CN1052502C - 抛光和刨平表面用的组合物和方法 - Google Patents

抛光和刨平表面用的组合物和方法 Download PDF

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Publication number
CN1052502C
CN1052502C CN93102414A CN93102414A CN1052502C CN 1052502 C CN1052502 C CN 1052502C CN 93102414 A CN93102414 A CN 93102414A CN 93102414 A CN93102414 A CN 93102414A CN 1052502 C CN1052502 C CN 1052502C
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CN
China
Prior art keywords
aqeous suspension
polishing
composition
workpiece
granularity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN93102414A
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English (en)
Chinese (zh)
Other versions
CN1077974A (zh
Inventor
G·布兰卡罗尼
E·W·杰森
J·V·H·罗伯特思
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Rodel Inc
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25364263&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1052502(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rodel Inc filed Critical Rodel Inc
Publication of CN1077974A publication Critical patent/CN1077974A/zh
Application granted granted Critical
Publication of CN1052502C publication Critical patent/CN1052502C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN93102414A 1992-04-27 1993-03-05 抛光和刨平表面用的组合物和方法 Expired - Fee Related CN1052502C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/874,654 US5264010A (en) 1992-04-27 1992-04-27 Compositions and methods for polishing and planarizing surfaces
US07/874,654 1992-04-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN99101890A Division CN1243857A (zh) 1992-04-27 1999-02-12 抛光和刨平表面用的组合物和方法

Publications (2)

Publication Number Publication Date
CN1077974A CN1077974A (zh) 1993-11-03
CN1052502C true CN1052502C (zh) 2000-05-17

Family

ID=25364263

Family Applications (2)

Application Number Title Priority Date Filing Date
CN93102414A Expired - Fee Related CN1052502C (zh) 1992-04-27 1993-03-05 抛光和刨平表面用的组合物和方法
CN99101890A Pending CN1243857A (zh) 1992-04-27 1999-02-12 抛光和刨平表面用的组合物和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN99101890A Pending CN1243857A (zh) 1992-04-27 1999-02-12 抛光和刨平表面用的组合物和方法

Country Status (12)

Country Link
US (1) US5264010A (de)
EP (1) EP0690772B1 (de)
JP (1) JP2592401B2 (de)
KR (1) KR950701264A (de)
CN (2) CN1052502C (de)
AT (1) ATE166018T1 (de)
AU (1) AU3432693A (de)
DE (1) DE69318577T2 (de)
MY (1) MY108954A (de)
SG (1) SG43334A1 (de)
TW (1) TW226403B (de)
WO (1) WO1993022103A1 (de)

Families Citing this family (123)

* Cited by examiner, † Cited by third party
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CN1243857A (zh) 2000-02-09
CN1077974A (zh) 1993-11-03
DE69318577D1 (de) 1998-06-18
MY108954A (en) 1996-11-30
EP0690772A4 (de) 1995-06-01
EP0690772A1 (de) 1996-01-10
EP0690772B1 (de) 1998-05-13
US5264010A (en) 1993-11-23
SG43334A1 (en) 1997-10-17
ATE166018T1 (de) 1998-05-15
JP2592401B2 (ja) 1997-03-19
DE69318577T2 (de) 1998-11-12
JPH07502778A (ja) 1995-03-23
WO1993022103A1 (en) 1993-11-11
TW226403B (de) 1994-07-11
KR950701264A (ko) 1995-03-23
AU3432693A (en) 1993-11-29

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