CN112805472B - 用于控制真空泵的温度的方法以及相关的真空泵和设备 - Google Patents

用于控制真空泵的温度的方法以及相关的真空泵和设备 Download PDF

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Publication number
CN112805472B
CN112805472B CN201980066007.4A CN201980066007A CN112805472B CN 112805472 B CN112805472 B CN 112805472B CN 201980066007 A CN201980066007 A CN 201980066007A CN 112805472 B CN112805472 B CN 112805472B
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China
Prior art keywords
vacuum pump
temperature
stator
pumping
cooling element
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CN201980066007.4A
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English (en)
Chinese (zh)
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CN112805472A (zh
Inventor
Y·格勒尼耶
P·德科尔德
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0666—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump a sensor is integrated into the pump/motor design
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/01—Load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F04C2270/195—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
CN201980066007.4A 2018-10-17 2019-09-26 用于控制真空泵的温度的方法以及相关的真空泵和设备 Active CN112805472B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1859617A FR3087504B1 (fr) 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees
FR1859617 2018-10-17
PCT/EP2019/076111 WO2020078689A1 (fr) 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées

Publications (2)

Publication Number Publication Date
CN112805472A CN112805472A (zh) 2021-05-14
CN112805472B true CN112805472B (zh) 2023-01-24

Family

ID=65244325

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980066007.4A Active CN112805472B (zh) 2018-10-17 2019-09-26 用于控制真空泵的温度的方法以及相关的真空泵和设备

Country Status (8)

Country Link
US (1) US20210404476A1 (fr)
EP (1) EP3867531B1 (fr)
JP (1) JP2022505202A (fr)
KR (1) KR20210074368A (fr)
CN (1) CN112805472B (fr)
FR (1) FR3087504B1 (fr)
TW (1) TWI798487B (fr)
WO (1) WO2020078689A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI815109B (zh) * 2021-04-28 2023-09-11 華碩電腦股份有限公司 散熱檢測方法以及電子裝置
FR3128745B1 (fr) * 2021-10-29 2025-07-11 Pfeiffer Vacuum Pompe à vide sèche
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1151486A (zh) * 1995-11-29 1997-06-11 日本真空技术株式会社 油密封旋转式真空泵的冷却装置
CN1755120A (zh) * 2004-10-01 2006-04-05 LOTVacuum株式会社 具有罗茨转子和螺旋转子的组合干式真空泵
DE102009053268A1 (de) * 2009-11-13 2011-05-26 Bayerische Motoren Werke Aktiengesellschaft Klimaanlage für Kraftfahrzeuge
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
CN106438365A (zh) * 2015-08-27 2017-02-22 上海伊莱茨真空技术有限公司 一种模块一体式多级多驱动腔部分非共轴干式真空单泵
CN107709787A (zh) * 2015-09-24 2018-02-16 李仁喆 具有冷却装置的真空泵
CN108431422A (zh) * 2015-11-03 2018-08-21 莱宝有限公司 干式真空泵

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2637655B1 (fr) * 1988-10-07 1994-01-28 Alcatel Cit Machine rotative du type pompe a vis
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
JP2003083273A (ja) * 2001-09-12 2003-03-19 Ebara Corp ドライ真空ポンプ
GB0326061D0 (en) * 2003-11-10 2003-12-10 Boc Group Plc Improvements in screw pumps
JP4673011B2 (ja) 2004-07-05 2011-04-20 株式会社島津製作所 ターボ分子ポンプの温度制御装置
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0510892D0 (en) * 2005-05-27 2005-07-06 Boc Group Plc Vacuum pump
TW200905079A (en) * 2007-07-18 2009-02-01 Shanorm Tech Co Ltd Dry vacuum pump device and cooling method thereof
JP6097067B2 (ja) * 2012-12-19 2017-03-15 株式会社荏原製作所 ドライポンプ装置
US10590955B2 (en) * 2017-02-23 2020-03-17 Shimadzu Corporation Turbo-molecular pump

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1151486A (zh) * 1995-11-29 1997-06-11 日本真空技术株式会社 油密封旋转式真空泵的冷却装置
CN1755120A (zh) * 2004-10-01 2006-04-05 LOTVacuum株式会社 具有罗茨转子和螺旋转子的组合干式真空泵
DE102009053268A1 (de) * 2009-11-13 2011-05-26 Bayerische Motoren Werke Aktiengesellschaft Klimaanlage für Kraftfahrzeuge
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
CN106438365A (zh) * 2015-08-27 2017-02-22 上海伊莱茨真空技术有限公司 一种模块一体式多级多驱动腔部分非共轴干式真空单泵
CN107709787A (zh) * 2015-09-24 2018-02-16 李仁喆 具有冷却装置的真空泵
CN108431422A (zh) * 2015-11-03 2018-08-21 莱宝有限公司 干式真空泵

Also Published As

Publication number Publication date
EP3867531B1 (fr) 2022-06-01
FR3087504B1 (fr) 2020-10-30
JP2022505202A (ja) 2022-01-14
CN112805472A (zh) 2021-05-14
TWI798487B (zh) 2023-04-11
FR3087504A1 (fr) 2020-04-24
WO2020078689A1 (fr) 2020-04-23
US20210404476A1 (en) 2021-12-30
EP3867531A1 (fr) 2021-08-25
TW202018186A (zh) 2020-05-16
KR20210074368A (ko) 2021-06-21

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