CN107123700A - A kind of hollow polyimide fiber solar micro battery and its manufacture method - Google Patents
A kind of hollow polyimide fiber solar micro battery and its manufacture method Download PDFInfo
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- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
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- H—ELECTRICITY
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- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
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- H10P14/3411—Silicon, silicon germanium or germanium
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- Y02E10/00—Energy generation through renewable energy sources
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
技术领域technical field
本发明涉及一种中空聚酰亚胺纤维太阳能微电池及其制造方法。The invention relates to a hollow polyimide fiber solar micro battery and a manufacturing method thereof.
背景技术Background technique
太阳能以其环保、取之不尽等优点受到了人们青睐;随着技术不断创新,太阳能已在不少领域得到应用。然而,现有太阳能电池体积大、不可挠等特点制约其在一些行业领域的发展。Solar energy is favored by people for its advantages of environmental protection and inexhaustibility; with continuous technological innovation, solar energy has been applied in many fields. However, the large size and inflexibility of existing solar cells restrict their development in some industries.
发明内容Contents of the invention
本发明的目的在于提供一种可挠性强、可纺性强、光电转移效果高的中空聚酰亚胺纤维太阳能微电池及其制造方法。The object of the present invention is to provide a hollow polyimide fiber solar micro-battery with strong flexibility, strong spinnability and high photoelectric transfer effect and its manufacturing method.
本发明目的的实现,采用六室连续VHF-PECVD即六室连续超高频率等离子体辅助化学气相沉积技术,在中空聚酰亚胺纤维表面生成双层PIN膜层结构,提高其光电转移效果。The object of the present invention is achieved by using six-chamber continuous VHF-PECVD, that is, six-chamber continuous ultra-high frequency plasma-assisted chemical vapor deposition technology, to form a double-layer PIN film structure on the surface of the hollow polyimide fiber to improve its photoelectric transfer effect.
本发明,按以下工艺步骤进行:中空聚酰亚胺纤维清洗→中空聚酰亚胺纤维表面镀铝膜层→在镀铝膜层上制备第一PIN膜层→在第一PIN膜层上制备第二PIN膜层→在第二PIN膜层上制备TCO或ITO透明导电膜层;The present invention is carried out according to the following process steps: cleaning of hollow polyimide fiber → aluminized film layer on the surface of hollow polyimide fiber → preparing the first PIN film layer on the aluminized film layer → preparing on the first PIN film layer The second PIN film layer → prepare a TCO or ITO transparent conductive film layer on the second PIN film layer;
所述中空聚酰亚胺纤维清洗利用超声波清洗并干燥处理;The hollow polyimide fiber is cleaned by ultrasonic cleaning and dried;
所述中空聚酰亚胺纤维表面镀铝膜层采用测控溅射技术,在中空聚酰亚胺纤维外表面镀一层铝膜层而作为负电极,铝膜层厚度为300~400nm,镀膜温度为200~300℃;The aluminum coating layer on the surface of the hollow polyimide fiber adopts measurement and control sputtering technology, and a layer of aluminum film layer is coated on the outer surface of the hollow polyimide fiber as a negative electrode. The thickness of the aluminum film layer is 300~400nm, and the coating temperature 200~300℃;
所述第一PIN膜层的制备是采用六室连续VHF~PECVD镀膜设备,先在镀铝膜层上制备N型非晶硅薄膜,电源激发频率为13.56MHz,薄膜厚度为50~100nm;再制备I型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为300~400nm;然后,制备P型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为50~100nm,完成第一PIN膜层的制备;The preparation of the first PIN film layer is to adopt six-chamber continuous VHF~PECVD film coating equipment, first prepare an N-type amorphous silicon film on the aluminum-coated film layer, the power excitation frequency is 13.56MHz, and the film thickness is 50~100nm; Prepare an I-type amorphous silicon film with a power excitation frequency of 60MHz and a film thickness of 300-400nm; then, prepare a P-type amorphous silicon film with a power excitation frequency of 60MHz and a film thickness of 50-100nm to complete the first PIN film layer preparation of
所述第二PIN膜层的制备是采用六室连续VHF~PECVD镀膜设备,先在第一PIN膜层的P型非晶硅薄膜上制备N型非晶硅薄膜,电源激发频率为13.56MHz,薄膜厚度为50~100nm;再制备I型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为300~400nm;然后,制备P型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为50~100nm,完成第二PIN膜层的制备;The preparation of the second PIN film layer is to use six-chamber continuous VHF~PECVD film coating equipment, first prepare an N-type amorphous silicon film on the P-type amorphous silicon film of the first PIN film layer, and the power excitation frequency is 13.56MHz. The thickness of the film is 50~100nm; then prepare an I-type amorphous silicon film, the power excitation frequency is 60MHz, and the film thickness is 300~400nm; then, prepare a P-type amorphous silicon film, the power excitation frequency is 60MHz, and the film thickness is 50~ 100nm, complete the preparation of the second PIN film layer;
所述TCO或ITO透明导电膜层的制备是采用磁控溅射镀膜技术,在第二PIN膜层的P型非晶硅薄膜上制备TCO或ITO透明导电薄膜并引出正电极。The TCO or ITO transparent conductive film layer is prepared by magnetron sputtering coating technology, and the TCO or ITO transparent conductive film is prepared on the P-type amorphous silicon film of the second PIN film layer and a positive electrode is drawn out.
本发明,具有以下积极效果:The present invention has the following positive effects:
1)、聚酰亚胺纤维具有良好的可纺性,可以制成各类特殊场合使用的纺织品。由于具有耐高低温特性、阻燃性,不熔滴,离火自熄以及极佳的隔温性,聚酰亚胺纤维隔热防护服穿着舒适,皮肤适应性好,永久阻燃,而且尺寸稳定、安全性好、使用寿命长,和其他纤维相比,由于材料本身的导热系数低,也是绝佳的隔温材料,是防护服装的理想纤维材料;本发明采用中空聚酰亚胺纤维更好地强化其可挠性、可纺性,根据需要,可制造出不同形状、大小的太阳能微电池;1) Polyimide fiber has good spinnability and can be made into various textiles for special occasions. Due to its high and low temperature resistance, flame retardancy, non-melting, self-extinguishing when away from fire and excellent temperature insulation, polyimide fiber thermal insulation protective clothing is comfortable to wear, good skin adaptability, permanent flame retardancy, and the size Stability, good safety, long service life, compared with other fibers, due to the low thermal conductivity of the material itself, it is also an excellent heat insulation material, and is an ideal fiber material for protective clothing; the hollow polyimide fiber used in the present invention is more Better enhance its flexibility and spinnability, and according to needs, solar micro-batteries of different shapes and sizes can be manufactured;
2)、采用六室连续VHF-PECVD即六室连续超高频率等离子体辅助化学气相沉积技术,在中空聚酰亚胺纤维表面生成双层PIN膜层结构,提高其光电转移效果。2) Using six-chamber continuous VHF-PECVD, that is, six-chamber continuous ultra-high frequency plasma-assisted chemical vapor deposition technology, to form a double-layer PIN film structure on the surface of the hollow polyimide fiber to improve its photoelectric transfer effect.
本发明,具有可挠性强、可纺性强、光电转移效果高的优点,利用中空聚酰亚胺纤维的可编织性,根据需要制造不同形状、不同容量太阳能电池,可以应用到窗帘、广告牌、装饰品、玩具等领域。The present invention has the advantages of strong flexibility, strong spinnability, and high photoelectric transfer effect. Using the weavability of hollow polyimide fibers, solar cells of different shapes and capacities can be manufactured according to needs, and can be applied to curtains, advertisements, etc. Cards, decorations, toys and other fields.
附图说明Description of drawings
图1是本发明的一个实施例的结构示意图。Fig. 1 is a structural schematic diagram of an embodiment of the present invention.
图中,1、中空聚酰亚胺纤维;2、镀铝膜层;3、第一PIN膜层;4、第二PIN膜层;5、TCO或ITO透明导电膜层。In the figure, 1. hollow polyimide fiber; 2. aluminized film layer; 3. first PIN film layer; 4. second PIN film layer; 5. TCO or ITO transparent conductive film layer.
具体实施方式detailed description
参照图1,一种中空聚酰亚胺纤维太阳能微电池的制造方法,按以下工艺步骤进行:中空聚酰亚胺纤维清洗→中空聚酰亚胺纤维表面镀铝膜层→在镀铝膜层上制备第一PIN膜层→在第一PIN膜层上制备第二PIN膜层→在第二PIN膜层上制备TCO或ITO透明导电膜层;With reference to Fig. 1, a kind of manufacturing method of hollow polyimide fiber solar energy micro-battery is carried out according to the following process steps: hollow polyimide fiber cleaning→hollow polyimide fiber surface aluminized film layer→aluminized film layer Prepare the first PIN film layer → prepare the second PIN film layer on the first PIN film layer → prepare a TCO or ITO transparent conductive film layer on the second PIN film layer;
所述中空聚酰亚胺纤维清洗利用超声波清洗并干燥处理;The hollow polyimide fiber is cleaned by ultrasonic cleaning and dried;
所述中空聚酰亚胺纤维表面镀铝膜层采用测控溅射技术,在中空聚酰亚胺纤维1的外表面镀一层铝膜层2而作为负电极,铝膜层厚度为300~400nm,镀膜温度为200~300℃;The aluminum coating layer on the surface of the hollow polyimide fiber adopts measurement and control sputtering technology, and an aluminum film layer 2 is coated on the outer surface of the hollow polyimide fiber 1 as a negative electrode, and the thickness of the aluminum film layer is 300~400nm , the coating temperature is 200~300℃;
所述第一PIN膜层的制备是采用六室连续VHF~PECVD镀膜设备,先在镀铝膜层上制备N型非晶硅薄膜,电源激发频率为13.56MHz,薄膜厚度为50~100nm;再制备I型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为300~400nm;然后,制备P型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为50~100nm,完成第一PIN膜层3的制备;The preparation of the first PIN film layer is to adopt six-chamber continuous VHF~PECVD film coating equipment, first prepare an N-type amorphous silicon film on the aluminum-coated film layer, the power excitation frequency is 13.56MHz, and the film thickness is 50~100nm; Prepare an I-type amorphous silicon film with a power excitation frequency of 60MHz and a film thickness of 300-400nm; then, prepare a P-type amorphous silicon film with a power excitation frequency of 60MHz and a film thickness of 50-100nm to complete the first PIN film layer 3 preparation;
所述第二PIN膜层的制备是采用六室连续VHF~PECVD镀膜设备,先在第一PIN膜层的P型非晶硅薄膜上制备N型非晶硅薄膜,电源激发频率为13.56MHz,薄膜厚度为50~100nm;再制备I型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为300~400nm;然后,制备P型非晶硅薄膜,电源激发频率为60MHz,薄膜厚度为50~100nm,完成第二PIN膜层4的制备;The preparation of the second PIN film layer is to use six-chamber continuous VHF~PECVD film coating equipment, first prepare an N-type amorphous silicon film on the P-type amorphous silicon film of the first PIN film layer, and the power excitation frequency is 13.56MHz. The thickness of the film is 50~100nm; then prepare an I-type amorphous silicon film, the power excitation frequency is 60MHz, and the film thickness is 300~400nm; then, prepare a P-type amorphous silicon film, the power excitation frequency is 60MHz, and the film thickness is 50~ 100nm, complete the preparation of the second PIN film layer 4;
所述TCO或ITO透明导电膜层的制备是采用磁控溅射镀膜技术,在第二PIN膜层的P型非晶硅薄膜上制备TCO或ITO透明导电薄膜5并引出正电极。The TCO or ITO transparent conductive film layer is prepared by magnetron sputtering coating technology, and the TCO or ITO transparent conductive film 5 is prepared on the P-type amorphous silicon film of the second PIN film layer and a positive electrode is drawn out.
本发明,按上述方法制造单元纤维太阳能微电池,再把所有单元纤维太阳能微电池并联或/和串联连接起来而形成太阳能微电池。In the present invention, the unit fiber solar micro-batteries are manufactured according to the above method, and then all the unit fiber solar micro-batteries are connected in parallel or/and in series to form a solar micro-battery.
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| CN201710269490.9A CN107123700A (en) | 2017-04-24 | 2017-04-24 | A kind of hollow polyimide fiber solar micro battery and its manufacture method |
| PCT/CN2017/000331 WO2018195675A1 (en) | 2017-04-24 | 2017-04-28 | Hollow polyimide fiber solar micro-battery and manufacturing method therefor |
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| CN101517740A (en) * | 2006-03-18 | 2009-08-26 | 索林塔有限公司 | Monolithic integrated circuit for non-planar solar cells |
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| DE19909417A1 (en) * | 1999-03-04 | 2000-11-16 | Manfred Baumgaertner | Solar collector made of fibers |
| US6706963B2 (en) * | 2002-01-25 | 2004-03-16 | Konarka Technologies, Inc. | Photovoltaic cell interconnection |
| CN101431128B (en) * | 2008-12-02 | 2010-06-09 | 华中科技大学 | A kind of preparation method of amorphous silicon laminated solar cell |
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| CN101517740A (en) * | 2006-03-18 | 2009-08-26 | 索林塔有限公司 | Monolithic integrated circuit for non-planar solar cells |
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| 刘荣厚: "《新能源工程》", 31 October 2006, 中国农业出版社 * |
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