CN102709221A - Planar three degree-of-freedom wafer transmitting device - Google Patents

Abstract

A plane three-degree-of-freedom wafer transmission device includes a base, three mechanical arms, three motors, six steel belts, twelve pulleys, three transmission shafts and a quill shaft. Three motors drive three mechanical arms respectively, and the three mechanical arms have relative rotational degrees of freedom respectively. The three motors are fixed on the base, and through belt transmission, the three motors independently drive the three mechanical arms, and the rotation of the three mechanical arms realizes the plane three-degree-of-freedom movement at the end of the wafer transfer device.

Description

A planar three-degree-of-freedom wafer transfer device

technical field

The invention relates to a plane three-degree-of-freedom wafer transmission device, which is mainly used in the technical field of semiconductor manufacturing.

Background technique

In the semiconductor manufacturing process, such as wafer cleaning, polishing, etc., there is a large amount of wafer transfer between cassette-cassette and cassette-chamber, so a safe and effective wafer transfer device is designed It is one of the research hotspots in the semiconductor industry.

Among the existing wafer transfer devices, there are mainly two types, one is the R-θ type manipulator, also known as the radial linear type, and the other is the three-joint independent drive type. The R-θ manipulator can realize two-degree-of-freedom motion in the plane, that is, linear motion and rotation around the central axis. The plane of this manipulator needs two motors to drive, one of the motors realizes the plane drive, that is, the motor drives the first big arm to rotate, and the three mechanical arms are driven by the belt at the joint, and the transmission ratio between the joints is 1: -2:1, at this time, the manipulator can move in a straight line. The second motor is used to drive the overall structure to rotate around the axis of gravity, and at this time, the rotation of the manipulator around the Z axis can be realized. Therefore, the manipulator can only realize plane two-degree-of-freedom movement, which is limited by the operating space.

The three-joint independent drive manipulator uses three direct drive motors at the three joints to realize the independent movement of the three manipulators, so it can realize the plane three-degree-of-freedom movement. However, the direct drive motor is located at the joint, which increases the load quality of the mechanical arm and easily causes deformation of the mechanical arm.

In view of the above deficiencies, it is necessary to design a wafer transfer manipulator that can realize plane three-degree-of-freedom movement without increasing the load of the manipulator.

Contents of the invention

The object of the present invention is to provide a wafer transfer device capable of realizing plane three-degree-of-freedom movement.

Technical scheme of the present invention is as follows:

A planar three-degree-of-freedom wafer transfer device is characterized in that: the wafer transfer device includes a base, three mechanical arms, three motors, six steel belts, twelve pulleys, three solid shafts and a sleeve barrel shaft.

The first solid shaft and the sleeve shaft are coaxially installed and can rotate with each other; the axes of the first solid shaft, the second solid shaft and the third solid shaft are installed parallel to each other;

The first mechanical arm and the second mechanical arm are respectively connected to the second solid shaft through bearings, and the second mechanical arm and the third mechanical arm are respectively connected to the third solid shaft through bearings;

The first pulley is fixed on the output shaft of the first motor, the third pulley is fixed on the output shaft of the second motor, and the seventh pulley is fixed on the output shaft of the third motor; the fourth pulley and the fifth pulley The pulleys are respectively fixed on both ends of the first solid shaft, the tenth pulley and the eleventh pulley are respectively fixed on both ends of the second solid shaft, the twelfth pulley is fixed on the third solid shaft, and the eighth pulley The ninth pulley and the ninth pulley are respectively fixed at both ends of the sleeve shaft; the second pulley is fixed on the connection part of the first mechanical arm, and the sixth pulley is fixed on the connection part of the second mechanical arm;

The movement of the first pulley and the second pulley is connected by the first steel belt, the movement of the third pulley and the fourth pulley is connected by the second steel belt, and the fifth pulley and the sixth belt are connected by the third steel belt The movement of the pulley, the movement of the seventh pulley and the eighth pulley is connected by the fourth steel belt, the movement of the ninth pulley and the tenth pulley is connected by the fifth steel belt, and the eleventh belt is connected by the sixth steel belt the movement of the wheel and the twelfth pulley;

The first motor, the second motor and the third motor are fixed on the base, respectively controlling the movement of the first mechanical arm, the second mechanical arm and the third mechanical arm.

The wafer transfer device of the present invention drives three mechanical arms respectively by three motors, without increasing the load of the mechanical arms, and realizes plane three-degree-of-freedom movement.

Description of drawings

FIG. 1 is a front view of the wafer transfer device of the present invention.

Fig. 2 is a partially enlarged view of the first solid axis of the wafer transfer device of the present invention.

FIG. 3 is a partially enlarged view of the second solid axis of the wafer transfer device of the present invention.

Fig. 4 is a partially enlarged view of the third solid axis of the wafer transfer device of the present invention.

In the picture:

100-base

101-the first mechanical arm; 102-the second mechanical arm; 103-the third mechanical arm;

201-the first motor; 202-the second motor; 203-the third motor;

211-the first steel strip; 212-the second steel strip; 213-the third steel strip; 214-the fourth steel strip; 215-the fifth steel strip; 216-the sixth steel strip;

221-the first pulley; 222-the second pulley; 223-the third pulley; 224-the fourth pulley; 225-the fifth pulley; 226-the sixth pulley; 227-the seventh pulley; 228 - the eighth pulley; 229 - the ninth pulley; 2210 - the tenth pulley; 2211 - the eleventh pulley; 2212 - the twelfth pulley;

231-first solid shaft; 232-second solid shaft; 233-third solid shaft; 234-sleeve shaft;

901 - first axis; 902 - second axis; 903 - third axis.

Detailed ways

The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are the structural diagrams of the wafer transfer device of the present invention, including base 100, first manipulator 101, second manipulator 102, third manipulator 103, first motor 201, Second motor 202, third motor 203, first steel belt 211, second steel belt 212, third steel belt 213, fourth steel belt 214, fifth steel belt 215, sixth steel belt 216, first pulley 221, the second pulley 222, the third pulley 223, the fourth pulley 224, the fifth pulley 225, the sixth pulley 226, the seventh pulley 227, the eighth pulley 228, the ninth pulley 229, Tenth pulley 2210 , eleventh pulley 2211 , twelfth pulley 2212 , first solid shaft 231 , second solid shaft 232 , third solid shaft 233 and quill shaft 234 . The first motor 201 , the second motor 202 and the third motor 203 are fixed on the base 100 .

The first solid shaft 231 and the sleeve shaft 234 are installed coaxially and can rotate with each other; the axes of the first solid shaft 231 , the second solid shaft 232 and the third solid shaft 233 are installed parallel to each other.

The first mechanical arm 101 and the second mechanical arm 102 are respectively connected through the bearing second solid shaft 232 , and the second mechanical arm 102 and the third mechanical arm 103 are respectively connected through the bearing third solid shaft 233 .

The first pulley 221 is fixed on the output shaft of the first motor 201, the third pulley 223 is fixed on the output shaft of the second motor 202, and the seventh pulley 227 is fixed on the output shaft of the third motor 203; The pulley 224 and the fifth pulley 225 are respectively fixed on the two ends of the first solid shaft 231, the tenth pulley 2210 and the eleventh pulley 2211 are respectively fixed on the two ends of the second solid shaft 232, and the twelfth pulley 2212 is fixed on the third solid shaft 233, the eighth pulley 228 and the ninth pulley 229 are respectively fixed on the two ends of the sleeve shaft 234; the second pulley 222 is fixed on the first mechanical arm 101, and the sixth pulley 226 is fixed on the second mechanical arm 102.

The movement of the first pulley 221 and the second pulley 222 is connected by the first steel belt 211, the movement of the third pulley 223 and the fourth pulley 224 is connected by the second steel belt 212, and the movement of the third pulley 224 is connected by the third steel belt 213. The movement of the fifth pulley 225 and the sixth pulley 226 connects the movement of the seventh pulley 227 and the eighth pulley 228 through the fourth steel belt 214, and connects the ninth pulley 229 and the tenth belt through the fifth steel belt 215. The movement of the pulley 2210 is connected to the movement of the eleventh pulley 2211 and the twelfth pulley 2212 through the sixth steel belt 216 .

The first motor 201 , the second motor 202 and the third motor 203 are fixed on the base 100 and control the movement of the first mechanical arm 101 , the second mechanical arm 102 and the third mechanical arm 103 respectively.

2 is a partially enlarged view of the first solid shaft of the wafer transfer device of the present invention. The first solid shaft 231 is coaxially installed with the sleeve shaft 234; the first motor 201 passes through the first pulley 221, the first steel belt 211 and the second The second pulley 222 transmits power to the first mechanical arm 101, driving the first mechanical arm 101 to rotate relative to the first solid shaft 231; the second motor 202 passes the third pulley 223, the second steel belt 212 and the fourth The pulley 224 transmits power to the first solid shaft 231, and the power is output through the fifth pulley 225; the third motor 203 transmits the power to the sleeve through the seventh pulley 227, the fourth steel belt 214 and the eighth pulley 228. cylinder shaft 234, and the power is output by the ninth pulley 229.

3 is a partially enlarged view of the second solid shaft of the wafer transfer device of the present invention. The first mechanical arm 101 and the second mechanical arm 102 are respectively connected through the second solid shaft 232 of the bearing; the second motor 202 transmitted by the fifth pulley 225 The driving force is transmitted to the second mechanical arm 102 through the third steel belt 213 and the sixth pulley 226, driving the second mechanical arm 102 to rotate relative to the second solid shaft 232; the third motor 203 transmitted by the ninth pulley 229 The driving force is transmitted to the second solid shaft 232 through the fifth steel belt 215 and the tenth pulley 2210 , and the power is output by the eleventh pulley 2211 .

4 is a partially enlarged view of the third solid shaft of the wafer transfer device of the present invention. The second mechanical arm 102 and the third mechanical arm 103 are respectively connected to the third solid shaft 233 through bearings; the third solid shaft transmitted by the eleventh pulley 2212 The driving force of the motor 203 is transmitted to the third solid shaft through the sixth steel belt 216 and the twelfth pulley 2212 , driving the third mechanical arm 103 to rotate relative to the third solid shaft 103 .

Claims (1)

1. A planar three-degree-of-freedom wafer transfer device, characterized in that: the wafer transfer device includes a base (100), three mechanical arms, three motors, six steel belts, twelve pulleys, three solid shaft and a quill shaft; The first solid shaft (231) and the sleeve shaft (234) are installed coaxially and can rotate with each other; the axis lines of the first solid shaft (231), the second solid shaft (232) and the third solid shaft (233) are parallel to each other Install; The first mechanical arm (101) and the second mechanical arm (102) are respectively connected to the second solid shaft (232) through bearings, and the second mechanical arm (102) and the third mechanical arm (103) are respectively connected to the third solid shaft through bearings. shaft (233) connection; The first pulley (221) is fixed on the output shaft of the first motor (201), the third pulley (223) is fixed on the output shaft of the second motor (202), and the seventh pulley (227) is fixed on the On the output shaft of the three motors (203); the fourth pulley (224) and the fifth pulley (225) are respectively fixed on the two ends of the first solid shaft (231), and the tenth pulley (2210) and the eleventh The pulleys (2211) are respectively fixed on the two ends of the second solid shaft (232), the twelfth pulley (2212) is fixed on the third solid shaft (233), the eighth pulley (228) and the ninth pulley (229) are respectively fixed on both ends of the sleeve shaft (234); the second pulley (222) is fixed on the first mechanical arm (101), and the sixth pulley (226) is fixed on the second mechanical arm (102) on; the first motor (201), the second motor (202) and the third motor (203) are fixed on the base (100); The first pulley (221) and the second pulley (222) are connected by the first steel belt (211), the third pulley (223) and the fourth pulley (224) are connected by the second steel belt (212), The fifth pulley (225) and the sixth pulley (226) are connected by the third steel belt (213), the seventh pulley (227) and the eighth pulley (228) are connected by the fourth steel belt (214), The ninth pulley (229) and the tenth pulley (2210) are connected through the fifth steel belt (215), and the eleventh pulley (2211) and the twelfth pulley (2212) are connected through the sixth steel belt (216) connect.

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