CN109406830B - Separable scanning probe microscope body - Google Patents
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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Abstract
Description
技术领域Technical field
本发明属于扫描探针显微镜领域，具体涉及一种可分离式扫描探针显微镜镜体。The invention belongs to the field of scanning probe microscopes, and specifically relates to a detachable scanning probe microscope lens body.
背景技术Background technique
G.Binnig等人在1982年发明了人类历史上第一台扫描隧道显微镜，因其具有独特优异的原子分辨能力和广泛的测量用途，一直活跃地应用于科学研究的最前沿。由此衍生出的扫描探针系列显微镜包括扫描隧道显微镜、原子力显微镜、磁力显微镜等，在表面科学、材料科学、生命科学等领域的研究中都有着重大的意义和广泛的应用前景。G. Binnig and others invented the first scanning tunneling microscope in human history in 1982. Because of its unique and excellent atomic resolution capabilities and wide range of measurement applications, it has been actively used at the forefront of scientific research. The scanning probe series microscopes derived from this include scanning tunneling microscopes, atomic force microscopes, magnetic force microscopes, etc., which are of great significance and have broad application prospects in research in surface science, materials science, life science and other fields.
扫描探针显微镜的核心部件之一是能够对样品表面进行XYZ三维方向进行扫描的扫描器，其稳定性直接决定了扫描成像的质量。最早的扫描器是一种三脚架结构的扫描器，即三个分别负责X、Y、Z方向扫描的压电体相互垂直正交地固定在一起，形成一个带有公共顶点的三脚架结构，把探针固定在顶点位置，通过三个压电体的压电效应来实现三维方向的扫描。但这种扫描器结构松散、机械稳定性较差，对外界震动比较敏感，而且体积庞大，不易集成化。后来G.Binnig发明了一种单管扫描器，即利用单独一根四象限压电管作为扫描器，该压电管的外电极轴向四等分，负责XY方向扫描；其内电极保持完整，负责Z方向扫描。因其结构简单紧凑、扫描精度和定位精度较高，该类单管扫描器一直被人们沿用至今。One of the core components of the scanning probe microscope is the scanner that can scan the sample surface in the XYZ three-dimensional direction. Its stability directly determines the quality of the scanning imaging. The earliest scanner was a tripod structure scanner, that is, three piezoelectric bodies responsible for scanning in the X, Y, and Z directions were fixed perpendicularly and orthogonally to each other, forming a tripod structure with a common vertex. The needle is fixed at the vertex position, and scanning in the three-dimensional direction is achieved through the piezoelectric effect of the three piezoelectric bodies. However, this kind of scanner has a loose structure, poor mechanical stability, is sensitive to external vibrations, and is bulky and difficult to integrate. Later, G. Binnig invented a single-tube scanner, which uses a single four-quadrant piezoelectric tube as the scanner. The outer electrode of the piezoelectric tube is divided into four equal parts axially and is responsible for scanning in the XY direction; its inner electrode remains intact. , responsible for scanning in the Z direction. Because of its simple and compact structure, high scanning accuracy and high positioning accuracy, this type of single-tube scanner has been used today.
然而压电管易碎，必须对其进行保护。一般的扫描探针显微镜镜体都是一体化设计、整体加工，是为了能最大程度上对压电管进行保护。这样的整体加工结构虽然刚性很强，但也存在加工难度大、不易开合，不利于设备的调试等问题。However, piezoelectric tubes are fragile and must be protected. The general scanning probe microscope body is designed in an integrated manner and processed as a whole in order to protect the piezoelectric tube to the greatest extent. Although such an overall processing structure is very rigid, it also has problems such as difficulty in processing, difficulty in opening and closing, and is not conducive to equipment debugging.
发明内容Contents of the invention
本发明目的是针对上述中现有的扫描探针显微镜中加工难度大、不易开合以及不利于调试的问题，提供一种可分离式扫描探针显微镜镜体，本发明采用分离式的镜体结构设计镜体，方便扫描探针显微镜的组装调试和后期维护，具体技术方案如下：The object of the present invention is to provide a detachable scanning probe microscope lens body in order to solve the above-mentioned problems of the existing scanning probe microscope being difficult to process, difficult to open and close, and unfavorable for debugging. The present invention adopts a detachable lens body. The structural design of the mirror body facilitates the assembly, debugging and later maintenance of the scanning probe microscope. The specific technical solutions are as follows:
一种可分离式扫描探针显微镜镜体，所述显微镜镜体包括压电马达、支撑架、绝缘盖、样品台、屏蔽罩和前置放大电路盒，所述绝缘盖上开设有一与所述压电马达形状和大小适配的第一定位卡槽，所述压电马达通过粘接方式固定在所述第一定位卡槽内；所述支撑架内部开设有一用于装设所述压电马达的腔体，且所述支撑架上端与所述绝缘盖固定连接，所述支撑架下端固定在所述样品台上开设的与所述支撑架形状和大小均适配的第二定位卡槽内，所述样品台固定在所述前置放大电路盒上，所述屏蔽罩固定于所述前置放大电路盒表面，用于罩住所述压电马达、支撑架、绝缘盖、样品台，起电磁干扰屏蔽作用。A detachable scanning probe microscope body. The microscope body includes a piezoelectric motor, a support frame, an insulating cover, a sample stage, a shielding cover and a preamplifier circuit box. The insulating cover is provided with a A first positioning slot adapted to the shape and size of the piezoelectric motor. The piezoelectric motor is fixed in the first positioning slot through adhesive bonding. There is a slot inside the support frame for installing the piezoelectric motor. The cavity of the motor, and the upper end of the support frame is fixedly connected to the insulating cover, and the lower end of the support frame is fixed on the second positioning slot on the sample stage that is adapted to the shape and size of the support frame. Inside, the sample stage is fixed on the preamplifier circuit box, and the shielding cover is fixed on the surface of the preamplifier circuit box for covering the piezoelectric motor, support frame, insulating cover, and sample stage, Acts as electromagnetic interference shielding.
进一步的，所述支撑架上端开设有预设数量的支撑架螺纹孔，所述绝缘盖与所述支撑架连接处对应所述支撑架螺纹孔开设有相同数量的绝缘盖螺纹孔，所述支撑架和绝缘盖通过螺丝固定的方式穿过所述支撑架螺纹孔和绝缘盖螺纹孔固定连接在一起。Further, a preset number of threaded holes of the supporting frame is opened at the upper end of the supporting frame, and the same number of threaded holes of the insulating cover are opened at the connection point between the insulating cover and the supporting frame corresponding to the threaded holes of the supporting frame. The frame and the insulating cover are fixedly connected together by screws passing through the threaded holes of the support frame and the threaded holes of the insulating cover.
进一步的，所述绝缘盖还开设有用于所述压电马达的轴承通过的滑杆通口和用于引入样品和探针间隧道电流导线至所述前置放大电路盒的信号线通口。Furthermore, the insulating cover is also provided with a sliding rod opening for the bearing of the piezoelectric motor to pass through and a signal line opening for introducing tunnel current wires between the sample and the probe to the preamplifier circuit box.
进一步的，所述支撑架下端开设有一用于更换试验探针和试验样品的观察窗口。Furthermore, an observation window is provided at the lower end of the support frame for replacing test probes and test samples.
进一步的，所述样品台上开设有样品槽和按照预设数量均匀设置于所述样品台上样品台通孔，所述样品槽开设于所述观察窗口的正下方；且所述样品台上还开设有用于固定的样品台螺纹通孔。Further, the sample platform is provided with sample grooves and a preset number of sample platform through-holes evenly arranged on the sample platform, and the sample grooves are provided directly below the observation window; and the sample platform is provided with sample grooves. There is also a threaded through hole for fixing the sample stage.
进一步的，所述前置放大电路盒上开设有一与所述样品台形状和大小均适配的第三定位卡槽，用于固定所述样品台；且对应所述样品台螺纹通孔设置有放大电路盒螺纹通孔，通过螺丝固定方式穿过所述样品台螺纹通孔和放大电路盒螺纹通孔将所述样品台固定在所述第三定位卡槽中。Further, the preamplifier circuit box is provided with a third positioning slot that is adapted to the shape and size of the sample stage for fixing the sample stage; and is provided with a threaded through hole corresponding to the sample stage. The threaded through hole of the amplifying circuit box is passed through the threaded through hole of the sample stage and the threaded through hole of the amplifying circuit box by means of screws to fix the sample stage in the third positioning slot.
与现有技术相比，本发明的可分离式扫描探针显微镜镜体的有益效果体现为：Compared with the existing technology, the beneficial effects of the detachable scanning probe microscope body of the present invention are reflected in:
(1)结构简单且刚性强：各个部件之间通过定位卡槽组装成型并用螺栓组装固定，整体刚性强；(1) Simple structure and strong rigidity: Each component is assembled through positioning slots and assembled and fixed with bolts, and the overall rigidity is strong;
(2)易于拆装维护：采用分离式的镜体结构设计，方便试验操作，以及扫描探针显微镜系统的后期的维护；(2) Easy to disassemble and maintain: using a separate mirror structure design to facilitate experimental operations and subsequent maintenance of the scanning probe microscope system;
(3)电磁屏蔽效果好：设置具有信号屏蔽效果的屏蔽罩，不仅能对镜体产生保护，也能很好的屏蔽外界电磁干扰。(3) Good electromagnetic shielding effect: Setting up a shielding cover with signal shielding effect can not only protect the mirror body, but also effectively shield external electromagnetic interference.
附图说明Description of the drawings
图1为本发明实施例中所述可分离式扫描探针显微镜镜体的剖视图示意；Figure 1 is a schematic cross-sectional view of the detachable scanning probe microscope body in an embodiment of the present invention;
图2为本发明实施例中所述可分离式扫描探针显微镜镜体的结构爆炸图示意；Figure 2 is a schematic exploded view of the structure of the detachable scanning probe microscope body in the embodiment of the present invention;
图3为本发明实施例中所述支撑架的的结构图示意；Figure 3 is a schematic structural diagram of the support frame in the embodiment of the present invention;
图4为本发明实施例中所述绝缘盖的结构图示意；Figure 4 is a schematic structural diagram of the insulating cover in the embodiment of the present invention;
图5为本发明实施例中所述样品台的结构图示意。Figure 5 is a schematic structural diagram of the sample stage in the embodiment of the present invention.
标识说明：1-压电马达、2-支撑架、3-绝缘盖、4-样品台、5-屏蔽罩、6-前置放大电路盒；Label description: 1-piezoelectric motor, 2-support frame, 3-insulation cover, 4-sample stage, 5-shielding cover, 6-preamplifier circuit box;
2a-支撑架螺纹孔、2b-观察窗口、3a-绝缘盖螺纹孔、3b-第一信号线通口、3c-滑杆通口、3d-第一定位卡槽、4a-样品台螺纹孔、4b-第二定位卡槽、4c-第二信号线通口、4d-样品槽、6a-第三定位卡槽。2a-support frame threaded hole, 2b-observation window, 3a-insulation cover threaded hole, 3b-first signal line port, 3c-sliding rod port, 3d-first positioning slot, 4a-sample stage threaded hole, 4b-second positioning slot, 4c-second signal line port, 4d-sample slot, 6a-third positioning slot.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.
结合图1～图5，在本发明实施例中，提供的可分离式扫描探针显微镜镜体包括压电马达1、支撑架2、绝缘盖3、样品台4、屏蔽罩5和前置放大电路盒6，绝缘盖3上开设有一与压电马达2形状和大小适配的第一定位卡槽3d，压电马达1通过粘接方式固定在第一定位卡槽3d内；支撑架2内部开设有一用于装设压电马达1的腔体，且支撑架2上端与绝缘盖3固定连接；具体的，支撑架2上端开设有预设数量的支撑架螺纹孔2a，绝缘盖3与支撑架2连接处对应支撑架螺纹孔2a开设有相同数量的绝缘盖螺纹孔3a，支撑架2和绝缘盖3通过螺丝固定的方式穿过支撑架螺纹孔2a和绝缘盖螺纹孔3a固定连接在一起，具体可参阅图2，从中可知，支撑架2和绝缘盖3上开设有四个大小适配的螺纹孔，再通过螺丝固定即可；当然，本实施例仅为较佳实施例，对于螺纹孔的开设数目本发明并不进行限制和固定。With reference to Figures 1 to 5, in the embodiment of the present invention, a detachable scanning probe microscope body is provided including a piezoelectric motor 1, a support frame 2, an insulating cover 3, a sample stage 4, a shielding cover 5 and a preamplifier The circuit box 6 and the insulating cover 3 are provided with a first positioning slot 3d that matches the shape and size of the piezoelectric motor 2. The piezoelectric motor 1 is fixed in the first positioning slot 3d by adhesive; inside the support frame 2 There is a cavity for installing the piezoelectric motor 1, and the upper end of the support frame 2 is fixedly connected to the insulating cover 3; specifically, the upper end of the support frame 2 is provided with a preset number of support frame threaded holes 2a, and the insulating cover 3 and the support The same number of insulating cover threaded holes 3a are opened at the connection point of the frame 2 corresponding to the threaded holes 2a of the supporting frame. The supporting frame 2 and the insulating cover 3 are fixedly connected together by screws through the threaded holes 2a of the supporting frame and the threaded holes 3a of the insulating cover. , please refer to Figure 2 for details. It can be seen from it that four threaded holes of suitable sizes are provided on the support frame 2 and the insulating cover 3, and then they can be fixed with screws; of course, this embodiment is only a preferred embodiment, and the threads The number of holes is not limited or fixed in the present invention.
再次参阅图2，本发明的支撑架2下端固定在样品台4上开设的与支撑架2形状和大小均适配的第二定位卡槽4b内，且样品台4固定在前置放大电路盒6上，屏蔽罩5固定于前置放大电路盒6表面，用于罩住压电马达1、支撑架2、绝缘盖3、样品台4，具体的，本发明中屏蔽罩5采用具有电磁屏蔽效果的例如不锈钢制备形成，一方面起到保护整个镜体内部结构的作用，另一方面起电磁干扰屏蔽作用，保证使用本发明的镜体进行实验过程中不会因为电磁干扰而影响实验结果。Referring again to Figure 2, the lower end of the support frame 2 of the present invention is fixed in the second positioning slot 4b provided on the sample stage 4 that is adapted to the shape and size of the support frame 2, and the sample stage 4 is fixed in the preamplifier circuit box. 6, the shielding cover 5 is fixed on the surface of the preamplifier circuit box 6, and is used to cover the piezoelectric motor 1, the support frame 2, the insulating cover 3, and the sample stage 4. Specifically, in the present invention, the shielding cover 5 adopts an electromagnetic shielding The effect is, for example, made of stainless steel, which on the one hand protects the internal structure of the entire mirror body, and on the other hand acts as an electromagnetic interference shield to ensure that the experimental results will not be affected by electromagnetic interference during experiments using the mirror body of the present invention.
参阅图3，在本发明实施例中，为了保证试验过程的流畅性和可操作性，本发明还在支撑架2下端开设有一用于更换试验探针和试验样品的观察窗口2b；在具体实验过程中，通过观察窗口2b实验者可以根据实际情况进行探针或者实验样品的更换，以便于实验可以按照设定的程序进行。Referring to Figure 3, in the embodiment of the present invention, in order to ensure the smoothness and operability of the test process, the present invention also provides an observation window 2b at the lower end of the support frame 2 for replacing test probes and test samples; in the specific experiment During the process, through the observation window 2b, the experimenter can replace the probe or experimental sample according to the actual situation, so that the experiment can be carried out according to the set procedure.
参阅图4并结合图2，在本发明实施例中，绝缘盖3还开设有用于压电马达1的轴承通过的滑杆通口3c和用于引入样品和探针间隧道电流导线至前置放大电路盒6的信号线通口3b。Referring to Figure 4 in conjunction with Figure 2, in the embodiment of the present invention, the insulating cover 3 also has a sliding rod opening 3c for the bearing of the piezoelectric motor 1 to pass through and a tunnel current wire for introducing the tunnel current wire between the sample and the probe to the front. The signal line opening 3b of the amplifier circuit box 6.
参阅图5并结合图2，在本发明实施例中，样品台4上开设有样品槽4d和按照预设数量均匀设置于样品台4上样品台通孔4c，通过样品台通孔4c可将由信号线通口3b引入的导线接入至前置放大电路盒6中；样品槽4d开设于观察窗口2b的正下方；且样品台4上还开设有用于固定的样品台螺纹通孔4a，具体的，在样品台4固定在前置放大电路盒6对应的位置上开设有一与样品台4形状和大小均适配的第三定位卡槽6a，并通过开设与样品台通孔4c相适配的放大电路盒螺纹通孔来将样品台4固定在第三定位卡槽6a内。Referring to Figure 5 in conjunction with Figure 2, in the embodiment of the present invention, the sample stage 4 is provided with sample slots 4d and a preset number of sample stage through holes 4c are evenly arranged on the sample stage 4. Through the sample stage through holes 4c, the sample can be The wires introduced through the signal line opening 3b are connected to the preamplifier circuit box 6; the sample slot 4d is opened directly below the observation window 2b; and the sample table 4 is also provided with a sample table threaded through hole 4a for fixation. Specifically, , a third positioning slot 6a matching the shape and size of the sample stage 4 is provided at the position corresponding to the preamplifier circuit box 6 when the sample stage 4 is fixed, and is adapted to the through hole 4c of the sample stage by opening The threaded through hole of the amplification circuit box is used to fix the sample stage 4 in the third positioning slot 6a.
在使用本发明的镜体进行试验的过程中，通过在样品槽4d中放入试验样品，随后通过压电马达1控制探针进行试样操作；同时，为了保证整个镜体的结构简洁性，本发明通过在绝缘盖3开设信号线通口3b，在样品台4上开设样品台通孔4c将外界与前置放大电路盒6的导线梳理；而且在支撑架2与样品槽4d对应的正上方位置处开设一便于探针和试验样品更换的观察窗口2b。In the process of testing using the mirror body of the present invention, the test sample is placed in the sample tank 4d, and then the sample is operated by controlling the probe through the piezoelectric motor 1; at the same time, in order to ensure the structural simplicity of the entire mirror body, In the present invention, the signal line opening 3b is opened in the insulating cover 3, and the sample platform through hole 4c is opened in the sample stage 4 to comb the wires between the outside world and the preamplifier circuit box 6; An observation window 2b is provided at the upper position to facilitate the replacement of probes and test samples.
与现有技术相比，本发明的可分离式扫描探针显微镜镜体的有益效果体现为：结构简单且刚性强：各个部件之间通过定位卡槽组装成型并用螺栓组装固定，整体刚性强；易于拆装维护：采用分离式的镜体结构设计，方便试验操作，以及扫描探针显微镜系统的后期的维护；电磁屏蔽效果好：设置具有信号屏蔽效果的屏蔽罩，不仅能对镜体产生保护，也能很好的屏蔽外界电磁干扰。Compared with the existing technology, the beneficial effects of the detachable scanning probe microscope body of the present invention are as follows: simple structure and strong rigidity: each component is assembled through positioning slots and assembled and fixed with bolts, and the overall rigidity is strong; Easy to disassemble and maintain: the separated mirror body structure design is used to facilitate experimental operations and later maintenance of the scanning probe microscope system; good electromagnetic shielding effect: setting up a shielding cover with signal shielding effect can not only protect the mirror body , and can also well shield external electromagnetic interference.
以上仅为本发明的较佳实施例，但并不限制本发明的专利范围，尽管参照前述实施例对本发明进行了详细的说明，对于本领域的技术人员来而言，其依然可以对前述各具体实施方式所记载的技术方案进行修改，或者对其中部分技术特征进行等效替换。凡是利用本发明说明书及附图内容所做的等效结构，直接或间接运用在其他相关的技术领域，均同理在本发明专利保护范围之内。The above are only preferred embodiments of the present invention, but do not limit the patent scope of the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make various modifications to the foregoing aspects. The technical solutions described in the specific embodiments are modified, or some of the technical features are replaced with equivalents. Any equivalent structures made using the contents of the description and drawings of the present invention and used directly or indirectly in other related technical fields shall likewise fall within the scope of patent protection of the present invention.
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