of the processing chamber. 16. The device according to claim 13, further comprising: vertically movable buffer rollers to perform the web under the standby state by changing the moving route of the web in the first chamber. length adjustment. 17. The device of claim 13, wherein the vacuum chamber is part of a vacuum assembly unit that assembles two meshes.

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