CN102995112B - A kind of Controlling System of growth of LED substrate material - Google Patents
A kind of Controlling System of growth of LED substrate material Download PDFInfo
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- CN102995112B CN102995112B CN201210533302.6A CN201210533302A CN102995112B CN 102995112 B CN102995112 B CN 102995112B CN 201210533302 A CN201210533302 A CN 201210533302A CN 102995112 B CN102995112 B CN 102995112B
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- 239000000463 material Substances 0.000 title claims abstract description 20
- 239000000758 substrate Substances 0.000 title claims abstract description 20
- 239000013078 crystal Substances 0.000 claims abstract description 65
- 238000006243 chemical reaction Methods 0.000 claims abstract description 25
- 238000004891 communication Methods 0.000 claims abstract description 19
- 238000002050 diffraction method Methods 0.000 claims abstract description 10
- 230000003321 amplification Effects 0.000 claims description 12
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000005303 weighing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The invention provides a kind of Controlling System of growth of LED substrate material, comprise: host system, seed crystal rotate sub-system, seed crystal lifting sub-system, Energy control sub-system, crystallography sub-system and crystals weighed system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module.Wherein, sub-system is connected with host system by modules, effectively solves in prior art because subsystems in crystal growing furnace can not the integrated and problem that control that is that cause is loaded down with trivial details, cost is high.
Description
Technical field
The present invention relates to semiconductor growth techniques field, in particular, relate to a kind of Controlling System of growth of LED substrate material.
Background technology
Along with the development of science and technology, LED is widely used in the electronic products such as mobile phone, digital product, televisor and flat-panel monitor.
The preparation process of LED is divided into upstream, midstream and downstream three phases, wherein, upstream is substrate material preparatory phase, mainly comprise crystal growth, crystal draw rod, section, polishing etc., middle reaches are the process segment of wafer, mainly comprise electrode, burn into photoetching, figure, cut thin, cleaning, detection etc., downstream is encapsulated phase, mainly comprise scribing, bonding die, sintering, pressure welding, encapsulation, change cut, sorting, packaging etc.As can be seen from the preparation process of above-mentioned LED, the substrate material of upstream is the principal element determining the performance index such as LED color, brightness, life-span, and namely substrate material is the basis of LED illumination.
At present, the Preparation equipment of LED substrate material is generally the crystal growing furnace of Russia and Ukraine's import, comprises heater power source power control system, seed crystal rotation and jacking system and weighing system.Contriver finds: the subsystems in this kind equipment is all control separately, cannot be integrated and need equipment operator to have higher technical background, the control process which results in crystal growing furnace of the prior art is loaded down with trivial details, Financial cost is high, therefore, how being integrated in a control device by subsystems, do centralized Control is industry problem demanding prompt solution always.
Summary of the invention
In view of this, the invention provides a kind of Controlling System of growth of LED substrate material, effectively solve in prior art because subsystems in crystal growing furnace can not the integrated and problem that control that is that cause is loaded down with trivial details, cost is high.
For achieving the above object, the invention provides following technical scheme:
A kind of Controlling System of growth of LED substrate material, comprise: host system, seed crystal rotate sub-system, seed crystal lifting sub-system, Energy control sub-system, crystallography sub-system and crystals weighed sub-system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module;
Described seed crystal is rotated sub-system and is connected with described programmable logic controller by described first counting module, and described first counting module rotates the pulse number of the rotating driver output in sub-system for detecting described seed crystal;
Described seed crystal lifting sub-system is connected with described programmable logic controller by described second counting module, the pulse number that described second counting module exports for the lift actuator detected in described seed crystal lifting sub-system;
Described Energy control sub-system is connected with described programmable logic controller by described serial communication module, and described serial communication module is used for carrying out digital communication with the power supply in described Energy control sub-system, controls and detect the state of described power supply;
Described crystallography sub-system is connected with described programmable logic controller, for showing the growth image of crystal;
Described crystals weighed sub-system is connected with described programmable logic controller by described analog-to-digital conversion module, and described analog-to-digital conversion module is used for the digital quantity analog quantity that described crystals weighed sub-system exports be converted between 0-4000 or 0-16000;
Described switching input module is connected with described programmable logic controller, for gathering the switching value of extraneous input;
Described switching value output module is connected with described programmable logic controller, for exporting the switching value of control;
Described D/A converter module is connected with described programmable logic controller, for digital quantity being changed into the analog quantity controlling external equipment.
Preferably, described programmable logic controller is Mitsubishi Q06DUEHCPU type PLC.
Preferably, described crystals weighed sub-system comprises: the first LOAD CELLS, the second LOAD CELLS, the first amplification module and the second amplification module;
The current signal of output is amplified by described first amplification module by described first LOAD CELLS, and transfers to described analog-to-digital conversion module;
The current signal of output is amplified by described second amplification module by described second LOAD CELLS, and transfers to described analog-to-digital conversion module;
Accordingly, described programmable logic controller receives the numerary signal that described analog-to-digital conversion module exports, and carries out difference processing.
Preferably, also comprise infrared thermometer,
The temperature detected for detecting the temperature of crystal growing furnace, and is sent to described programmable logic controller by described infrared thermometer.
Preferably, described seed crystal lifting sub-system comprises: servomotor, servo-driver and electromagnetism selector,
Described electromagnetism selector, according to the extraneous control signal of the difference that receives, triggers described servo-driver and controls described servomotor and be in different gears.
Preferably,
Described switching input module is QX42;
Described switching value output module is QY42P;
Described analog-to-digital conversion module is Q68AD or Q64AD;
Described D/A converter module is Q64DA;
Described serial communication module is QJ71C24;
Described first counting module and the second counting module are QD62D.
Known via above-mentioned technical scheme, compared with prior art, the invention provides a kind of Controlling System of growth of LED substrate material, comprise: host system, seed crystal rotate sub-system, seed crystal lifting sub-system, Energy control sub-system, crystallography sub-system and crystals weighed system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module.Wherein, sub-system is connected with host system by modules, effectively solves in prior art because subsystems in crystal growing furnace can not the integrated and problem that control that is that cause is loaded down with trivial details, cost is high.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments of the invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
The structural representation of the Controlling System of a kind of growth of LED substrate material that Fig. 1 provides for the embodiment of the present invention one;
The structural representation of the Controlling System of a kind of growth of LED substrate material that Fig. 2 provides for the embodiment of the present invention two;
The structural representation of the specific implementation of the Controlling System of a kind of growth of LED substrate material that Fig. 3 provides for the embodiment of the present invention two;
Fig. 4 is the pie graph of the Controlling System of a kind of growth of LED substrate material provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment one
Refer to accompanying drawing 1, the structural representation of the Controlling System of a kind of growth of LED substrate material provided for the embodiment of the present invention one, comprise: host system 10, seed crystal rotates sub-system 20, seed crystal lifting sub-system 30, Energy control sub-system 40, crystallography sub-system 50 and crystals weighed sub-system 60, wherein, described host system 10 comprises: programmable logic controller 101, switching input module 102, switching value output module 103, analog-to-digital conversion module 104, D/A converter module 105, serial communication module 106, first counting module 107 and the second counting module 108.
Wherein, in host system 10, the annexation of each several part is:
Described seed crystal is rotated sub-system 20 and is connected with described programmable logic controller 101 by described first counting module 107, and described first counting module 107 rotates the pulse number of the rotating driver output in sub-system 20 for detecting described seed crystal.
Described seed crystal lifting sub-system 30 is connected with described programmable logic controller 101 by described second counting module 108, the pulse number that described second counting module 108 exports for the lift actuator detected in described seed crystal lifting sub-system 30.
Described Energy control sub-system 40 is connected with described programmable logic controller 101 by described serial communication module 106, described serial communication module 106, for carrying out digital communication with the power supply in described Energy control sub-system 40, controls and detects the state of described power supply.
Described crystallography sub-system 50 is connected with described programmable logic controller 101, for showing the growth image of crystal (crystal is in crystal growing furnace 70).
Described crystals weighed sub-system 60 is connected with described programmable logic controller 101 by described analog-to-digital conversion module 104, and described analog-to-digital conversion module 104 is converted into the digital quantity between 0-4000 or 0-16000 for the analog quantity described crystals weighed sub-system 60 exported.
Except this, described switching input module 102 is connected with described programmable logic controller 101, for gathering the switching value of extraneous input; Described switching value output module 103 is connected with described programmable logic controller 101, for exporting the switching value of control; Described D/A converter module 105 is connected with described programmable logic controller 101, for digital quantity being changed into the analog quantity controlling external equipment.
It should be noted that, in the present embodiment, programmable logic controller 101 preferentially adopts Mitsubishi Q06DUEHCPU type PLC, but is not limited to this model.Accordingly, described switching input module 102 is QX42, described switching value output module 103 is QY42P, described analog-to-digital conversion module 104 is Q68AD or Q64AD, described D/A converter module 105 is Q64DA, described serial communication module 106 is QJ71C24, and described first counting module 107 and the second counting module 108 are QD62D.
The host system adopted in the present embodiment is Mitsubishi Q06DUEHCPU type PLC, can expand as required, be connected with host system by modules by sub-system, effectively solve in prior art because subsystems in crystal growing furnace can not the integrated and problem that control that is that cause is loaded down with trivial details, cost is high.
Embodiment two
Refer to accompanying drawing 2, the structural representation of the Controlling System of a kind of growth of LED substrate material provided for the embodiment of the present invention two, comprise: host system 10, seed crystal rotates sub-system 20, seed crystal lifting sub-system 30, Energy control sub-system 40, crystallography sub-system 50 and crystals weighed sub-system 60, wherein, described host system 10 comprises: programmable logic controller 101, switching input module 102, switching value output module 103, analog-to-digital conversion module 104, D/A converter module 105, serial communication module 106, first counting module 107 and the second counting module 108.On the basis of the above, the present embodiment adds infrared thermometer 80 on the basis of embodiment one, this infrared thermometer is connected with programmable logic controller 101, for detecting the temperature of crystal growing furnace 70, and the temperature detected is sent to described programmable logic controller 101.
Except this, refer to Fig. 3, the crystals weighed sub-system 60 that the present embodiment provides comprises: the first LOAD CELLS 601, second LOAD CELLS 602, first amplification module 603 and the second amplification module 604, wherein, the current signal of output is amplified by described first amplification module 603 by described first LOAD CELLS 601, and transfers to described analog-to-digital conversion module 104.The current signal of output is amplified by described second amplification module 604 by described second LOAD CELLS 602, and transfers to described analog-to-digital conversion module 104.Accordingly, described programmable logic controller 101 receives the numerary signal that described analog-to-digital conversion module 104 exports, and carries out difference processing.Adopt the sub-system of weighing in the present embodiment that weighing precision can be made to reach about 1 gram, precision is high.
For seed crystal lifting sub-system, contriver considers, to the requirement of long brilliant technique in real crystal process of growth, velocity ratio when seed high speed and low speed elevation is 10000 times, but the height speed ratio of common servomotor is generally 3000:3, namely 1000 times are only had, can not practical requirement, therefore in the present embodiment, described seed crystal lifting sub-system 30 comprises: servomotor, servo-driver and electromagnetism selector, wherein, described electromagnetism selector is according to the extraneous control signal of the difference received, trigger described servo-driver to control described servomotor and be in different gears.Namely be transferred to high tap position by electromagnetism selector when high speed, be transferred to low-grade location when low speed, effectively achieve and utilize a servomotor to meet the problem of friction-motion speed.
Refer to Fig. 4; for the pie graph of the Controlling System of a kind of growth of LED substrate material provided by the invention; wherein; because the scalability of programmable logic controller is good; freely can carry out function expansion as required, those skilled in the art's expansion on this basis all belongs in protection scope of the present invention.It should be noted that, on the basis of Controlling System provided by the invention, corresponding software can also be configured, realize the function of this Controlling System further, at this, no longer describe in detail.
In sum: the Controlling System that the invention provides a kind of growth of LED substrate material, comprise: host system, seed crystal rotate sub-system, seed crystal lifting sub-system, Energy control sub-system, crystallography sub-system and crystals weighed system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module.Wherein, sub-system is connected with host system by modules, effectively solves in prior art because subsystems in crystal growing furnace can not the integrated and problem that control that is that cause is loaded down with trivial details, cost is high.
In this specification sheets, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.For the device that embodiment provides, the method provided due to itself and embodiment is corresponding, so description is fairly simple, relevant part illustrates see method part.
To the above-mentioned explanation of provided embodiment, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle provided in this article and features of novelty.
Claims (5)
1. the Controlling System of a growth of LED substrate material, it is characterized in that, comprise: host system, seed crystal rotate sub-system, seed crystal lifting sub-system, Energy control sub-system, crystallography sub-system and crystals weighed sub-system, wherein, described host system comprises: programmable logic controller, switching input module, switching value output module, analog-to-digital conversion module, D/A converter module, serial communication module, the first counting module and the second counting module;
Described seed crystal is rotated sub-system and is connected with described programmable logic controller by described first counting module, and described first counting module rotates the pulse number of the rotating driver output in sub-system for detecting described seed crystal;
Described seed crystal lifting sub-system is connected with described programmable logic controller by described second counting module, the pulse number that described second counting module exports for the lift actuator detected in described seed crystal lifting sub-system;
Described Energy control sub-system is connected with described programmable logic controller by described serial communication module, and described serial communication module is used for carrying out digital communication with the power supply in described Energy control sub-system, controls and detect the state of described power supply;
Described crystallography sub-system is connected with described programmable logic controller, for showing the growth image of crystal;
Described crystals weighed sub-system is connected with described programmable logic controller by described analog-to-digital conversion module, and described analog-to-digital conversion module is used for the digital quantity analog quantity that described crystals weighed sub-system exports be converted between 0-4000 or 0-16000;
Described switching input module is connected with described programmable logic controller, for gathering the switching value of extraneous input;
Described switching value output module is connected with described programmable logic controller, for exporting the switching value of control;
Described D/A converter module is connected with described programmable logic controller, for digital quantity being changed into the analog quantity controlling external equipment;
Described crystals weighed sub-system comprises: the first LOAD CELLS, the second LOAD CELLS, the first amplification module and the second amplification module;
The current signal of output is amplified by described first amplification module by described first LOAD CELLS, and transfers to described analog-to-digital conversion module;
The current signal of output is amplified by described second amplification module by described second LOAD CELLS, and transfers to described analog-to-digital conversion module;
Accordingly, described programmable logic controller receives the numerary signal that described analog-to-digital conversion module exports, and carries out difference processing.
2. Controlling System according to claim 1, is characterized in that, described programmable logic controller is Mitsubishi Q06DUEHCPU type.
3. Controlling System according to claim 1, is characterized in that, also comprises infrared thermometer,
The temperature detected for detecting the temperature of crystal growing furnace, and is sent to described programmable logic controller by described infrared thermometer.
4. Controlling System according to claim 1, is characterized in that, described seed crystal lifting sub-system comprises: servomotor, servo-driver and electromagnetism selector,
Described electromagnetism selector, according to the extraneous control signal of the difference that receives, triggers described servo-driver and controls described servomotor and be in different gears.
5. Controlling System according to claim 1, is characterized in that,
Described switching input module is QX42;
Described switching value output module is QY42P;
Described analog-to-digital conversion module is Q68AD or Q64AD;
Described D/A converter module is Q64DA;
Described serial communication module is QJ71C24;
Described first counting module and the second counting module are QD62D.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6126745A (en) * | 1998-02-19 | 2000-10-03 | Leybold Systems Gmbh | Device for controlling crystal growth processes |
| CN2913393Y (en) * | 2006-05-30 | 2007-06-20 | 北京京运通真空设备厂 | Control device for monocrystalline silicon furnace |
| CN201390800Y (en) * | 2009-05-06 | 2010-01-27 | 西安恒新自动控制有限公司 | DAC signal given plate of single crystal furnace |
| CN202072794U (en) * | 2011-05-17 | 2011-12-14 | 江苏清能电源有限公司 | Full-digital energy-saving single crystal growth power supply for solar energy and control device |
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- 2012-12-11 CN CN201210533302.6A patent/CN102995112B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6126745A (en) * | 1998-02-19 | 2000-10-03 | Leybold Systems Gmbh | Device for controlling crystal growth processes |
| CN2913393Y (en) * | 2006-05-30 | 2007-06-20 | 北京京运通真空设备厂 | Control device for monocrystalline silicon furnace |
| CN201390800Y (en) * | 2009-05-06 | 2010-01-27 | 西安恒新自动控制有限公司 | DAC signal given plate of single crystal furnace |
| CN202072794U (en) * | 2011-05-17 | 2011-12-14 | 江苏清能电源有限公司 | Full-digital energy-saving single crystal growth power supply for solar energy and control device |
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