CN108398449B - X-ray refractor for miniaturized integrated assembly of X-ray array combined with refractive lens - Google Patents

Abstract

An X-ray refractor for a miniaturized X-ray array combined refraction lens integrated component is characterized in that the X-ray refractor and an X-ray array combined refraction lens are arranged in a close manner, the X-ray refractor is provided with a shaping structure for realizing incident X-ray beam shaping, the shaping structure refers to the refraction theta angle of the X-ray refractor to a positive-negative primary combined lens in the X-ray array combined refraction lens, the refraction 2 theta angle to a positive-negative secondary combined lens in the X-ray array combined refraction lens and the like, and finally the parallel light incidence of each single combined refraction lens in the X-ray array combined refraction lens is realized. The invention is applied to a miniaturized X-ray array combined refraction lens integrated component, can simultaneously realize high micro-area resolution and high sensitivity, and can carry out field analysis.

Description

X-ray Refractor for Miniaturized X-ray Array Combined Refractive Lens Integrated Assembly

technical field

The invention relates to the field of X-ray detection and imaging, in particular to an X-ray refractor for an X-ray array combined refractive lens integrated assembly of a microbeam X-ray fluorescence analysis system.

Background technique

X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can perform simple, fast, high-resolution and non-destructive elemental quantitative measurement and analysis of samples in various forms (solid/liquid/powder, etc.) under normal pressure. The microbeam X-ray fluorescence analysis system (micro-XRF) has received extensive attention because of its higher micro-area resolution.

Microbeam X-ray fluorescence analysis system (micro-XRF) usually needs to be equipped with X-ray focusing device. X-ray fluorescence analysis system using X-ray focusing device, although the micro-area resolution is greatly improved (usually can be improved by more than an order of magnitude), but the count rate will decrease, affecting the detection sensitivity. The prior art fluorescence spectrometer based on X-ray capillary device (Patent No.: 201010180956.6) uses X-ray capillary device for focusing, and the micro-area resolution can only reach several tens of microns. Not only the micro-area resolution is not high enough, but also because of the count rate The decrease leads to a decrease in detection sensitivity to a certain extent; at the same time, the structure is complex and the size is huge, which cannot be portable. The inventor also proposed a portable microbeam X-ray fluorescence spectrometer (patent number: 201310356270.1, which is the closest prior art to the present invention), and uses an X-ray combined refraction lens to obtain the detection microbeam, although the resolution of the micro area is large. The amplitude is increased, but the count rate is low, which affects the detection sensitivity.

The X-ray combined refractive lens is an integrated microstructure device with a small numerical aperture. The light emitted by the X-ray light tube cannot be received by the combined lens, which not only reduces the count rate, but also wastes X-ray light energy and increases noise. If a new device structure can be invented and the X-ray light emitted by the X-ray light tube can be used as much as possible, it will not only greatly increase the count rate, thereby improving the detection sensitivity, but also reduce energy consumption and noise.

SUMMARY OF THE INVENTION

In order to overcome the shortcomings of the existing X-ray fluorescence spectrometer that the micro-area resolution is not high enough, especially the detection sensitivity is not high enough due to the low count rate, and the structure is complex, the size is large, and the portability cannot be realized, the present invention provides a miniaturized The X-ray refractor of the X-ray array combined with the refractive lens integrated component is applied to a miniaturized micro-beam X-ray fluorescence analysis system, which can achieve high micro-area resolution and high sensitivity at the same time, and can perform on-site analysis.

The technical scheme adopted by the present invention to solve its technical problems is:

An X-ray refractor for miniaturizing an X-ray array combined refracting lens integrated assembly, the X-ray refractor and the X-ray array combined refracting lens are placed close to each other, and the X-ray refractor has a function for realizing incident X-ray beam shaping. The shaping structure refers to the refraction angle θ of the positive and negative first-order combined lenses in the X-ray array combined refracting lens by the X-ray refractor, and the refraction 2θ of the positive and negative second-level combined lenses in the X-ray array combined refracting lens The angle, and so on, finally realizes the quasi-parallel light incident to each single combined refractive lens in the X-ray array combined refractive lens.

Further, the X-ray refractor selects any elemental or compound material whose refraction characteristic satisfies the following formula,

Refractive index of X-ray band material:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, λ represents the wavelength, A represents the atomic mass, the subscript i represents the element type in the compound, the subscript j is a positive integer, ρ represents the electron density, and the lower The subscript i represents the element type in the compound. When the material is an elemental substance, i=1, v represents the number of atoms, the subscript i represents the element type in the compound, the subscript j is a positive integer, Z represents the atomic number, and the subscript i represents Elemental species in a compound.

Still further, the thickness of the material in the non-refractive region of the X-ray refractor is represented by t _Z0 , the width of the non-refractive region of the X-ray refractor is T _Z =T ₀ +2G ₂ , and T ₀ is the width of the zero-order light transmission band. width; t _Z0 is the material thickness of the non-refractive region, and the material thickness t _ZM of the refractive region is calculated by the following formula:

t _ZM =t _Z0 +T _M ·tan(0.5M·θ) (2).

Among them, G ₂ is the width of the positive and negative secondary light-blocking bands, and T _M is the width of the light-transmitting bands at all levels.

The beneficial effects of the present invention are mainly manifested in: 1. Using the invented X-ray refractor to shape the X-ray beam, the structure is simple and can be integrated in batch production; 2. The X-ray array combined refractive lens works based on the refraction effect, The optical path does not need to be refracted when focusing the X-ray beam, so the formed detection device or instrument is compact in structure, small in size and light in weight, suitable for making portable instruments and can realize on-site analysis.

Description of drawings

1 is a schematic structural diagram of an X-ray refractor of the present invention for use in a miniaturized X-ray array combined refracting lens integrated assembly (only the partial structure of M≤2 is drawn), wherein T _Z is the width of the non-refractive region, and t _Z0 is the material thickness of the non-refractive region, t _ZM is the material thickness of the refractive region, (a) front view, (b) top view.

2 is a schematic structural diagram of an X-ray diaphragm in a miniaturized X-ray array combined refracting lens integrated assembly of the present invention (only a partial structure of M≤2 is drawn), wherein T ₀ is the width of the zero-order light transmission band , T ₂ is the width of the positive and negative first-order light transmission bands, t is the thickness of the X-ray diaphragm, (a) front view, (b) top view.

3 is a schematic structural diagram of a miniaturized X-ray array combined refracting lens integrated assembly of the present invention, wherein 1 represents an X-ray aperture, 2 represents an X-ray refractor, 3 represents an X-ray array combined refracting lens, and 4 represents a component carrier .

4 is a schematic structural diagram of an X-ray array combined refractive lens in a miniaturized X-ray array combined refractive lens integrated assembly of the present invention (only a partial structure of M≤2 is drawn), wherein T ₀ is the aperture of the refraction unit, l is the axial thickness dimension of the refractive element.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

1 to 4 , an X-ray refractor for miniaturizing an X-ray array combined refracting lens integrated assembly, the X-ray refractor and the X-ray array combined refracting lens are placed close to each other, and the X-ray refractor is useful In order to realize the shaping structure of incident X-ray beam shaping, the shaping structure refers to the refraction angle θ of the positive and negative first-order combined lenses in the X-ray array combined refractive lens by the X-ray refractor, and the positive and negative first-order combined lenses in the X-ray array combined refractive lens by the X-ray refractor. The negative second-order composite lens refracts light at an angle of 2θ, and so on, and finally realizes the quasi-parallel light incident to each single composite refractive lens in the X-ray array composite refractive lens.

Further, the X-ray refractor selects any elemental or compound material whose refraction characteristic satisfies the following formula,

Refractive index of X-ray band material:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, λ represents the wavelength, A represents the atomic mass, the subscript i represents the element type in the compound, the subscript j is a positive integer, ρ represents the electron density, and the lower The subscript i represents the element type in the compound, when the material is an elemental substance i=1, v represents the number of atoms, the subscript i represents the element type in the compound, the subscript j is a positive integer, Z represents the atomic number, and the subscript i represents Elemental species in a compound.

Still further, the thickness of the material in the non-refractive region of the X-ray refractor is represented by t _Z0 , the width of the non-refractive region of the X-ray refractor is T _Z =T ₀ +2G ₂ , and T ₀ is the width of the zero-order light transmission band. width; t _Z0 is the material thickness of the non-refractive region, and the material thickness t _ZM of the refractive region is calculated by the following formula:

t _ZM =t _Z0 +T _M ·tan(0.5M·θ) (2).

Among them, G ₂ is the width of the positive and negative secondary light-blocking bands, calculated from formula (8) when M=2; T _M is the width of the light-transmitting band, calculated from formula (7).

The X-ray refractor of this embodiment is applied to a miniaturized X-ray array combined refractive lens integrated assembly, the integrated assembly includes an X-ray diaphragm 1, an X-ray refractor 2, an X-ray array combined lens 3 and a component carrier 4 , the X-ray beam is irradiated on the X-ray array combined refracting lens integrated component, first received by the X-ray diaphragm, and subjected to the first shaping and filtering. The first shaping refers to the combination according to the X-ray array. The numerical aperture of the refracting lens is used to shape the incident X-ray light wave; the filtering refers to splitting the incident X-ray light wave to form multiple sub-beams, and the number of sub-beams is the same as the number of combined refracting lenses in the X-ray array combined refracting lens. The X-ray light wave that has been split into a plurality of sub-beams is then incident on the X-ray refractor, and the beam is shaped for the second time by the X-ray refractor. The X-ray sub-beams are all incident on the corresponding X-ray combined refractive lens in the array in a quasi-parallel light manner. The X-ray array combined refracting lens focuses a plurality of incident X-ray sub-beams respectively, and the array structure layout of the X-ray array combined refracting lens ensures that the focused focal spot formed by each sub-beam is at the same position, and on the optical axis. The component carrying platform is used to carry the X-ray diaphragm, the X-ray refractor, and the X-ray array combined refracting lens, and is located at the relative position of the X-ray diaphragm, the X-ray refractor, and the X-ray array combined refracting lens Fix it after adjusting with the optical axis.

Further, the X-ray array combined refractive lens includes (M+1) X-ray combined refractive lenses, and M is a positive integer and an even number. The X-ray array combined refractive lens is axially symmetrically distributed along its optical axis, the optical axis of the X-ray array combined refractive lens is coincident with the optical axis of the zero-order X-ray combined refractive lens in the array, and the X-ray array combined refractive lens The included angle between the optical axis of the lens and the optical axis of the positive and negative first-order X-ray combined refraction lenses in the array is θ, and the optical axis of the X-ray array combined refraction lens and the positive and negative second-level X-ray combined refraction lenses in the array. The included angle of the optical axis is 2θ, and so on.

Still further, the layout structure of the (M+1) combined refractive lenses in the X-ray array combined refractive lens is such that the focal spots focused by all (M+1) X-ray combined refractive lenses are at the same position and located on the optical axis. superior.

Further, the structure and performance parameters of the (M+1) X-ray combined refractive lenses are obtained according to the following formula:

Optical constant in X-ray band: n=1-δ+iβ (3)

The focal length of the X-ray combining refractive lens:

Focal spot size of X-ray combining refractive lens:

The numerical aperture of the X-ray combined refractive lens:

where n represents the optical constant, δ represents the refraction of the material in the X-ray band, β represents the absorption of the material in the X-ray band, and N represents the number of refracting units in the X-ray combined refracting lens. The radius of curvature of the vertex is R, the opening size of the paraboloid is R ₀ , f represents the focal length of the X-ray combined refractive lens, λ represents the wavelength, μ represents the line absorption coefficient of the X-ray,

Further, the X-ray refractor is placed close to the X-ray array combined refracting lens to realize the second shaping of the incident X-ray beam. The positive and negative first-order combined lenses in the array combined refracting lens are refracted by the θ angle, and the positive and negative second-level combined lenses in the X-ray array combined refracting lens are refracted by the 2θ angle, and so on. A single composite refractive lens for parallel-like light incidence.

Still further, the structural size of the X-ray diaphragm is determined according to the structural size of the X-ray array combined refracting lens to realize the first shaping and filtering of the incident X-ray beam, and the first shaping of the beam is Refers to the function of using the X-ray aperture structure to block the stray light incident outside the X-ray array combined refracting lens and preliminarily collimating the beam; the filtering refers to the alternating light transmission band and light blocking band in the X-ray aperture structure A filter structure is arranged, and the X-ray light wave is split into a plurality of sub-beams by the filter structure.

The number of the light transmission bands is (M+1), which is the same as the number of combined refractive lenses in the X-ray array combined refractive lens. The widths of the light-transmitting band and the light-blocking band are respectively calculated by the following formulas:

The zero-order light transmission band T ₀ is the same as the numerical aperture size of the X-ray combined refraction lens, the positive and negative first-order light-transmitting bands, the positive and negative second-order light-transmitting bands…, and so on, the light-transmitting band width is expressed as:

Positive and negative first-order light-blocking tapes, positive and negative second-order light-blocking tapes…, and so on, the light-blocking tape width is expressed as:

G _M =L·tan(0.5M·θ) (8)

Wherein L represents the geometric length of the X-ray combined refractive lens, expressed as L=N·l, where l is the axial thickness dimension of the refractive unit.

The X-ray diaphragm can be selected from any material whose absorption characteristic satisfies the following formula, usually metal materials such as copper and lead are selected,

The absorption coefficient of X-ray band material:

where N _A represents Avogadro's constant, r ₀ represents the electron radius, A represents the atomic mass, f ₂ represents the atomic scattering factor, ρ represents the electron density, and i represents the element type in the compound, when the material is a simple substance, i=1 .

The material thickness t of the X-ray diaphragm satisfies the expression e ^-β·t <<1.

Claims (3)

1. An X-ray refractor for miniaturizing an X-ray array combined refracting lens integrated assembly is characterized in that the X-ray refractor is placed close to the X-ray array combined refracting lens, and the X-ray refractor has a A shaping structure that realizes the shaping of incident X-ray beams, the shaping structure means that the X-ray refractor refracts the positive and negative first-order combined lenses in the X-ray array combined refracting lens θ angle, and the positive and negative X-ray array combined refracting lenses. The secondary combined lens refracts the light at 2θ angle, and so on, and finally realizes the parallel light incident to each single combined refractive lens in the X-ray array combined refractive lens. 2. The X-ray refractor for a miniaturized X-ray array combined refractive lens integrated assembly according to claim 1, wherein the X-ray refractor selects any elemental or compound material whose refraction characteristic satisfies the following formula, Refractive index of X-ray band material:

Among them, N _A represents Avogadro's constant, r ₀ represents the electron radius, λ represents the wavelength, A represents the atomic mass, the subscript i represents the element type in the compound, the subscript j is a positive integer, ρ represents the electron density, and the lower The subscript i represents the type of element in the compound, when the material is an elemental substance i=1, v represents the number of atoms, the subscript i represents the type of element in the compound, the subscript j is a positive integer, Z represents the atomic number, and the subscript i represents Elemental species in a compound. 3. The X-ray refractor for a miniaturized X-ray array combined refractive lens integrated assembly according to claim 1 or 2, wherein the material thickness of the non-refractive region of the X-ray refractor is represented by t _Z0 , The width dimension of the non-refractive zone of the X-ray refractor T _Z =T ₀ +2G ₂ , T ₀ is the width of the zero-order light transmission band; t _Z0 is the material thickness of the non-refractive zone, and the material thickness of the refractive zone t _ZM is given by It is calculated by the following formula: t _ZM =t _ZO +T _M ·tan(0.5M·θ) (2), Among them, G ₂ is the width of the positive and negative secondary light-blocking bands, and T _M is the width of the light-transmitting band.

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