CN108398449A - X-ray dioptric apparatus for X-ray array combination refractor integrated package to be miniaturized - Google Patents

Abstract

An X-ray refractor for miniaturized X-ray array combined refraction lens integrated assembly, the X-ray refractor is placed close to the X-ray array combined refraction lens, and the X-ray refractor has a function for realizing incident X-ray beam shaping The reshaping structure refers to the refraction angle θ of the positive and negative primary combination lenses in the X-ray array combination refraction lens by the X-ray refractor, and the refraction 2θ of the positive and negative secondary combination lenses in the X-ray array combination refraction lens Angles, and so on, finally realize the parallel light incident on each single combined refracting lens in the X-ray array combined refracting lens. The invention is applied to a miniaturized X-ray array combined with a refracting lens integrated component, which can realize high micro-region resolution and high sensitivity at the same time, and can perform on-site analysis.

Description

X-ray refractor for miniaturized X-ray array combined refraction lens integrated assembly

technical field

The invention relates to the field of X-ray detection and imaging, in particular to an X-ray refractor used in an X-ray array combined refraction lens integrated assembly of a micro-beam X-ray fluorescence analysis system.

Background technique

The X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can perform simple, fast, high-resolution and non-destructive elemental quantitative measurement and analysis on samples in various forms (solid/liquid/powder, etc.) under normal pressure. The micro-beam X-ray fluorescence analysis system (micro-XRF) has attracted extensive attention because of its higher micro-resolution.

Micro-beam X-ray fluorescence analysis systems (micro-XRF) usually need to be equipped with X-ray focusing devices. In the X-ray fluorescence analysis system using X-ray focusing devices, although the resolution of the micro-area is greatly improved (usually by more than one order of magnitude), the count rate will decrease, which affects the detection sensitivity. The prior art fluorescence spectrometer based on X-ray capillary devices (Patent No.: 201010180956.6) uses X-ray capillary devices for focusing, and the resolution of the micro-area can only reach tens of microns. Not only the micro-area resolution is not high enough, but also the count rate The decline leads to a certain degree of reduction in detection sensitivity; at the same time, the structure is complex and the size is large, and it cannot be portable. The inventor also proposed a portable micro-beam X-ray fluorescence spectrometer before (Patent No.: 201310356270.1, which is the closest existing technology to the present invention), using an X-ray combined refracting lens to obtain a detection micro-beam, although the resolution of the micro-area is large The amplitude is increased, but the count rate is low, which affects the detection sensitivity.

The X-ray combined refracting lens is an integrated microstructure device with a small numerical aperture. All the light emitted by the X-ray light tube cannot be received by the combined lens, which not only reduces the counting rate, but also wastes X-ray light energy and increases noise. If a new device structure can be invented and the X-ray light emitted by the X-ray light tube can be used as much as possible, it will not only greatly increase the count rate, thereby improving the detection sensitivity, but also reduce energy consumption and noise.

Contents of the invention

In order to overcome the shortcomings of the existing X-ray fluorescence spectrometer that the micro-resolution is not high enough, especially the detection sensitivity is not high enough due to the low count rate, and the structure is complex, the size is large, and the lack of portability is not possible. The present invention provides a miniaturized The X-ray refractor of the X-ray array combined with the refraction lens integrated component is applied to a miniaturized micro-beam X-ray fluorescence analysis system, which can simultaneously achieve high micro-area resolution and high sensitivity, and can perform on-site analysis.

The technical solution adopted by the present invention to solve its technical problems is:

An X-ray refractor for miniaturized X-ray array combined refraction lens integrated assembly, the X-ray refractor is placed close to the X-ray array combined refraction lens, and the X-ray refractor has a function for realizing incident X-ray beam shaping The reshaping structure refers to the refraction angle θ of the positive and negative first-stage combination lenses in the X-ray array combination refraction lens by the X-ray refractor, and the refraction 2θ of the positive and negative second-level combination lenses in the X-ray array combination refraction lens Angles, and so on, finally realize the parallel light incident on each single combined refracting lens in the X-ray array combined refracting lens.

Further, the X-ray refractor selects any simple substance or compound material whose refraction characteristics satisfy the following formula,

Refractive coefficient of X-ray band material:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, λ represents the wavelength, A represents the atomic mass, the subscript i represents the type of element in the compound, the subscript j represents a positive integer, ρ represents the electron density, and The subscript i indicates the type of element in the compound. When the material is a simple substance, i=1, v represents the number of atoms, the subscript i represents the type of element in the compound, the subscript j is a positive integer, Z represents the atomic number, and the subscript i represents The type of element in the compound.

Furthermore, the material thickness of the non-refractive zone of the X-ray refractor is represented by t _Z0 , the width of the non-refractive zone of the X-ray refractor is T _Z =T ₀ +2G ₂ , and T ₀ is the zero-order light transmission zone Width; t _Z0 is the material thickness of the non-refractive zone, and the material thickness t _ZM of the refractive zone is calculated by the following formula:

t _ZM =t _Z0 + _TM ·tan(0.5M·θ) (2).

Among them, G ₂ is the width of the positive and negative secondary light-blocking bands, and T _M is the width of the light-transmitting bands at all levels.

The beneficial effects of the present invention are mainly manifested in: 1. Utilize the invented X-ray refractor to shape the X-ray beam, which has a simple structure and can be integrated and produced in batches; 2. The combined refraction lens of the X-ray array works based on the refraction effect. There is no need to bend the optical path when focusing the X-ray beam, so the formed detection device or instrument has a compact structure, small size, and light weight, and is suitable for making a portable instrument device, which can realize on-site analysis.

Description of drawings

Fig. 1 is the structural representation of the X-ray refractor used for the miniaturized X-ray array combined refraction lens integrated assembly of the present invention (only the partial structure of M≤2 is drawn), wherein T _Z is the width of the non-refractive zone, t _Z0 is the material thickness of the non-refractive zone, t _ZM is the material thickness of the refractive zone, (a) front view, (b) top view.

Fig. 2 is a structural schematic diagram of the X-ray diaphragm in a kind of miniaturized X-ray array combined refracting lens integrated assembly of the present invention (only the local structure of M≤2 is drawn), wherein T ₀ is the width of the zero-order light transmission band , T ₂ is the width of the positive and negative primary light transmission bands, t is the thickness of the X-ray diaphragm, (a) front view, (b) top view.

Fig. 3 is a structural schematic diagram of a miniaturized X-ray array combined refracting lens integrated assembly of the present invention, in which 1 represents the X-ray diaphragm, 2 represents the X-ray refractor, 3 represents the X-ray array combined refracting lens, and 4 represents the assembly platform .

Fig. 4 is a structural representation of the X-ray array combined refracting lens in a kind of miniaturized X-ray array combined refracting lens integrated assembly of the present invention (only the local structure of M≤2 is drawn), wherein T ₀ is the aperture of the refracting unit, l is the axial thickness dimension of the refraction element.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

Referring to Figures 1 to 4, an X-ray refractor for an integrated component of a miniaturized X-ray array combined refraction lens, the X-ray refractor is placed close to the X-ray array combined refraction lens, and the X-ray refractor has a function In order to realize the shaping structure of the incident X-ray beam shaping, the shaping structure refers to the refraction angle θ angle of the X-ray refractor to the positive and negative first-stage combined lenses in the X-ray array combined refraction lens, and to the positive and negative one-stage combined lens in the X-ray array combined refraction lens. The negative secondary combination lens refracts the 2θ angle, and so on, finally realizes the parallel light incident on each single combination refraction lens in the X-ray array combination refraction lens.

Further, the X-ray refractor selects any simple substance or compound material whose refraction characteristics satisfy the following formula,

Refractive coefficient of X-ray band material:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, λ represents the wavelength, A represents the atomic mass, the subscript i represents the type of element in the compound, the subscript j represents a positive integer, ρ represents the electron density, and The subscript i represents the type of element in the compound. When the material is a simple substance, i=1, v represents the number of atoms, the subscript i represents the type of element in the compound, the subscript j is a positive integer, Z represents the atomic number, and the subscript i represents The type of element in the compound.

Furthermore, the material thickness of the non-refractive zone of the X-ray refractor is represented by t _Z0 , the width of the non-refractive zone of the X-ray refractor is T _Z =T ₀ +2G ₂ , and T ₀ is the zero-order light transmission zone Width; t _Z0 is the material thickness of the non-refractive zone, and the material thickness t _ZM of the refractive zone is calculated by the following formula:

t _ZM =t _Z0 + _TM ·tan(0.5M·θ) (2).

Among them, G ₂ is the width of the positive and negative secondary light-blocking bands, calculated by formula (8) when M=2; T _M is the width of the light-transmitting band, calculated by formula (7).

The X-ray refractor of this embodiment is applied to a miniaturized X-ray array combined refracting lens integrated assembly, which includes an X-ray diaphragm 1, an X-ray refractor 2, an X-ray array combined lens 3 and an assembly carrier 4 , the X-ray beam is irradiated on the X-ray array combination refracting lens integrated assembly, first received by the X-ray diaphragm, and subjected to the first shaping and filtering, the first shaping refers to the X-ray array combination The numerical aperture of the refracting lens is used to shape the incident X-ray light wave; the filtering refers to splitting the incident X-ray light wave to form multiple sub-beams, and the number of sub-beams is the same as the number of combined refracting lenses in the combined refracting lens of the X-ray array. The X-ray light wave that has been split into multiple sub-beams is then incident into the X-ray refractor, and the beam is reshaped for the second time by the X-ray refractor. The second reshaping of the beam ensures that the multiple beams emitted from the X-ray refractor The X-ray sub-beams all enter the corresponding X-ray combination refracting lens in the array in a parallel light-like manner. The X-ray array combined refraction lens focuses the incident X-ray sub-beams respectively, and the array structure layout of the X-ray array combined refraction lens ensures that the focal spot formed by each sub-beam is at the same position, and on the optical axis. The component carrier is used to carry the X-ray diaphragm, X-ray refractor, and X-ray array combined refraction lens, and is positioned at the relative positions of the X-ray diaphragm, X-ray refractor, and X-ray array combined refraction lens. Fix it after adjusting the optical axis.

Further, the X-ray array combination refraction lens includes (M+1) X-ray combination refraction lenses, and M is a positive integer and an even number. The X-ray array combined refraction lens is distributed axially symmetrically along its optical axis, the optical axis of the X-ray array combined refraction lens coincides with the optical axis of the zero-order X-ray combined refraction lens in the array, and the X-ray array combined refraction lens The angle between the optical axis of the lens and the positive and negative primary X-ray combined refracting lens in the array is θ, and the optical axis of the X-ray array combined refracting lens and the positive and negative secondary X-ray combined refracting lens in the array The angle between the optical axis is 2θ, and so on.

Still further, the layout structure of (M+1) combined refractive lenses in the X-ray array combined refractive lenses makes the focal spots focused by all (M+1) X-ray combined refractive lenses be at the same position and located on the optical axis superior.

Further, the structure and performance parameters of the (M+1) X-ray combined refracting lenses are obtained according to the following formula:

Optical constants in the X-ray band: n=1-δ+iβ (3)

The focal length of the combined X-ray refracting lens:

The focal spot size of the combined X-ray refracting lens:

Numerical aperture of X-ray combined refracting lens:

Among them, n represents the optical constant, δ represents the refraction of the X-ray band material, β represents the absorption of the X-ray band material, and N represents the number of refraction units in the X-ray combined refraction lens. Taking the parabolic refraction unit as an example, the combined refraction lens paraboloid The radius of curvature of the vertex is R, the opening size of the paraboloid is R ₀ , f represents the focal length of the combined X-ray refracting lens, λ represents the wavelength, and μ represents the linear absorption coefficient of X-rays,

Furthermore, the X-ray refractor is placed close to the combined refracting lens of the X-ray array to realize the second shaping of the incident X-ray beam. The second shaping means that the X-ray refractor can correct the X-ray The positive and negative first-stage combined lenses in the combined refracting lens of the array refract the θ angle, and the positive and negative secondary combined lenses in the X-ray combined refracting lens refract the 2θ angle, and so on. Parallel-like incidence of a single composite refractive lens.

Still further, the structural size of the X-ray diaphragm is determined according to the structural size of the X-ray array combined refracting lens to realize the first shaping and filtering of the incident X-ray beam, and the first shaping of the beam is Refers to the function of using the X-ray diaphragm structure to block the stray light entering the X-ray array combination refracting lens and to initially collimate the beam; the filtering refers to the alternating light-transmitting and blocking bands in the X-ray diaphragm structure The filter structure is arranged, and the X-ray light wave is split into multiple sub-beams through the filter structure.

The number of the light-transmitting zones is (M+1), which is the same as the number of combined refractive lenses in the X-ray array combined refractive lenses. The widths of the light-transmitting zone and the light-blocking zone are calculated by the following formulas:

The zero-order light transmission zone T ₀ is the same as the numerical aperture size of the X-ray combined refracting lens, the positive and negative first-order light transmission zones, the positive and negative second-order light transmission zones..., and so on. The width of the light transmission zone is expressed as:

Positive and negative first-level light-blocking bands, positive and negative second-level light-blocking bands..., and so on, the width of the light-blocking bands is expressed as:

G _M ＝ L·tan(0.5M·θ) (8)

Where L represents the geometric length of the X-ray combined refraction lens, expressed as L=N·l, where l is the axial thickness dimension of the refraction unit.

The X-ray aperture can choose any material whose absorption characteristics satisfy the following formula, usually metal materials such as copper and lead are selected,

Absorption coefficient of materials in the X-ray band:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, A represents the atomic mass, f ₂ represents the atomic scattering factor, ρ represents the electron density, and i represents the element type in the compound. When the material is a simple substance, i=1 .

The material thickness t of the X-ray aperture satisfies the expression e ^−β·t <<1.

Claims (3)

1. a kind of X-ray dioptric apparatus for X-ray array combination refractor integrated package to be miniaturized, which is characterized in that institute X-ray dioptric apparatus is stated with X-ray array combination refractor close to placement, the X-ray dioptric apparatus has for realizing incident X The reshaping structure of ray beam shaping, the reshaping structure refer to X-ray dioptric apparatus in X-ray array combination refractor Positive and negative level-one compound lens refractive power θ angles, to positive and negative 2 angles θ of two level compound lens refractive power in X-ray array combination refractor Degree, and so on, the final class directional light for realizing combination refractor single to each in X-ray array combination refractor It is incident.

2. the X-ray dioptric apparatus as described in claim 1 for X-ray array combination refractor integrated package to be miniaturized, It is characterized in that, the X-ray dioptric apparatus selective refraction characteristic meets any simple substance or compound-material of following equation,

The refraction coefficient of X-ray band material：

Wherein, N_ARepresent Avgadro constant, r₀Electron radius is represented, λ represents wavelength, and A represents atomic mass, and subscript i is indicated Element species in compound, subscript j are positive integer, and ρ represents electron density, and subscript i indicates the element species in compound, when I=1 when material is simple substance, v represent atom number, and subscript i indicates that the element species in compound, subscript j are positive integer, Z generations Table atomic number, subscript i indicate the element species in compound.

3. the X-ray refractive power as claimed in claim 1 or 2 for X-ray array combination refractor integrated package to be miniaturized Device, which is characterized in that the non-refractive power area material thickness t of the X-ray dioptric apparatus_Z0It indicates, the non-folding of the X-ray dioptric apparatus Light sector width size T_Z=T₀+2G₂, T₀For the width of zero level euphotic zone；t_Z0For the material thickness in non-refractive power area, the material in refractive power area Expect thickness t_ZMIt is calculated by following equation：

t_ZM=t_Z0+T_M·tan(0.5M·θ) (2)。

Wherein, G₂For the width of positive and negative two level light blocking band, T_MFor the width of euphotic zone.