CN109406830A - A kind of detachable scanning probe microscopy mirror body - Google Patents

A kind of detachable scanning probe microscopy mirror body Download PDF

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Publication number
CN109406830A
CN109406830A CN201811491521.6A CN201811491521A CN109406830A CN 109406830 A CN109406830 A CN 109406830A CN 201811491521 A CN201811491521 A CN 201811491521A CN 109406830 A CN109406830 A CN 109406830A
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CN
China
Prior art keywords
support frame
sample stage
mirror body
insulating cover
scanning probe
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Granted
Application number
CN201811491521.6A
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Chinese (zh)
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CN109406830B (en
Inventor
庞宗强
白莉萍
龚昱滔
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Nanjing Post and Telecommunication University
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Nanjing Post and Telecommunication University
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Priority to CN201811491521.6A priority Critical patent/CN109406830B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

本发明公开了一种可分离式扫描探针显微镜镜体，所述显微镜镜体包括压电马达、支撑架、绝缘盖、样品台、屏蔽罩和前置放大电路盒，绝缘盖上开设有一与压电马达形状和大小适配的第一定位卡槽，压电马达通过粘接方式固定在第一定位卡槽内；支撑架内部开设有一用于装设压电马达的腔体，且支撑架上端与绝缘盖固定连接，支撑架下端固定在样品台上以中心为原点开设的与支撑架形状和大小均适配的第二定位卡槽内，样品台固定在前置放大电路盒上，屏蔽罩固定于前置放大电路盒表面，用于罩住压电马达、支撑架、绝缘盖、样品台；本发明整体结构简单且刚性强，采用分离式的镜体结构设计，方便扫描探针显微镜系统的组装调试以及后期的维护。

The invention discloses a detachable scanning probe microscope mirror body. The microscope mirror body comprises a piezoelectric motor, a support frame, an insulating cover, a sample stage, a shielding cover and a preamplifier circuit box. The piezoelectric motor is fitted with a first positioning slot in its shape and size, and the piezoelectric motor is fixed in the first positioning slot by means of bonding; a cavity for accommodating the piezoelectric motor is provided inside the support frame, and the support frame The upper end is fixedly connected with the insulating cover, the lower end of the support frame is fixed in the second positioning slot which is opened on the sample table with the center as the origin and is adapted to the shape and size of the support frame, the sample table is fixed on the preamplifier circuit box, shielding The cover is fixed on the surface of the preamplifier circuit box and is used to cover the piezoelectric motor, the support frame, the insulating cover and the sample stage; the overall structure of the present invention is simple and rigid, and the separate mirror body structure design is adopted, which is convenient for scanning probe microscopes System assembly and debugging and post-maintenance.

Description

A kind of detachable scanning probe microscopy mirror body
Technical field
The invention belongs to scanning probe microscopy fields, and in particular to a kind of detachable scanning probe microscopy mirror body.
Background technique
G.Binnig et al. has invented First scanning tunneling microscope in human history in nineteen eighty-two, because it has uniqueness Excellent atomic resolution capability and extensive measurement purposes, are actively applied to always the forefront of scientific research.Thus derive Scanning probe sets microscope out includes scanning tunneling microscope, atomic force microscope, magnetic force microscopy etc., in surface section Great meaning and broad application prospect are suffered from the research in the fields such as, material science, life science.
The core component of scanning probe microscopy be scanned first is that XYZ three-dimensional can be carried out to sample surfaces Scanner, stability directly determine the quality of scanning imagery.Earliest scanner is a kind of scanner of tripod structure, I.e. three be each responsible for X, Y, the piezoelectrics of Z-direction scanning are mutually perpendicular to orthogonally be fixed together, form one with public Probe is fixed on vertex position by the tripod structure on vertex, realizes three-dimensional by the piezoelectric effect of three piezoelectrics Scanning.But this scanner structure is loose, mechanical stability is poor, more sensitive to external shock and bulky, no Easy of integrationization.Later G.Binnig has invented a kind of single tube scanner, i.e., using an independent four-quadrant piezo tube as scanning Device, the external electrode axial direction quartering of the piezo tube are responsible for the scanning of the direction XY；Its interior electrode keeps complete, is responsible for Z-direction scanning. Because its is simple and compact for structure, scanning accuracy and positioning accuracy are higher, such single tube scanner is used till today by people always.
However piezo tube is frangible, it is necessary to protect to it.General scanning probe microscopy mirror body is all that integration is set Meter, overall processing, are in order to protect to the full extent to piezo tube.Although such overall processing structure rigidity is very By force, but that there is also difficulty of processing is big, the problems such as being not easy to open and close, being unfavorable for the debugging of equipment.
Summary of the invention
Object of the present invention is to it is big for difficulty of processing in existing scanning probe microscopy among the above, be not easy folding and not The problem of conducive to debugging, a kind of detachable scanning probe microscopy mirror body is provided, the present invention uses the mirror structure of separate type Mirror body is designed, facilitates assembly and adjustment and the later maintenance of scanning probe microscopy, specific technical solution is as follows:
A kind of detachable scanning probe microscopy mirror body, the microscope mirror body include piezo-electric motor, support frame, insulation Lid, sample stage, shielding case and pre-amplification circuit box offer one and the piezo-electric motor shapes and sizes on the insulating cover First locating groove of adaptation, the piezo-electric motor are fixed in first locating groove by bonding way；The support One is offered inside frame for installing the cavity of the piezo-electric motor, and support frame as described above upper end and the fixed company of the insulating cover It connects, support frame as described above lower end is fixed on opening up on the sample stage fixed with that support frame as described above shapes and sizes are adapted to second In the card slot of position, the sample stage is fixed on the pre-amplification circuit box, and the shielding case is fixed on the preposition amplification electricity Electromagnetic interference shielding action is played for covering the piezo-electric motor, support frame, insulating cover, sample stage in road box surface.
Further, support frame as described above upper end offers the support frame threaded hole of preset quantity, the insulating cover with it is described Support frame junction corresponds to the insulating cover threaded hole that support frame as described above threaded hole offers identical quantity, support frame as described above and insulation The mode being screwed is covered to be fixed together across support frame as described above threaded hole and insulating cover threaded hole.
Further, the insulating cover is also provided with the slide bar port passed through for the bearing of the piezo-electric motor and is used for Tunnel current conducting wire is introduced between sample and probe to the signal wire port of the pre-amplification circuit box.
Further, support frame as described above lower end offers one for replacing the watch window of test prod and test specimen.
Further, sample cell is offered on the sample stage and be uniformly arranged on the sample stage according to preset quantity Sample stage through-hole, the sample cell are opened in the underface of the watch window；And it is also provided on the sample stage for solid Fixed sample stage tapped through hole.
Further, offered on the pre-amplification circuit box one be adapted to the sample stage shapes and sizes Three locating grooves, for fixing the sample stage；And the corresponding sample stage tapped through hole is provided with amplifying circuit box screw thread and leads to Hole is screwed mode and fixes the sample stage across the sample stage tapped through hole and amplifying circuit box tapped through hole In the third locating groove.
Compared with prior art, the beneficial effect of detachable scanning probe microscopy mirror body of the invention embodies are as follows:
(1) structure is simple and rigidity is strong: it is fixed between all parts by the assembling of locating groove assembled formation blending bolt, Integral rigidity is strong；
(2) it is easy to dismount maintenance: is designed using the mirror structure of separate type, test operation, and scanning probe is facilitated to show The maintenance in the later period of micromirror systems；
(3) effectiveness is good: the shielding case with signal shielding effect is set, protection can not only be generated to mirror body, Also outside electromagnetic interference can be shielded well.
Detailed description of the invention
Fig. 1 is the cross-sectional view signal of detachable scanning probe microscopy mirror body described in the embodiment of the present invention；
Fig. 2 is the Structure explosion diagram signal of detachable scanning probe microscopy mirror body described in the embodiment of the present invention；
Fig. 3 is the structure chart signal of support frame described in the embodiment of the present invention；
Fig. 4 is the structure chart signal of insulating cover described in the embodiment of the present invention；
Fig. 5 is the structure chart signal of sample stage described in the embodiment of the present invention.
Identifier declaration: the preposition amplification electricity of 1- piezo-electric motor, 2- support frame, 3- insulating cover, 4- sample stage, 5- shielding case, 6- Road box；
2a- support frame threaded hole, 2b- watch window, 3a- insulating cover threaded hole, the first signal wire of 3b- port, 3c- slide bar Port, the first locating groove of 3d-, 4a- sample stage threaded hole, the second locating groove of 4b-, 4c- second signal line port, 4d- sample Product slot, 6a- third locating groove.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described.
In conjunction with FIG. 1 to FIG. 5, in embodiments of the present invention, the detachable scanning probe microscopy mirror body provided includes pressure Electric notor 1, support frame 2, insulating cover 3, sample stage 4, shielding case 5 and pre-amplification circuit box 6, offer on insulating cover 3 one with First locating groove 3d of 2 shapes and sizes of piezo-electric motor adaptation, piezo-electric motor 1 are fixed on the first positioning card by bonding way In slot 3d；One is offered inside support frame 2 for installing the cavity of piezo-electric motor 1, and 2 upper end of support frame and insulating cover 3 are fixed Connection；Specifically, 2 upper end of support frame offers the support frame threaded hole 2a of preset quantity, insulating cover 3 and 2 junction of support frame Corresponding support frame threaded hole 2a offers the insulating cover threaded hole 3a of identical quantity, and support frame 2 and insulating cover 3 are screwed Mode pass through support frame threaded hole 2a and insulating cover threaded hole 3a be fixed together, specifically see Fig. 2, Cong Zhongke Know, is opened up on support frame 2 and insulating cover 3 there are four the threaded hole of size adaptation, then be screwed；Certainly, this reality Applying example is only preferred embodiment, for threaded hole open up number the present invention and be not limited and fix.
Referring again to Fig. 2,2 lower end of support frame of the invention be fixed on opened up on sample stage 4 with 2 shape of support frame and big In small the second locating groove 4b being adapted to, and sample stage 4 is fixed on pre-amplification circuit box 6, and shielding case 5 is fixed on preposition 6 surface of amplifying circuit box, for covering piezo-electric motor 1, support frame 2, insulating cover 3, sample stage 4, specifically, being shielded in the present invention On the one hand cover 5 plays the entire mirror body internal structure of protection using having such as stainless steel of effectiveness to prepare to be formed On the other hand effect plays electromagnetic interference shielding action, guarantee is carried out using mirror body of the invention will not be because of electricity in experimentation Magnetic disturbance and influence experimental result.
Refering to Fig. 3, in embodiments of the present invention, for the fluency and operability of guarantee test process, the present invention is also One is offered for replacing the watch window 2b of test prod and test specimen in 2 lower end of support frame；During specific experiment, It can carry out the replacement of probe or laboratory sample according to the actual situation by watch window 2b experimenter, it can be in order to test It is carried out according to the program of setting.
Refering to Fig. 4 and Fig. 2 is combined, in embodiments of the present invention, insulating cover 3 is also provided with the bearing for piezo-electric motor 1 By slide bar port 3c and signal wire for introducing tunnel current conducting wire between sample and probe to pre-amplification circuit box 6 it is logical Mouth 3b.
Refering to Fig. 5 and Fig. 2 is combined to offer sample cell 4d on sample stage 4 and according to present count in embodiments of the present invention Amount is uniformly arranged on sample stage through-hole 4c on sample stage 4, can be led what is introduced by signal wire port 3b by sample stage through-hole 4c Line accesses in pre-amplification circuit box 6；Sample cell 4d is opened in the underface of watch window 2b；And it is also opened up on sample stage 4 There is sample stage tapped through hole 4a for fixing, specifically, being fixed on the corresponding position of pre-amplification circuit box 6 in sample stage 4 On offer a third locating groove 6a being adapted to 4 shapes and sizes of sample stage, and by opening up and sample stage through-hole 4c Sample stage 4 is fixed in third locating groove 6a by compatible amplifying circuit box tapped through hole.
During being tested using mirror body of the invention, by being put into test specimen in sample cell 4d, then Probe, which is controlled, by piezo-electric motor 1 carries out sample manipulation；Meanwhile the property simple for structure in order to guarantee entire mirror body, the present invention are logical It crosses and opens up signal wire port 3b in insulating cover 3, sample stage through-hole 4c is opened up on sample stage 4 by extraneous and pre-amplification circuit box 6 conducting wire combing；And one is opened up at the position directly above corresponding with sample cell 4d of support frame 2 convenient for probe and test specimen The watch window 2b of replacement.
Compared with prior art, the beneficial effect of detachable scanning probe microscopy mirror body of the invention embodies are as follows: knot Structure is simple and rigidity is strong: being fixed between all parts by the assembling of locating groove assembled formation blending bolt, integral rigidity is strong；Easily It is safeguarded in dismounting: being designed using the mirror structure of separate type, facilitate the later period of test operation and scanning probe microscope system Maintenance；Effectiveness is good: the shielding case with signal shielding effect is arranged, can not only generate protection to mirror body, also can Shielding outside electromagnetic interference well.
The foregoing is merely a prefered embodiment of the invention, is not intended to limit the scope of the patents of the invention, although referring to aforementioned reality Applying example, invention is explained in detail, still can be to aforementioned each tool for coming for those skilled in the art Technical solution documented by body embodiment is modified, or carries out equivalence replacement to part of technical characteristic.All benefits The equivalent structure made of description of the invention and accompanying drawing content is directly or indirectly used in other related technical areas, Similarly within the invention patent protection scope.

Claims (6)

1. a kind of detachable scanning probe microscopy mirror body, which is characterized in that the microscope mirror body includes piezo-electric motor, branch Support, insulating cover, sample stage, shielding case and pre-amplification circuit box offer one and the piezo-electric motor on the insulating cover First locating groove of shapes and sizes adaptation, the piezo-electric motor are fixed on first locating groove by bonding way It is interior；One is offered inside support frame as described above for installing the cavity of the piezo-electric motor, and support frame as described above upper end and it is described absolutely Edge lid is fixedly connected, support frame as described above lower end be fixed on opened up on the sample stage it is suitable with support frame as described above shapes and sizes In the second locating groove matched, the sample stage is fixed on the pre-amplification circuit box；The shielding case is fixed on described It is dry to play electromagnetism for covering and protecting the piezo-electric motor, support frame, insulating cover and sample stage in pre-amplification circuit box surface Disturb shielding action.
2. detachable scanning probe microscopy mirror body as described in claim 1, which is characterized in that open support frame as described above upper end Support frame threaded hole equipped with preset quantity, insulating cover support frame as described above threaded hole corresponding with support frame as described above junction are opened Insulating cover threaded hole equipped with identical quantity, the mode that support frame as described above and insulating cover are screwed pass through support frame as described above Threaded hole and insulating cover threaded hole are fixed together.
3. detachable scanning probe microscopy mirror body as claimed in claim 2, which is characterized in that the insulating cover also opens up There is slide bar port that the bearing for the piezo-electric motor passes through and for introducing between sample and probe tunnel current conducting wire to institute State the signal wire port of pre-amplification circuit box.
4. detachable scanning probe microscopy mirror body as claimed in claim 3, which is characterized in that open support frame as described above lower end Equipped with one for replacing the watch window of test prod and test specimen.
5. detachable scanning probe microscopy mirror body as claimed in claim 4, which is characterized in that opened up on the sample stage There is sample cell and be uniformly arranged on sample stage through-hole on the sample stage according to preset quantity, the sample cell is opened in the sight Examine the underface of window；And sample stage tapped through hole for fixing is also provided on the sample stage.
6. detachable scanning probe microscopy mirror body as claimed in claim 5, which is characterized in that the pre-amplification circuit A third locating groove being adapted to the sample stage shapes and sizes is offered on box, for fixing the sample stage；And The corresponding sample stage tapped through hole is provided with amplifying circuit box tapped through hole, is screwed mode across the sample stage The sample stage is fixed in the third locating groove by tapped through hole and amplifying circuit box tapped through hole.
CN201811491521.6A 2018-12-07 2018-12-07 Separable scanning probe microscope body Active CN109406830B (en)

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Denomination of invention: A Separable Scanning Probe Microscope Body

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License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Nanjing Fuliang Network Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018296

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Nanjing Jinsheng Artificial Intelligence Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018283

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Nanjing Jingda Environmental Protection Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018281

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Nanjing Hancong Robot Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018278

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Jiangsu Huida Information Technology Industry Development Research Institute Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018270

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

Application publication date: 20190301

Assignee: Nanjing Extreme New Materials Research Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018268

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241012

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20190301

Assignee: Nanjing Shuqi Network Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980018526

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241015

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20190301

Assignee: Nanjing Light and Shadow Digital Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980020343

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241024

Application publication date: 20190301

Assignee: Nanjing Xingye Intelligent Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980020341

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241024

OL01 Intention to license declared
OL01 Intention to license declared
EE01 Entry into force of recordation of patent licensing contract
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Application publication date: 20190301

Assignee: JIANGSU WANJI TRANSMISSION TECHNOLOGY Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980039133

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241218

Application publication date: 20190301

Assignee: Nanjing Kangyou Biotechnology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980038870

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241218

Application publication date: 20190301

Assignee: Nanjing Kanglikai Pharmaceutical Technology Co.,Ltd.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980038867

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241218

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20190301

Assignee: JIANGSU ZHONGXING WATER SERVICE CO.,LTD.

Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS

Contract record no.: X2024980039163

Denomination of invention: A Separable Scanning Probe Microscope Body

Granted publication date: 20231222

License type: Common License

Record date: 20241219