CN110415744A - Nonvolatile storage based on ferroelectric transistor - Google Patents
Nonvolatile storage based on ferroelectric transistor Download PDFInfo
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- CN110415744A CN110415744A CN201910626112.0A CN201910626112A CN110415744A CN 110415744 A CN110415744 A CN 110415744A CN 201910626112 A CN201910626112 A CN 201910626112A CN 110415744 A CN110415744 A CN 110415744A
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Abstract
Description
技术领域technical field
本发明涉及低功耗非易失存储器结构设计技术领域,特别涉及一种基于铁电晶体管的非易失存储器。The invention relates to the technical field of low power consumption nonvolatile memory structure design, in particular to a nonvolatile memory based on ferroelectric transistors.
背景技术Background technique
当今时代下,随着信息量的日益扩大,人们为了防止存储信息丢失,对存储器的非易失性能提出了更高的要求。很多存储器,例如,DRAM(dynamic random access memory,动态随机存储器),当过长时间没有外部供电时,存储器上存储的信息会因为电路器件能量的减少而丢失。随机存取的NVM(nonvolatile memory,非易失存储器)可以有效的解决上述问题。目前的非易失存储器有PCRAM、ReRAM、FeRAM、STT-MRAM等,但是这些存储器在数据存取消耗的能量与延时、工艺兼容性、器件耐久度、电路的设计复杂度等方面依旧有较多的不足之处。In today's era, with the increasing amount of information, people put forward higher requirements on the non-volatile performance of memory in order to prevent the loss of stored information. For many memories, such as DRAM (dynamic random access memory, dynamic random access memory), when there is no external power supply for a long time, the information stored in the memory will be lost due to the reduction of the energy of the circuit device. Random access NVM (nonvolatile memory, nonvolatile memory) can effectively solve the above problems. The current non-volatile memories include PCRAM, ReRAM, FeRAM, STT-MRAM, etc., but these memories still have relatively low data access energy consumption and delay, process compatibility, device durability, and circuit design complexity. Many deficiencies.
当前,基于新型材料以及制作工艺的FeFET(ferroelectric field effecttransistor,铁电晶体管)使得设计的存储器拥有很好的工艺兼容性以及低功耗特性,并且具有较好的耐久度和适中的工作电压,例如,最近的业内发表的测试结果表明,FeFET读写操作的偏置电压可以降低到1.5V以内。这些特征表明了铁电晶体管在阵列设计、分布式数据存储(distributed data storage)、类神经网络计算(neuromorphic computing)领域拥有很大的应用潜力。进一步地,在Nonvolatile memory design based on ferroelectricFETs中设计了每个电路单元拥有两个晶体管的非易失存储阵列,实现了较高的能量效率;但是该设计读写电压较高,未能充分发挥铁电晶体管的高能量效率的潜力。At present, the FeFET (ferroelectric field effect transistor, ferroelectric transistor) based on new materials and manufacturing processes makes the designed memory have good process compatibility and low power consumption characteristics, and has good durability and moderate working voltage, such as , The recent test results published in the industry show that the bias voltage of FeFET read and write operations can be reduced to within 1.5V. These characteristics indicate that ferroelectric transistors have great application potential in the fields of array design, distributed data storage, and neuromorphic computing. Further, in the Nonvolatile memory design based on ferroelectric FETs, a nonvolatile memory array with two transistors per circuit unit is designed to achieve high energy efficiency; Potential for high energy efficiency of electrical transistors.
发明内容Contents of the invention
本发明旨在至少在一定程度上解决相关技术中的技术问题之一。The present invention aims to solve one of the technical problems in the related art at least to a certain extent.
为此,本发明的一个目的在于提出一类基于铁电晶体管设计的电路单元,该电路单元充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。For this reason, an object of the present invention is to propose a class of circuit units designed based on ferroelectric transistors, which fully utilizes the drain-source current-gate voltage hysteresis characteristics of ferroelectric transistors, and designs novel circuit structures and operations In this way, the purpose of lower power consumption non-volatile memory is achieved.
本发明的另一个目的在于,基于前述铁电晶体管设计的电路单元,提出对应的阵列电路。Another object of the present invention is to propose a corresponding array circuit based on the above-mentioned circuit unit designed with ferroelectric transistors.
为达到上述目的,本发明第一方面实施例提出了一种基于铁电晶体管设计的电路单元,包括:第一晶体管、第二晶体管、位线、第一字线与第二字线,其中,所述第一晶体管的栅极与所述第一字线相连,所述第一晶体管的漏极与所述位线相连,所述第一晶体管的源极与所述第二晶体管的漏极相连,所述第二晶体管的栅极与所述第二字线相连,所述第二晶体管的源极接地或者偏置在预设电位,且第一晶体管和第二晶体管中至少有一个晶体管是铁电晶体管。In order to achieve the above purpose, the embodiment of the first aspect of the present invention proposes a circuit unit based on a ferroelectric transistor design, including: a first transistor, a second transistor, a bit line, a first word line and a second word line, wherein, The gate of the first transistor is connected to the first word line, the drain of the first transistor is connected to the bit line, and the source of the first transistor is connected to the drain of the second transistor , the gate of the second transistor is connected to the second word line, the source of the second transistor is grounded or biased at a preset potential, and at least one of the first transistor and the second transistor is an iron electric transistor.
为达到上述目的,本发明第二方面实施例提出了一种基于铁电晶体管设计的阵列电路,包括:至少一个如上述实施例所述的电路单元,且所述阵列电路的各个单元通过电气连接的方式组合成多行多列的布局方式,其中,同一行的电路单元的第一字线相连,同一行的电路单元的第二字线相连,同一列的电路单元的位线相连。In order to achieve the above purpose, the embodiment of the second aspect of the present invention proposes an array circuit based on ferroelectric transistor design, including: at least one circuit unit as described in the above embodiment, and each unit of the array circuit is electrically connected A multi-row multi-column layout is combined in a multi-row multi-column manner, wherein the first word lines of the circuit units in the same row are connected, the second word lines of the circuit units in the same row are connected, and the bit lines of the circuit units in the same column are connected.
本发明实施例的基于铁电晶体管设计的电路单元和阵列电路,对于每个电路单元拥有两个晶体管的非易失存储器,写入操作的能量延时积可以更低,从而充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。According to the circuit unit and array circuit designed based on ferroelectric transistors in the embodiment of the present invention, for each circuit unit has a nonvolatile memory with two transistors, the energy delay product of the write operation can be lower, thereby fully utilizing the ferroelectric The transistor's drain-source current-gate voltage hysteresis characteristic, a new circuit structure and operation mode are designed, and the purpose of lower power consumption non-volatile memory is achieved.
另外,根据本发明上述实施例的基于铁电晶体管设计的阵列电路还可以具有以下附加的技术特征:In addition, the array circuit designed based on ferroelectric transistors according to the above-mentioned embodiments of the present invention may also have the following additional technical features:
进一步地,本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行读操作时,所述电路单元的第二字线的电压使得所述电路单元的第二晶体管导通,以根据所述电路单元的第一晶体管的漏源之间电阻值大小或所述电阻值大小对所述电路单元的位线上的电压或电流的变化影响分辨所述电路单元存储的数据。Further, in an embodiment of the present invention, wherein, when the data stored in the circuit unit is read, the voltage of the second word line of the circuit unit makes the second transistor of the circuit unit turn on, so as to distinguish the stored value of the circuit unit according to the resistance value between the drain and source of the first transistor of the circuit unit or the influence of the resistance value on the voltage or current change on the bit line of the circuit unit. data.
进一步地,本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行写操作时,控制所述位线和所述第一字线的电压,使所述电路单元的第一晶体管的极化特性与所需要存储的数据一致。Further, in one embodiment of the present invention, wherein, when the data stored in the circuit unit is written, the voltages of the bit line and the first word line are controlled so that the circuit unit The polarization characteristic of the first transistor is consistent with the data to be stored.
进一步地,本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行写操作时,位线电压偏置在高电平或者低电平,且所述第一字线的电压在低电压和高电压分别停留一段时间后再恢复至原本的电压,所述第二字线的电压使得所述电路单元的第二晶体管截止。Further, in an embodiment of the present invention, wherein, when the data stored in the circuit unit is written, the bit line voltage is biased at a high level or a low level, and the first word The voltage of the line stays at the low voltage and the high voltage for a period of time and then recovers to the original voltage, and the voltage of the second word line causes the second transistor of the circuit unit to be turned off.
为达到上述目的,本发明第三方面实施例提出了一种基于铁电晶体管设计的电路单元,包括:第一晶体管、第二晶体管、第三晶体管、第一位线、第二位线、第一字线、第二字线与第三字线,其中,所述第一晶体管的栅极与所述第一字线相连,所述第一晶体管的漏极与所述第二晶体管的栅极相连,所述第一晶体管的源极与所述第一位线相连,第二晶体管的漏极与第三晶体管的源极相连,所述第二晶体管的源极与所述第二字线相连,所述第三晶体管的栅极与所述第三字线相连,所述第三晶体管的漏极与所述第二位线相连,其中,所述第一晶体管、第二晶体管和第三晶体管中至少有一个晶体管是铁电晶体管。In order to achieve the above purpose, the embodiment of the third aspect of the present invention proposes a circuit unit based on ferroelectric transistor design, including: a first transistor, a second transistor, a third transistor, a first bit line, a second bit line, a second A word line, a second word line and a third word line, wherein the gate of the first transistor is connected to the first word line, the drain of the first transistor is connected to the gate of the second transistor connected, the source of the first transistor is connected to the first bit line, the drain of the second transistor is connected to the source of the third transistor, and the source of the second transistor is connected to the second word line , the gate of the third transistor is connected to the third word line, and the drain of the third transistor is connected to the second bit line, wherein the first transistor, the second transistor and the third transistor At least one of the transistors in is a ferroelectric transistor.
另外,根据本发明上述实施例的基于铁电晶体管设计的电路单元还可以具有以下附加的技术特征:In addition, the circuit unit designed based on ferroelectric transistors according to the above embodiments of the present invention may also have the following additional technical features:
进一步地,在本发明的一个实施例中,所述第一位线和所述第二位线以短接的形式合并为一条位线。Further, in an embodiment of the present invention, the first bit line and the second bit line are combined into one bit line in a form of short circuit.
为达到上述目的,本发明第四方面实施例提出了一种基于铁电晶体管设计的阵列电路,包括:至少一个如上述实施例所述的电路单元,且所述阵列电路的各个单元通过电气连接的方式组合成多行多列的布局方式,其中,同一行的电路单元的第一字线相连,同一行的电路单元的第二字线相连,同一行的电路单元的第三字线也相连,同一列的电路单元的第一位线相连,同一列的电路单元的第二位线也相连。In order to achieve the above purpose, the embodiment of the fourth aspect of the present invention proposes an array circuit based on ferroelectric transistor design, including: at least one circuit unit as described in the above embodiment, and each unit of the array circuit is electrically connected The layout of multiple rows and multiple columns is combined in a multi-row and multi-column manner, wherein the first word lines of the circuit cells in the same row are connected, the second word lines of the circuit cells in the same row are connected, and the third word lines of the circuit cells in the same row are also connected. , the first bit lines of the circuit units in the same column are connected, and the second bit lines of the circuit units in the same column are also connected.
本发明实施例的基于铁电晶体管设计的电路单元和阵列电路,对于每个电路单元拥有三个晶体管的非易失存储器,有效降低了写入操作的能量延时积,对某个电路单元的写入操作不会影响其他电路单元的正常状态,同时,电路单元只需要单一电压的维持操作,从而充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。The circuit unit and array circuit designed based on ferroelectric transistors in the embodiment of the present invention effectively reduce the energy delay product of the write operation for a nonvolatile memory with three transistors for each circuit unit. The write operation will not affect the normal state of other circuit units. At the same time, the circuit unit only needs a single voltage to maintain the operation, thus making full use of the drain-source current-gate voltage hysteresis characteristics of the ferroelectric transistor, and designing a new circuit structure and operation mode, the purpose of lower power consumption non-volatile memory is achieved.
另外,根据本发明上述实施例的基于铁电晶体管设计的阵列电路还可以具有以下附加的技术特征:In addition, the array circuit designed based on ferroelectric transistors according to the above-mentioned embodiments of the present invention may also have the following additional technical features:
进一步地,在本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行读操作时,所述第三字线的电压使得所述第三晶体管导通,以根据所述第二晶体管的漏源之间的电阻值大小或其影响来分辨所述电路单元存储的数据。Further, in one embodiment of the present invention, wherein, when the data stored in the circuit unit is read, the voltage of the third word line makes the third transistor turn on, so as to The value of the resistance between the drain and source of the second transistor or its influence is used to distinguish the data stored by the circuit unit.
进一步地,在本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行写操作时,控制所述第二字线和所述第一位线的电压,使所述电路单元的第二晶体管的极化特性与所需要存储的数据一致。Further, in one embodiment of the present invention, wherein, when the data stored in the circuit unit is written, the voltages of the second word line and the first bit line are controlled so that the The polarization characteristic of the second transistor of the circuit unit is consistent with the data to be stored.
进一步地,在本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行写操作时,所述第一位线电压偏置在高电平或者低电平,所述第一字线的电压使得所述第一晶体管导通,所述第三字线的电压使得所述第三晶体管截止。Further, in an embodiment of the present invention, wherein, when the data stored in the circuit unit is written, the voltage of the first bit line is biased at a high level or a low level, so The voltage of the first word line turns on the first transistor, and the voltage of the third word line turns off the third transistor.
进一步地,在本发明的一个实施例中,其中,在对其中所述的电路单元所存储的数据进行写操作时,所述第二字线的电压在低电压和高电压分别停留一段时间后再恢复至原本的电压。Further, in one embodiment of the present invention, wherein when the data stored in the circuit unit is written, the voltage of the second word line stays at a low voltage and a high voltage for a period of time respectively Then return to the original voltage.
进一步地,在本发明的一个实施例中,所述第一位线和所述第二位线以短接的形式合并为一条位线。Further, in an embodiment of the present invention, the first bit line and the second bit line are combined into one bit line in a form of short circuit.
本发明附加的方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
附图说明Description of drawings
本发明上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and easy to understand from the following description of the embodiments in conjunction with the accompanying drawings, wherein:
图1为根据本发明实施例的铁电晶体管的电路符号示意图;1 is a schematic diagram of circuit symbols of a ferroelectric transistor according to an embodiment of the present invention;
图2为根据本发明实施例的铁电晶体管的一种结构的示意图;2 is a schematic diagram of a structure of a ferroelectric transistor according to an embodiment of the present invention;
图3为根据本发明实施例的铁电晶体管漏源电导-栅源电压滞回特性曲线的一种典型情况示意图;3 is a schematic diagram of a typical situation of a ferroelectric transistor drain-source conductance-gate-source voltage hysteresis characteristic curve according to an embodiment of the present invention;
图4为根据本发明实施例的包含两个晶体管的电路单元的结构以及读写操作示意图;FIG. 4 is a schematic diagram of a structure of a circuit unit including two transistors and a read and write operation according to an embodiment of the present invention;
图5为根据本发明实施例的基于铁电晶体管设计的阵列电路的结构示意图;5 is a schematic structural diagram of an array circuit designed based on ferroelectric transistors according to an embodiment of the present invention;
图6为根据本发明实施例的第一种存储器的一种阵列结构示意图;6 is a schematic diagram of an array structure of a first memory according to an embodiment of the present invention;
图7为根据本发明实施例的第一种存储器不同操作下的瞬态波形示意图;7 is a schematic diagram of transient waveforms under different operations of the first memory according to an embodiment of the present invention;
图8为根据本发明实施例的包含三个晶体管的电路单元的结构以及读写操作示意图;FIG. 8 is a schematic diagram of a structure of a circuit unit including three transistors and a read and write operation according to an embodiment of the present invention;
图9为根据本发明实施例的第二种存储器的一种阵列结构示意图;FIG. 9 is a schematic diagram of an array structure of a second memory according to an embodiment of the present invention;
图10为根据本发明实施例的第三种存储器的一种阵列结构示意图;FIG. 10 is a schematic diagram of an array structure of a third memory according to an embodiment of the present invention;
图11为根据本发明实施例的基于铁电晶体管设计的不同非易失存储器写入延时-平均写入能量、读取延时-平均读取能量、写入延时-动能系数三种性能的比较示意图;Figure 11 shows three types of non-volatile memory write delay-average write energy, read delay-average read energy, and write delay-kinetic energy coefficient based on ferroelectric transistor design according to an embodiment of the present invention Schematic diagram of the comparison of performance;
图12为根据本发明实施例的基于铁电晶体管设计的不同非易失存储器之间性能指标的比较示意图。FIG. 12 is a schematic diagram of comparison of performance indicators among different nonvolatile memories based on ferroelectric transistor designs according to an embodiment of the present invention.
具体实施方式Detailed ways
下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
本发明实施例主要是一类基于铁电晶体管的非易失存储器,包括基于铁电晶体管设计的非易失存储器的单元电路和阵列电路,其单元电路结构包括两个晶体管或三个晶体管,多个单元之间通过电气连接的方式可组合成若干行若干列的布局方式,本发明实施例利用铁电晶体管漏源电流-栅极电压的滞回特性,完成对存储器的高效率读写操作。The embodiments of the present invention are mainly a type of nonvolatile memory based on ferroelectric transistors, including unit circuits and array circuits of nonvolatile memories designed based on ferroelectric transistors, and the unit circuit structure includes two transistors or three transistors. Each unit can be combined into a layout of several rows and several columns through electrical connection. The embodiment of the present invention utilizes the hysteresis characteristic of the drain-source current-gate voltage of the ferroelectric transistor to complete high-efficiency read and write operations on the memory.
下面参照附图描述根据本发明实施例提出的基于铁电晶体管设计的电路单元及存储器,首先将参照附图描述根据本发明实施例提出的基于铁电晶体管设计的电路单元。The ferroelectric transistor-based circuit unit and memory according to the embodiments of the present invention will be described below with reference to the drawings. First, the ferroelectric transistor-based circuit unit according to the embodiments of the present invention will be described with reference to the drawings.
该基于铁电晶体管设计的电路单元包括:第一晶体管、第二晶体管、位线、第一字线与第二字线。The circuit unit designed based on ferroelectric transistors includes: a first transistor, a second transistor, a bit line, a first word line and a second word line.
其中,第一晶体管的栅极与第一字线相连,第一晶体管的漏极与位线相连,第一晶体管的源极与第二晶体管的漏极相连,第二晶体管的栅极与第二字线相连,第二晶体管的源极接地或者偏置在预设电位,且第一晶体管和第二晶体管中至少有一个晶体管是铁电晶体管。本发明实施例的电路单元可以充分利用铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。Wherein, the gate of the first transistor is connected to the first word line, the drain of the first transistor is connected to the bit line, the source of the first transistor is connected to the drain of the second transistor, and the gate of the second transistor is connected to the second The word lines are connected, the source of the second transistor is grounded or biased at a preset potential, and at least one of the first transistor and the second transistor is a ferroelectric transistor. The circuit unit of the embodiment of the present invention can make full use of the drain-source current-gate voltage hysteresis characteristic of the ferroelectric transistor, design a new circuit structure and operation mode, and achieve the purpose of a non-volatile memory with lower power consumption.
预设电位可以理解为第二晶体管的源极偏置在某固定电位,本领域技术人员可以根据实际情况进行设置,在此不做具体限定。The preset potential can be understood as that the source of the second transistor is biased at a fixed potential, which can be set by those skilled in the art according to actual conditions, and is not specifically limited here.
需要说明的是,铁电晶体管的电路符号如图1所示,铁电晶体管的一种结构如图2所示,铁电晶体管漏源电导-栅源电压滞回特性曲线的一种典型情况如图3所示。It should be noted that the circuit symbol of the ferroelectric transistor is shown in Figure 1, a structure of the ferroelectric transistor is shown in Figure 2, and a typical situation of the drain-source conductance-gate-source voltage hysteresis characteristic curve of the ferroelectric transistor is shown in Figure 3 shows.
下面将通过一个具体实施例对基于铁电晶体管设计的电路单元进行进一步阐述。The circuit unit designed based on the ferroelectric transistor will be further elaborated below through a specific embodiment.
对于每个电路单元有两个晶体管结构的非易失存储器,如图4所示,铁电晶体管T2的栅极与字线WLW相连,漏极与位线BL相连,源极与晶体管T1的漏极相连;晶体管T1的栅极与字线WLR相连,源极偏置在固定电位0。For a nonvolatile memory with two transistor structures per circuit unit, as shown in Figure 4, the gate of the ferroelectric transistor T2 is connected to the word line WLW, the drain is connected to the bit line BL, and the source is connected to the drain of the transistor T1 The gate of the transistor T1 is connected to the word line WLR, and the source is biased at a fixed potential of 0.
在没有外部能量注入的情况下,位线BL和两条写字线WLW、WLR均偏置在0电位,此时铁电晶体管的栅源电压VGS=0,铁电晶体管工作在漏源电流-栅极电压滞回曲线的滞回区间内部。当有能量注入,在不对存储单元数据进行读写操作时,WLW电位偏置在VDD/2,WLR电位偏置于0,上述情况下铁电晶体管极化不会发生改变,即存储的信息不会改变。In the absence of external energy injection, the bit line BL and the two write word lines WLW, WLR are biased at 0 potential, at this time the gate-source voltage V GS of the ferroelectric transistor = 0, and the ferroelectric transistor operates at drain-source current - Inside the hysteresis interval of the gate voltage hysteresis curve. When there is energy injection, when the data of the storage unit is not read and written, the WLW potential is biased at VDD/2, and the WLR potential is biased at 0. In the above cases, the polarization of the ferroelectric transistor will not change, that is, the stored information will not change. will change.
在对存储单元进行读取操作时,WLR电位偏置于VDD,T1处于导通状态,WLW电位偏置在VDD/2。利用测量位线电压变化的方法判断读取的信息,如图4的(a)(b):BL电位偏置在VDD,如果铁电晶体管是正极化状态,BL上电压会从VDD降低为0;如果是负极化状态,BL上电压始终保持在VDD。上述变化可以用电压放大器测量BL上的电压检测到。此外,还可以测量BL上电流的变化判断读取的信息,对于大规模的阵列,通过电流变化判断相比于通过电压变化判断延时更低,原因是通过电压变化判断时,BL上电容需要充放电。When the memory cell is read, the potential of WLR is biased at VDD, T1 is in a conduction state, and the potential of WLW is biased at VDD/2. Use the method of measuring the voltage change of the bit line to judge the read information, as shown in (a) (b) of Figure 4: BL potential is biased at VDD, if the ferroelectric transistor is in a positive polarization state, the voltage on BL will drop from VDD to 0 ; If it is a negative polarization state, the voltage on BL is always kept at VDD. The above changes can be detected by measuring the voltage on BL with a voltage amplifier. In addition, it is also possible to measure the change of the current on the BL to judge the read information. For a large-scale array, the delay of judging by the change of the current is lower than that of judging by the change of the voltage. Discharge.
在对存储单元进行写操作时,如图4的(c)(d)所示,WLR偏置在0电位,晶体管T1处于截止状态,如果往存储单元写入‘1’,将BL电位偏置在VDD,WLW上电位进行两次偏置:先偏置到VDD,再偏置到0,第一次偏置到VDD时T2原先存储的信息没有发生变化,第二次偏置到0时,T2变为负极化,即写入‘1’;如果往存储单元写入‘0’,将BL电位偏置在0,WLW进行上述同样的操作,第一次偏置到VDD时T2变为正极化,即写入‘0’,第二次偏置到0时,之前已经写入的‘0’没有发生变化。此外,将WLW上电位先偏置再0,再偏置到VDD,也能实现写入操作。When writing to the memory cell, as shown in (c)(d) of Figure 4, the WLR is biased at 0 potential, and the transistor T1 is in an off state. If a '1' is written to the memory cell, the BL potential is biased The potential on VDD and WLW is biased twice: first biased to VDD, and then biased to 0. When biased to VDD for the first time, the original stored information of T2 does not change. When biased to 0 for the second time, T2 becomes negatively polarized, that is, writing '1'; if writing '0' to the memory cell, the BL potential is biased at 0, WLW performs the same operation as above, and T2 becomes positive when it is biased to VDD for the first time When it is written into '0' and biased to 0 for the second time, the previously written '0' does not change. In addition, the write operation can also be realized by biasing the upper potential of WLW to 0 first, and then biasing it to VDD.
考虑电路单元晶体管各极的初始电位对读写操作正确性的影响,该原理设计的存储器可以保证读写操作的正确性,原因是WLW上的电位在读写操作之前会偏置在VDD/2,使得T2的极化状态不发生改变。Considering the influence of the initial potential of each pole of the circuit unit transistor on the correctness of read and write operations, the memory designed by this principle can ensure the correctness of read and write operations, because the potential on WLW will be biased at VDD/2 before the read and write operations , so that the polarization state of T2 does not change.
其次参照附图描述根据本发明实施例提出的基于铁电晶体管设计的阵列电路。Next, an array circuit designed based on ferroelectric transistors proposed according to an embodiment of the present invention will be described with reference to the accompanying drawings.
图5是本发明一个实施例的基于铁电晶体管设计的阵列电路的结构示意图。FIG. 5 is a schematic structural diagram of an array circuit designed based on ferroelectric transistors according to an embodiment of the present invention.
如图5所示,该基于铁电晶体管设计的阵列电路包括:至少一个如上述实施例的电路单元,且阵列电路的各个单元通过电气连接的方式组合成多行多列的布局方式,其中,同一行的电路单元的第一字线相连,同一行的电路单元的第二字线相连,同一列的电路单元的位线相连。As shown in FIG. 5, the array circuit designed based on ferroelectric transistors includes: at least one circuit unit as in the above-mentioned embodiment, and each unit of the array circuit is combined into a multi-row and multi-column layout by electrical connection, wherein, The first word lines of the circuit units in the same row are connected, the second word lines of the circuit units in the same row are connected, and the bit lines of the circuit units in the same column are connected.
进一步地,本发明的一个实施例中,其中,在对其中所述电路单元存储的数据进行读操作时,所述第二字线的电压使得所述第二晶体管导通,以根据所述第一晶体管的漏源之间电阻值大小或电阻值大小对所述位线上的电压或电流的变化影响分辨所述电路单元存储的数据。Furthermore, in an embodiment of the present invention, wherein, when the data stored in the circuit unit is read, the voltage of the second word line makes the second transistor turn on, so that according to the first The resistance value between the drain and source of a transistor or the change of the resistance value on the voltage or current on the bit line affects the resolution of the data stored by the circuit unit.
进一步地,在对其中所述电路单元存储的数据进行写操作时,控制所述位线和所述第一字线的电压,使所述第一晶体管的极化特性与所需要存储的数据一致。Further, when the data stored in the circuit unit is written, the voltage of the bit line and the first word line is controlled to make the polarization characteristics of the first transistor consistent with the data to be stored .
进一步地,在对其中所述电路单元存储的数据进行写操作时,所述位线电压偏置在高电平或者低电平,且所述第一字线的电压在低电压和高电压分别停留一段时间后再恢复至原本的电压,所述第二字线的电压使得所述第二晶体管截止。Further, when the data stored in the circuit unit is written, the voltage of the bit line is biased at a high level or a low level, and the voltage of the first word line is at a low voltage and a high voltage, respectively. After staying for a period of time and then recovering to the original voltage, the voltage of the second word line turns off the second transistor.
另外,如图6,图6是本发明的第一种存储器的一种阵列结构示意图,且第一种存储器不同操作下的瞬态波形示意图如图7所示。In addition, as shown in FIG. 6 , FIG. 6 is a schematic diagram of an array structure of the first memory of the present invention, and a schematic diagram of transient waveforms of the first memory under different operations is shown in FIG. 7 .
根据本发明实施例提出的基于铁电晶体管设计的电路单元和阵列电路,对于每个电路单元拥有两个晶体管的非易失存储器,写入操作的能量延时积可以更低,从而充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。According to the circuit unit and array circuit designed based on ferroelectric transistors proposed by the embodiments of the present invention, for a nonvolatile memory with two transistors per circuit unit, the energy delay product of the write operation can be lower, thereby making full use of the The drain-source current-gate voltage hysteresis characteristic of ferroelectric transistors, a new circuit structure and operation mode are designed, and the purpose of lower power consumption non-volatile memory is achieved.
基于上一实施例,本发明第二个实施例提供了另一种基于铁电晶体管设计的电路单元,本实施例和上一实施例在描述内容上各有侧重,各实施例之间对于未尽述地方可相互参考。下面将对本发明第二实施例进行详细阐述。Based on the previous embodiment, the second embodiment of the present invention provides another circuit unit based on ferroelectric transistor design. This embodiment and the previous embodiment have their own emphasis on the description content. The above places can be referred to each other. The second embodiment of the present invention will be described in detail below.
该基于铁电晶体管设计的电路单元,包括:第一晶体管、第二晶体管、第三晶体管、第一位线、第二位线、第一字线、第二字线与第三字线。The circuit unit designed based on ferroelectric transistors includes: a first transistor, a second transistor, a third transistor, a first bit line, a second bit line, a first word line, a second word line and a third word line.
其中,第一晶体管的栅极与第一字线相连,第一晶体管的漏极与第二晶体管的栅极相连,第一晶体管的源极与第一位线相连,第二晶体管的漏极与第三晶体管的源极相连,第二晶体管的源极与第二字线相连,第三晶体管的栅极与第三字线相连,第三晶体管的漏极与第二位线相连,其中,所述第一晶体管、第二晶体管和第三晶体管中至少有一个晶体管是铁电晶体管。Wherein, the gate of the first transistor is connected to the first word line, the drain of the first transistor is connected to the gate of the second transistor, the source of the first transistor is connected to the first bit line, and the drain of the second transistor is connected to the first bit line. The source of the third transistor is connected, the source of the second transistor is connected to the second word line, the gate of the third transistor is connected to the third word line, and the drain of the third transistor is connected to the second bit line, wherein the At least one of the first transistor, the second transistor and the third transistor is a ferroelectric transistor.
第二种具体实施方式中,每个电路单元使用了三个晶体管,且有两条位线,由图8(a)所示,晶体管T1的栅极与字线WLW相连,其漏极与铁电晶体管T2的栅极相连,源极与位线BLW相连;铁电晶体管T2的漏极与晶体管T3的源极相连,其源极与字线WLRW相连;晶体管T3的栅极与字线WLR相连,漏极与位线BLR相连;In the second specific implementation mode, each circuit unit uses three transistors and has two bit lines. As shown in FIG. 8(a), the gate of the transistor T1 is connected to the word line WLW, and its drain is connected to the iron The gate of the transistor T2 is connected, and the source is connected to the bit line BLW; the drain of the ferroelectric transistor T2 is connected to the source of the transistor T3, and its source is connected to the word line WLRW; the gate of the transistor T3 is connected to the word line WLR , the drain is connected to the bit line BLR;
在没有外部能量注入的情况下,或者有外部能量注入但不对存储单元数据进行读写操作时,三条字线和两条位线均偏置在0电位,此时铁电晶体管工作在漏源电流-栅极电压滞回曲线的滞回区间内部,其存储的信息不会发生改变。In the absence of external energy injection, or when there is external energy injection but the memory cell data is not read and written, the three word lines and two bit lines are all biased at 0 potential, and the ferroelectric transistor works at the drain-source current -In the hysteresis interval of the gate voltage hysteresis curve, the stored information will not change.
在对存储单元进行读取操作时,WLR电位偏置在VDD,WLW、BLW、WLRW电位均偏置在0,T1处于截止状态,T3处于导通状态。如图8(a)所示,通过BLR上电压的变化判断电路单元存储的信息:将BLR上电压偏置在VDD,如果T2处于负极化,BLR电位始终保持在VDD;如果处于正极化,BLR电位会减小到0。判断BLR上电流的变化也可以判断出电路单元存储的信息,为实现大型存储阵列的能量延时理想化提供了一种有效的方式。When the memory cell is read, the potential of WLR is biased at VDD, the potentials of WLW, BLW, and WLRW are all biased at 0, T1 is in an off state, and T3 is in an on state. As shown in Figure 8(a), the information stored in the circuit unit is judged by the change of the voltage on the BLR: the voltage on the BLR is biased at VDD, if T2 is negatively polarized, the BLR potential is always kept at VDD; if it is positively polarized, the BLR The potential will decrease to 0. Judging the change of the current on the BLR can also judge the information stored in the circuit unit, which provides an effective way to realize the energy delay idealization of a large storage array.
在对存储单元进行写入操作时,WLW电位偏置在VDD,WLR电位偏置在GND,T1处于导通状态,T3处于截止状态。如图8(c)(d)所示,如果往存储单元里写入‘1’,BLW电位偏置在0,WLWR上电位进行两次偏置:先偏置到VDD,再偏置到0,第一次偏置到VDD时,T2变为负极化,即写入‘1’,第二次偏置到0时,之前已经写入的‘1’没有发生变化;如果往存储单元里写入‘0’,BLW电位偏置在VDD,WLWR进行上述同样的操作,第一次偏置到VDD时T2极化状态没有发生改变,第二次偏置到0时,T2变为正极化,即写入‘0’。此外,将WLWR上电位先偏置再0,再偏置到VDD,也能实现写入操作。When performing a write operation on the memory cell, the potential of WLW is biased at VDD, the potential of WLR is biased at GND, T1 is in an on state, and T3 is in an off state. As shown in Figure 8(c)(d), if '1' is written into the memory cell, the potential of BLW is biased at 0, and the potential of WLWR is biased twice: first biased to VDD, then biased to 0 , when it is biased to VDD for the first time, T2 becomes negatively polarized, that is, writing '1', when it is biased to 0 for the second time, the previously written '1' does not change; if it is written into the memory cell Enter '0', the BLW potential is biased at VDD, and WLWR performs the same operation as above. When it is biased to VDD for the first time, the polarization state of T2 does not change. When it is biased to 0 for the second time, T2 becomes positively polarized. That is, write '0'. In addition, the write operation can also be realized by biasing the upper potential of WLWR to 0 first, and then biasing it to VDD.
其次描述根据上述实施例提出的基于铁电晶体管设计的阵列电路。Next, the array circuit based on ferroelectric transistor design proposed according to the above-mentioned embodiments will be described.
该基于铁电晶体管设计的阵列电路包括:至少一个如第二实施例的电路单元,且阵列电路的各个单元通过电气连接的方式组合成多行多列的布局方式,其中,同一行的电路单元的第一字线相连,同一行的电路单元的第二字线相连,同一行的电路单元的第三字线也相连,同一列的电路单元的第一位线相连,同一列的电路单元的第二位线也相连。The array circuit designed based on ferroelectric transistors includes: at least one circuit unit as in the second embodiment, and each unit of the array circuit is combined into a multi-row and multi-column layout by electrical connection, wherein the circuit units in the same row The first word lines of the circuit units in the same row are connected, the third word lines of the circuit units in the same row are also connected, the first bit lines of the circuit units in the same column are connected, and the circuit units in the same column are connected. The second bit line is also connected.
进一步地,在本发明的一个实施例中,其中,在对其中所述电路单元存储的数据进行读操作时,所述第三字线的电压使得所述第三晶体管导通,以根据所述第二晶体管的漏源之间的电阻值大小或其影响来分辨所述电路单元存储的数据。Further, in one embodiment of the present invention, wherein, when the data stored in the circuit unit is read, the voltage of the third word line makes the third transistor turn on, so as to The value of the resistance between the drain and the source of the second transistor or its influence is used to distinguish the data stored by the circuit unit.
进一步地,在对其中所述电路单元存储的数据进行写操作时,控制所述第二字线和所述第一位线的电压,使所述第二晶体管的极化特性与所需要存储的数据一致。Further, when the data stored in the circuit unit is written, the voltages of the second word line and the first bit line are controlled so that the polarization characteristics of the second transistor are consistent with the data stored in the circuit unit. The data is consistent.
进一步地,在对其中所述电路单元存储的数据进行写操作时,所述第一位线电压偏置在高电平或者低电平,所述第一字线的电压使得所述第一晶体管导通,所述第三字线的电压使得所述第三晶体管截止。Further, when the data stored in the circuit unit is written, the voltage of the first bit line is biased at high level or low level, and the voltage of the first word line makes the first transistor is turned on, the voltage of the third word line turns off the third transistor.
进一步地,在对其中所述的电路单元所存储的数据进行写操作时,所述第二字线的电压在低电压和高电压分别停留一段时间后再恢复至原本的电压。Further, when the data stored in the circuit unit is written, the voltage of the second word line stays at the low voltage and the high voltage for a period of time and then returns to the original voltage.
另外,如图9所示,图9为第二种存储器的一种阵列结构示意图。In addition, as shown in FIG. 9 , FIG. 9 is a schematic diagram of an array structure of the second type of memory.
根据本发明实施例提出的基于铁电晶体管设计的电路单元和阵列电路,对于每个电路单元拥有三个晶体管的非易失存储器,有效降低了写入操作的能量延时积,对某个电路单元的写入操作不会影响其他电路单元的正常状态,同时,电路单元只需要单一电压的维持操作,从而充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。According to the circuit unit and array circuit designed based on ferroelectric transistors proposed in the embodiment of the present invention, for each circuit unit has three transistors non-volatile memory, effectively reduces the energy delay product of the write operation, for a certain circuit The writing operation of the unit will not affect the normal state of other circuit units. At the same time, the circuit unit only needs a single voltage to maintain the operation, thus making full use of the drain-source current-gate voltage hysteresis characteristics of the ferroelectric transistor, and designing a new type of The circuit structure and operation mode achieve the purpose of the non-volatile memory with lower power consumption.
进一步地,本发明第二实施例中的第一位线和第二位线可以以短接的形式合并为一条位线,因此,本发明第三个实施例提供了另一种基于铁电晶体管设计的电路单元,本实施例和上述实施例在描述内容上各有侧重,各实施例之间对于未尽述地方可相互参考。下面将对本发明第三实施例进行详细阐述。Further, the first bit line and the second bit line in the second embodiment of the present invention can be combined into one bit line in the form of a short circuit, therefore, the third embodiment of the present invention provides another ferroelectric transistor-based For the designed circuit unit, this embodiment and the above-mentioned embodiments have different emphases in the description content, and the various embodiments can refer to each other for the parts that are not fully described. The third embodiment of the present invention will be described in detail below.
该基于铁电晶体管设计的电路单元包括:第一晶体管、第二晶体管、第三晶体管、位线、第一字线、第二字线与第三字线。The circuit unit designed based on ferroelectric transistors includes: a first transistor, a second transistor, a third transistor, a bit line, a first word line, a second word line and a third word line.
其中,第一晶体管的栅极与第一字线相连,第一晶体管的漏极与第二晶体管的栅极相连,第一晶体管的源极与位线相连,第二晶体管的漏极与第三晶体管的源极相连,第二晶体管的源极与第二字线相连,第三晶体管的栅极与第三字线相连,第三晶体管的漏极与位线相连,其中,所述第一晶体管、第二晶体管和第三晶体管中至少有一个晶体管是铁电晶体管。Wherein, the gate of the first transistor is connected to the first word line, the drain of the first transistor is connected to the gate of the second transistor, the source of the first transistor is connected to the bit line, and the drain of the second transistor is connected to the third The sources of the transistors are connected, the source of the second transistor is connected to the second word line, the gate of the third transistor is connected to the third word line, and the drain of the third transistor is connected to the bit line, wherein the first transistor At least one of the transistors, the second transistor and the third transistor is a ferroelectric transistor.
第三种具体实施方式中,每个电路单元使用了三个晶体管,且只有一条位线,如图8(b)所示,晶体管T1的栅极与字线WLW相连,漏极与铁电晶体管T2的栅极相连,源极与位线BL相连;晶体管T2的漏极与晶体管T3的源极相连,源极与字线WLRW相连;晶体管T3的栅极与字线WLR相连,漏极与位线BL相连;In the third specific implementation mode, each circuit unit uses three transistors and only one bit line, as shown in Figure 8(b), the gate of the transistor T1 is connected to the word line WLW, and the drain is connected to the ferroelectric transistor The gate of T2 is connected, and the source is connected to the bit line BL; the drain of transistor T2 is connected to the source of transistor T3, and the source is connected to the word line WLRW; the gate of transistor T3 is connected to the word line WLR, and the drain is connected to the bit line Line BL is connected;
在没有外部能量注入的情况下,或者有外部能量注入但不对存储单元数据进行读写操作时,三条字线和位线均偏置在0电位,此时铁电晶体管工作在漏源电流-栅极电压滞回曲线的滞回区间内部,其存储的信息不会发生改变。In the absence of external energy injection, or when there is external energy injection but no read and write operations are performed on the memory cell data, the three word lines and bit lines are all biased at 0 potential, and the ferroelectric transistor works at drain-source current-gate Within the hysteresis interval of the pole voltage hysteresis curve, the stored information will not change.
在对存储单元进行读取操作时,WLR电位偏置在VDD,WLW、WLRW电位均偏置在0,T1处于截止状态,T3处于导通状态。通过BL上电压的变化判断电路单元存储的信息:将BL上电压偏置在VDD,如果T2处于负极化,BL电位始终保持在VDD;如果处于正极化,BL电位会减小到0。判断BL上电流的变化也可以判断出电路单元存储的信息。When the memory cell is read, the potential of WLR is biased at VDD, the potentials of WLW and WLRW are both biased at 0, T1 is in an off state, and T3 is in an on state. The information stored in the circuit unit is judged by the change of the voltage on the BL: the voltage on the BL is biased at VDD, if T2 is negatively polarized, the BL potential is always kept at VDD; if it is positively polarized, the BL potential will be reduced to 0. Judging the change of the current on the BL can also judge the information stored in the circuit unit.
在对存储单元进行写入操作时,其工作原理和所述第二种存储器电路单元的写入操作相同,只需要将对BLW的操作变为对BL操作,其他操作保持不变,即可实现对所述第三种存储器电路单元的写入操作。对于第二种和第三种存储器,电路单元晶体管各极的初始电位对铁电晶体管的极化均不会造成影响,即不会影响电路单元读写操作的正确性。When performing a write operation on a storage unit, its working principle is the same as that of the second type of memory circuit unit. It only needs to change the operation on BLW to the operation on BL, and keep other operations unchanged. A write operation to the third type memory circuit unit. For the second and third types of memory, the initial potential of each pole of the circuit unit transistor will not affect the polarization of the ferroelectric transistor, that is, it will not affect the correctness of the circuit unit read and write operations.
其次描述根据上述实施例提出的基于铁电晶体管设计的阵列电路。Next, the array circuit based on ferroelectric transistor design proposed according to the above-mentioned embodiments will be described.
该基于铁电晶体管设计的阵列电路包括:至少一个如第三实施例的电路单元,且阵列电路的各个单元通过电气连接的方式组合成多行多列的布局方式,其中,同一行的电路单元的第一字线相连,同一行的电路单元的第二字线相连,同一行的电路结单元的第三字线也相连,同一列的电路单元的位线相连。The array circuit designed based on ferroelectric transistors includes: at least one circuit unit as in the third embodiment, and each unit of the array circuit is combined into a multi-row and multi-column layout by electrical connection, wherein the circuit units in the same row The first word lines of the circuit units in the same row are connected, the second word lines of the circuit units in the same row are also connected, and the bit lines of the circuit units in the same column are connected.
进一步地,在本发明的一个实施例中,其中,在对所述电路单元存储的数据进行读操作时,所述第三字线的电压使得所述第三晶体管导通,以根据所述第二晶体管的漏源之间的电阻值大小或其影响来分辨所述电路单元存储的数据。Further, in an embodiment of the present invention, wherein, when the data stored in the circuit unit is read, the voltage of the third word line makes the third transistor turn on, so as to The data stored in the circuit unit is determined by the resistance value between the drain and source of the two transistors or its influence.
进一步地,在对所述电路单元存储的数据进行写操作时,控制所述第二字线和所述位线的电压,使所述第二晶体管的极化特性与所需要存储的数据一致。Further, when the data stored in the circuit unit is written, the voltages of the second word line and the bit line are controlled to make the polarization characteristic of the second transistor consistent with the data to be stored.
进一步地,在对所述电路单元存储的数据进行写操作时,所述位线电压偏置在高电平或者低电平,所述第一字线的电压使得所述第一晶体管导通,所述第三字线的电压使得所述第三晶体管截止。Further, when the data stored in the circuit unit is written, the voltage of the bit line is biased at a high level or a low level, and the voltage of the first word line makes the first transistor turn on, The voltage of the third word line turns off the third transistor.
进一步地,在对所述电路单元存储的数据进行写操作时,所述第二字线的电压在低电压和高电压分别停留一段时间后再恢复至原本的电压。Further, when the data stored in the circuit unit is written, the voltage of the second word line stays at the low voltage and the high voltage for a period of time and then returns to the original voltage.
另外,如图10所示,图10为第三种存储器的一种阵列结构示意图。In addition, as shown in FIG. 10 , FIG. 10 is a schematic diagram of an array structure of the third memory.
根据本发明实施例提出的基于铁电晶体管设计的电路单元和阵列电路,对于每个电路单元拥有三个晶体管的非易失存储器,有效降低了写入操作的能量延时积,对某个电路单元的写入操作不会影响其他电路单元的正常状态,同时,电路单元只需要单一电压的维持操作,从而充分利用了铁电晶体管的漏源电流-栅极电压滞回特性,设计出新型的电路结构及操作方式,达到了更低功耗非易失存储器的目的。According to the circuit unit and array circuit designed based on ferroelectric transistors proposed in the embodiment of the present invention, for each circuit unit has three transistors non-volatile memory, effectively reduces the energy delay product of the write operation, for a certain circuit The writing operation of the unit will not affect the normal state of other circuit units. At the same time, the circuit unit only needs a single voltage to maintain the operation, thus making full use of the drain-source current-gate voltage hysteresis characteristics of the ferroelectric transistor, and designing a new type of The circuit structure and operation mode achieve the purpose of the non-volatile memory with lower power consumption.
进一步地,在上述三个实施例的基础上,如图11和图12所示,图11是基于铁电晶体管设计的不同非易失存储器写入延时-平均写入能量、读取延时-平均读取能量、写入延时-动能系数三种性能的比较,图12是基于铁电晶体管设计的不同非易失存储器之间性能指标的比较。Further, on the basis of the above three embodiments, as shown in Figure 11 and Figure 12, Figure 11 shows different non-volatile memory write delays based on ferroelectric transistor design - average write energy, read delay -Comparison of the three performances of average read energy, write delay-kinetic energy coefficient, Figure 12 is a comparison of performance indicators between different non-volatile memories designed based on ferroelectric transistors.
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.
在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外,在不相互矛盾的情况下,本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。In the description of this specification, descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or feature is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.
尽管上面已经示出和描述了本发明的实施例,可以理解的是,上述实施例是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and those skilled in the art can make the above-mentioned The embodiments are subject to changes, modifications, substitutions and variations.
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