201218882 六、發明說明： 【發明所屬之技術領域】 本發明有關一種網狀物（web )處理裝置，尤其有關— 種將室保持在密封狀態以便進行各種處理的網狀物處理裝 置。 ' 【先前技術】 網狀物指的是基板，該基板是可移動的並且由紡布、 無紡布、組合式編織紡織物、紗、塑膠膜、金屬箔、金屬 線圈等軟性材料組成。 在網狀物移動或停止的過程中，可對網狀物進行各種 處理。比如，這些處理包括：在真空下沉積金屬或氧化物 的處理，在網狀物上塗覆特殊材料或在特定的氣氛下對網 狀物進行的特殊處理，裝配兩個網狀物，等等。因此，需 要在網狀物與外界隔離的狀態下進行處理，以便在真空或 特定的氣氛下處理網狀物。 軟性顯示器是使用諸如塑膠基板等可彎曲的基板形成 的平板顯示設備，並且可在保持優質的顯示特性的同時彎 曲、折疊或變形為輥狀。因此，目前來說，軟性顯示器作 為下一代技術正吸引著全世界的關注。軟性顯示器設備由 薄的軟性基板製成，該軟性顯示器設備在不會喪失現有顯 示設備的特性的情況下，可彎曲或像紙那樣卷幾釐米。不 同于現有玻璃基板製成的硬質顯示器，軟性顯示器是輕、 薄、高強度抗衝擊並且可自由彎曲的。為了以卷對卷 4 201218882 (r〇ll-t〇-r〇1l)或卷對片（roll_t〇 —sheet)的方式製造 這種軟性顯示器（網狀物），要在軟性基板移動或停止的 過程中在真空下進行各種處理，比如薄膜電晶體（Thin Film Transistor，TFT)陣列處理、密封分配、裝配等。 但是，對於製造軟性顯示器來說，沒有密封設備能通 過簡單的方法在保持網狀物處於真空或隔離的狀態下的同 時進行關於網狀物的各種處理’例如真空沉積、密封分配、 裝配等。 【發明内容】 為了改進現有技術並滿足以上概述的一種或多種需 求，本發明一方面在於提供一種網狀物處理裝置，該網狀 物處理裝置可保持網狀物處於真空或隔離狀態下的同時， 進行薄膜沉積、分配、裝配等多種處理。 根據本發明的一方面’網狀物處理裝置包括：第一室， 該第一室包括在網狀物的輸送方向上配置的傾斜的門和在 該門中形成的網狀物進口與網狀物出口；壓縮單元，該壓 縮單元朝向門的方向壓縮網狀物以密封網狀物進口；以及 0型圈’該0型圈彈性地變形以密封壓縮單元和門之間的 網狀物進口。 在一個實施例中，上述網狀物可以是用於顯示設備的 軟性基板。 在一個實施例中，由上述壓縮單元和上述門壓縮的上 述網狀物的一部分’可以是在網狀物上形成的顯示面板之 5 201218882 間的邊緣。 在一個實施例中，上述網狀物可由包括pET、pEN、pES、 PAR、PC、COC、PS # PI中至少一項的塑膠材料或包括不 銹鋼的金屬材料製成。 在一個實施例中，上述第一室可以是真空裝配單元的 一部分。 在一個實施例中，上述壓縮單元可由致動器驅動。 在一個實施例中，上述壓縮單元可具有圓角，以防止 壓縮單元在壓縮網狀物時損壞網狀物。 在一個實施例中，上述門可具有圓角，以防止壓縮單 元在壓縮網狀物時損壞網狀物。 在一個實施例中，上述第一室可以是真空室。 在一個實施例中，上述裝置還可包括網狀物角度調節 單，該網狀物角度調節單元用於調節網狀物的傾斜度， 以利於壓縮單元壓縮網狀物。 在一個實施例中，上述網狀物角度調節單元可包括輥 子0 在一個實施例中，上述〇型圈可插入到上述壓縮單元 的〇型圈凹槽或上述門的0型圈凹槽中。 在一個實施財，上述裝置還可包括與上述第 接的處理室。 在一個實施例中，上述處理室可保持在比上述第 的真空度更高的真空中。 在-個實施例中’上述第一室可分成兩個或多個室， 6 201218882 以保持上述處理室的真空度。 在一個實施例中， 上述裝置還可包括可垂直移動的緩 衝輥子，以通過改轡名μ、+、# _ . 臧在上述第一至内的網狀物的移動路線 來進行備用狀態下的網狀物的長度調節。 在一個實施例中，上述直空宮可 丄砥具工至J U疋裝配兩個網狀物 的真空裝配單元的—部分。 【實施方式】 現將結合㈣對本發㈣實施例進行詳細說明。 圖1為根據本發明_實施例的網狀物處理裝置的側視 圖，圖2為根據本發明實施例的網狀物處理裝置的一部分 (門）的局部透視圖。 參照圖1和圖2，根據一實施例的網狀物處理裝置包 括第一室1〇0、網狀物進口 102、網狀物出口 104、門106、 麼細皁元108和〇型園ιΐη , λ., i圈110。根據本發明的裝置可應用於 ^性液晶顯示器或軟性有機電致發光二極體顯示器的多種 土於網狀物的薄膜成形過程、軟性顯示器製造（如真空裝 配）過程，等等。另外， 牡干等體工藝中，化學蝕刻、超 純清洗和乾燥在濕法工藝 丁“… ”㈣堂T進仃’其中，用於每個 :的兀件都在單個空間段内形成。在用於濕钮刻的容器 3有熱化學溶液’從而從該化學溶液中產生化學煙霧。 此，如果未有效地進行排氣 元件内。這裏，上述裝置還可用於=流動到相鄰的 等過程中產生的化學煙m卜 +導體濕法工藝 ’根據本發明的網狀物處 7 201218882 理裝置可用於必須在與外界隔離的狀態下進行的所有處 理。 網狀物w可由任何材料製成。比如，上述網狀物可由 任何導電的活動材料形成，比如，包括聚對苯二曱酸乙二 醇酯（Polyethylene Terephthalate ’ pET)、聚萘二酸乙 一醇酯（Polyethylene Naphthalate，PEN)、聚醚砜 (Polyether Sulfone，PES)、聚丙烯酸酯（p〇lyacryiate， PAR)、聚碳酸酯（polycarb〇nate，pc)、環烯烴共聚物 (Cycloolefin Copolymer > COC )、聚苯乙烯 (Polystyrene，PS)和聚酰亞胺（p〇lyimide，pi)中至 少一項的塑膠材料，紡布或無紡布、組合式編織紡織物和 紗，以及包括不銹鋼的金屬材料，等等。 門106在網狀物的輸送方向以預定的角度0傾斜。這 種配置通過提高下面上述的壓縮單元1〇8的壓縮效率來提 高第一室100的密封效率.門1〇6可以是第一室1〇〇的壁 面的一部分或是單獨形成的。 當壓縮單元108朝向門106的方向壓縮網狀物W時， 任何只要能被壓縮以密封門丨〇 6的元件都可以用作〇型圈 110。0型圈可以是包括矩形以及圓形的多邊形。由於〇型 圈11 0與網狀物W接觸’所以任何具有良好的密封性並且 不會損壞網狀物的材料都可以用作〇型圈。比如，〇型圈 可由橡膠材料’比如丁腈橡膠（Nitrile Butadiene201218882 VI. Description of the Invention: [Technical Field] The present invention relates to a web processing apparatus, and more particularly to a web processing apparatus that maintains a chamber in a sealed state for various processes. [Prior Art] The mesh refers to a substrate which is movable and composed of a soft material such as a woven fabric, a nonwoven fabric, a combined woven fabric, a yarn, a plastic film, a metal foil, and a metal coil. The web can be subjected to various treatments during the movement or stopping of the web. For example, these treatments include: treatment of depositing metal or oxide under vacuum, application of special materials on the mesh or special treatment of the mesh under a specific atmosphere, assembly of two meshes, and the like. Therefore, it is necessary to carry out the treatment in a state in which the mesh is isolated from the outside to treat the mesh under vacuum or a specific atmosphere. The flexible display is a flat panel display device formed using a flexible substrate such as a plastic substrate, and can be bent, folded or deformed into a roll shape while maintaining excellent display characteristics. Therefore, at present, soft displays are attracting worldwide attention as the next generation technology. The flexible display device is made of a thin flexible substrate that can be bent or rolled a few centimeters like paper without losing the characteristics of the existing display device. Unlike hard displays made from existing glass substrates, flexible displays are light, thin, high-strength, impact-resistant and freely bendable. In order to manufacture such a flexible display (mesh) in the form of roll-to-roll 4 201218882 (r〇ll-t〇-r〇1l) or roll-to-sheet (roll), it is necessary to move or stop on the flexible substrate. Various processes are performed under vacuum in the process, such as Thin Film Transistor (TFT) array processing, seal dispensing, assembly, and the like. However, for the manufacture of flexible displays, no sealing apparatus can perform various processes relating to the web, such as vacuum deposition, seal dispensing, assembly, etc., while maintaining the web in a vacuum or isolated state by a simple method. SUMMARY OF THE INVENTION In order to improve the prior art and to meet one or more of the needs outlined above, one aspect of the present invention is to provide a web processing apparatus that maintains the web while in a vacuum or isolated state. , for film deposition, distribution, assembly and other processing. According to an aspect of the invention, a web processing apparatus includes: a first chamber including a tilted door disposed in a conveying direction of the web and a mesh inlet and a mesh formed in the door An outlet; a compression unit that compresses the mesh toward the door to seal the mesh inlet; and an o-ring 'elastically deformed to seal the mesh inlet between the compression unit and the door. In one embodiment, the mesh may be a flexible substrate for a display device. In one embodiment, a portion of the web that is compressed by the compression unit and the door may be an edge between the display panels 5 201218882 formed on the web. In one embodiment, the mesh may be made of a plastic material including at least one of pET, pEN, pES, PAR, PC, COC, PS # PI or a metal material including stainless steel. In one embodiment, the first chamber may be part of a vacuum assembly unit. In one embodiment, the compression unit described above can be driven by an actuator. In one embodiment, the compression unit described above may have rounded corners to prevent the compression unit from damaging the mesh when compressing the mesh. In one embodiment, the door may have rounded corners to prevent the compression unit from damaging the mesh as it compresses the mesh. In one embodiment, the first chamber may be a vacuum chamber. In one embodiment, the apparatus may further include a mesh angle adjustment unit for adjusting the inclination of the mesh to facilitate compression of the mesh by the compression unit. In one embodiment, the mesh angle adjustment unit may include a roller 0. In one embodiment, the collar may be inserted into the ring groove of the compression unit or the 0-ring groove of the door. In one implementation, the apparatus described above may also include a processing chamber as described above. In one embodiment, the processing chamber can be maintained in a vacuum that is higher than the first degree of vacuum described above. In one embodiment, the first chamber described above can be divided into two or more chambers, 6 201218882 to maintain the vacuum of the processing chamber described above. In one embodiment, the apparatus may further include a buffer roller that is vertically movable to perform the standby state by changing the movement route of the meshes of the first to the inner inside of the first to the inner The length of the mesh is adjusted. In one embodiment, the above-mentioned straight-air palace can be configured to assemble a portion of the vacuum assembly unit of the two meshes. [Embodiment] The embodiment of the present invention will be described in detail in conjunction with (4). BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a side elevational view of a web processing apparatus in accordance with an embodiment of the present invention, and Figure 2 is a partial perspective view of a portion (door) of the web processing apparatus in accordance with an embodiment of the present invention. 1 and 2, a web processing apparatus according to an embodiment includes a first chamber 110, a mesh inlet 102, a mesh outlet 104, a door 106, a soap cell 108, and a garden type ΐ , λ., i circle 110. The apparatus according to the present invention can be applied to a variety of mesh-forming film forming processes, flexible display manufacturing (e.g., vacuum assembly) processes, and the like of a liquid crystal display or a flexible organic electroluminescent diode display. In addition, in the soy-and-dry process, chemical etching, ultra-pure cleaning, and drying are performed in the wet process, in which the components for each are formed in a single space segment. The container 3 for wet button engraving has a thermochemical solution 'to produce chemical fumes from the chemical solution. Therefore, if the exhaust element is not effectively performed. Here, the above device can also be used for the chemical fumes generated by the flow to the adjacent process, etc. + the conductor wet process. The mesh device according to the present invention can be used in a state that must be isolated from the outside world. All processing done. The mesh w can be made of any material. For example, the mesh may be formed of any electrically conductive active material, including, for example, polyethylene terephthalate ' pET, polyethyl naphthalate (PEN), polyether. Sulfone (Polyether Sulfone, PES), polyacrylate (p〇lyacryiate, PAR), polycarbonate (polycarb〇nate, pc), cycloolefin copolymer (COC), polystyrene (PS) And a plastic material of at least one of polyimide (p〇lyimide, pi), woven or non-woven fabric, combined woven textile and yarn, and a metal material including stainless steel, and the like. The door 106 is inclined at a predetermined angle 0 in the conveying direction of the web. This configuration improves the sealing efficiency of the first chamber 100 by increasing the compression efficiency of the above-described compression unit 1 〇 8. The door 〇 6 may be a part of the wall of the first chamber 1 或是 or formed separately. When the compression unit 108 compresses the web W in the direction toward the door 106, any element that can be compressed to seal the sill 6 can be used as the 〇-shaped ring 110. The 0-ring can be a polygon including a rectangle and a circle. . Since the crucible ring 110 is in contact with the web W, any material having a good seal and not damaging the web can be used as the crucible ring. For example, the 〇-ring can be made of a rubber material such as nitrile rubber (Nitrile Butadiene)
Rubber ， NBR)、三元乙丙（Ethylene-Propylene-DieneRubber, NBR), Ethylene-Propylene-Diene
Monomer ’ EPDM)橡膠、矽酮橡膠、天然橡膠、氟橡膠、全 8 201218882 氟橡膠·#製成。這裏，Ti〇2、BaS〇 ς S〇4、Sl〇2荨添加劑可添加 到橡膠材料中以增強橡膠材料的特性。 壓縮單元108可以是板形的，廿s s丄 的並且疋由致動器112驅 動來壓縮網狀物W的。致動器119叮 勤器112可以是電動致動器或氣 動致動器，並且並不限於此。I缩單元繼可由包括金屬、 橡膠、陶曼和塑膠中至少一項的材料製成，並且並不限於 此。壓縮單元108用作網狀物進口 m的門，並可在與第 一室100連接或分開的狀態下由上述致動器驅動。盤縮單 元108和致動器112可以是連接（安裝）在第一室⑽的 部件的-部分或者可作為到第_t⑽的單獨部件（設 備）。 尸第-室100可以是真空室或用於在特殊氣氛，比如氣 氣、氬氣、二氧化碳氣體下進行處理的其他室❶當第一室 為真空室時，該室通過真空》124排氣。當第一室為在特 殊氣氛下進行處理的室時’各種高壓罐（未示出）通過管 道與第一室100連接。另外，在第—室1〇〇或與第一室1〇〇 連接的另一個室内可進行特殊處理，比如薄膜沉積、裝配、 分配等。在後-種情況下，第—t 1QG可用作載入互鎖真 空室。 在網狀物出口 104附近設置的壓縮單元118、門116 和致動器122與在網狀物進口 1〇2附近設置的壓縮單元、 門和致動器基本一樣，這裏不再贅述。因此，本發明的實 施例將只關於網狀物進口 1 〇2進行說明。 圖3為0型圈的多種安裝實例的橫截面圖。 9 201218882 參照圖3, 0型圈11〇可只裝配在門1〇6上[見圖3 (A)] ’或只裝配在壓縮單元1〇8上[見圖3 (b)]，或在 門106和壓縮單元108上都裝配[見圖3(C)]。當在門1〇6 和壓縮單A 108上都裝配〇型目n〇日夺，必須裝配。型圈 110a和ll〇b以免相互重疊。對於這種配置在圖3(c) 中，裝配在門106上的〇型圈11〇a比裝配在壓縮單元ι〇8 上的〇型圈u〇b有更大的尺寸，即，（〇型圈u〇a的安 裝間隔比0型圈11Gb的大）（D1<D2)，這樣，當被壓縮 單元108壓縮時，裝配在壓縮單元1〇8 位於裝配在門106上的〇型圏u〇a内 在壓縮單元108上的〇型圈110b比在 110a 大。 上的〇型圈ll〇b可 。應理解的是，裝配 門106上的〇型圈 圖4為0型圈的安裝方法的橫載面圖。 如圖4所示’0型圈11〇可插入到在門1〇6上形成的〇 型圈凹槽106a内》當0型圈110裝配到壓縮單元ι〇8時， 壓縮單元108也可具有0型圈凹槽，③〇型圈凹槽與在門 106上形成的〇型圈_ 106&的功能和配置基本相同。因 此，本發明的實施例將結合門106的〇型圈凹槽1〇6& 說明。 订 〇型圈110可具有圓形的橫截面[見圖4(A)]、橢圓 形的橫截面[見圖4 (B)]以及其他形狀的橫戴面並且不 限於此。〇型圈凹槽l〇6a可具有多種橫截面，比如，四邊 形橫戴面、矩形橫截面、平行六邊形橫截 = —月艰橫截 面、圓形橫截面、橢圓形橫截面等。另外，也，t 力汁為了提高0型 10 201218882 圈110的密封特性，從〇型圈凹槽106a突出的〇型圈 的部分llGa可以是凸圓的形狀（D)或包括多個突出物和 凹槽的形狀（C)。 圖5為根據本發明實施例的裝置的網狀物進口的打開 /關閉操作的橫截面圖，圖6為圖5中A部分的放大視圖。 圖5示出了’當網狀物w進入網狀物進口 1〇"，調節網 狀物W的傾斜度（進入角度）以通過壓縮單元1 〇8對網狀 物w進行有效的壓縮。這裏，網狀物w的傾斜度可由多個 網狀物角度調節單元來調節。在該實施例巾，網狀物的傾 斜度由第二輥+132來調節 '然而，需要說明的是，網狀 物的傾斜度的調節並不限於特定的方法。比如，代替第二 32另一元件可裝配在門上來壓縮網狀物。 參照圖5和圖6’當門打開時[見圖5⑴]，由第一 =130、第二輥子132和第三輥子支撐或輸送 =句的冋度。為了關閉網狀物進口 10 2 [見圖5 壓縮單凡108借助致動器112朝向網狀物進口 1〇2 、方向移動。這寘，笛— 的同 裏第一輥子丨32可在壓縮單元1〇8移動 、7或之前壓縮網狀物W’以利於壓縮單& 1〇8的壓縮。 以進“户〇6可具有光滑的圓角106b，以便在網狀物被壓縮 且不订进封8寺’被壓縮的網狀物可進入網狀物102並 108b，、又到知壞。壓缩單元108也可具有光滑的圓角 、便在由壓縮單疋1Q8壓縮時，網狀物¥可通過壓 縮早元_的邊緣並且不會受到損壞。 7為以卷對卷或卷對片#方式製造軟性&晶顯示器 11 201218882 的系統的方案視圖。 ::圖7’第一退繞機152連續地供給纏繞成輥型的 第一網_ W1(第-軟性基板）。第'網狀物W1可由包 括聚對本二甲酸乙二醇醋（PET)、聚蔡二甲酸乙二醇酯 (pen)、聚醚砜（PES)、聚丙稀酸酯（㈣、聚碳酸酯 (pc)、環烯烴共聚物（coc)、聚笨乙稀（ps)和聚醜亞 胺⑺）中至少-項的塑膠材料製成。為了有效地進行輸 送和後續處理，必須將第一網狀物W1的張力維持在恒定的 範圍内可在第一網狀物W1的輸送方向上設置至少一個測 力感測器1 54，以測量和調節第一網狀物W1的張力。由於 第一網狀物W1在移動（輸送）的過程中會變形成彎曲的形 狀’所以可在第一網狀物W1的輸送方向上設置至少一個網 狀物導向器1 56，以把第一網狀物W1調節在固定的位置。 首先’在第一網狀物W1上形成濾色器158。但是，當 第一網狀物W1預先形成了濾色器158時，形成濾色器158 的處理可以省略。另外，可在第一網狀物W1上進一步形成 公共電極（未示出）和黑矩陣。然後，通過第一配向膜形 成單元（未示出）在第一網狀物W1的一個表面上形成第一 配向膜160 »濾色器158、第一配向膜160等可在第一網狀 物W1的上表面或下表面上形成。 第二退繞機202連續地供給纏繞成輥型的第二網狀物 W2 (第二軟性基板）。如上所述，在第二網狀物W2的輸送 方向上設置至少一個用於調節第二網狀物W2張力的測力 感測器204和至少一個用於定位第二網狀物W2的網狀物導 12 201218882 向器206。第二網狀物W2可由與第一網狀物wi的材料相 同或不同的材料製成。 首先，薄膜電晶體（TFT)陣列208通過形成TFT陣列 的典型處理在第二網狀物W2的上表面上形成。然而，當第 二網狀物W2預先形成了 TFT陣列時，形成TFT陣列的處理 可以省略。另外，由於無源矩陣液晶顯示器替代了有源矩 陣液晶顯示器，因此可以形成透明電極圖來替代TFT陣 列。接下來’通過第二配向膜形成單元（未示出）形成第 二配向膜210。第二配向膜210的類型和形成方法與第一 配向膜1 6 0的類型和形成方法相同。然後，在具有第二配 向膜210的第二軟性基板的上表面上可以通過密封分配器 (未示出）、短料分配器（未示出）和液晶分配器（未示 出）分別進行密封分配處理、短料分配處理和液晶分配處 理。這裏，可省略短料分配處理。另外，密封分配處理、 短料分配處理和液晶分配處理的順序可以改變。此外，儘 管該實施例說明了在裝配上、下基板之前進行液晶分配處 理，但是，可在沒有液晶分配處理的情況下在真空裝配後 可進行注入液晶的處理。 密封分配處理是形成密封劑的處理過程，短料分配處 理形成短料214，液晶分配處理通過液晶滴入制程（〇DF ) 方法來提供液晶。間隙體（spacer )形成單元（未示出） 用於形成間隔體21 6。然後，分別在第一網狀物W1和第二 網狀物W2上形成的上基板和下基板通過裝配單元goo進行 校準和裝配，接著進行固化密封劑的處理、把裝配後的基 13 201218882 板切割成單個的液晶盒的處理，以及連接偏光器板的處 理。另外，系統在第一網狀物W1和第二網狀物w2的輸送 方向上可敦配有多個親子r100，r1〇2，ri〇4 ri〇6，ri〇8, R112，R2GG ’ R2G2 ’ R2G4，R2G6，R2G8，R21G，R212， 並且有些觀子可以《由電機驅動的_輥子。 這裏，難以在真空下進行密封分配、短料分配和液晶 分配’並且非常難以在真空室裏進行整體的卷對卷處理。 因此，裝配處理可在真空下單獨進行。至此，裝配單元綱 裝配有真空室並需要與外界隔離（密封）。另外在真空 下還非常有利地進行對用於m陣列處理的各種金屬元件 或絕緣材料的沉積。 圓8為根據本發明另—實施例的網狀物處理裝置的剖 圖圖9為根據本發明一實施例的第一室的剖視圖。圖 8所不的裝置可應用於基於網狀物的軟性液晶顯示器和軟 杜有機電致發光二極體顯示器等的各種薄膜成形處理，並 可組成整個真空裝配單元或部分真空裝配單元。另外，根 據&個實施例的裝置可應用於進行關於與外界隔離的狀態 下的網狀物的任何處理。根據這個實施例的網狀物處理裝 置=括第-室500、處理室_、第二室·，以及與相應 室連接的真空泵504’604，704。除了真空泵504, 604， 7〇4，也可以根據需要把高壓罐與室連接以形成各種氣氛。 第—室500裝配有門506，該門可形成在第一室5〇〇 的2面的一部分或形成為單獨的結構。門506在網狀物w 的輸送方向上傾斜。門506裝配有網狀物進口 502，該進 14 201218882 口還可用作第一室的網狀物出口 5 5〇，如圖8所示。可替 換地’可在處理室600上裝配單獨的網狀物出口。網狀物 的打開/關閉以及0型圈和第一室5 〇 〇的門5 0 6的配置與上 述實施例中的相同，這裏不再贅述。 例如，當製造軟性液晶顯示器時，網狀物W包括在它 的一個表面上的處理區域2002(見圖1〇)，用於進行各種 處理’如薄膜沉積、蝕刻、密封分配等。另外，網狀物W 包括面板部分X (見圖1 〇 )’該面板部分成為了液晶顯示 器上基板或下基板，以及面板之間的邊界部分γ (見圖 10)。邊界部分Y (見圖10)既不進行任何處理也不由任 何圖案構成。由壓縮單元5 0 8壓縮的網狀物w的部分和網 狀物進口 502處的門506成為了面板之間的邊界部分γ(見 圖10 )。裝配這種結構可防止通過壓縮單元508和門506 的壓縮對網狀物上形成的圖案、薄膜或密封劑的損壞。顯 而易見地’這種描述也應用於其他處理以及製造軟性液晶 顯示器的處理。 在處理室600内完成預定的處理後，網狀物W通過處 理室的網狀物出口（或通過第二室的網狀物入口 650)移 動到第二室。這裏，第二室7〇〇上裝配的門708、網狀物 出口 702、壓縮單元708和致動器712與上述描述的在網 狀物進口附近的門、網狀物出口、壓縮單元和制動器基本 相同’因此這裏不再贅述。 與各自的室連接的真空泵504，604，704可根據需要 的真空度來選擇。例如，旋轉栗，如幹轉回轉式滑片栗或 15 201218882 注油回轉式滑片泵等’用於獲得較低的真空度。多級回轉 式滑片泵、多級蒸汽喷射器、活塞泵、擴散泵或其他類似 物可用于獲得適中的真空度。擴散泵、渦輪分子泵、吸收 泵、低溫冷卻泵或其他類似物可用於獲得較高的真空度。 屑輪为子泵、低溫冷卻泵、吸收栗或其他類似物可用于獲 得超高的真空度。Monomer ’ EPDM rubber, fluorenone rubber, natural rubber, fluoro rubber, all 8 201218882 fluoro rubber·#. Here, Ti〇2, BaS〇 ς S〇4, and S1〇2荨 additives may be added to the rubber material to enhance the properties of the rubber material. The compression unit 108 can be plate-shaped, 廿s s 疋 and driven by the actuator 112 to compress the mesh W. The actuator 119 engine 112 may be an electric actuator or a pneumatic actuator, and is not limited thereto. The I-retracting unit may be made of a material including at least one of metal, rubber, taman, and plastic, and is not limited thereto. The compression unit 108 serves as a door for the mesh inlet m and can be driven by the above-described actuator in a state of being connected or separated from the first chamber 100. The disk unit 108 and the actuator 112 may be a portion of a component that is attached (mounted) to the first chamber (10) or may serve as a separate component (device) to the _t (10). The cadaver-chamber 100 can be a vacuum chamber or other chamber for treatment under a special atmosphere, such as air, argon, carbon dioxide gas. When the first chamber is a vacuum chamber, the chamber is vented by a vacuum 124. When the first chamber is a chamber that is treated under a special atmosphere, various high pressure tanks (not shown) are connected to the first chamber 100 through the tubes. Alternatively, special treatment such as film deposition, assembly, dispensing, etc. may be performed in the first chamber or in another chamber connected to the first chamber 1A. In the latter case, the -t 1QG can be used as a load-locking vacuum chamber. The compression unit 118, the door 116 and the actuator 122 disposed adjacent the mesh outlet 104 are substantially identical to the compression unit, door and actuator disposed adjacent the mesh inlet 1〇2 and will not be described again. Thus, embodiments of the invention will be described only with respect to the mesh inlet 1 〇2. Figure 3 is a cross-sectional view of various mounting examples of a 0-ring. 9 201218882 Referring to Figure 3, the 0-ring 11〇 can be assembled only on the door 1〇6 [see Figure 3 (A)] ' or only on the compression unit 1〇8 [see Figure 3 (b)], or in Both the door 106 and the compression unit 108 are assembled [see Fig. 3(C)]. When both the door 1〇6 and the compression single A 108 are assembled, they must be assembled. The rings 110a and 110b are arranged so as not to overlap each other. For this configuration, in Fig. 3(c), the 〇-shaped ring 11〇a assembled on the door 106 has a larger size than the 〇-shaped ring u〇b fitted on the compression unit 〇8, that is, The mounting interval of the collar u〇a is larger than that of the 0-ring 11Gb (D1 < D2), so that when compressed by the compression unit 108, the compression unit 1〇8 is placed on the door 装配u assembled on the door 106 The inner ring 110b on the inner compression unit 108 is larger than the one at 110a. The upper circle ll〇b can be used. It should be understood that the 〇-ring on the fitting door 106 is a cross-sectional view of the mounting method of the 0-ring. As shown in FIG. 4, the '0-ring 11' can be inserted into the 〇-shaped groove 106a formed on the door 〇6. When the 0-ring 110 is assembled to the compression unit ι8, the compression unit 108 can also have The 0-ring groove, the 3-turn ring groove has substantially the same function and configuration as the 〇-ring _ 106& formed on the door 106. Accordingly, embodiments of the present invention will be described in connection with the 〇-ring groove 1〇6& of the door 106. The binding ring 110 may have a circular cross section [see Fig. 4 (A)], an elliptical cross section [see Fig. 4 (B)], and other shapes of the cross face and is not limited thereto. The 〇-shaped groove groove 〇6a may have various cross-sections, for example, a quadrangular cross-sectional surface, a rectangular cross-section, a parallel hexagonal cross-section = a rigid cross-section, a circular cross-section, an elliptical cross-section, and the like. In addition, in order to improve the sealing characteristics of the 0-type 10 201218882 ring 110, the portion llGa of the 〇-shaped ring protruding from the 〇-shaped groove 106a may be a convex shape (D) or include a plurality of protrusions and The shape of the groove (C). Figure 5 is a cross-sectional view showing the opening/closing operation of the mesh inlet of the apparatus according to the embodiment of the present invention, and Figure 6 is an enlarged view of a portion A of Figure 5. Fig. 5 shows that when the web w enters the web inlet 1", the inclination (entry angle) of the web W is adjusted to effectively compress the web w by the compression unit 1 〇8. Here, the inclination of the mesh w can be adjusted by a plurality of mesh angle adjusting units. In this embodiment, the inclination of the web is adjusted by the second roller + 132. However, it should be noted that the adjustment of the inclination of the mesh is not limited to a specific method. For example, instead of the second element 32, another component can be mounted on the door to compress the mesh. Referring to Figures 5 and 6', when the door is opened [see Fig. 5 (1)], the twist of the sentence is supported or conveyed by the first = 130, the second roller 132, and the third roller. In order to close the mesh inlet 10 2 [see Fig. 5, the compression unit 108 is moved in the direction by the actuator 112 toward the mesh inlet 1〇2. This, the first roller 丨 32 of the flute can compress the web W' before the compression unit 1 〇 8 moves, 7 or before to facilitate compression of the compression single & 1 〇 8. In order to enter the mesh 102 and 108b, the "cells 6 can have smooth rounded corners 106b so that the mesh is compressed and not subscribed to the seal 8" can be entered into the mesh 102 and 108b. The compression unit 108 can also have a smooth rounded corner, and when compressed by the compression unit 1Q8, the mesh ¥ can be compressed by the edge of the early element _ without being damaged. 7 is a roll-to-roll or a roll-to-roll # A schematic view of a system for manufacturing a soft & crystal display 11 201218882. :: Figure 7 'The first unwinder 152 continuously supplies a first web _ W1 (first soft substrate) wound into a roll type. The material W1 may include polyparaben ethylene glycol vinegar (PET), polyethylene terephthalate (pen), polyether sulfone (PES), polyacrylate ((iv), polycarbonate (pc), ring Made of a plastic material of at least one of olefin copolymer (coc), polystyrene (ps) and polycumynmine (7). For efficient transport and subsequent processing, the tension of the first web W1 must be Maintaining a constant range, at least one load cell 1 54 may be disposed in the conveying direction of the first web W1 to measure and The tension of the first web W1. Since the first web W1 is deformed into a curved shape during the movement (transport), at least one mesh may be provided in the conveying direction of the first web W1. The object guide 1 56 adjusts the first web W1 at a fixed position. First, the color filter 158 is formed on the first web W1. However, when the first web W1 is previously formed with a color filter At the time of the device 158, the process of forming the color filter 158 may be omitted. Further, a common electrode (not shown) and a black matrix may be further formed on the first mesh W1. Then, through the first alignment film forming unit (not shown) Forming a first alignment film 160 on one surface of the first web W1. The color filter 158, the first alignment film 160, and the like may be formed on the upper surface or the lower surface of the first web W1. The unwinder 202 continuously supplies the second web W2 (second flexible substrate) wound into a roll type. As described above, at least one of the second web is provided in the conveying direction of the second web W2. a force sensor 204 of the W2 tension and at least one for positioning the second mesh The mesh guide 12 of the object W2 is 201218882. The second mesh W2 may be made of the same or different material as the material of the first mesh wi. First, the thin film transistor (TFT) array 208 is formed by forming a TFT. A typical process of the array is formed on the upper surface of the second web W2. However, when the second mesh W2 is previously formed with a TFT array, the process of forming the TFT array may be omitted. In addition, due to the passive matrix liquid crystal display replacement An active matrix liquid crystal display can be formed so that a transparent electrode pattern can be formed instead of the TFT array. Next, the second alignment film 210 is formed by a second alignment film forming unit (not shown). The type and formation method of the second alignment film 210 are the same as those of the first alignment film 160. Then, on the upper surface of the second flexible substrate having the second alignment film 210, sealing can be performed by a sealing dispenser (not shown), a short dispenser (not shown), and a liquid crystal dispenser (not shown), respectively. Distribution processing, short material distribution processing, and liquid crystal distribution processing. Here, the short material distribution processing can be omitted. In addition, the order of the seal dispensing process, the short material dispensing process, and the liquid crystal dispensing process may be changed. Further, although this embodiment has explained that the liquid crystal dispensing process is performed before the upper and lower substrates are assembled, the liquid crystal injecting process can be performed after vacuum assembly without the liquid crystal dispensing process. The seal dispensing process is a process of forming a sealant, the short material dispensing process forms a short material 214, and the liquid crystal dispensing process provides liquid crystal by a liquid crystal dropping process (〇DF) method. A spacer forming unit (not shown) is used to form the spacers 21 6 . Then, the upper substrate and the lower substrate respectively formed on the first web W1 and the second web W2 are calibrated and assembled by the assembly unit goo, followed by curing of the sealant, and the assembled base 13 201218882 The process of cutting into a single liquid crystal cell, and the process of connecting the polarizer plates. In addition, the system can be equipped with a plurality of parental r100, r1〇2, ri〇4 ri〇6, ri〇8, R112, R2GG 'R2G2 in the transport direction of the first mesh W1 and the second mesh w2. 'R2G4, R2G6, R2G8, R21G, R212, and some of the viewers can be "driven by the motor_roller. Here, it is difficult to perform seal distribution, short material distribution, and liquid crystal distribution under vacuum and it is very difficult to perform an overall roll-to-roll process in a vacuum chamber. Therefore, the assembly process can be carried out separately under vacuum. At this point, the assembly unit is equipped with a vacuum chamber and needs to be isolated (sealed) from the outside. The deposition of various metal components or insulating materials for m-array processing is also very advantageously carried out under vacuum. Circle 8 is a cross-sectional view of a web processing apparatus in accordance with another embodiment of the present invention. Figure 9 is a cross-sectional view of a first chamber in accordance with an embodiment of the present invention. The apparatus shown in Fig. 8 can be applied to various film forming processes of a mesh-based soft liquid crystal display and a soft organic electroluminescent diode display, and can constitute an entire vacuum assembly unit or a partial vacuum assembly unit. Further, the apparatus according to & embodiments can be applied to any processing for performing a mesh in a state of being isolated from the outside. The web processing apparatus according to this embodiment includes a first chamber 500, a processing chamber _, a second chamber, and vacuum pumps 504' 604, 704 connected to the respective chambers. In addition to the vacuum pumps 504, 604, 7〇4, the high pressure tank can be connected to the chamber as needed to form various atmospheres. The first chamber 500 is equipped with a door 506 which may be formed in a part of two faces of the first chamber 5A or formed as a separate structure. The door 506 is inclined in the conveying direction of the web w. The door 506 is fitted with a mesh inlet 502 which can also be used as a mesh outlet 5 5 of the first chamber, as shown in FIG. Alternatively, a separate mesh outlet can be assembled on the process chamber 600. The configuration of the opening/closing of the mesh and the door 506 of the 0-ring and the first chamber 5 与 are the same as those in the above embodiment, and will not be described again. For example, when manufacturing a flexible liquid crystal display, the web W includes a processing region 2002 (see Fig. 1A) on one surface thereof for performing various processes such as film deposition, etching, sealing distribution, and the like. Further, the mesh W includes a panel portion X (see Fig. 1 〇)' which becomes a substrate on the liquid crystal display or a lower substrate, and a boundary portion γ between the panels (see Fig. 10). The boundary portion Y (see Fig. 10) is neither processed nor composed of any pattern. The portion of the web w compressed by the compression unit 508 and the door 506 at the mesh inlet 502 become the boundary portion γ between the panels (see Fig. 10). The assembly of such a structure prevents damage to the pattern, film or sealant formed on the web by compression of the compression unit 508 and the door 506. Obviously, this description is also applied to other processing and processing of manufacturing flexible liquid crystal displays. After the predetermined treatment is completed in the process chamber 600, the web W is moved to the second chamber through the web outlet of the processing chamber (or through the mesh inlet 650 of the second chamber). Here, the second chamber 7 is fitted with a door 708, a mesh outlet 702, a compression unit 708 and an actuator 712 with the door, mesh outlet, compression unit and brake described above in the vicinity of the mesh inlet. Basically the same 'so no longer repeat them here. The vacuum pumps 504, 604, 704 connected to the respective chambers can be selected according to the degree of vacuum required. For example, a rotary pump, such as a dry-turn rotary slide or a 15 201218882 oil-filled rotary vane pump, etc., is used to achieve a lower vacuum. Multi-stage rotary vane pumps, multi-stage steam injectors, piston pumps, diffusion pumps or the like can be used to achieve moderate vacuum. A diffusion pump, a turbomolecular pump, an absorption pump, a cryogenic cooling pump or the like can be used to obtain a higher degree of vacuum. The chamfer is a sub-pump, a cryogenic cooling pump, a suction pump or the like and can be used to obtain an ultra-high vacuum.
通常，由於第一室500和第二室700需要使處理室保 持在較高的真空度中，所以要求第一室5〇〇和第二室7〇〇 的真空度低於處理室600的真空度。因此，如圖9所示， 當網狀物靠近真空室600時，第一室5〇〇或第二室7〇〇可 分成兩個或多個室並可配置成具有漸增的真空度。圖9示 出了第一室500的一實例，該第一室5〇〇分成兩個分別I 真空栗504a和540b連接的室500a和500b。 另一方面，第一室500和第二室700可以是載入互鎖 真空至。也就是說，每次當網狀物在處理室6〇〇中進行某 種處理時，如果門506的網狀物進口 5〇2和第二室的Z狀 物出口 702都被打開，則很難保持處理室6〇〇的真空产。 因此’第-室50。或第二室7〇〇可具有緩衝功能以收：其 中的預定長度的網狀物。 、 圖10為根據本發明一實施例的緩衝功能的方案視 圖。提供該功能的設備可設置在第一室或第二室内。 緩衝輥子R3和R4配置成通過與其連接的電機（未示 出）垂直移動。也就是說，當緩衝輥子”和以向下移動 時’要收納在第-室500的網狀物w的長度隨緩衝镜子的 16 201218882 移動距離增加。為了使網狀物W在處理室600進行預定處 理後進行後續處理，緩衝輥子R3和R4向上移動以使網狀 物W進入處理室600進行後續處理。為此，第一室5〇〇、 處理室600或第二室7〇〇可裝配有至少一個能移動網狀物 w的驅動親子。 另一方面’每個包括緩衝輥子的輥子R1，R2，R3，R4, R、5 ’R6可具有由較小直徑的中心部分和較大直徑的邊緣部 分組成的啞鈐形狀，以保護網狀物W的處理區域2002上的 各種材料層或圖案^ g卩’在網狀物w的存在處理區域2剛 的中心部分A，輥子R1等可只與第二軟性基板2〇〇的邊緣 B相接觸’而不與整個網狀# w接觸。更優選地，輥子與 網狀物w的一部分接觸’該部分位於網狀物w的校準標記 酬外。網狀物W的邊緣B可形成有通孔襲，以在切割 網狀物W後維持網狀物^張力並定位網狀物卜 乃一万面’網狀物w的平面，gp，国+ 卞曲即，圖1〇中網狀物w的 不存在有處理區域2〇〇2的 斑酿七 表面不存在平面和輥子之間 擇觸方面的問題。因肤，a 矛、了啞鈴形狀的輥子外，可優選 夺木用等搜的圓筒形輥子爽 牙或輸送網狀物W。也就是說， 视于R3，R4和R6可以是啞 n7 亞鈐式輥子，輥子Rl，R2，R5和 R7可以是圓筒形輥子。 才 圖11為進行緩衝功能的 衝功能μ < 置的方案視圖。執行緩 衝力能的設備可配置在第-室或第二室内。 參照圖11 ( Α)，兩個緩衝 動以烟— 戈衡輥子R12和IU4可垂直移 動以調郎網狀物W的長度。剩 移 剩餘的兩個輥子R1〇和Rl6 17 201218882 用來支撐和輸送網狀物w。儘管緩衝輥子也支撐和輸送網 狀物w ’但是這些輥子具有調節網狀物w長度的獨立功能， 因此，為了方便起見，稱為“緩衝輥子，，。參照圖^ 1 ( B )， 四個緩衝棍子R22 ’ R24，R26和R28可提供緩衝功能。剩 餘的兩個輥子R2〇 # R29用來支撐和輸送網狀物w。可替 換地’如® π (c)所* ’單個緩衝觀子R32可用於提供 緩衝功能。剩餘的兩個輥子R3G> R34用來支掠和輸送網 狀物W。攻裏’包括要配置成面向網狀物W的處理區域的 緩衝輥子和普it輥子在内的所有輥子都可以是讀形狀親 子。 這樣，根據本發明的實施例，網狀物處理裝置的優，案 在於此通過簡單的方法在將網狀物保持在真空或隔離的法 態下的同時進行關於網狀物的各種處理。另外，網狀物虔 理裝置通過載人互鎖真空室、緩衝輥子等可使處理室内部 持真空或特定的氣氛更容易。 儘管本發明已經就一些實施例進行了描述，但是，本 領域的技術人員應理解的是，這些實施例僅僅是通過說明 的方式、.、。出的，在不脫離本發明的精神和範圍的情況下， 可進行各種修改、變化和p冲 , #更改。本發明的保護範圍應僅受 附屬申請專利範圍及其等同物的限定。 【圖式簡單說明】 通過結合附圖給出的實施例的以下描述將使本發明的 上述和其他方面、特徵和優點更加清晰易懂，其中， 18 201218882 圖1為根據本發明一實施例的網狀物處理裝置的側視 圖； 圖2為根據本發明實施例的網狀物處理裝置的一部分 (門）的局部透視圖； 圖3(A)~(C)為〇型圈的多種安裝實例的橫戴面圖； 圖4(A) ~(D)為〇型圈的安裝方法實例的橫截面圖； 圖5(A)、（B)為根據本發明實施例的裝置的網狀物進 口的打開/關閉操作的橫截面圖； 圖6為圖5中A部分的放大視圖 圖7為以卷對卷或卷對片 的系統的方案視圖； 的方式製造軟性液晶顯示器 圖 視圖； 8為根據本發明另— 實施例的網狀物處理裝置 的剖 圖9為根據本發明_ 貫施例的第一室的剖視圖； 圖10為根據本發明t 圖；以及 實施例的缓衝功能的方案視 圖11 (A)〜（C)為進行 緩衝功能的多種 配置的方案視圖。 【主要元件符號說明】 1 00〜第一室； 102〜網狀物進口； 104〜網狀物出口； 106〜門； 108〜壓縮單元； 19 201218882 110〜0型圈； 112~致動器； 11 8〜壓縮單元； 116〜門； 122〜致動器； 124〜真空泵； 130~第一幸昆子； 132〜第二輥子； 134〜第三親子； R100, R102, R104, R106, R108, R110, R112, R200 ， R202，R204，R206，R208，R210，R212〜輥子； 500〜第一室； 5 0 2〜網狀物進口； 504，604，704〜真空泵； 506〜門； 508~壓縮單元； 5 5 0 ~網狀物出口； 600~處理室； 650〜網狀物入口； 700〜第二室； 702〜網狀物出口； 708〜壓縮單元； 712〜致動器； W ~網狀物； 20 201218882 2002〜處理區域； 2004〜校準標記； 2006〜通孔； R3，R4，R6〜幸昆子； R卜R2，R5，R7〜輥子； R12，R14~緩衝輥子； R10，R16〜輥子； R22，R24，R26，R28〜缓衝輥子； R20，R29，R30，R34〜輥子。 21Generally, since the first chamber 500 and the second chamber 700 need to maintain the processing chamber at a higher degree of vacuum, the vacuum of the first chamber 5〇〇 and the second chamber 7〇〇 is required to be lower than the vacuum of the processing chamber 600. degree. Therefore, as shown in Fig. 9, when the mesh is close to the vacuum chamber 600, the first chamber 5〇〇 or the second chamber 7〇〇 can be divided into two or more chambers and can be configured to have an increasing degree of vacuum. Fig. 9 shows an example of a first chamber 500 which is divided into chambers 500a and 500b which are respectively connected by I vacuum dams 504a and 540b. Alternatively, the first chamber 500 and the second chamber 700 can be loaded with an interlocking vacuum to. That is, each time the mesh is subjected to some treatment in the processing chamber 6〇〇, if the mesh inlet 5〇2 of the door 506 and the Z-shaped exit 702 of the second chamber are both opened, It is difficult to maintain the vacuum of the processing chamber 6 〇〇. Therefore 'the first chamber 50. Or the second chamber 7 can have a cushioning function to receive: a predetermined length of mesh therein. Figure 10 is a perspective view of a buffering function in accordance with an embodiment of the present invention. The device providing this function can be placed in the first room or the second room. The buffer rollers R3 and R4 are configured to move vertically by a motor (not shown) connected thereto. That is, the length of the web w to be accommodated in the first chamber 500 when the buffer roller "and moves downward" increases with the moving distance of the buffer mirror 16 201218882. In order to cause the web W to be performed in the processing chamber 600 Subsequent processing is performed after the predetermined treatment, and the buffer rollers R3 and R4 are moved upward to cause the web W to enter the processing chamber 600 for subsequent processing. To this end, the first chamber 5, the processing chamber 600, or the second chamber 7 can be assembled. There are at least one driving parent that can move the mesh w. On the other hand, each of the rollers R1, R2, R3, R4, R, 5'R6 including the buffer roller can have a central portion and a larger diameter from a smaller diameter. The edge portion is composed of a matte shape to protect various material layers or patterns on the processing region 2002 of the mesh W. In the presence of the web w, the central portion A of the processing region 2, the roller R1, etc. Only in contact with the edge B of the second flexible substrate 2' without contact with the entire mesh #w. More preferably, the roller is in contact with a portion of the mesh w' which is located at the calibration mark of the mesh w Outside, the edge B of the mesh W can be formed with a through hole After the mesh W is cut, the tension of the mesh is maintained and the mesh is positioned. The plane of the mesh is the surface of the mesh w, the gp, the country + the distortion, that is, the mesh w of FIG. There is a problem that there is no contact between the plane and the roller in the surface of the smear 7 having the treatment area 2 〇〇 2. Due to the skin, a spear and a dumbbell-shaped roller, it is preferable to use a cylindrical shape such as a wood. The roller is cool or conveys the mesh W. That is, depending on R3, R4 and R6 may be dummy n7 roller blades, and rollers R1, R2, R5 and R7 may be cylindrical rollers. The buffer function has a punch function. The device that performs the buffering force can be configured in the first chamber or the second chamber. Referring to Figure 11 (Α), the two buffers move with smoke - Ge Heng roller R12 and IU4 It can be moved vertically to adjust the length of the mesh W. The remaining two rollers R1〇 and Rl6 17 201218882 are used to support and transport the mesh w. Although the buffer roller also supports and transports the mesh w 'but these The roller has an independent function of adjusting the length of the mesh w, so for the sake of convenience, it is called "slow" Roller,,. Referring to Figure ^ 1 (B), four buffer sticks R22' R24, R26 and R28 provide a buffering function. The remaining two rollers R2〇 # R29 are used to support and transport the web w. Alternatively, a single buffered view R32 can be used to provide a buffering function, such as ® π (c)*. The remaining two rollers R3G> R34 are used to sweep and transport the web W. All of the rollers including the buffer roller and the normal roller that are to be arranged to face the processing area of the mesh W may be read shape parents. Thus, in accordance with an embodiment of the present invention, the mesh processing apparatus is advantageous in that various treatments relating to the web are performed by a simple method while maintaining the web in a vacuum or isolated state. Further, the mesh processing apparatus can make it possible to hold a vacuum or a specific atmosphere inside the processing chamber by means of a manned interlocking vacuum chamber, a buffer roller or the like. Although the present invention has been described in terms of some embodiments, those skilled in the art will understand that these embodiments are by way of illustration only. Various modifications, changes, and p-cuts may be made without departing from the spirit and scope of the invention. The scope of the invention should be limited only by the scope of the appended claims and their equivalents. BRIEF DESCRIPTION OF THE DRAWINGS The above and other aspects, features, and advantages of the present invention will become more apparent from the following description of the embodiments of the invention. 2 is a partial perspective view of a portion (door) of a mesh processing device according to an embodiment of the present invention; and FIGS. 3(A) to (C) are various installation examples of a 〇-shaped ring. Figure 4 (A) ~ (D) is a cross-sectional view of an example of a mounting method of a 〇-ring; Figure 5 (A), (B) is a mesh inlet of the device according to an embodiment of the present invention FIG. 6 is an enlarged view of a portion A of FIG. 5, FIG. 7 is a plan view of a system of roll-to-roll or roll-to-roll; a method for manufacturing a flexible liquid crystal display; Section 9 of the mesh processing apparatus of another embodiment of the present invention is a cross-sectional view of a first chamber according to the present invention; FIG. 10 is a diagram of a t-shaped diagram according to the present invention; and a buffer function of the embodiment. 11 (A) ~ (C) for the various configurations of the buffer function Case view. [Main component symbol description] 1 00~ first chamber; 102~ mesh inlet; 104~ mesh outlet; 106~gate; 108~compression unit; 19 201218882 110~0 type ring; 112~actuator; 11 8 ~ compression unit; 116 ~ door; 122 ~ actuator; 124 ~ vacuum pump; 130 ~ first lucky Kunzi; 132 ~ second roller; 134 ~ third parent; R100, R102, R104, R106, R108, R110, R112, R200, R202, R204, R206, R208, R210, R212~roller; 500~first chamber; 5 0 2~ mesh inlet; 504,604,704~vacuum pump; 506~gate; 508~compression Unit; 5 5 0 ~ mesh outlet; 600~ processing chamber; 650~ mesh inlet; 700~ second chamber; 702~ mesh outlet; 708~ compression unit; 712~ actuator; 20 201218882 2002~Processing area; 2004~calibration mark; 2006~through hole; R3, R4, R6~Lucky Kunzi; R Bu R2, R5, R7~roller; R12, R14~buffer roller; R10, R16 ~ Roller; R22, R24, R26, R28 ~ buffer roller; R20, R29, R30, R34 ~ roller. twenty one