CN103409727A - Device for improving flexible substrate material film layer quality online - Google Patents
Device for improving flexible substrate material film layer quality online Download PDFInfo
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- CN103409727A CN103409727A CN2013103512242A CN201310351224A CN103409727A CN 103409727 A CN103409727 A CN 103409727A CN 2013103512242 A CN2013103512242 A CN 2013103512242A CN 201310351224 A CN201310351224 A CN 201310351224A CN 103409727 A CN103409727 A CN 103409727A
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- 239000000463 material Substances 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 title claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 41
- 238000001228 spectrum Methods 0.000 claims abstract description 13
- 230000003595 spectral effect Effects 0.000 claims abstract description 10
- 238000007747 plating Methods 0.000 claims abstract description 8
- 239000000523 sample Substances 0.000 claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000013307 optical fiber Substances 0.000 claims description 7
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000010923 batch production Methods 0.000 abstract description 2
- 238000010924 continuous production Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 abstract description 2
- 238000012806 monitoring device Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention relates to a device for improving flexible substrate material film layer quality online. The invention relates to a reeling film-plating machine online monitoring device. The structure comprises a transmission module and a reflection module with respective spectrum converting devices. A spectral detector is placed between a reeling film-plating device plating drum and a reeling chamber. With the device provided by the invention, plating quality can be controlled online, process parameters can be adjusted on time, continuous production can be achieved, product defect can be greatly avoided, and long-time stable batch production can be realized.
Description
Technical field
The present invention relates to a kind of online raising flexible parent metal film quality device, belong to the winding film coating machine on-Line Monitor Device.
Background technology
Flexible transparent conducting film is by the vacuum sputtering method; the height of metal such as deposition argentiferous etc. is led rete on the clear polymer diaphragm; it has very high transparency (70～85%); overcome the shortcoming of conventional shield glass transparency low (40%); diaphragm very thin (0.125mm, 0.175mm and 0.188mm), can directly paste on conventional glass or synthetic glass surface simultaneously, realizes the EMI electromagnetic interference shield; due to diaphragm band matcoveredn itself, can in severe Working environment, work.
Flexible transparent conductive film application in recent years is along with the development of touch-screen is more and more extensive, as mobile phone, household electrical appliances, automobile, furniture etc., flexible transparent conductive film adopt winding film plating equipment to be coated with, along with state of the art improves, touch-screen conductive film layer resistance is more and more lower, more and more higher to quality requirements.
At present, after being generally to plated film, flexible parent metal plated film Quality Detection tests outside machine, as reflection, transmission, sheet resistance; Perhaps at substrate surface, place single fibre-optical probe, realize on-line monitoring rete reflectivity and transmissivity.
Summary of the invention
In order to overcome above-mentioned defect, the object of the invention is to provide a kind of raising flexible parent metal rete coating quality, improves membrane uniformity, and online adjusting process parameter in time is to guarantee to improve the online raising flexible parent metal film quality device of product non-defective unit number.
In order to achieve the above object, the present invention adopts following technical scheme:
A kind of online raising flexible parent metal film quality device, it comprises transmission module and mirror module its structure, and transmission module and mirror module comprise spectrum conversion device separately, and spectral detector is positioned between winding film plating equipment plated film drum and rolling chamber.
The transmission module comprises first transmitter module and four receiver modules: the first receiver module, the second receiver module, the 3rd receiver module, the 4th receiver module.
In transmitter module, transmitting illuminant is halogen tungsten lamp, and utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 4th receiver module without base material; Its excess-three road is incident to substrate surface via projector, receptor: the first transmission probe, the second transmission probe, the 3rd transmission probe are sent spectral signal into respectively the first receiver module, the second receiver module, the 3rd receiver module.
Projector and receptor: the first transmission probe, the second transmission probe, the 3rd transmission probe be vertical and substrate surface all, and the transmission module is placed in the vacuum system outside, and utilizing emitted light and transmitted light transmit through optical fiber.
Mirror module comprises second transmitter module and four receiver modules: the 5th receiver module, the 6th receiver module, the 7th receiver module, the 8th receiver module.
In the second transmitter module, transmitting illuminant is halogen tungsten lamp, and utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 8th receiver module without base material; Its excess-three road is incident to substrate surface via projector, receptor: the first reflection probe, the second reflection probe, the 3rd reflection probe are sent spectral signal into respectively the 5th receiver module, the 6th receiver module, the 7th receiver module.
Each projector and receptor: the first reflection probe, the second reflection probe, the 3rd reflection probe are positioned at same position, and all perpendicular to substrate surface, mirror module is placed in the vacuum system outside, and utilizing emitted light and reflected light signal transmit through optical fiber.
In the receiver module of transmission module and mirror module, place the photodiode array spectrograph.
The spectrum probe is placed in three positions of base material, and three position transmitted spectrums and reflection spectrum are all detectable.
The present invention compared with prior art has following technological merit:
The present invention controls coating quality online, and the adjusting process parameter, reach continuous production in time, greatly avoids product bad, to realize batch production steady in a long-term.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
1 transmission module, 2 mirror module, 3 data processing equipments, 4 display unit, 5 first receiver modules, 6 second receiver modules, 7 the 3rd receiver modules, 8 the 4th receiver modules, 9 first transmitter modules, 10 base materials, 11 optical fiber, 12 first transmission probes, 13 second transmission probes, 14 the 3rd transmission probes, 15 second transmitter modules, 16 the 5th receiver modules, 17 the 6th receiver modules, 18 the 7th receiver modules, 19 the 8th receiver modules, 20 first reflection probe, 21 second reflection probe, 22 the 3rd reflection probe.
Fig. 2 is installation site of the present invention structural representation.
23 unreel chamber, 24 transmission probes, 25 reflection probe, 26 rolling chambers, 27 plated film chambers, 28 plated film drums.
Fig. 3 is that the present invention specifically implements structure iron.
Embodiment
In order to describe the These characteristics of patent of the present invention in detail, advantage and principle of work, the present invention is described further below in conjunction with Figure of description 1,2,3 and embodiment, but the scope that the present invention protects is not limited to this.
A kind of online raising flexible parent metal film quality device, it comprises transmission module 1 and mirror module 2 its structure, and transmission module 1 comprises spectrum conversion device separately with mirror module 2, and spectral detector is positioned between winding film plating equipment plated film drum 28 and rolling chamber 26.
The interior transmitting illuminant of transmitter module 9 is halogen tungsten lamp, and utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 4th receiver module 8 without base material; Its excess-three road is incident to substrate surface via projector, receptor: first transmission probe the 12, second transmission probe the 13, the 3rd transmission probe 14 is sent spectral signal into respectively the first receiver module 5, the second receiver module 6, the 3rd receiver module 7.
Projector and receptor: first transmission probe the 12, second transmission probe the 13, the 3rd transmission probe 14 is vertical and base material 10 surfaces all, and the transmission module is placed in the vacuum system outside, and utilizing emitted light and transmitted light transmit through optical fiber 11.
The interior transmitting illuminant of the second transmitter module 15 is halogen tungsten lamp, and utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 8th receiver module 19 without base material; Its excess-three road is incident to substrate surface via projector, receptor: the first reflection probe 20, the second reflection probe 21, the 3rd reflection probe 22 are sent spectral signal into respectively the 5th receiver module 16, the 6th receiver module 17, the 7th receiver module 18.
Each projector and receptor: the first reflection probe 20, the second reflection probe 21, the 3rd reflection probe 22 are positioned at same position, and all perpendicular to base material 10 surfaces, mirror module is placed in the vacuum system outside, and utilizing emitted light and reflected light signal transmit through optical fiber 11.
In the receiver module of transmission module 1 and mirror module 2, place the photodiode array spectrograph.
The spectrum probe is placed in three positions of base material, and three position transmitted spectrums and reflection spectrum are all detectable.
As shown in Figure 2, base material is put into reel system via unreeling chamber 23, through different plated film chambers 27, be coated with different retes respectively, transmitted spectrum detector and reflection spectrum detector evenly are positioned over the substrate surface top, survey respectively the different positions place curve of spectrum, shown by display unit 4 by data processing equipment 3, if base material film layer thickness etc. change, reflectivity curve and transmission curve are corresponding to change, in time by being adjusted at the Wiring technology parameter to guarantee product non-defective unit number.
The above embodiment has only expressed a kind of embodiment of this patent, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to this patent scope.It should be pointed out that for the person of ordinary skill of the art, under the prerequisite that does not break away from this patent design, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of this patent should be as the criterion with claims.
Claims (8)
1. one kind is improved flexible parent metal film quality device online, it is characterized in that: it comprises transmission module (1) and mirror module (2) its structure, transmission module (1) comprises spectrum conversion device separately with mirror module (2), and spectral detector is positioned between winding film plating equipment plated film drum (28) and rolling chamber (26).
2. online raising flexible parent metal film quality device as claimed in claim 1, it is characterized in that: transmission module (1) comprises first transmitter module (9) and four receiver modules: the first receiver module (5), the second receiver module (6), the 3rd receiver module (7), the 4th receiver module (8).
3. online raising flexible parent metal film quality device as claimed in claim 2, it is characterized in that: the interior transmitting illuminant of transmitter module (9) is halogen tungsten lamp, utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 4th receiver module (8) without base material; Its excess-three road is incident to substrate surface via projector, receptor: the first transmission probe (12), the second transmission probe (13), the 3rd transmission probe (14) are sent spectral signal into respectively the first receiver module (5), the second receiver module (6), the 3rd receiver module (7).
4. online raising flexible parent metal film quality device as claimed in claim 3, it is characterized in that: projector and receptor: the first transmission probe (12), the second transmission probe (13), the 3rd transmission probe (14) be vertical and base material (10) surface all, the transmission module is placed in the vacuum system outside, and utilizing emitted light and transmitted light transmit through optical fiber (11).
5. online raising flexible parent metal film quality device as claimed in claim 1, it is characterized in that: mirror module (2) comprises second transmitter module (15) and four receiver modules: the 5th receiver module (16), the 6th receiver module (17), the 7th receiver module (18), the 8th receiver module (19).
6. online raising flexible parent metal film quality device as claimed in claim 5, it is characterized in that: the interior transmitting illuminant of the second transmitter module (15) is halogen tungsten lamp, utilizing emitted light is divided into four Lu， mono-tunnels as the reference signal, directly gets back to the 8th receiver module (19) without base material; Its excess-three road is incident to substrate surface via projector, receptor: the first reflection probe (20), the second reflection probe (21), the 3rd reflection probe (22) are sent spectral signal into respectively the 5th receiver module (16), the 6th receiver module (17), the 7th receiver module (18).
7. online raising flexible parent metal film quality device as claimed in claim 6, it is characterized in that: each projector and receptor: the first reflection probe (20), the second reflection probe (21), the 3rd reflection probe (22) are positioned at same position, all perpendicular to base material (10) surface, mirror module is placed in the vacuum system outside, and utilizing emitted light and reflected light signal transmit through optical fiber (11).
8. online raising flexible parent metal film quality device as claimed in claim 1, is characterized in that: in the receiver module of transmission module (1) and mirror module (2), place the photodiode array spectrograph.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103512242A CN103409727A (en) | 2013-08-13 | 2013-08-13 | Device for improving flexible substrate material film layer quality online |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103512242A CN103409727A (en) | 2013-08-13 | 2013-08-13 | Device for improving flexible substrate material film layer quality online |
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| CN103409727A true CN103409727A (en) | 2013-11-27 |
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| CN2013103512242A Pending CN103409727A (en) | 2013-08-13 | 2013-08-13 | Device for improving flexible substrate material film layer quality online |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107367516A (en) * | 2017-07-19 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | One kind coating detection prosthetic device and its method |
| CN109913846A (en) * | 2017-12-13 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | Multi-purpose metal film vacuum coating production line |
| CN110629191A (en) * | 2019-11-01 | 2019-12-31 | 北京大学 | A kind of graphene film roll-to-roll production device and method |
| CN116732489A (en) * | 2023-04-20 | 2023-09-12 | 上海传芯半导体有限公司 | Monitoring system, thin film deposition system and method for manufacturing thin film product |
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| US20030143318A1 (en) * | 2002-01-31 | 2003-07-31 | Karsten Schutte | Apparatus and method for thermal spraying |
| CN202196010U (en) * | 2011-09-06 | 2012-04-18 | 南昌欧菲光科技有限公司 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
| CN202403671U (en) * | 2011-12-06 | 2012-08-29 | 成都中科唯实仪器有限责任公司 | Full-automatic optical thickness measurer |
| CN103162832A (en) * | 2011-12-19 | 2013-06-19 | 中国科学院微电子研究所 | Normal incidence broadband polarization spectrometer and optical measurement system including reference beam |
| CN203451611U (en) * | 2013-08-13 | 2014-02-26 | 南昌欧菲光科技有限公司 | Device for improving quality of flexible substrate membrane layer in online manner |
-
2013
- 2013-08-13 CN CN2013103512242A patent/CN103409727A/en active Pending
Patent Citations (5)
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| US20030143318A1 (en) * | 2002-01-31 | 2003-07-31 | Karsten Schutte | Apparatus and method for thermal spraying |
| CN202196010U (en) * | 2011-09-06 | 2012-04-18 | 南昌欧菲光科技有限公司 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
| CN202403671U (en) * | 2011-12-06 | 2012-08-29 | 成都中科唯实仪器有限责任公司 | Full-automatic optical thickness measurer |
| CN103162832A (en) * | 2011-12-19 | 2013-06-19 | 中国科学院微电子研究所 | Normal incidence broadband polarization spectrometer and optical measurement system including reference beam |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107367516A (en) * | 2017-07-19 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | One kind coating detection prosthetic device and its method |
| CN107367516B (en) * | 2017-07-19 | 2020-08-04 | 武汉华星光电半导体显示技术有限公司 | Coating detection and repair device and method thereof |
| CN109913846A (en) * | 2017-12-13 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | Multi-purpose metal film vacuum coating production line |
| CN110629191A (en) * | 2019-11-01 | 2019-12-31 | 北京大学 | A kind of graphene film roll-to-roll production device and method |
| CN116732489A (en) * | 2023-04-20 | 2023-09-12 | 上海传芯半导体有限公司 | Monitoring system, thin film deposition system and method for manufacturing thin film product |
| CN116732489B (en) * | 2023-04-20 | 2024-05-03 | 上海传芯半导体有限公司 | Monitoring system, thin film deposition system and method for manufacturing thin film product |
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Application publication date: 20131127 |
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