CN104233473B - Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height - Google Patents

Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height Download PDF

Info

Publication number
CN104233473B
CN104233473B CN201410517436.8A CN201410517436A CN104233473B CN 104233473 B CN104233473 B CN 104233473B CN 201410517436 A CN201410517436 A CN 201410517436A CN 104233473 B CN104233473 B CN 104233473B
Authority
CN
China
Prior art keywords
height
crystal bar
seed crystal
quartzy
ingot furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410517436.8A
Other languages
Chinese (zh)
Other versions
CN104233473A (en
Inventor
李书森
冯媛
兰洵
刘兴翀
林洪峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianwei New Energy Holdings Co Ltd
Original Assignee
Tianwei New Energy Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianwei New Energy Holdings Co Ltd filed Critical Tianwei New Energy Holdings Co Ltd
Priority to CN201410517436.8A priority Critical patent/CN104233473B/en
Publication of CN104233473A publication Critical patent/CN104233473A/en
Application granted granted Critical
Publication of CN104233473B publication Critical patent/CN104233473B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The present invention relates to the measurement apparatus for general ingot furnace seed crystal fusing height and measuring method, particularly the cooling argon buckle on ingot casting furnace roof arranges the measurement apparatus of a good airproof performance, long for the quartz of customized lengths crystal bar is fixed on this measurement apparatus, during measuring seed crystal height, manually regulating the height of quartzy long crystal bar, the height declined by quartzy long crystal bar calculates the fusing height of seed crystal.Instant invention overcomes prior art and on the ingot furnace be configured without exploration hole, the technical problem of seed crystal fusing height cannot be measured by the efficient ingot casting technology of popularization and application;By customize quartzy long crystal bar length avoid quartzy long crystal bar too high cause potential safety hazard, the waste of silica starting material.

Description

Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height
Technical field
The present invention relates to photovoltaic art ingot casting furnace superintendent crystalline substance measurement apparatus field, in particular it relates to melt measurement apparatus and the measuring method of height for general ingot furnace seed crystal.
Background technology
Polysilicon is current topmost photovoltaic material, and polysilicon mostly takes directional solidification processes to prepare, cast polysilicon compared with pulling of crystals and there is the advantages such as easy and simple to handle, single feeds intake greatly, production cost is low, but there is substantial amounts of crystal boundary and defect in casting process in polysilicon, crystal boundary and defect can introduce deep energy level in silicon forbidden band, it is easily formed the complex centre of photogenerated minority carriers, and then reduces the photoelectric transformation efficiency of polycrystalline silicon battery plate.Therefore, how to reduce casting polysilicon grain boundary quantity and defect concentration is to improve the research focus of polycrystal silicon cell photoelectric transformation efficiency at present.
At present, the method that casting high-quality polysilicon typically uses seed crystal seeding in the industry, one is to use monocrystalline silico briquette can reduce number of grain boundaries and defect concentration as seed crystal, monocrystal seeding, is effectively improved the photoelectric transformation efficiency of silicon chip quality and polycrystal silicon cell;But monocrystalline adds the production cost of silicon chip as seed crystal, further battery needs to use alkali making herbs into wool, increases production difficulty;Another kind is to use the silicon chip fragment in production process as seed crystal, does not increases any production cost, just can reach the purpose of cost efficiency compared with conventional foundry ingot.
Either use monocrystalline or fragment as seed crystal, it is directed to the requirement to seed crystal fusing extent control, the fusing of the most guaranteed seed portion just can grow high-quality silicon ingot, measure seed crystal fusing fusing degree and become the principal element determining Ingot quality, it is to measure with the open long crystal bar of quartz when measuring seed crystal fusing height, use quartz high-purity, high temperature resistant, even thickness long crystal bar test in molten silicon, measure the height remaining quartzy long crystal bar outside furnace chamber, indirectly calculate the fusing height of polysilicon.nullCurrent ingot furnace producer in the industry is the most,Such as U.S. GT、Germany PVA、Domestic Zhejiang crystalline substance is contained、Capital fortune is logical etc.,GT、The ingot furnaces such as brilliant victory are built-in with the exploration hole of quartzy long crystal bar,And PVA polycrystalline silicon ingot or purifying furnace needs custom probe aperture apparatus,And difference ingot furnace furnace chamber height differs,Existing is to measure on the ingot furnace be configured with exploration hole to the measurement of seed crystal fusing height in ingot furnace,Quartzy long crystal bar is inserted and secured in corresponding exploration hole,The fusing height of seed crystal in ingot furnace is judged by the falling head calculating quartzy long crystal bar,The ingot furnace be configured without exploration hole then cannot be carried out the measurement of seed crystal fusing height,Existing measuring method cannot promote efficient ingot casting technology on this kind of ingot furnace,Therefore,Existing measuring method is not suitable for seed crystal fusing measurement highly in general ingot furnace.
Summary of the invention
The technical problem to be solved is to provide the measurement apparatus for general ingot furnace seed crystal fusing height and measuring method, overcomes existing measuring method cannot measure the technical problem of seed crystal fusing height by the efficient ingot casting technology of popularization and application on the ingot furnace be configured without exploration hole.
The present invention solves the problems referred to above and be the technical scheme is that the measurement apparatus for general ingot furnace seed crystal fusing height, including exploration hole interface pedestal, fixing device, fixing hole is offered in exploration hole interface pedestal, it is set to helicitic texture on the outer cylinder of fixing device one end, the other end is connected with exploration hole interface pedestal, it is provided with through hole inside exploration hole interface pedestal and fixing device, fixing device is additionally provided with the nut coordinated with sealing ring, metal gasket, pass through nut, quartzy long crystal bar is fixed in through hole by the cooperation of metal gasket and helicitic texture, described exploration hole interface pedestal is arranged on ingot furnace top open part.Quartzy long crystal bar is inserted in through hole, sealing ring is placed under metal gasket, nut sleeve is located at helicitic texture again and slowly tightens, make metal gasket compress sealing ring and fix quartzy long crystal bar, realize the sealing of quartzy long crystal bar and measurement apparatus, ingot furnace top open part is the cooling argon gas export of ingot furnace, the circular flange of measurement apparatus screw or exploration hole interface pedestal is fixed on ingot furnace top open part, realize the sealing between measurement apparatus and ingot furnace, so, the measurement process at whole seed crystal fusing height is to seal in intact environment at one;During measurement, unscrew nut, adjust the height of quartzy long crystal bar, when manually detecting and contact seed crystal, measure and record the height of quartzy long crystal bar, the therewith fusing of seed crystal, gradually manually adjust the height of quartzy long crystal bar, until whole seed crystal fusion process terminates, measuring and record the height of quartzy long crystal bar, the difference in height of quartzy long crystal bar is the height of seed crystal fusing;Afterwards, determining that quartzy long crystal bar puts in order the position at place, it is ensured that will not deform upon during ingot casting bottom quartzy long crystal bar, quartzy long crystal bar is shielded by the cooling argon in furnace chamber;By arranging a measurement apparatus at the cooling argon gas export of ingot furnace top of chamber, even if making efficient ingot casting technology to be applied to measure seed crystal fusing height at the ingot furnace being not provided with exploration hole, instant invention overcomes prior art and on the ingot furnace be configured without exploration hole, the technical problem of seed crystal fusing height cannot be measured by the efficient ingot casting technology of popularization and application.
Further, the a length of of the long crystal bar of quartz customizes height according to specific table, and the furnace chamber height that height is described ingot furnace of the long crystal bar of customized quartz, exploration hole interface height, hand-held height sum deduct seed crystal height, silica crucible height, graphite bottom plate heights sum.The actual height of the furnace chamber of ingot furnace when furnace chamber height is actual application, exploration hole interface height is the height of the measurement apparatus of actual measurement, hand-held height is the height being exposed at the long crystal bar of the quartz outside measurement apparatus, seed crystal height is the elemental height of seed crystal, and silica crucible height, graphite bottom plate heights are respectively silica crucible height, the graphite bottom plate heights coordinated with actually used ingot furnace;nullThe quartz long crystal bar standard size measuring the most in the industry seed crystal fusing height is diameter about 9mm,Length about 1825mm,And different brands ingot furnace furnace chamber height is different,1825mm length is long for some ingot furnace,The long crystal bar of quartz puts in order the outer excessive height of rear furnace chamber,Certain potential safety hazard is there is in this to ingot casting,And bring unnecessary difficulty to elevation carrection,The most quartzy long crystal bar is long wastes material,Add production cost,Different ingot furnaces differ primarily in that furnace roof is to the DS i.e. furnace roof of radiating block height、Exploration hole height is different with graphite bottom plate heights,The long boule length of industry universal is improper to some ingot furnaces,It is proposed that the long crystal bar for different ingot furnace customization different lengths is necessary,Therefore,The present invention is first according to ingot furnace used in actual seed crystal fusion process、Exploration hole interface arrangement、Silica crucible、The height of graphite base plate and hand-held height calculate the height of the long crystal bar of required quartz,Additionally,The long crystal bar ride out of quartz is less than 1000mm,It is easy to quartzy long crystal bar and puts in order the measurement of position,Customize the long crystal bar of quartz of corresponding height again,The too high potential safety hazard caused of quartzy long crystal bar is avoided by customizing the height of quartzy long crystal bar、And the waste of silica starting material.
Further, described hand-held height is 150~400mm.Quartz long crystal bar reserve certain hand-held height, it is simple to manual setting quartz long crystal bar height, suitable hand-held height is convenient to operate so that operate during measurement safer, measure more accurate.
Further, exploration hole interface pedestal bottom offer with valve rubber with the use of groove.The groove of exploration hole interface pedestal bottom and valve rubber with the use of, increase the cushion effect of quartzy long crystal bar and the through hole contact position of gaging hole interface pedestal, it is to avoid quartzy long crystal bar is impaired during manually adjusting.
Further, appropriate vacuum grease smeared by valve rubber.Make between valve rubber and groove fixing more stable, better tightness, prevent gas leakage.
Further, appropriate vacuum grease smeared by sealing ring.Vacuum grease smeared by sealing ring can strengthen the sealing of quartzy long crystal bar and exploration hole interface arrangement further, prevents gas leakage.
For the measuring method of the measurement apparatus of general ingot furnace seed crystal fusing height, comprise the following steps:
First, long for the quartz of customized lengths crystal bar is inserted in through hole, lentamente quartzy long crystal bar is moved down, until quartzy long crystal bar touches the seed crystal in ingot furnace, sealing ring is placed under metal gasket, nut sleeve it is located at helicitic texture again and slowly tightens, making metal gasket compress sealing ring and fix quartzy long crystal bar, record the elemental height of quartzy long crystal bar;
Secondly, ingot furnace is heated, makes the seed crystal melted by heat in stove, during measuring, unscrew nut and manually regulate the height of quartzy long crystal bar, make quartzy long crystal bar contact with seed crystal all the time during measuring, and record the falling head of quartzy long crystal bar;
Then, being calculated the fusing height of seed crystal by the height of the decline of quartzy long crystal bar, when the height of seed crystal fusing meets the requirements, measurement process terminates, and stops heating, records the height of quartzy long crystal bar;
Finally, being carried by quartzy long crystal bar and cool down quartzy long crystal bar to argon shield, quartzy long crystal bar is fixed on argon shield district by fastening nut.
To sum up, the invention has the beneficial effects as follows:
1, the present invention is by arranging a measurement apparatus at the cooling argon gas export of ingot furnace top of chamber, even if making to apply efficient ingot casting technology to measure seed crystal fusing height on the ingot furnace be not provided with exploration hole, overcoming prior art and on the ingot furnace be configured without exploration hole, the technical problem of seed crystal fusing height cannot be measured by the efficient ingot casting technology of popularization and application.
2, the present invention avoids the too high potential safety hazard caused of quartzy long crystal bar by customizing the height of quartzy long crystal bar.
3, the present invention avoids the waste of the too high silica starting material caused of quartzy long crystal bar by customizing the height of quartzy long crystal bar.
4, the present invention is by smearing vacuum grease to sealing ring, improves the sealing of quartzy long crystal bar and exploration hole interface arrangement.
Accompanying drawing explanation
Fig. 1 is nut;
Fig. 2 is metal gasket;
Fig. 3 is measurement apparatus schematic diagram;
Fig. 4 is measurement apparatus upward view;
Fig. 5 is metal closures.
Labelling and corresponding parts title in accompanying drawing:
1 nut;2 metal gaskets;3 fixing devices;4 exploration hole interface pedestal;5 fixing holes;6 grooves;7 through holes;8 metal closures, 31 helicitic textures.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is made detailed description further, but embodiments of the present invention are not limited to this;Those skilled in the art it may also be made that many deformation on basis of the present invention and improve, the change of material, the change of size dimension, and the configuration aspects done on the basis of the present invention is changed accordingly and is regarded as protection scope of the present invention.
Embodiment:
nullIf Fig. 1 is to shown in 5,The present invention relates to the measurement apparatus for general ingot furnace seed crystal fusing height,Including exploration hole interface pedestal 4、Fixing device 3,Fixing hole 5 is offered in exploration hole interface pedestal 4,It is set to helicitic texture 31 on the outer cylinder of fixing device 3 one end,The other end is connected with exploration hole interface pedestal 4,Exploration hole interface pedestal 4 is internal with fixing device 3 is provided with through hole 7,Fixing device 3 is additionally provided with the nut 1 coordinated with sealing ring、Metal gasket 2,By nut 1、Quartzy long crystal bar is fixed in through hole 7 by the cooperation of metal gasket 2 and helicitic texture 31,Appropriate vacuum grease smeared by sealing ring,Exploration hole interface pedestal 4 is arranged on ingot furnace top open part,The long crystal bar of quartz is the quartz pushrod according to specific table customization height,The furnace chamber height that height is ingot furnace of the customized long crystal bar of quartz、Exploration hole interface height、Hand-held height sum deducts seed crystal height、Silica crucible height、Graphite bottom plate heights sum,Hand-held height is 150-400mm,Exploration hole interface pedestal 4 bottom offer with valve rubber with the use of groove 6,Appropriate vacuum grease smeared by valve rubber,The when of fusing need not being detected for a long time under casting ingot process,Quartzy long crystal bar can be replaced with metal closures 8 to be used for sealing.
As shown in Figures 1 to 3, the invention still further relates to melt for general ingot furnace seed crystal the measuring method of the measurement apparatus of height, comprise the following steps:
First, long for the quartz of customized lengths crystal bar is inserted in through hole 7, lentamente quartzy long crystal bar is moved down, until quartzy long crystal bar touches the seed crystal in ingot furnace, metal gasket places sealing ring 2 times, nut 1 it is set in helicitic texture 31 again and slowly tightens, making metal gasket 2 compress sealing ring and fix quartzy long crystal bar, record the elemental height of quartzy long crystal bar;
Secondly, ingot furnace is heated, makes the seed crystal melted by heat in stove, during measuring, unscrew nut 1 and manually regulate the height of quartzy long crystal bar, make quartzy long crystal bar contact with seed crystal all the time during measuring, and record the falling head of quartzy long crystal bar;
Then, being calculated the fusing height of seed crystal by the height of the decline of quartzy long crystal bar, when the height of seed crystal fusing meets the requirements, measurement process terminates, and stops heating, records the height of quartzy long crystal bar;
Finally, being carried by quartzy long crystal bar and cool down quartzy long crystal bar to argon shield, quartzy long crystal bar is fixed on argon shield district by fastening nut 1.
The present invention measuring method of seed crystal fusing height is extended to can not PVA ingot furnace measured directly or do not have on the ingot furnace of device exploration hole, the present invention is that this type of ingot furnace is provided with general measurement apparatus.
As it has been described above, the present invention can preferably be realized.

Claims (5)

1. for the measurement apparatus of general ingot furnace seed crystal fusing height, including exploration hole interface pedestal (4), fixing device (3), fixing hole (5) is offered in exploration hole interface pedestal (4), helicitic texture (31) it is set on the outer cylinder of fixing device (3) one end, the other end is connected with exploration hole interface pedestal (4), exploration hole interface pedestal (4) is internal with fixing device (3) is provided with through hole (7), it is characterized in that, described fixing device (3) is additionally provided with the nut (1) coordinated with sealing ring, metal gasket (2), by nut (1), quartzy long crystal bar is fixed in through hole (7) by the cooperation of metal gasket (2) and helicitic texture (31), described exploration hole interface pedestal (4) is arranged on ingot furnace top open part;The a length of of the long crystal bar of described quartz customizes height according to specific table, and the furnace chamber height that height is described ingot furnace of the long crystal bar of customized quartz, exploration hole interface height, hand-held height sum deduct seed crystal height, silica crucible height, graphite bottom plate heights sum;Exploration hole interface pedestal (4) bottom offer with valve rubber with the use of groove (6).
Measurement apparatus for general ingot furnace seed crystal fusing height the most according to claim 1, it is characterised in that described hand-held height is 150~400mm.
Measurement apparatus for general ingot furnace seed crystal fusing height the most according to claim 1, it is characterised in that appropriate vacuum grease smeared by described valve rubber.
Measurement apparatus for general ingot furnace seed crystal fusing height the most according to claim 1, it is characterised in that appropriate vacuum grease smeared by described sealing ring.
5. use the measuring method of the arbitrary described measurement apparatus for general ingot furnace seed crystal fusing height of claim 1-4, it is characterised in that comprise the following steps:
First, long for the quartz of customized lengths crystal bar is inserted in through hole (7), lentamente quartzy long crystal bar is moved down, until quartzy long crystal bar touches the seed crystal in ingot furnace, sealing ring is placed under metal gasket (2), again nut (1) it is set in helicitic texture (31) and slowly tightens, making metal gasket (2) compress sealing ring and fix quartzy long crystal bar, record the elemental height of quartzy long crystal bar;
Secondly, ingot furnace is heated, makes the seed crystal melted by heat in stove, during measuring, unscrew nut (1) and manually regulate the height of quartzy long crystal bar, make quartzy long crystal bar contact with seed crystal all the time during measuring, and record the falling head of quartzy long crystal bar;
Then, being calculated the fusing height of seed crystal by the height of the decline of quartzy long crystal bar, when the height of seed crystal fusing meets the requirements, measurement process terminates, and stops heating, records the height of quartzy long crystal bar;
Finally, being carried by quartzy long crystal bar and cool down quartzy long crystal bar to argon shield, quartzy long crystal bar is fixed on argon shield district by fastening nut (1).
CN201410517436.8A 2014-09-30 2014-09-30 Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height Expired - Fee Related CN104233473B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410517436.8A CN104233473B (en) 2014-09-30 2014-09-30 Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410517436.8A CN104233473B (en) 2014-09-30 2014-09-30 Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height

Publications (2)

Publication Number Publication Date
CN104233473A CN104233473A (en) 2014-12-24
CN104233473B true CN104233473B (en) 2016-08-24

Family

ID=52222339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410517436.8A Expired - Fee Related CN104233473B (en) 2014-09-30 2014-09-30 Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height

Country Status (1)

Country Link
CN (1) CN104233473B (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202099411U (en) * 2011-04-06 2012-01-04 镇江荣德新能源科技有限公司 Automatic measuring device for crystal growth speed of multi-crystal furnace
CN102692199A (en) * 2012-06-11 2012-09-26 苏州禹石自动化工程技术有限公司 Unfused silicon ingot height measuring system
CN202482491U (en) * 2012-02-03 2012-10-10 昆山中辰矽晶有限公司 Height analysis apparatus
CN202755099U (en) * 2012-09-06 2013-02-27 镇江荣德新能源科技有限公司 Solid liquid interface determination device for silicon ingot furnace
CN203144556U (en) * 2013-02-21 2013-08-21 无锡开日能源科技股份有限公司 Device for measuring height of crystal
CN103409797A (en) * 2013-08-27 2013-11-27 天威新能源控股有限公司 Device for measuring long crystal bar of ingot furnace
CN203382851U (en) * 2013-08-01 2014-01-08 安徽大晟新能源设备科技有限公司 Testing device for melting thickness of seed crystals of pseudo-single crystal ingot furnace
CN203384363U (en) * 2013-07-25 2014-01-08 天津市亚安科技股份有限公司 Nut sealing structure
CN103668449A (en) * 2012-09-06 2014-03-26 镇江荣德新能源科技有限公司 Solid-liquid interface determination device for silicon ingot furnace
CN203728966U (en) * 2014-03-07 2014-07-23 江苏华盛天龙光电设备股份有限公司 Crystal measurement device of polycrystal furnace
TW201432102A (en) * 2013-02-08 2014-08-16 Sino American Silicon Prod Inc Ingot measurement rod
CN204058658U (en) * 2014-09-30 2014-12-31 天威新能源控股有限公司 A kind of measuring apparatus for general ingot furnace seed crystal fusing height

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163188A (en) * 1985-01-14 1986-07-23 Komatsu Denshi Kinzoku Kk Process for doping impurity in pulling method of silicon single crystal

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202099411U (en) * 2011-04-06 2012-01-04 镇江荣德新能源科技有限公司 Automatic measuring device for crystal growth speed of multi-crystal furnace
CN202482491U (en) * 2012-02-03 2012-10-10 昆山中辰矽晶有限公司 Height analysis apparatus
CN102692199A (en) * 2012-06-11 2012-09-26 苏州禹石自动化工程技术有限公司 Unfused silicon ingot height measuring system
CN202755099U (en) * 2012-09-06 2013-02-27 镇江荣德新能源科技有限公司 Solid liquid interface determination device for silicon ingot furnace
CN103668449A (en) * 2012-09-06 2014-03-26 镇江荣德新能源科技有限公司 Solid-liquid interface determination device for silicon ingot furnace
TW201432102A (en) * 2013-02-08 2014-08-16 Sino American Silicon Prod Inc Ingot measurement rod
CN203144556U (en) * 2013-02-21 2013-08-21 无锡开日能源科技股份有限公司 Device for measuring height of crystal
CN203384363U (en) * 2013-07-25 2014-01-08 天津市亚安科技股份有限公司 Nut sealing structure
CN203382851U (en) * 2013-08-01 2014-01-08 安徽大晟新能源设备科技有限公司 Testing device for melting thickness of seed crystals of pseudo-single crystal ingot furnace
CN103409797A (en) * 2013-08-27 2013-11-27 天威新能源控股有限公司 Device for measuring long crystal bar of ingot furnace
CN203728966U (en) * 2014-03-07 2014-07-23 江苏华盛天龙光电设备股份有限公司 Crystal measurement device of polycrystal furnace
CN204058658U (en) * 2014-09-30 2014-12-31 天威新能源控股有限公司 A kind of measuring apparatus for general ingot furnace seed crystal fusing height

Also Published As

Publication number Publication date
CN104233473A (en) 2014-12-24

Similar Documents

Publication Publication Date Title
CN101148777B (en) Method and device for growing gallium-mixing silicon monocrystal by czochralski method
CN103103604B (en) Large size C is to sapphire crystal manufacture method
TWI522500B (en) Single crystal and its manufacturing method
CN104499045B (en) Kyropoulos-method sapphire crystal growth furnace
CN202139324U (en) Graphite thermal field system of upward-exhausting thermal field type czochralski silicon mono-crystal furnace
CN101311332B (en) Crystallization zone temperature gradient regulator and crucible drop method single crystal growth device
CN205711031U (en) A kind of single crystal growing furnace
CN104451858A (en) Multifunctional crystal growth system for high-pressure in-situ synthesis
CN101812729A (en) Polycrystalline silicon ingot with low carbon content and preparation method
CN201506845U (en) Single crystal furnace heat shield
CN201058893Y (en) Device for growing gallium-doped silicon single crystal by Czochralski method
CN208976814U (en) Aluminium alloy smelting, heat preservation, casting all-in-one oven
CN102181925A (en) Growth process and device for growing IC-level silicon single crystal with low Fe content by czochralski method
CN102703965A (en) Method for reducing crystal defects of ingot-casting silicon single crystal
CN104233473B (en) Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height
CN206052206U (en) A kind of sapphire single-crystal furnace
CN204058658U (en) A kind of measuring apparatus for general ingot furnace seed crystal fusing height
CN208419812U (en) Length-measuring appliance is used in a kind of production of silicon single crystal rod
CN203923449U (en) A kind of low-energy consumption single-crystal stove
CN101319351B (en) Single crystal furnace
CN205915428U (en) Circular silica wool cutting means
CN203639604U (en) Flexible shaft lifting type single crystal furnace
CN207877928U (en) A kind of crystal height measuring device of polycrystalline silicon ingot or purifying furnace
CN219972551U (en) Guide cylinder for improving crystal quality
CN114481292A (en) Czochralski single crystal thermal field and repeated casting process for thermal field

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160824

Termination date: 20170930