CN109141237B - Method and device for misdetection judgment of detection device - Google Patents
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Abstract
The invention provides a method and a device for misdetection judgment of a detection device, wherein the device comprises the following components: the position acquisition module is used for acquiring the positions of the edges of the first pattern to be detected and the second pattern to be detected through the detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel; the angle acquisition module is used for respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected; and the judging module is used for judging whether the detection device has the misdetection or not according to the included angle. The method and the device for misdetection judgment of the detection device can improve the detection rate of misdetection of the detection device and the yield of products.
Description
[ technical field ] A method for producing a semiconductor device
The present invention relates to the field of display technologies, and in particular, to a method and an apparatus for determining a misdetection of a detection device.
[ background of the invention ]
Currently, a line width measuring machine (CDO) is used to measure the overlay accuracy between the pattern of the current layer and the pattern of the previous layer, so as to obtain the position offset of the two layers. However, the line width measuring machine often has a measurement error when acquiring the positions of the pattern of the current layer and the pattern of the previous layer, and currently, the measurement error can only be determined by comparing the measurement value with a reference range of preset coincidence accuracy, and then manually confirming whether the measurement error occurs if the measurement value exceeds the reference range.
However, in practice, even if the measured value is within the preset reference range, a measurement error may occur, and the line width measuring machine cannot detect the error. If the measured value (the position offset between the pattern of the current layer and the pattern of the previous layer) is directly compensated to the exposure machine, the product is easy to exceed the specification, and the product yield is reduced.
In order to avoid the abnormal condition of the product yield caused by the fact that the result of the measurement error is compensated to the exposure machine, the overlapped measurement patterns need to be manually confirmed one by one before compensation, so that the detection efficiency of misdetection is reduced, the accuracy of the measurement result cannot be ensured, the accuracy of the compensation value of the exposure machine cannot be realized, and the product yield is reduced.
Therefore, it is necessary to provide a method and an apparatus for determining a misdetection of a detection device to solve the problems of the prior art.
[ summary of the invention ]
The invention aims to provide a method and a device for misdetection judgment of a detection device, which can improve the detection rate of the misdetection of the detection device and the yield of products.
To solve the above technical problem, the present invention provides an apparatus for determining a misdetection of a detection device, comprising:
the position acquisition module is used for acquiring the positions of the edges of the first pattern to be detected and the second pattern to be detected through the detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel;
the angle acquisition module is used for respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected;
and the judging module is used for judging whether the detection device has the misdetection or not according to the included angle.
In the device for misdetection judgment of a detection device of the present invention, the angle acquisition module includes:
the first generating unit is used for generating a linear main extension line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
the second generating unit is used for generating linear auxiliary extension lines of the corresponding sides of the second pattern to be detected according to the positions of the sides of the second pattern to be detected;
the first obtaining unit is used for obtaining a first included angle between the main extension line and the preset reference line;
and the second acquisition unit is used for acquiring a second included angle between the auxiliary extension line and the preset reference line.
In the apparatus for misdetection judgment of a detection device according to the present invention, the first generation unit is specifically configured to: generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected; generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
In the apparatus for determining a false detection of a detection device according to the present invention, the second generation unit is specifically configured to: generating a secondary boundary line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected; generating a secondary extension line according to the secondary boundary line; wherein the secondary boundary lines are shaped to include linear and non-linear.
In the device for misdetection judgment of the detection device, the first pattern to be detected is quadrilateral, and the main extension line comprises two first main extension lines arranged along a first direction and two second main extension lines arranged along a second direction; the preset reference lines comprise horizontal lines and vertical lines;
the first obtaining unit is specifically configured to obtain a first included angle between the first main extension line and a horizontal line; acquiring a first included angle between the second main extension line and the vertical line; wherein an included angle exists between the first direction and the second direction.
In the device for misdetection judgment of a detection device of the present invention, the judgment module is specifically configured to:
judging whether the included angle is within a preset angle range; when the included angle exceeds the preset angle range, judging that the detection device has error detection; and when the included angle does not exceed the preset angle range, judging that the detection device has no error detection.
In the device for misdetection and judgment of the detection device, the first pattern to be detected is a projection of a first thin film layer in the display panel on the preset projection plane, the second pattern to be detected is a projection of a second thin film layer in the display panel on the preset projection plane, and the second thin film layer is positioned on the first thin film layer.
The invention also provides a method for misdetection judgment of the detection device, which comprises the following steps:
acquiring positions of edges of the first pattern to be detected and the second pattern to be detected through a detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel;
respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected;
and judging whether the detection device has misdetection or not according to the included angle.
In the method for misdetection and judgment of a detection device of the present invention, the step of respectively obtaining an included angle between each side of the first pattern to be detected and each side of the second pattern to be detected and a preset reference line according to the positions of each side of the first pattern to be detected and each side of the second pattern to be detected includes:
generating a linear main extension line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
generating a linear type auxiliary extension line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected;
acquiring a first included angle between the main extension line and the preset reference line;
and acquiring a second included angle between the auxiliary extension line and the preset reference line.
In the method for misdetection and judgment of the detection device of the present invention, the step of generating the linear main extension line of the side corresponding to the first pattern to be detected according to the position of each side of the first pattern to be detected includes:
generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
According to the method and the device for misdetection judgment of the detection device, the positions of the edges of the first pattern to be detected and the second pattern to be detected are obtained through the detection device; respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected; and then, whether the detection device has the false detection or not is judged according to the included angle, so that the detection rate of the false detection of the detection device and the yield of the product are improved.
[ description of the drawings ]
FIG. 1 is a schematic structural diagram of a detecting device of the present invention before detection.
Fig. 2 is a schematic structural diagram of a first step of the misdetection determining method of the detecting device according to the present invention.
Fig. 3 is a schematic structural diagram of a second step of the misdetection determining method of the detecting device of the present invention.
Fig. 4 is a schematic structural diagram of the misdetection judging device of the detection device of the present invention.
[ detailed description ] embodiments
The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. In the present invention, directional terms such as "up", "down", "front", "back", "left", "right", "inner", "outer", "side", etc. refer to directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
Referring to fig. 1 to 3, fig. 1 is a schematic structural view of a detecting device before detection.
The method for detecting the error detection of the device comprises the following steps:
s101, obtaining the positions of the edges of the first pattern to be detected and the second pattern to be detected through a detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel on a preset projection plane;
as shown in fig. 1, the detecting device 10 is a line amplitude measuring machine, the display panel includes the first thin film layer and the second thin film layer, the second thin film layer is located on the first thin film layer, a projection of the first thin film layer in the display panel on a preset projection plane forms the first pattern to be detected 11, and a projection of the second thin film layer in the display panel on the preset projection plane forms the second pattern to be detected 12. The first pattern to be detected 11 is an inner rectangle, and the second pattern to be detected 12 is an outer rectangle. The preset projection plane is set according to requirements.
For example, the detecting device 10 obtains coordinates of a plurality of points in each of the first pattern to be detected 11 and the second pattern to be detected 12, respectively, to obtain the position of each edge, and may also obtain the position offset, that is, the coincidence accuracy, of each edge according to the coordinates of each edge of the first pattern to be detected 11 and the coordinates of each edge of the second pattern to be detected 12. That is, the detecting device 10 is used to detect the position displacement amount of the first pattern to be detected 11 and the second pattern to be detected 12 in the display panel.
S102, respectively obtaining included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected;
as shown in fig. 2 and 3, in the actual detection process of the detection device 10, the positions of the first pattern to be detected 11 and the second pattern to be detected 12 are as shown in fig. 2, that is, different from the original positions in fig. 1, so that the method of the present invention needs to be performed to determine whether the detection device 10 has a false detection condition.
For example, according to the coordinates of a plurality of points in each side of the first pattern to be detected 11 and the coordinates of a plurality of points in each side of the second pattern to be detected 12, an included angle between each side of the first pattern to be detected 11 and a preset reference line and an included angle between each side of the second pattern to be detected 12 and the preset reference line are respectively obtained. Wherein the preset reference lines include horizontal lines and vertical lines.
The shape of the first pattern to be detected 11 and the shape of the second pattern to be detected 12 are both quadrilateral, such as rectangular.
The step S102 includes:
s1021, generating a linear main extension line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
as shown in fig. 2, for example, extended lines 31 to 34 corresponding to each side are generated based on coordinates of a plurality of points in each side of the first pattern to be detected 11, and the extended lines 31 to 34 are straight lines. In step S1021, the step of generating a linear main extension line of a corresponding side of the first pattern to be detected according to positions of the sides of the first pattern to be detected may include:
s201, generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
s202, generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
For example, boundary lines 21-24 of four sides, i.e., boundary lines that may be straight lines or curved lines, are generated based on the coordinates of a plurality of points in the sides of the first pattern to be detected 11, wherein the shape of the main boundary line includes a linear type and a non-linear type, may define the boundary of the first pattern to be detected 11 detected by the detecting device 10. Then, extension lines 31-34 corresponding to each side are generated according to the boundary lines 21-24, and the extension lines 31-34 are straight lines.
S1022, generating linear auxiliary extension lines of the corresponding sides of the second pattern to be detected according to the positions of the sides of the second pattern to be detected;
as shown in fig. 3, for example, extended lines 35 to 38 corresponding to each side are generated from the coordinates of a plurality of points in each side of the second pattern to be detected 12, and the extended lines 35 to 38 are straight lines. The step S1022 of generating a linear auxiliary extension line of a side corresponding to the second pattern to be detected according to the position of each side of the second pattern to be detected includes:
s205, generating a secondary boundary line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected;
s206, generating a secondary extension line according to the secondary boundary line;
for example, as shown in fig. 3, boundary lines 25-28 of four sides are generated according to the coordinates of a plurality of points in each side of the second pattern to be detected 12, that is, the boundary lines may define the boundary of the second pattern to be detected 12 detected by the detecting device 10, and the boundary lines may be straight lines or curved lines, that is, the shapes of the sub-boundary lines include linear types and non-linear types. Then, extension lines 35-38 corresponding to each side are generated according to the boundary lines 25-28, and the extension lines 35-38 are straight lines.
S1023, acquiring a first included angle between the main extension line and a preset reference line;
step S1023, that is, the step of obtaining the first included angle between the main extension line and the preset reference line includes:
s301, acquiring a first included angle between the first main extension line and a horizontal line; and
s302, acquiring a first included angle between the second main extension line and the vertical line; wherein an included angle exists between the first direction and the second direction.
For example, as shown in fig. 2, the first pattern to be detected 11 has a quadrilateral shape, and the main extension lines include two first main extension lines 31 and 32 arranged in a first direction and two second main extension lines 33 and 34 arranged in a second direction; the angles a1, a2 between the extension lines 31, 32 and the horizontal line, respectively, and the angles a3, a4 between the extension lines 33, 34 and the vertical line, respectively, are obtained, the horizontal line and the vertical line being shown as dotted lines in the figure.
And S1024, acquiring a second included angle between the auxiliary extension line and a preset reference line.
The step S1024, that is, the step of obtaining the second included angle between the auxiliary extension line and the preset reference line, includes:
s304, acquiring a second included angle between the first auxiliary extension line and a horizontal line; and
s305, acquiring a second included angle between the second auxiliary extension line and the vertical line; wherein an included angle exists between the first direction and the second direction.
For example, as shown in fig. 3, the second pattern 12 to be detected has a quadrilateral shape, and the secondary extension lines include two first secondary extension lines 35 and 36 arranged in the first direction and two second secondary extension lines 37 and 38 arranged in the second direction; the angles a5, a6 between the extension lines 35, 36, respectively, and the horizontal line are taken, and the angles a7, a8 between the extension lines 37, 38, respectively, and the vertical line are taken, as indicated by the dashed lines in the figure.
S103, judging whether the detection device has misdetection or not according to the included angle.
The method comprises the following steps:
s1031, judging whether the included angle is within a preset angle range;
s1032, if the included angle exceeds the preset angle range, judging that the detection device has error detection;
and S1033, if the included angle does not exceed the preset angle range, judging that the detection device has no error detection.
For example, whether the first included angle a1-a4 and the second included angle a5-a8 are within a preset angle range or not is respectively judged, and if one included angle exceeds the preset angle range, it is judged that the detection device 10 has a false detection. And if all the included angles a1-a8 do not exceed the preset angle range, judging that no error detection exists in the detection device 10. In one embodiment, the predetermined angle ranges from-5 degrees to 5 degrees.
As shown in fig. 4, the present invention further provides an apparatus 40 for determining a false detection of a detection device, which includes a position obtaining module 41, an angle obtaining module 42, and a determining module 43.
The position obtaining module 41 is configured to obtain positions of edges of the first pattern to be detected and the second pattern to be detected through the detecting device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel;
the angle obtaining module 42 is configured to obtain, according to positions of the edges of the first pattern to be detected and the second pattern to be detected, included angles between the edges of the first pattern to be detected and the edges of the second pattern to be detected and a preset reference line respectively;
the judging module 43 is configured to judge whether the detecting device has a false detection according to the included angle.
The angle acquisition module 42 includes: a first generation unit 421, a second generation unit 422, a first acquisition unit 423, a second acquisition unit 424;
a first generating unit 421, configured to generate a linear main extension line of a corresponding side of the first pattern to be detected according to positions of the sides of the first pattern to be detected;
the second generating unit 422 is configured to generate a linear auxiliary extension line of a corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected;
a first obtaining unit 423, configured to obtain a first included angle between the main extension line and a preset reference line;
the second obtaining unit 424 is configured to obtain a second included angle between the sub extension line and the preset reference line.
The first generating unit 421 is specifically configured to: generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected; generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
The second generating unit 422 is specifically configured to: generating a secondary boundary line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected; generating a secondary extension line according to the secondary boundary line; wherein the secondary boundary lines are shaped to include linear and non-linear.
The first pattern to be detected is quadrilateral, and the main extension lines comprise two first main extension lines arranged along a first direction and two second main extension lines arranged along a second direction; the preset reference lines comprise horizontal lines and vertical lines;
the first obtaining unit 423 is specifically configured to obtain a first included angle between the first main extension line and a horizontal line; acquiring a first included angle between the second main extension line and the vertical line; wherein an included angle exists between the first direction and the second direction.
The determining module 43 is specifically configured to: judging whether the included angle is within a preset angle range; when the included angle exceeds the preset angle range, judging that the detection device has error detection; and when the included angle does not exceed the preset angle range, judging that the detection device has no error detection.
The first pattern to be detected is a projection of a first thin film layer in the display panel on the preset projection plane, the second pattern to be detected is a projection of a second thin film layer in the display panel on the preset projection plane, and the second thin film layer is located on the first thin film layer.
For the method corresponding to the device for misdetection and judgment of the detection device, please refer to the above, which is not described herein again.
According to the method and the device for misdetection judgment of the detection device, the positions of the edges of the first pattern to be detected and the second pattern to be detected are obtained through the detection device; respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected; and then, whether the detection device has the false detection or not is judged according to the included angle, so that the detection rate of the false detection of the detection device and the yield of the product are improved.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (5)
1. An apparatus for detecting a false positive determination of a device, comprising:
the position acquisition module is used for acquiring the positions of the edges of the first pattern to be detected and the second pattern to be detected through the detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel; the first pattern to be detected is a projection of a first thin film layer in the display panel on a preset projection plane, the second pattern to be detected is a projection of a second thin film layer in the display panel on the preset projection plane, and the second thin film layer is positioned on the first thin film layer;
the angle acquisition module is used for respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected;
the judging module is used for judging whether the detection device has misdetection according to the included angle;
wherein the angle acquisition module comprises:
the first generating unit is used for generating a linear main extension line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
the second generating unit is used for generating linear auxiliary extension lines of the corresponding sides of the second pattern to be detected according to the positions of the sides of the second pattern to be detected;
the first obtaining unit is used for obtaining a first included angle between the main extension line and the preset reference line;
the second acquisition unit is used for acquiring a second included angle between the auxiliary extension line and the preset reference line;
the first generating unit is specifically configured to: generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected; generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
2. The apparatus for misdetection judgment of a detection device according to claim 1, wherein the second generation unit is specifically configured to: generating a secondary boundary line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected; generating a secondary extension line according to the secondary boundary line; wherein the secondary boundary lines are shaped to include linear and non-linear.
3. The apparatus for misdetection judgment of a detection device according to claim 1, wherein the first pattern to be detected has a quadrangular shape, and the main extension lines include two first main extension lines arranged in a first direction and two second main extension lines arranged in a second direction; the preset reference lines comprise horizontal lines and vertical lines;
the first obtaining unit is specifically configured to obtain a first included angle between the first main extension line and a horizontal line; acquiring a first included angle between the second main extension line and the vertical line; wherein an included angle exists between the first direction and the second direction.
4. The apparatus for false positive determination of a detection device according to claim 1, wherein the determination module is specifically configured to:
judging whether the included angle is within a preset angle range; when the included angle exceeds the preset angle range, judging that the detection device has error detection; and when the included angle does not exceed the preset angle range, judging that the detection device has no error detection.
5. A method of misdetection judgment of a detection device, comprising:
acquiring positions of edges of the first pattern to be detected and the second pattern to be detected through a detection device; the detection device is used for detecting the position offset of the first pattern to be detected and the second pattern to be detected in the display panel; the first pattern to be detected is a projection of a first thin film layer in the display panel on a preset projection plane, the second pattern to be detected is a projection of a second thin film layer in the display panel on the preset projection plane, and the second thin film layer is positioned on the first thin film layer;
respectively acquiring included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected;
judging whether the detection device has error detection according to the included angle;
the step of respectively obtaining included angles between each edge of the first pattern to be detected and each edge of the second pattern to be detected and a preset reference line according to the positions of each edge of the first pattern to be detected and each edge of the second pattern to be detected comprises the following steps:
generating a linear main extension line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
generating a linear type auxiliary extension line of the corresponding side of the second pattern to be detected according to the position of each side of the second pattern to be detected;
acquiring a first included angle between the main extension line and the preset reference line;
acquiring a second included angle between the auxiliary extension line and the preset reference line;
the step of generating a linear main extension line of a side corresponding to the first pattern to be detected according to the position of each side of the first pattern to be detected comprises:
generating a main boundary line of the corresponding side of the first pattern to be detected according to the position of each side of the first pattern to be detected;
generating a main extension line according to the main boundary line; wherein the shape of the major boundary lines includes linear and non-linear.
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| JPS57112021A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
| KR0164078B1 (en) * | 1995-12-29 | 1998-12-15 | 김주용 | Overlay mark for exposure energy and focusing |
| KR20140112605A (en) * | 2013-03-11 | 2014-09-24 | 삼성디스플레이 주식회사 | Inspection method of organic pattern |
| CN103713467B (en) * | 2013-12-16 | 2016-07-06 | 合肥京东方光电科技有限公司 | A kind of method of mask plate group and using mask plate group detection alignment precision |
| CN105225978B (en) * | 2014-06-17 | 2019-06-04 | 联华电子股份有限公司 | Correction Method of Overlay Error |
| CN105988293B (en) * | 2015-01-27 | 2018-09-21 | 志圣工业股份有限公司 | Method and system for detecting negative film error |
| CN107305321A (en) * | 2016-04-21 | 2017-10-31 | 中芯国际集成电路制造(上海)有限公司 | A kind of method for examining lithography alignment accuracy |
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