CN115727770B - A method for measuring off-plane displacement of curved surface objects based on speckle shearing interferometry - Google Patents
A method for measuring off-plane displacement of curved surface objects based on speckle shearing interferometryInfo
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Abstract
本发明涉及一种基于散斑剪切干涉的计量曲面物体离面位移方法，步骤包括：1、获被测物调制后的正弦条纹图并进行灰度处理；2、得到绝对相位信息,获取物体相对相机的三维坐标,获取物体相对相机的三维坐标；3、计算出被测物表面法向量相对CCD相机光轴的夹角；4、采集被测物表面变形前后的散斑包裹相位图并进行灰度处理和滤波处理；5、计算所测得的表面离面位移信息；6、建立激光散斑所测的离面位移测量值与被测物体表面实际变形的离面位移之间的几何关系；7、求得实际的离面位移；本发明采用剪切散斑干涉与数字条纹投影相结合，以检测出曲面（斜面）物体内部缺陷的同时，并能获取其离面位移信息用于分析其缺陷属性，有利于曲面物体内部缺陷属性的评估。
The present invention relates to a method for measuring the off-surface displacement of curved surface objects based on speckle shearing interferometry, comprising the following steps: 1. obtaining a modulated sinusoidal fringe pattern of the object to be measured and performing grayscale processing; 2. obtaining absolute phase information, obtaining the three-dimensional coordinates of the object relative to the camera; 3. calculating the angle between the surface normal vector of the object to be measured and the optical axis of the CCD camera. 4. Collect the speckle package phase image before and after the deformation of the surface of the object being measured and perform grayscale processing and filtering; 5. Calculate the measured surface off-plane displacement information; 6. Establish the off-plane displacement measurement value measured by the laser speckle pattern and the off-plane displacement of the actual deformation of the surface of the object being measured The geometric relationship between them; 7. Obtain the actual off-plane displacement The present invention combines shear speckle interferometry with digital fringe projection to detect internal defects of curved (inclined) objects and obtain their off-surface displacement information for analyzing their defect properties, which is beneficial to the evaluation of internal defect properties of curved objects.
Description
Technical Field
The invention relates to the field of optical measurement and detection, in particular to a method for measuring out-of-plane displacement of a curved object based on speckle shearing interference.
Background
The laser speckle shearing interference technology is used as a photodetection mechanics technology, has the characteristics of high precision, non-contact, full-field, real-time measurement and the like, and the excellent anti-seismic performance of the laser speckle shearing interference technology enables the laser speckle shearing interference technology to be widely applied to the fields of displacement measurement, strain measurement, vibration measurement, deformation measurement, temperature measurement, internal defect detection of engineering materials and the like, and the indirect acquisition of defect attributes by measuring out-of-plane deformation caused by internal defects through the laser speckle shearing technology is one of methods for judging the material performance.
The laser speckle shearing interference technology obtains out-of-plane displacement by collecting speckle patterns before and after deformation of a measured object, the out-of-plane displacement is along the optical axis direction of a camera, the out-of-plane displacement of a curved surface (inclined surface) object is measured, the deformation direction of each point of the measured object is not necessarily parallel to the optical axis, and the measured out-of-plane displacement is not the actual deformation amount of each point of the curved surface. The Shanghai university Li Xiaodong et al uses a CCD color camera to record speckle interference images obtained by three light paths at one time to measure three-dimensional deformation of an object by constructing three laser measuring light paths with different wavelengths, but the method has the advantages of complex light paths, multiple laser light sources, complex operation, combination of a digital speckle correlation method and an electronic speckle interferometry by the Shandong university Sun Yongming et al to measure the three-dimensional deformation of the object, measurement of the three-dimensional deformation of a plane object by the method, and calculation of the three-dimensional shape of a curved object by the laser speckle deflection method by the Shanghai university Li Pengfei et al, and acquisition of discrete shape deformation information by combining speckle images before and after the curved surface deformation, but the method needs a high-precision light source deflection instrument and has poor anti-interference performance.
Therefore, the method for measuring the out-of-plane deformation of the curved surface and the inclined surface by combining and measuring the three-dimensional shape with high anti-interference performance and the out-of-plane deformation is provided, and has very important significance.
Disclosure of Invention
Aiming at the prior problems, the invention provides a method for measuring the out-of-plane displacement of a curved object based on speckle shearing interference, which combines shearing speckle interference with digital fringe projection to detect the internal defects of the curved (inclined) object and obtain out-of-plane displacement information for analyzing the defect attributes.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
A method for measuring out-of-plane displacement of a curved object based on speckle shearing interference comprises the following steps:
s1, projecting sinusoidal stripes to the surface of a measured object by a projector, acquiring a sinusoidal stripe diagram modulated by the measured object by a CCD camera, and carrying out gray scale processing;
s2, extracting wrapping phases from modulated projection fringe images acquired by a CCD camera by using a phase shift method, performing unwrapping calculation by combining a multi-frequency extrapolation method to obtain absolute phase information, obtaining three-dimensional coordinates of an object relative to the camera, and obtaining the three-dimensional coordinates of the object relative to the camera by combining the camera and calibrated projection system parameters;
S3, carrying out normal vector estimation on the three-dimensional model in the reconstructed point cloud dataset by utilizing PCL (Point Cloud Learning), and calculating an included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera ;
S4, the laser projects laser to the surface of the measured object, and the CCD camera respectively collects speckle wrapping phase diagrams before and after the surface deformation of the measured object and carries out gray level processing and filtering processing by applying external load to the measured object;
S5, extracting phases from the speckle wrapping phase diagram acquired by the CCD camera by using a phase shift method, performing phase expansion on the speckle wrapping phase diagram by using a least square unwrapping algorithm to obtain unwrapped phase distribution information, and substituting parameters such as wavelength, shearing quantity and the like to calculate to obtain measured surface out-of-plane displacement information (namely optical path difference) );
S6, establishing out-of-plane displacement measurement value (namely optical path difference) measured by laser speckle) Off-plane displacement value of actual deformation of surface of measured objectGeometric relationship between;
S7, utilizing the included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera according to the geometric relationship in S6 Correcting the out-of-plane displacement information measured by speckle shearing interference to obtain the actual out-of-plane displacement 。
As a preferable technical scheme:
In the above-mentioned method for measuring out-of-plane displacement of curved object based on speckle shearing interference, in step S2, the process of solving absolute phase information is as follows:
the mathematical expression of the phase fringe pattern collected by the camera is:
in the formula, For the intensity of the stripes,For the image pixel coordinates,For the background light intensity distribution,For the degree of modulation of the light intensity,In order for the phase to be sought,Is the phase shift amount, wherein 。
Phase determination using phase shift methodAnd (3) solving to obtain:
;
The phase of the phase is unfolded by utilizing a multi-frequency extrapolation method to obtain an absolute phase The phase distribution and height relationship is:
;
Wherein: For the height information distribution of the object, For the phase change amount of the object to be measured,For the distance of the camera's optical center to the reference plane,For the distance of the projector light source from the camera optical center,Is the projected fringe spacing.
In the above-mentioned method for measuring out-of-plane displacement of curved surface object based on speckle shearing interference, in step S3, normal vector estimation is performed on point cloud data set, covariance matrix of adjacent elements of any point is created based on local plane fitting, and feature vector corresponding to minimum feature value is obtained as the local plane normal vectorFor each pointCorresponding covariance matrixThe method comprises the following steps:
;
;
in the formula, Is a dotThe number of the neighboring points is determined by the number of the neighboring points,Representing the three-dimensional centroid of the nearest neighbor element,Respectively denoted as covariance matrixThe feature values and feature vectors satisfy the following conditions when the normal direction is towards the camera direction,Is the point of view of the point cloud dataset.
As described above, in step S3, an included angle between the normal vector of the surface of the object to be measured and the optical axis of the CCD camera is calculated :
;
In the formula,For the normal vector of the surface of the measured object,Is a unit vector of the CCD camera in the optical axis direction.
In the above method for measuring out-of-plane displacement of curved object based on speckle shearing interference, in step S5, the phase distribution information is obtained by unwrapping the speckle wrapped phase mapAnd out-of-plane displacement derivative (Directional clipping) relationship:
integrating the optical path length difference to solve out-of-plane displacement ;
In the formula,Is a rimThe amount of shear in the direction is determined,Is the included angle between the CCD camera and the light source,Is the laser wavelength.
In the above-mentioned method for measuring the off-plane displacement of a curved object based on speckle shearing interference, in step S6, the off-plane displacement information measured by the laser shearing speckle method is obtained by subtracting the phase information before and after the change to obtain the off-plane displacement information (i.e. optical path difference) in the optical axis direction, and the direction of the object is along the normal vector direction of the surface when the object is slightly off-plane deformed, so the measured optical path differenceAnd the actual deformationThe relation between the two is:
。
In the above method for measuring out-of-plane displacement of curved object based on speckle shearing interference, in step S5, the unwrapping calculation process for the speckle wrapping phase map is as follows:
the light intensity expression of the speckle pattern before deformation is ,
;
Light intensity expression after deformationThe method comprises the following steps:
;
Subtracting the fringe patterns before and after deformation to obtain four phase wrap patterns ,
;
According to the four-part phase shift principle, the phase change quantity before and after deformation is obtained:
;
unwrapping to obtain unwrapped phase diagram to obtain phase distribution information And out-of-plane displacement derivative (Directional clipping) is:
integrating the optical path length difference to solve out-of-plane displacement 。
In the above-mentioned method for measuring out-of-plane displacement of curved object based on speckle shearing interference, in steps S1 and S4, the modulated sinusoidal fringe pattern and speckle package phase diagram are respectively obtained by the same CCD camera (or two sets of CCD cameras with parallel optical axes), the sinusoidal fringe pattern is projected to the surface of the object to be measured by the projector, the optical path is collected by the CCD camera via the lens and shearing interference system, the shearing interference system is not in interference state at this time, the three-dimensional information of the object to be measured is obtained by processing the computer module, the laser array emitted by the laser generator irradiates the surface of the object to be measured after passing through the beam expander, the optical path is divided into two beams of light by the shearing interference system to form interference in space, and the speckle package phase diagram is collected by the CCD camera.
The invention also provides a multiplexing light path system for realizing the method, as shown in figure 2, the system comprises a beam expander, a projector, a shearing interferometer, a CCD camera, a laser generator, a computer module, a reflector, an adjusting mirror and a phase shifter, wherein the computer can control the projector and the laser generator to project phase shift coding stripes and laser to the surface of a measured object, the CCD camera is used for capturing images formed by the surface radiation of the measured object, sending the images to the computer to generate a modulation picture group and sequencing, and the computer is also used for carrying out phase expansion on the modulation images to realize reconstruction of point cloud data of the surface of the measured object and reconstruction of out-plane deformation of the surface of the measured object, and correcting an out-of-plane displacement value by acquiring an included angle between a normal vector of the surface of the measured object and an optical axis by using the point cloud data.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, through the three-dimensional measurement of the combined surface structured light and the off-plane displacement measurement technology of shearing speckle interference, the switching of the surface structured light and the shearing speckle system is realized by controlling the adjusting lens, the combined measurement of the three-dimensional morphology and the off-plane deformation can be realized, the normal vector information of the three-dimensional morphology is introduced into the measurement of the off-plane displacement, and the off-plane displacement information of a curved object is measured.
Drawings
FIG. 1 is a schematic flow chart of the method of the present invention;
FIG. 2 is a schematic diagram of an apparatus and an optical path system in the out-of-plane displacement measuring method of the present invention;
FIG. 3 is a schematic diagram showing the geometrical relationship between the out-of-plane displacement of the measured object when the measured object is deformed and the out-of-plane displacement measured by the CCD camera;
FIG. 4 is a striped grating diagram collected by a CCD camera;
FIG. 5 is a three-dimensional point cloud of reconstructed objects;
FIG. 6 is a plot of the speckle package phase for loading deformation;
FIG. 7 is a phase diagram graphically wrapping a speckle wrap phase;
FIG. 8 is out-of-plane displacement information measured by laser speckle;
FIG. 9 is corrected out-of-plane displacement information;
in the figure, a 1-laser generator, a 2-beam expander, a 3-surface of a measured object, a 4-projector, a 5-computer module, a 6-CCD camera, a 7-shearing interferometer, an 8-reflecting mirror, a 9-regulating mirror and a 10-phase shifter are shown.
Detailed Description
The application is further described below in conjunction with the detailed description. It is to be understood that these examples are illustrative of the present application and are not intended to limit the scope of the present application. Furthermore, it should be understood that various changes and modifications can be made by one skilled in the art after reading the teachings of the present application, and such equivalents are intended to fall within the scope of the application as defined in the appended claims.
A method for measuring out-of-plane displacement of a curved object based on speckle shearing interference is shown in figure 1, and comprises the following steps:
S1, projecting grating fringes onto a measured object 3 by a projector 4, adjusting an adjusting mirror 9 to enable a shearing interferometer 7 not to be in an interference state, and acquiring a sinusoidal fringe pattern modulated by the measured object by a CCD camera 6 and performing gray scale processing;
S2, the computer module 5 extracts the wrapping phase of the modulated projection fringe image acquired by the CCD camera through a phase shift method, unwrapping calculation is carried out by combining a multi-frequency extrapolation method, absolute phase information is obtained, and the computer module 5 combines the camera and calibrated projection system parameters to obtain the three-dimensional coordinates of the object relative to the camera;
the process of solving absolute phase information is as follows:
the mathematical expression of the phase fringe pattern collected by the camera is:
in the formula, For the intensity of the stripes,For the image pixel coordinates,For the background light intensity distribution,For the degree of modulation of the light intensity,In order for the phase to be sought,Is the phase shift amount, wherein ;
Phase determination using phase shift methodAnd (3) solving to obtain:
;
The phase of the phase is unfolded by utilizing a multi-frequency extrapolation method to obtain an absolute phase The phase distribution and height relationship is:
;
Wherein: For the height information distribution of the object, For the phase change amount of the object to be measured,For the distance of the camera's optical center to the reference plane,For the distance of the projector light source from the camera optical center,Is the projection fringe spacing;
S3, carrying out normal vector estimation on the three-dimensional model in the reconstructed point cloud dataset by utilizing PCL (Point Cloud Learning), and calculating an included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera ;
The normal vector estimation method comprises the steps of carrying out normal vector estimation on a point cloud data set, creating covariance matrixes of adjacent elements of any point based on local plane fitting, and obtaining a feature vector corresponding to a minimum feature value of the covariance matrixes to obtain the local plane normal vectorFor each pointCorresponding covariance matrixThe method comprises the following steps:
;
;
in the formula, Is a dotThe number of the neighboring points is determined by the number of the neighboring points,Representing the three-dimensional centroid of the nearest neighbor element,Respectively denoted as covariance matrixThe feature values and feature vectors satisfy the following conditions when the normal direction is towards the camera direction,A viewpoint that is a point cloud dataset;
calculating the included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera The method comprises the following steps:
;
in the formula, For the normal vector of the surface of the measured object,Is a unit vector in the optical axis direction of the CCD camera;
s4, the laser generator 1 projects laser to the surface 3 of the measured object, and a CCD camera respectively collects speckle wrapping phase diagrams before and after the surface deformation of the measured object and performs gray level processing and filtering processing by applying external load to the measured object;
S5, the computer module 5 extracts the phase of the speckle wrapping phase diagram acquired by the CCD camera by using a phase shift method, and performs phase expansion on the speckle wrapping phase diagram by using a least square unwrapping algorithm to obtain unwrapped phase distribution information, and substitutes parameters such as wavelength, shearing quantity and the like to calculate and obtain measured surface out-of-plane displacement information (namely optical path difference) );
Wherein, by unwrapping the speckle wrap phase diagram,
The unwrapping calculation of the speckle wrap phase diagram comprises the following steps:
the light intensity expression of the speckle pattern before deformation is ,
;
Light intensity expression after deformationThe method comprises the following steps:
;
Subtracting the fringe patterns before and after deformation to obtain four phase wrap patterns ,
;
According to the four-part phase shift principle, the phase change quantity before and after deformation is obtained:
;
unwrapping to obtain unwrapped phase diagram to obtain phase distribution information And out-of-plane displacement derivative (Directional clipping) is:
integrating the optical path length difference to solve out-of-plane displacement ;
In the formula,Is a rimThe amount of shear in the direction is determined,Is the included angle between the CCD camera and the light source,Is the laser wavelength;
S6, establishing out-of-plane displacement measurement value (namely optical path difference) measured by laser speckle ) Out-of-plane displacement from actual deformation of the surface of the object under testGeometric relationship between;
the laser shearing speckle method is to subtract the phase information before and after the change to obtain the off-plane displacement information (i.e. optical path difference) in the optical axis direction, and the direction of the object is along the normal vector direction of the surface when the object is slightly off-plane deformed, so the measured optical path difference And the actual deformationThe relation between the two is:
;
S7, utilizing the included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera according to the geometric relationship in S6 Correcting the out-of-plane displacement information measured by speckle shearing interference to obtain corrected out-of-plane displacement
In the steps S1 and S4, the modulated sinusoidal fringe pattern and the speckle package phase pattern are respectively obtained by the same CCD camera (or two groups of CCD cameras with parallel optical axes), the sinusoidal fringe pattern is projected to the surface of the measured object by the projector, the optical path is collected by the CCD camera through the lens and the shearing interference system, the shearing interference system is not in an interference state at the moment, the three-dimensional information of the measured object is obtained by processing of the computer module, the laser array emitted by the laser generator irradiates the surface of the measured object after passing through the beam expanding device, the optical path is divided into two beams of light by the shearing interference system to form interference in space, and the speckle package phase pattern is collected by the CCD camera.
Although the embodiments of the present invention are described above, the embodiments are only used for facilitating understanding of the present invention, and are not intended to limit the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is still subject to the scope of the present disclosure as defined by the appended claims.
Claims (8)
1. The method for measuring the out-of-plane displacement of the curved object based on speckle shearing interference is characterized by comprising the following steps:
Step S1, projecting sinusoidal stripes to the surface of a measured object by a projector, collecting a sinusoidal stripe diagram modulated by the measured object by a CCD camera, and carrying out gray scale processing;
s2, extracting wrapping phases from modulated projection fringe images acquired by a CCD camera by using a phase shift method, and performing unwrapping calculation by combining a multi-frequency extrapolation method to obtain absolute phase information and obtain three-dimensional coordinates of an object relative to the camera;
S3, performing normal vector estimation on the three-dimensional model in the reconstructed point cloud data set by using PCL, and calculating an included angle of the normal vector of the measured object surface relative to the optical axis of the CCD camera ;
S4, the laser projects laser to the surface of the measured object, and the CCD camera respectively collects speckle wrapping phase diagrams before and after the surface deformation of the measured object and carries out gray level processing and filtering processing by applying external load to the measured object;
S5, extracting phases from the speckle wrapping phase map acquired by the CCD camera by using a phase shift method, performing phase expansion on the speckle wrapping phase map by using a least square unwrapping algorithm to obtain unwrapped phase distribution information, and substituting parameters such as wavelength, shearing quantity and the like to calculate to obtain measured surface out-of-plane displacement information;
s6, establishing an out-of-plane displacement measured value measured by laser speckle and out-of-plane displacement of actual deformation of the surface of the measured object Geometric relationship between;
S7, utilizing the included angle of the normal vector of the surface of the measured object relative to the optical axis of the CCD camera according to the geometric relation in S6 Correcting the out-of-plane displacement measured by speckle shearing interference to obtain the actual out-of-plane displacement。
2. The method for measuring out-of-plane displacement of a curved object based on speckle shearing interferometry according to claim 1, wherein in the step S2, the process of solving absolute phase information is as follows:
the mathematical expression of the phase fringe pattern collected by the camera is:
in the formula, For the intensity of the stripes,For the image pixel coordinates,For the background light intensity distribution,For the degree of modulation of the light intensity,In order for the phase to be sought,Is the phase shift amount, wherein ;
Phase determination using phase shift methodAnd (3) solving to obtain:
;
The phase of the phase is unfolded by utilizing a multi-frequency extrapolation method to obtain an absolute phase The phase distribution and height relationship is:
;
Wherein: For the height information distribution of the object, For the phase change amount of the object to be measured,For the distance of the camera's optical center to the reference plane,For the distance of the projector light source from the camera optical center,Is the projected fringe spacing.
3. The method for measuring out-of-plane displacement of curved object based on speckle shearing interferometry according to claim 2, wherein in step S3, normal vector estimation is performed on the point cloud dataset, covariance matrix of any point neighboring element is created based on local plane fitting, and the feature vector corresponding to the minimum feature value is obtained as the local plane normal vectorFor each pointCorresponding covariance matrixThe method comprises the following steps:
;
;
in the formula, Is a dotThe number of the neighboring points is determined by the number of the neighboring points,Representing the three-dimensional centroid of the nearest neighbor element,Respectively denoted as covariance matrixThe feature values and feature vectors satisfy the following conditions when the normal direction is towards the camera direction,Is the point of view of the point cloud dataset.
4. The method for measuring out-of-plane displacement of a curved object based on speckle shearing interferometry according to claim 3, wherein in step S3, an included angle of a surface normal vector of the object to be measured relative to an optical axis of the CCD camera is calculated :
;
In the formula,For the normal vector of the surface of the measured object,Is a unit vector of the CCD camera in the optical axis direction.
5. The method for measuring out-of-plane displacement of a curved object based on speckle shearing interferometry according to claim 1, wherein in step S5, phase distribution information is obtained by unwrapping a speckle wrapped phase mapAnd out-of-plane displacement derivativeAt the position ofRelationship under directional shear:
integrating the optical path length difference to solve out-of-plane displacement ;
In the formula,Is a rimThe amount of shear in the direction is determined,Is the included angle between the CCD camera and the light source,Is the laser wavelength.
6. The method for measuring the displacement of a curved object in an out-of-plane manner based on speckle shearing interferometry according to claim 1, wherein in the step S6, the displacement information measured by the laser shearing speckle method is obtained by subtracting the phase information before and after the change to obtain the displacement information in the optical axis direction, and the direction of the object is along the normal vector direction of the surface when the object is slightly deformed in an out-of-plane manner, so that the optical path difference is measuredAnd the actual deformationThe relation between the two is:
。
7. The method for measuring out-of-plane displacement of a curved object based on speckle shearing interferometry according to claim 5, wherein in step S5, the unwrapping calculation of the speckle wrapping phase map is performed by:
the light intensity expression of the speckle pattern before deformation is ,
;
Light intensity expression after deformationThe method comprises the following steps:
;
Subtracting the fringe patterns before and after deformation to obtain four phase wrap patterns ,
;
According to the four-part phase shift principle, the phase change quantity before and after deformation is obtained:
;
unwrapping to obtain unwrapped phase diagram to obtain phase distribution information And out-of-plane displacement derivativeAt the position ofThe relationship under directional shear is:
integrating the optical path length difference to solve out-of-plane displacement 。
8. The method is characterized in that in the steps S1 and S4, a modulated sine fringe pattern and a modulated speckle package phase pattern are respectively obtained by the same CCD camera, a projector projects sine fringes onto the surface of a measured object, an optical path is collected by the CCD camera through a lens and a shearing interference system, the shearing interference system is not in an interference state at the moment, a computer module processes three-dimensional information of the measured object, a laser array emitted by a laser generator irradiates the surface of the measured object after passing through a beam expanding device, the optical path is divided into two beams of light by the shearing interference system to form interference in space, and the CCD camera collects the speckle package phase pattern.
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