CN102995112A - Control system for growth of LED substrate material - Google Patents
Control system for growth of LED substrate material Download PDFInfo
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- CN102995112A CN102995112A CN2012105333026A CN201210533302A CN102995112A CN 102995112 A CN102995112 A CN 102995112A CN 2012105333026 A CN2012105333026 A CN 2012105333026A CN 201210533302 A CN201210533302 A CN 201210533302A CN 102995112 A CN102995112 A CN 102995112A
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- 239000000758 substrate Substances 0.000 title claims abstract description 20
- 239000013078 crystal Substances 0.000 claims abstract description 73
- 238000006243 chemical reaction Methods 0.000 claims abstract description 26
- 238000004891 communication Methods 0.000 claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims abstract description 10
- 230000003321 amplification Effects 0.000 claims description 12
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- 230000007246 mechanism Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000005303 weighing Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
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- 230000008676 import Effects 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The invention provides a control system for growth of an LED substrate material. The system comprises a main system, a seed rotation subsystem, a seed lift subsystem, a power control subsystem, a crystal imaging subsystem and a crystal weighing system. The main system comprises a programmable logic controller, a switch input module, a switch output module, an analog-to-digital conversion module, a digital-to-analog conversion module, a serial communication module, a first counting module and a second counting module. The subsystems are connected with the main system through each module, so as to effectively solve problems of tedious control and high cost caused by that subsystems of the crystal growth furnace in the prior art can not be integrated.
Description
Technical field
The present invention relates to the semiconductor growth techniques field, in particular, relate to a kind of Controlling System of LED substrate material growth.
Background technology
Along with the development of science and technology, LED is widely used in the electronic products such as mobile phone, digital product, televisor and flat-panel monitor.
The preparation process of LED is divided into the upstream, midstream and downstream three phases, wherein, the upstream is the substrate material preparatory phase, comprise that mainly crystal is grown, crystal is drawn rod, section, polishing etc., middle reaches are the process segment of wafer, mainly comprise electrode, burn into photoetching, figure, cut thin, cleaning, detection etc., the downstream is encapsulated phase, comprises mainly that scribing, bonding die, sintering, pressure welding, encapsulation, change are cut, sorting, packing etc.Can find out that from the preparation process of above-mentioned LED the substrate material of upstream is the principal element that determines the performance index such as led color, brightness, life-span, namely substrate material is the basis of LED illumination.
At present, the Preparation equipment of LED substrate material is generally the crystal growing furnace of Russia and Ukraine's import, comprises heater power source power control system, seed crystal rotation and jacking system and weighing system.The contriver finds: the subsystems in this kind equipment all is to control separately, can't be integrated and need the equipment operator to have higher technical background, this has just caused the control process of crystal growing furnace of the prior art loaded down with trivial details, Financial cost is high, therefore, how subsystems is integrated in the control device, do centralized Control is the industry problem demanding prompt solution always.
Summary of the invention
In view of this, the invention provides a kind of Controlling System of LED substrate material growth, effectively solved the problem that control is loaded down with trivial details, cost is high that can not integratedly cause owing to subsystems in the crystal growing furnace in the prior art.
For achieving the above object, the invention provides following technical scheme:
A kind of Controlling System of LED substrate material growth, comprise: host system, seed crystal rotation sub-system, seed crystal lifting sub-system, power supply control sub-system, crystal imaging sub-system and crystals weighed sub-system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module;
Described seed crystal rotation sub-system links to each other with described programmable logic controller by described the first counting module, and described the first counting module is for detection of the pulse number of the rotating driver output in the described seed crystal rotation sub-system;
Described seed crystal lifting sub-system links to each other with described programmable logic controller by described the second counting module, and described the second counting module is for detection of the pulse number of the output of the lifting driving mechanism in the described seed crystal lifting sub-system;
Described power supply control sub-system links to each other with described programmable logic controller by described serial communication module, and described serial communication module is used for carrying out digital communication with the power supply of described power supply control sub-system, controls and detect the state of described power supply;
Described crystal imaging sub-system links to each other with described programmable logic controller, is used for showing the growth image of crystal;
Described crystals weighed sub-system links to each other with described programmable logic controller by described analog-to-digital conversion module, and described analog-to-digital conversion module is used for the analog quantity that described crystals weighed sub-system is exported is converted into digital quantity between 0-4000 or the 0-16000;
Described switching input module links to each other with described programmable logic controller, is used for gathering the switching value of extraneous input;
Described switching value output module links to each other with described programmable logic controller, is used for the switching value of output control;
Described D/A converter module links to each other with described programmable logic controller, is used for digital quantity is changed into the analog quantity of control external equipment.
Preferably, described programmable logic controller is the Q06DUEHCPU of Mitsubishi type PLC.
Preferably, described crystals weighed sub-system comprises: the first LOAD CELLS, the second LOAD CELLS, the first amplification module and the second amplification module;
Described the first LOAD CELLS is amplified the current signal of output by described the first amplification module, and transfers to described analog-to-digital conversion module;
Described the second LOAD CELLS is amplified the current signal of output by described the second amplification module, and transfers to described analog-to-digital conversion module;
Accordingly, described programmable logic controller receives the numerary signal of described analog-to-digital conversion module output, and carries out difference processing.
Preferably, also comprise infrared thermometer,
Described infrared thermometer is for detection of the temperature of crystal growing furnace, and the temperature that detects is sent to described programmable logic controller.
Preferably, described seed crystal lifting sub-system comprises: servomotor, servo-driver and electromagnetism selector,
Described electromagnetism selector is according to the different extraneous control signal that receives, and triggers described servo-driver and controls described servomotor and be in different gears.
Preferably,
Described switching input module is QX42;
Described switching value output module is QY42P;
Described analog-to-digital conversion module is Q68AD or Q64AD;
Described D/A converter module is Q64DA;
Described serial communication module is QJ71C24;
Described the first counting module and the second counting module are QD62D.
Via above-mentioned technical scheme as can be known, compared with prior art, the invention provides a kind of Controlling System of LED substrate material growth, comprise: host system, seed crystal rotation sub-system, seed crystal lifting sub-system, power supply control sub-system, crystal imaging sub-system and crystals weighed system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module.Wherein, sub-system links to each other with host system by modules, has effectively solved the problem that control is loaded down with trivial details, cost is high that can not integratedly cause owing to subsystems in the crystal growing furnace in the prior art.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is embodiments of the invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to the accompanying drawing that provides other accompanying drawing.
The structural representation of the Controlling System of a kind of LED substrate material growth that Fig. 1 provides for the embodiment of the invention one;
The structural representation of the Controlling System of a kind of LED substrate material growth that Fig. 2 provides for the embodiment of the invention two;
The structural representation of the specific implementation of the Controlling System of a kind of LED substrate material growth that Fig. 3 provides for the embodiment of the invention two;
Fig. 4 is the pie graph of the Controlling System of a kind of LED substrate material growth provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
Embodiment one
See also accompanying drawing 1, the structural representation of the Controlling System of a kind of LED substrate material growth that provides for the embodiment of the invention one, comprise: host system 10, seed crystal rotation sub-system 20, seed crystal lifting sub-system 30, power supply control sub-system 40, crystal imaging sub-system 50 and crystals weighed sub-system 60, wherein, described host system 10 comprises: programmable logic controller 101, switching input module 102, switching value output module 103, analog-to-digital conversion module 104, D/A converter module 105, serial communication module 106, the first counting module 107 and the second counting module 108.
Wherein, the annexation of each several part is in the host system 10:
Described seed crystal rotation sub-system 20 links to each other with described programmable logic controller 101 by described the first counting module 107, and described the first counting module 107 is for detection of the pulse number of the rotating driver output in the described seed crystal rotation sub-system 20.
Described seed crystal lifting sub-system 30 links to each other with described programmable logic controller 101 by described the second counting module 108, and described the second counting module 108 is for detection of the pulse number of the output of the lifting driving mechanism in the described seed crystal lifting sub-system 30.
Described power supply control sub-system 40 links to each other with described programmable logic controller 101 by described serial communication module 106, described serial communication module 106 is used for carrying out digital communication with the power supply of described power supply control sub-system 40, controls and detect the state of described power supply.
Described crystal imaging sub-system 50 links to each other with described programmable logic controller 101, is used for showing the growth image of crystal (crystal is at crystal growing furnace 70).
Described crystals weighed sub-system 60 links to each other with described programmable logic controller 101 by described analog-to-digital conversion module 104, and described analog-to-digital conversion module 104 is used for the analog quantity that described crystals weighed sub-system 60 is exported is converted into digital quantity between 0-4000 or the 0-16000.
Except this, described switching input module 102 links to each other with described programmable logic controller 101, is used for gathering the switching value of extraneous input; Described switching value output module 103 links to each other with described programmable logic controller 101, is used for the switching value of output control; Described D/A converter module 105 links to each other with described programmable logic controller 101, is used for digital quantity is changed into the analog quantity of control external equipment.
Need to prove, in the present embodiment, the programmable logic controller 101 preferential employing Q06DUEHCPU of Mitsubishi type PLC, but be not limited to this model.Accordingly, described switching input module 102 is QX42, described switching value output module 103 is QY42P, described analog-to-digital conversion module 104 is Q68AD or Q64AD, described D/A converter module 105 is Q64DA, described serial communication module 106 is QJ71C24, and described the first counting module 107 and the second counting module 108 are QD62D.
The host system that adopts in the present embodiment is the Q06DUEHCPU of Mitsubishi type PLC, can expand as required, be about to sub-system and link to each other with host system by modules, effectively solved the problem that control is loaded down with trivial details, cost is high that can not integratedly cause owing to subsystems in the crystal growing furnace in the prior art.
Embodiment two
See also accompanying drawing 2, the structural representation of the Controlling System of a kind of LED substrate material growth that provides for the embodiment of the invention two, comprise: host system 10, seed crystal rotation sub-system 20, seed crystal lifting sub-system 30, power supply control sub-system 40, crystal imaging sub-system 50 and crystals weighed sub-system 60, wherein, described host system 10 comprises: programmable logic controller 101, switching input module 102, switching value output module 103, analog-to-digital conversion module 104, D/A converter module 105, serial communication module 106, the first counting module 107 and the second counting module 108.On the basis of the above, present embodiment has increased infrared thermometer 80 on the basis of embodiment one, this infrared thermometer links to each other with programmable logic controller 101, for detection of the temperature of crystal growing furnace 70, and the temperature that detects is sent to described programmable logic controller 101.
Except this, see also Fig. 3, the crystals weighed sub-system 60 that present embodiment provides comprises: the first LOAD CELLS 601, the second LOAD CELLS 602, the first amplification module 603 and the second amplification module 604, wherein, described the first LOAD CELLS 601 is amplified the current signal of output by described the first amplification module 603, and transfers to described analog-to-digital conversion module 104.Described the second LOAD CELLS 602 is amplified the current signal of output by described the second amplification module 604, and transfers to described analog-to-digital conversion module 104.Accordingly, described programmable logic controller 101 receives the numerary signal of described analog-to-digital conversion module 104 outputs, and carries out difference processing.Adopt the sub-system of weighing in the present embodiment that weighing precision is reached about 1 gram, precision is high.
For seed crystal lifting sub-system, the contriver considers, in the real crystal process of growth to the requirement of long brilliant technique, velocity ratio when seed high speed and low speed elevation is 10000 times, but the height speed ratio of common servomotor is generally 3000:3, namely only have 1000 times, can not practical requirement, so in the present embodiment, described seed crystal lifting sub-system 30 comprises: servomotor, servo-driver and electromagnetism selector, wherein, described electromagnetism selector is according to the different extraneous control signal that receives, and triggers described servo-driver and controls described servomotor and be in different gears.Namely be transferred to high tap position by the electromagnetism selector when the high speed, when low speed, be transferred to low-grade location, effectively realized utilizing a servomotor to satisfy the problem of friction-motion speed.
See also Fig. 4; pie graph for the Controlling System of a kind of LED substrate material growth provided by the invention; wherein; because the scalability of programmable logic controller is good; can freely carry out as required function and expand, those skilled in the art's expansion on this basis all belongs in protection scope of the present invention.Need to prove, on the basis of Controlling System provided by the invention, can also dispose corresponding software, further realize the function of this Controlling System, at this, no longer describe in detail.
In sum: the Controlling System that the invention provides a kind of LED substrate material growth, comprise: host system, seed crystal rotation sub-system, seed crystal lifting sub-system, power supply control sub-system, crystal imaging sub-system and crystals weighed system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module.Wherein, sub-system links to each other with host system by modules, has effectively solved the problem that control is loaded down with trivial details, cost is high that can not integratedly cause owing to subsystems in the crystal growing furnace in the prior art.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For the device that embodiment provides, because it is corresponding with the method that embodiment provides, so description is fairly simple, relevant part partly illustrates referring to method and gets final product.
Above-mentioned explanation to the embodiment that provides makes this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can in the situation that does not break away from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but principle and the features of novelty the widest consistent scope that provides with this paper will be provided.
Claims (6)
1. the Controlling System of LED substrate material growth, it is characterized in that, comprise: host system, seed crystal rotation sub-system, seed crystal lifting sub-system, power supply control sub-system, crystal imaging sub-system and crystals weighed sub-system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module;
Described seed crystal rotation sub-system links to each other with described programmable logic controller by described the first counting module, and described the first counting module is for detection of the pulse number of the rotating driver output in the described seed crystal rotation sub-system;
Described seed crystal lifting sub-system links to each other with described programmable logic controller by described the second counting module, and described the second counting module is for detection of the pulse number of the output of the lifting driving mechanism in the described seed crystal lifting sub-system;
Described power supply control sub-system links to each other with described programmable logic controller by described serial communication module, and described serial communication module is used for carrying out digital communication with the power supply of described power supply control sub-system, controls and detect the state of described power supply;
Described crystal imaging sub-system links to each other with described programmable logic controller, is used for showing the growth image of crystal;
Described crystals weighed sub-system links to each other with described programmable logic controller by described analog-to-digital conversion module, and described analog-to-digital conversion module is used for the analog quantity that described crystals weighed sub-system is exported is converted into digital quantity between 0-4000 or the 0-16000;
Described switching input module links to each other with described programmable logic controller, is used for gathering the switching value of extraneous input;
Described switching value output module links to each other with described programmable logic controller, is used for the switching value of output control;
Described D/A converter module links to each other with described programmable logic controller, is used for digital quantity is changed into the analog quantity of control external equipment.
2. Controlling System according to claim 1 is characterized in that, described programmable logic controller is the Q06DUEHCPU of Mitsubishi type PLC.
3. Controlling System according to claim 1 is characterized in that, described crystals weighed sub-system comprises: the first LOAD CELLS, the second LOAD CELLS, the first amplification module and the second amplification module;
Described the first LOAD CELLS is amplified the current signal of output by described the first amplification module, and transfers to described analog-to-digital conversion module;
Described the second LOAD CELLS is amplified the current signal of output by described the second amplification module, and transfers to described analog-to-digital conversion module;
Accordingly, described programmable logic controller receives the numerary signal of described analog-to-digital conversion module output, and carries out difference processing.
4. Controlling System according to claim 1 is characterized in that, also comprises infrared thermometer,
Described infrared thermometer is for detection of the temperature of crystal growing furnace, and the temperature that detects is sent to described programmable logic controller.
5. Controlling System according to claim 1 is characterized in that, described seed crystal lifting sub-system comprises: servomotor, servo-driver and electromagnetism selector,
Described electromagnetism selector is according to the different extraneous control signal that receives, and triggers described servo-driver and controls described servomotor and be in different gears.
6. Controlling System according to claim 1 is characterized in that,
Described switching input module is QX42;
Described switching value output module is QY42P;
Described analog-to-digital conversion module is Q68AD or Q64AD;
Described D/A converter module is Q64DA;
Described serial communication module is QJ71C24;
Described the first counting module and the second counting module are QD62D.
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| CN201210533302.6A CN102995112B (en) | 2012-12-11 | 2012-12-11 | A kind of Controlling System of growth of LED substrate material |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6126745A (en) * | 1998-02-19 | 2000-10-03 | Leybold Systems Gmbh | Device for controlling crystal growth processes |
| CN2913393Y (en) * | 2006-05-30 | 2007-06-20 | 北京京运通真空设备厂 | Control device for monocrystalline silicon furnace |
| CN201390800Y (en) * | 2009-05-06 | 2010-01-27 | 西安恒新自动控制有限公司 | DAC signal given plate of single crystal furnace |
| CN202072794U (en) * | 2011-05-17 | 2011-12-14 | 江苏清能电源有限公司 | Full-digital energy-saving single crystal growth power supply for solar energy and control device |
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2012
- 2012-12-11 CN CN201210533302.6A patent/CN102995112B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6126745A (en) * | 1998-02-19 | 2000-10-03 | Leybold Systems Gmbh | Device for controlling crystal growth processes |
| CN2913393Y (en) * | 2006-05-30 | 2007-06-20 | 北京京运通真空设备厂 | Control device for monocrystalline silicon furnace |
| CN201390800Y (en) * | 2009-05-06 | 2010-01-27 | 西安恒新自动控制有限公司 | DAC signal given plate of single crystal furnace |
| CN202072794U (en) * | 2011-05-17 | 2011-12-14 | 江苏清能电源有限公司 | Full-digital energy-saving single crystal growth power supply for solar energy and control device |
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