CN116445873A - Method for preparing bamboo material with corrosion resistance, easy repair and fire resistance by magnetron sputtering - Google Patents
Method for preparing bamboo material with corrosion resistance, easy repair and fire resistance by magnetron sputtering Download PDFInfo
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- C23C14/0021—Reactive sputtering or evaporation
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
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Abstract
采用磁控溅射制备具有防腐、易修复、耐火竹材的方法,本发明的目的是为解决现有制备耐火木材的方法生产周期长、附加功能单一、阻燃性不好等问题。制备方法:一、将竹材放置于大气等离子清洁仪中,进行表面清洁活化;二、将HBN靶材放入高温真空炉中,进行煅烧处理;三、将等离子清洗后的竹材放入磁控溅射仪器中溅射Cu薄膜;四、控制射频溅射功率为400~600W,自偏压为120~160V,通入氩气和氮气,在溅射有Cu薄膜的竹材表面继续溅射HBN层。本发明在制备阻燃薄膜时样品处在无水、无氧、短时高温、高压的条件下,有利于竹材表面的高温碳化,由于碳化层的存在,阻止热量、O2的向内传递,增强了阻燃效果。
The invention uses magnetron sputtering to prepare anti-corrosion, easy-to-repair, and fire-resistant bamboo materials. The purpose of the present invention is to solve the problems of long production cycle, single additional function, and poor flame retardancy in the existing methods for preparing fire-resistant wood. Preparation method: 1. Place the bamboo in an atmospheric plasma cleaner for surface cleaning and activation; 2. Put the HBN target in a high-temperature vacuum furnace for calcination; 3. Put the bamboo after plasma cleaning into magnetron sputtering 4. Control the radio frequency sputtering power to 400-600W, the self-bias voltage to 120-160V, feed argon and nitrogen, and continue sputtering the HBN layer on the bamboo surface with the Cu film sputtered. When the present invention prepares the flame retardant film, the sample is in anhydrous, anaerobic, short-term high temperature and high pressure conditions, which is beneficial to the high temperature carbonization of the bamboo surface, and due to the existence of the carbonized layer, it prevents heat and O from being transmitted inwardly, Enhanced flame retardant effect.
Description
技术领域technical field
本发明属于生物质材料功能改良领域,具体涉及一种具有防腐、净化空气、易修复、耐火竹材的制备方法。The invention belongs to the field of improving the function of biomass materials, and in particular relates to a preparation method of fire-resistant bamboo with anti-corrosion, air purification, easy repair and fire resistance.
背景技术Background technique
在绿色低碳理念兴起的当下,推进储量丰富和绿色环保的生物质材料资源化高效利用,是我国节能减排和环境保护的重要任务,符合当前环保节能和低碳经济的需求。竹材作为可再生、可降解、碳中和的生物质资源,因质轻、强度高、保温性好、纹理美观、易于加工、耗能低等优点,被大量使用在家具制造以及建筑装饰等领域。由于其自身碳氢化合物含量较高,属于一种易燃材料,极易引发火灾,威胁人们的生命财产安全。基于此寻求一种高效、节能、便捷的竹材阻燃技术,以减少或阻滞火焰传播速度、加速燃烧表面的炭化过程至为重要。现有阻燃专利技术主要围绕以下三种方法实施:1-浸注法,2-喷涂法,3-热压法。With the rise of the green and low-carbon concept, promoting the efficient utilization of abundant reserves and green and environmentally friendly biomass materials is an important task for my country's energy conservation, emission reduction and environmental protection, which meets the current needs of environmental protection, energy conservation and low-carbon economy. As a renewable, degradable, carbon-neutral biomass resource, bamboo is widely used in furniture manufacturing and architectural decoration due to its light weight, high strength, good thermal insulation, beautiful texture, easy processing, and low energy consumption. . Due to its high hydrocarbon content, it is a kind of flammable material, which can easily cause fire and threaten people's life and property safety. Based on this, it is very important to seek a high-efficiency, energy-saving and convenient bamboo flame-retardant technology to reduce or retard the flame propagation speed and accelerate the carbonization process of the burning surface. The existing flame retardant patented technology is mainly implemented around the following three methods: 1-impregnation method, 2-spraying method, 3-hot pressing method.
浸注法:申请号:CN202111544814.8,专利名称为《一种复配阻燃木材的制备方法》,申请号:CN202111656895.0,专利名称为《一种木材阻燃处理方法》,申请号:CN202211368353.8,专利名称为《一种用于木材增强改性的生物基阻燃不饱和聚酯及其制备和应用》,这三个专利分别研发硅酸盐-硼酸溶液、磷系-卤素阻燃剂、生物基不饱和聚酯溶液,采用真空浸渍的方法将阻燃剂注入到木材中以达到阻燃效果。以上专利有如下缺点:首先,生产效率较低,木材的溶液浸渍需要体积庞大的浸渍罐体,浸渍过程中很难保证阻燃剂均匀分布在木材内部,如果浸渍溶液分子量较大,甚至无法渗透到木材内部。其次,浸渍过程中需对罐体施加高压以及加热,压力不易控制且危险,加热会导致阻燃剂挥发或相互反应影响阻燃效果。最后,浸渍法只适用于处理厚度较薄的材料或者是渗透性较好的材料,适用对象有局限性。Impregnation method: application number: CN202111544814.8, patent name is "A Preparation Method for Composite Flame Retardant Wood", application number: CN202111656895.0, patent name is "A Method for Wood Flame Retardant Treatment", application number: CN202211368353.8, the patent title is "A Bio-based Flame Retardant Unsaturated Polyester for Wood Reinforcement Modification and Its Preparation and Application". Flame retardant, bio-based unsaturated polyester solution, using vacuum impregnation method to inject flame retardant into wood to achieve flame retardant effect. The above patents have the following disadvantages: First, the production efficiency is low, and the solution impregnation of wood requires a bulky impregnation tank. It is difficult to ensure that the flame retardant is evenly distributed inside the wood during the impregnation process. If the impregnation solution has a large molecular weight, it may not even penetrate. to the interior of the wood. Secondly, high pressure and heating need to be applied to the tank during the impregnation process. The pressure is difficult to control and dangerous. Heating will cause the flame retardants to volatilize or react with each other and affect the flame retardant effect. Finally, the impregnation method is only suitable for processing thinner materials or materials with better permeability, and the applicable objects are limited.
喷涂法:申请号:CN202211358671.6,专利名称为《一种膨胀炭层厚度可控型阻燃剂及阻燃木材的制备方法》,申请号:CN202110849790.0,专利名称为《一种生物质阻燃剂、水性阻燃涂料及其制备方法与应用》,申请号:CN202111037354.X,专利名称为《一种基于二维材料增强的木材表面层层自组装阻燃涂层的制备方法》,这三个专利分别以淀粉基膨胀型阻燃剂、生物质阻燃剂、层层自组装二维材料阻燃涂层的方法,将阻燃剂涂覆在木材表面,经气干、烘干、水分平衡即可得到阻燃木材。以上专利有如下缺点:首先,该方法制备的阻燃涂层时效性较短,适用短时小火环境,对于大火无法实现高效阻燃。其次,涂层不具备耐候性以及抵抗外界破坏的能力较差,针对外界环境温湿度的变化,易出现自然降解及损伤脱落。最后,阻燃涂层常含有磷氮硼系、铵、磷、三嗪类化合物,具有一定毒性,不具备环境友好的特点。Spraying method: application number: CN202211358671.6, the patent name is "A Flame Retardant with Controllable Intumescent Carbon Layer Thickness and Preparation Method of Fire-Retardant Wood", application number: CN202110849790.0, the patent name is "A Biomass Flame retardant, water-based flame retardant coating and its preparation method and application", application number: CN202111037354.X, patent name is "a method for preparing a self-assembled flame retardant coating on wood surface based on two-dimensional material reinforcement", These three patents use starch-based intumescent flame retardants, biomass flame retardants, and layer-by-layer self-assembled two-dimensional material flame-retardant coating methods to coat the flame retardants on the wood surface, and then air-dry and dry. , Moisture balance can get flame retardant wood. The above patents have the following disadvantages: First, the flame-retardant coating prepared by this method has a short timeliness and is suitable for a short-term small fire environment, and cannot achieve high-efficiency flame retardancy for large fires. Secondly, the coating does not have weather resistance and poor ability to resist external damage. In response to changes in temperature and humidity in the external environment, it is prone to natural degradation and damage. Finally, flame retardant coatings often contain phosphorus, nitrogen, boron, ammonium, phosphorus, and triazine compounds, which are toxic and not environmentally friendly.
热压法:申请号:CN202210921430.1,专利名称为《一种有机-无机杂化硼氮磷三元阻燃型刨花板及其制备方法》,申请号:CN202211272972.7,专利名称为《一种高强度、阻燃、环保木材及其制备方法》,申请号:CN202110188407.1,专利名称为《一种高强阻燃木材的制备方法》,这三个专利主要采用浸泡或涂抹的方式使板材与预聚阻燃剂相结合,再经热压,使阻燃层与黏结层同时固化在板材之中。以上专利最主要的缺点:首先,阻燃剂与胶黏剂两者协同效应,阻燃剂添加量过大,会影响胶黏剂的粘接效果,降低板材胶合强度。若胶黏剂添加量过大,则影响阻燃剂用量,对阻燃效果有影响。其次,板材热压过程中会不可避免的遇到热胀冷缩现象,板材的体积若过大,会产生翘曲,容易变形,从而影响平整度。最后,热压板材不具备环保特性。Hot pressing method: application number: CN202210921430.1, the patent name is "An organic-inorganic hybrid boron nitrogen phosphorus ternary flame-retardant particleboard and its preparation method", application number: CN202211272972.7, the patent name is "a kind of High-strength, flame-retardant, environmentally friendly wood and its preparation method", application number: CN202110188407.1, patent name is "a preparation method of high-strength flame-retardant wood", these three patents mainly use soaking or smearing to make the board and Combination of pre-polymerized flame retardants, and then hot pressing, so that the flame retardant layer and the adhesive layer are cured in the board at the same time. The main disadvantages of the above patents: First, the flame retardant and the adhesive have a synergistic effect. If the amount of the flame retardant is too large, it will affect the bonding effect of the adhesive and reduce the bonding strength of the board. If the amount of adhesive added is too large, it will affect the amount of flame retardant and affect the flame retardant effect. Secondly, thermal expansion and contraction will inevitably occur during the hot-pressing process of the board. If the volume of the board is too large, it will warp and deform easily, thus affecting the flatness. Finally, hot-pressed sheets do not have environmental protection features.
综上,从现有制备阻燃木质材料的专利分析,存在如下问题:生产周期较长、成本较高、缺乏环保性、附加功能少、性能不稳定、研究对象单一等,并且现存制备方法除上述3种浸渍、喷涂、热压外,其余阻燃研究工艺还鲜有报道。基于此,寻求一种简单、高效、多功能、附加值高的制备耐火竹材的方法具有广阔的应用前景。In summary, from the analysis of the existing patents for the preparation of flame-retardant wood materials, there are the following problems: long production cycle, high cost, lack of environmental protection, few additional functions, unstable performance, single research object, etc., and the existing preparation methods except Except for the above three kinds of impregnation, spraying, and hot pressing, there are few reports on the other flame retardant research processes. Based on this, seeking a simple, efficient, multi-functional, and high-value-added method for preparing refractory bamboo has broad application prospects.
发明内容Contents of the invention
本发明的目的是为解决现有制备耐火木材的方法生产周期长、附加功能单一、阻燃性不好等问题,提供一种采用磁控溅射制备具有防腐、净化空气、易修复、耐火竹材的方法及其应用。The purpose of the present invention is to solve the problems of long production cycle, single additional function and poor flame retardancy of the existing method for preparing refractory wood, and to provide a kind of anti-corrosion, air-purifying, easy-to-repair, refractory bamboo material prepared by magnetron sputtering. method and its application.
本发明采用磁控溅射制备具有防腐、净化空气、易修复、耐火竹材的方法按照以下步骤实现:The present invention uses magnetron sputtering to prepare the method for anti-corrosion, air-purifying, easy-to-repair, refractory bamboo according to the following steps:
一、将竹材放置于大气等离子清洁仪中,进行表面清洁活化,控制等离子输出功率为200~400W,输入气体压力为0.3~0.6Mpa,采用消音射流旋转枪嘴进行清洗,得到等离子清洗后的竹材;1. Place the bamboo in the atmospheric plasma cleaner to clean and activate the surface, control the plasma output power to 200-400W, and the input gas pressure to 0.3-0.6Mpa, use the silencer jet to clean the nozzle, and get the bamboo after plasma cleaning ;
二、将HBN(氮化硼)靶材放入高温真空炉中,以2000~3000℃的温度煅烧处理,得到高纯度的HBN靶;2. Put the HBN (boron nitride) target into a high-temperature vacuum furnace, and calcine it at a temperature of 2000-3000 ° C to obtain a high-purity HBN target;
三、将等离子清洗后的竹材放入磁控溅射仪器中,靶头上安装高纯度的Cu靶,抽真空后通入氩气,控制直流电源溅射功率为100~150W,氩气流量为20~30sccm,进行预溅射处理,调整靶基距为35~40mm,然后打开阻挡板继续溅射处理,得到溅射有Cu薄膜的竹材;3. Put the plasma-cleaned bamboo into the magnetron sputtering apparatus, install a high-purity Cu target on the target head, and feed argon gas after vacuuming, control the sputtering power of DC power supply to 100-150W, and the flow rate of argon gas to 20-30sccm, carry out pre-sputtering treatment, adjust the target base distance to 35-40mm, then open the blocking plate and continue the sputtering treatment to obtain bamboo with Cu thin film sputtered;
四、将溅射有Cu薄膜的竹材放入磁控溅射仪器中,靶头上安装高纯度的HBN靶,抽真空后通入氩气/氮气混合气体,开启加热基底,加热至磁控溅射腔体升至350~450℃,控制射频溅射功率为400~600W,自偏压为120~160V,氩气流量为20sccm,氮气流量为28~32sccm,进行预溅射处理20分钟,调整靶基距为25~35mm,然后打开阻挡板继续溅射处理,得到具有防腐、净化空气、易修复、耐火竹材(溅射有HBN-Cu薄膜的竹材)。4. Put the bamboo sputtered with Cu thin film into the magnetron sputtering instrument, install a high-purity HBN target on the target head, and then pass in argon/nitrogen mixed gas after vacuuming, turn on the heating base, and heat until magnetron sputtering Raise the injection cavity to 350-450°C, control the RF sputtering power to 400-600W, self-bias voltage to 120-160V, argon flow rate to 20sccm, nitrogen flow rate to 28-32sccm, perform pre-sputtering treatment for 20 minutes, adjust The base distance of the target is 25-35 mm, and then the blocking plate is opened to continue the sputtering treatment to obtain anti-corrosion, air-purifying, easy-to-repair, fire-resistant bamboo (bamboo with HBN-Cu film sputtered).
本发明制备得到溅射有HBN-Cu薄膜的竹材具有耐火性,可用于房屋建筑领域结构用材;溅射有HBN-Cu薄膜的竹材具有防腐、净化空气功能,可用于装饰装修领域;溅射有HBN-Cu薄膜的竹材具有易修复、保护性功能,可用于古建筑修复领域。The bamboo material sputtered with the HBN-Cu film prepared by the present invention has fire resistance and can be used as a structural material in the field of building construction; the bamboo material sputtered with the HBN-Cu film has the functions of anti-corrosion and air purification and can be used in the field of decoration; Bamboo with HBN-Cu film has easy repair and protective functions, and can be used in the field of ancient building restoration.
本发明利用磁控溅射技术在竹材表面制备功能性HBN-Cu纳米材料,提供了一种新型的具有防腐、易修复、净化空气、阻燃多功能竹材的制备方法。该功能性竹材的物理化学性质稳定,且具有应用领域多、适用对象广等特点。The invention utilizes magnetron sputtering technology to prepare functional HBN-Cu nanometer material on the surface of bamboo, and provides a novel preparation method of multifunctional bamboo with anti-corrosion, easy repair, air purification and flame retardancy. The physical and chemical properties of the functional bamboo are stable, and it has the characteristics of many application fields and wide application objects.
与现有技术相比,本发明采用磁控溅射制备的多功能阻燃竹材的方法包括以下有益效果:Compared with the prior art, the method of the present invention adopts the multifunctional flame-retardant bamboo prepared by magnetron sputtering to include the following beneficial effects:
首先,在工艺选择上摒弃浸渍、喷涂、热压传统的方法,利用磁控溅射生产周期短、高效、无污染、能耗低的技术特点在竹材表面制备多功能阻燃薄膜。First of all, in terms of process selection, the traditional methods of dipping, spraying, and hot pressing are abandoned, and the technical characteristics of magnetron sputtering are short production cycle, high efficiency, no pollution, and low energy consumption to prepare multifunctional flame-retardant films on the surface of bamboo.
其次,该方法不仅适用于竹材,同样适用于木材、秸秆或其他不适用于传统加工方法制备阻燃薄膜的对象,诸如在古建筑、无损修复等领域,采用溅射法在不破坏样品的同时可赋予其功能性薄膜。Secondly, this method is not only suitable for bamboo, but also for wood, straw or other objects that are not suitable for traditional processing methods to prepare flame-retardant films. For example, in the fields of ancient buildings and non-destructive restoration, the sputtering method is used without destroying samples It can be given a functional film.
另外在制备阻燃薄膜时样品处在无水、无氧、短时高温、高压的条件下,有利于竹材表面的高温碳化,表面生成活性炭同时又保留天然竹材的特性,使其具有净化空气的功能。碳化破坏了竹材表面内部的半纤维素吸水官能团,使其吸水性下降、膨胀性下降、尺寸稳定性提高,同样由于碳化层的存在,也阻止热量、O2的向内传递,增强了阻燃效果。In addition, when the flame retardant film is prepared, the sample is under the conditions of anhydrous, anaerobic, short-term high temperature and high pressure, which is conducive to the high-temperature carbonization of the bamboo surface, and the surface generates activated carbon while retaining the characteristics of natural bamboo, so that it has the ability to purify the air. Function. Carbonization destroys the water-absorbing functional groups of hemicellulose inside the surface of bamboo, making it less water-absorbing, less expansive, and improving dimensional stability. Also, due to the existence of the carbonized layer, it also prevents the inward transfer of heat and O2 , enhancing flame retardancy. Effect.
最后,磁控溅射制备HBN薄膜具有抗化学侵蚀性质,不被无机酸和水侵蚀,最重要的由于HBN的各向异性热传导性质,其平面内热导率为300W/mk,而穿过平面的热导率仅为30W/mk,可有效阻止热量的向内传递,赋予基材阻燃特性。Finally, the HBN thin film prepared by magnetron sputtering has chemical corrosion resistance and is not corroded by inorganic acid and water. Most importantly, due to the anisotropic thermal conductivity of HBN, its in-plane thermal conductivity is 300W/mk, while the The thermal conductivity is only 30W/mk, which can effectively prevent the inward transfer of heat and endow the substrate with flame retardant properties.
附图说明Description of drawings
图1为实施例中原始竹材表面的电镜图;Fig. 1 is the electron micrograph of original bamboo surface in the embodiment;
图2为实施例中溅射有HBN-Cu层的竹材的电镜图;Fig. 2 is the electron micrograph of the bamboo material that sputters with HBN-Cu layer in the embodiment;
图3为实施例中在300℃下燃烧30s后中溅射有HBN-Cu层的竹材的表面形貌图;Fig. 3 is the surface topography figure of the bamboo material sputtered with HBN-Cu layer in the embodiment after burning at 300 DEG C for 30s;
图4为实施例中得到的溅射有HBN-Cu层的竹材表面的傅里叶红外光谱图;Fig. 4 is the Fourier transform infrared spectrogram of the bamboo surface that is sputtered with HBN-Cu layer obtained in the embodiment;
图5为实施例中在丙烷火焰下燃烧1s时的原始竹材表面照片;Fig. 5 is the original bamboo surface photo when burning 1s under propane flame in the embodiment;
图6为实施例中在丙烷火焰下燃烧1s时的溅射有HBN-Cu层的竹材表面照片;Fig. 6 is the bamboo surface photo that is sputtered with HBN-Cu layer when burning 1s under propane flame in the embodiment;
图7为实施例中在丙烷火焰下燃烧8s时的原始竹材表面照片;Fig. 7 is the original bamboo surface photo when burning 8s under propane flame in the embodiment;
图8为实施例中在丙烷火焰下燃烧8s时的溅射有HBN-Cu层的竹材表面照片;Fig. 8 is the bamboo surface photograph that sputtering has HBN-Cu layer when burning 8s under propane flame in the embodiment;
图9为实施例中在原始竹材和溅射有HBN-Cu薄膜的竹材表面防霉变照片;Fig. 9 is the anti-mildew photo of the bamboo surface with HBN-Cu thin film in original bamboo and sputtering in the embodiment;
图10为实施例中溅射有HBN-Cu薄膜的竹材机械划痕损伤和溅射修复的电镜图,其中(A)代表溅射有HBN-Cu薄膜的竹材机械划痕损伤,(B)代表溅射有HBN-Cu薄膜的竹材再次溅射修复。Fig. 10 is the electronic micrograph of mechanical scratch damage and sputtering repair of bamboo material sputtered with HBN-Cu film in the embodiment, wherein (A) represents the mechanical scratch damage of bamboo material sputtered with HBN-Cu film, and (B) represents Bamboo sputtered with HBN-Cu film was repaired by sputtering again.
具体实施方式Detailed ways
具体实施方式一:本实施方式采用磁控溅射制备具有防腐、净化空气、易修复、耐火竹材的方法按照以下步骤实施:Specific Embodiment 1: In this embodiment, magnetron sputtering is used to prepare anti-corrosion, air-purifying, easy-to-repair, and refractory bamboo materials according to the following steps:
一、将竹材放置于大气等离子清洁仪中,进行表面清洁活化,控制等离子输出功率为200~400W,输入气体压力为0.3~0.6Mpa,采用消音射流旋转枪嘴进行清洗,得到等离子清洗后的竹材;1. Place the bamboo in the atmospheric plasma cleaner to clean and activate the surface, control the plasma output power to 200-400W, and the input gas pressure to 0.3-0.6Mpa, use the silencer jet to clean the nozzle, and get the bamboo after plasma cleaning ;
二、将HBN(氮化硼)靶材放入高温真空炉中,以2000~3000℃的温度煅烧处理,得到高纯度的HBN靶;2. Put the HBN (boron nitride) target into a high-temperature vacuum furnace, and calcine it at a temperature of 2000-3000 ° C to obtain a high-purity HBN target;
三、将等离子清洗后的竹材放入磁控溅射仪器中,靶头上安装高纯度的Cu靶,抽真空后通入氩气,控制直流电源溅射功率为100~150W,氩气流量为20~30sccm,进行预溅射处理,调整靶基距为35~40mm,然后打开阻挡板继续溅射处理,得到溅射有Cu薄膜的竹材;3. Put the plasma-cleaned bamboo into the magnetron sputtering apparatus, install a high-purity Cu target on the target head, and feed argon gas after vacuuming, control the sputtering power of DC power supply to 100-150W, and the flow rate of argon gas to 20-30sccm, carry out pre-sputtering treatment, adjust the target base distance to 35-40mm, then open the blocking plate and continue the sputtering treatment to obtain bamboo with Cu thin film sputtered;
四、将溅射有Cu薄膜的竹材放入磁控溅射仪器中,靶头上安装高纯度的HBN靶,抽真空后通入氩气/氮气混合气体,开启加热基底,加热至磁控溅射腔体升至350~450℃,控制射频溅射功率为400~600W,自偏压为120~160V,氩气流量为20sccm,氮气流量为28~32sccm,进行预溅射处理20分钟,调整靶基距为25~35mm,然后打开阻挡板继续溅射处理,得到具有防腐、净化空气、易修复、耐火竹材(溅射有HBN-Cu薄膜的竹材)。4. Put the bamboo sputtered with Cu thin film into the magnetron sputtering instrument, install a high-purity HBN target on the target head, and then pass in argon/nitrogen mixed gas after vacuuming, turn on the heating base, and heat until magnetron sputtering Raise the injection cavity to 350-450°C, control the RF sputtering power to 400-600W, self-bias voltage to 120-160V, argon flow rate to 20sccm, nitrogen flow rate to 28-32sccm, perform pre-sputtering treatment for 20 minutes, adjust The base distance of the target is 25-35 mm, and then the blocking plate is opened to continue the sputtering treatment to obtain anti-corrosion, air-purifying, easy-to-repair, fire-resistant bamboo (bamboo with HBN-Cu film sputtered).
具体实施方式二:本实施方式与具体实施方式一不同的是步骤一中控制等离子输出功率为200W,输入气体压力为0.4Mpa。Embodiment 2: The difference between this embodiment and Embodiment 1 is that in step 1, the plasma output power is controlled to be 200W, and the input gas pressure is 0.4Mpa.
具体实施方式三:本实施方式与具体实施方式一不同的是步骤一中采用枪嘴直径为70mm消音射流旋转枪嘴清洗。Embodiment 3: The difference between this embodiment and Embodiment 1 is that in step 1, the diameter of the gun nozzle is 70 mm and the nozzle is cleaned by rotating the gun nozzle.
具体实施方式四:本实施方式与具体实施方式一至三之一不同的是步骤二中HBN靶的纯度为99.999%。Embodiment 4: This embodiment differs from Embodiment 1 to Embodiment 3 in that the purity of the HBN target in step 2 is 99.999%.
具体实施方式五:本实施方式与具体实施方式一至四之一不同的是步骤二中以2000℃的温度煅烧处理1小时。Embodiment 5: This embodiment is different from Embodiment 1 to Embodiment 4 in that in Step 2, the temperature of 2000° C. is calcined for 1 hour.
具体实施方式六:本实施方式与具体实施方式一至五之一不同的是步骤三中控制直流电源溅射功率为100~150W,氩气流量为20sccm,进行预溅射处理20分钟。Embodiment 6: This embodiment differs from Embodiment 1 to Embodiment 5 in that in Step 3, the sputtering power of the DC power supply is controlled to 100-150 W, the flow rate of argon gas is 20 sccm, and the pre-sputtering treatment is performed for 20 minutes.
具体实施方式七:本实施方式与具体实施方式一至六之一不同的是步骤四中控制氩气流量为20sccm,氮气流量为30sccm。Embodiment 7: This embodiment is different from Embodiment 1 to Embodiment 6 in that in step 4, the flow rate of argon gas is controlled to 20 sccm, and the flow rate of nitrogen gas is 30 sccm.
具体实施方式八:本实施方式与具体实施方式一至六之一不同的是步骤四中控制射频溅射功率为500W,自偏压为150V。Embodiment 8: This embodiment is different from Embodiment 1 to Embodiment 6 in that in Step 4, the RF sputtering power is controlled to 500W, and the self-bias voltage is 150V.
具体实施方式九:本实施方式与具体实施方式一至八之一不同的是步骤四中预溅射时间为40min。Embodiment 9: This embodiment differs from Embodiment 1 to Embodiment 8 in that the pre-sputtering time in step 4 is 40 minutes.
具体实施方式十:本实施方式与具体实施方式一至九之一不同的是步骤四中具有防腐、净化空气、易修复、耐火竹材中HBN层的溅射厚度为15~40μm。Embodiment 10: This embodiment differs from Embodiment 1 to Embodiment 9 in that in step 4, it has anti-corrosion, air purification, easy repair, and the sputtering thickness of the HBN layer in refractory bamboo is 15-40 μm.
实施例:本实施例采用磁控溅射制备具有防腐、净化空气、易修复、耐火竹材的方法按照以下步骤实施:Embodiment: In this embodiment, magnetron sputtering is used to prepare anti-corrosion, air-purifying, easy-to-repair, and refractory bamboo materials according to the following steps:
一、将竹材放置于大气等离子清洁仪中,控制等离子输出功率为200W,输入氮气至压力为0.4Mpa,采用70mm消音射流旋转枪嘴进行清洗,得到等离子清洗后的竹材;1. Place the bamboo in an atmospheric plasma cleaner, control the plasma output power to 200W, input nitrogen to a pressure of 0.4Mpa, and use a 70mm silencer jet to clean the nozzle to obtain plasma-cleaned bamboo;
二、将HBN靶(氮化硼靶的纯度为99.999%)材放入高温真空炉中,以2000℃的温度煅烧处理1小时,使靶材中的B2O3杂质和靶材的表面吸附物彻底挥发掉,得到高纯度的HBN靶;2. Put the HBN target (the purity of the boron nitride target is 99.999%) into a high-temperature vacuum furnace, and calcine it at a temperature of 2000°C for 1 hour, so that the B 2 O 3 impurities in the target and the surface of the target are adsorbed The substance is completely volatilized to obtain a high-purity HBN target;
三、将等离子清洗后的竹材放入磁控溅射仪器中,靶头上安装高纯度的Cu靶(纯度高于99.99%),抽真空后通入氩气,控制直流电源溅射功率为120W,氩气流量为20sccm,进行预溅射处理20分钟,调整靶基距40mm,然后打开阻挡板继续溅射处理,得到溅射有厚度为2μmCu薄膜的竹材;3. Put the plasma-cleaned bamboo into the magnetron sputtering apparatus, install a high-purity Cu target (purity higher than 99.99%) on the target head, introduce argon gas after vacuuming, and control the DC power supply sputtering power to 120W , the flow rate of argon gas is 20 sccm, pre-sputtering treatment is carried out for 20 minutes, the target base distance is adjusted to 40mm, and then the blocking plate is opened to continue the sputtering treatment to obtain a bamboo material sputtered with a thickness of 2 μm Cu film;
四、将溅射有Cu薄膜的竹材再次放入磁控溅射仪器中,采用高纯度的HBN靶,放下阻挡板,抽真空至真空度为6×10-4Pa,通入氩气/氮气混合气体,开启加热基底,加热至磁控溅射腔体升至400℃,控制射频溅射功率为500W,自偏压为150V,正极接到溅射真空室上,同时真空室接地,负极接到试件上,氩气流量为20sccm,氮气流量为30sccm,进行预溅射处理20min,以清理靶材表面杂质,调整靶基距30mm,然后打开阻挡板继续射频溅射处理,得到溅射有HBN-Cu薄膜的竹材,HBN层的厚度为20μm。4. Put the bamboo sputtered with Cu thin film into the magnetron sputtering apparatus again, use high-purity HBN target, put down the barrier plate, evacuate to a vacuum degree of 6×10 -4 Pa, and pass in argon/nitrogen Mix gas, turn on the heating substrate, heat until the magnetron sputtering chamber rises to 400°C, control the radio frequency sputtering power to 500W, self-bias to 150V, connect the positive pole to the sputtering vacuum chamber, while the vacuum chamber is grounded, and the negative pole is connected to the sputtering vacuum chamber. On the test piece, the flow rate of argon gas is 20 sccm, and the flow rate of nitrogen gas is 30 sccm. Pre-sputtering treatment is carried out for 20 minutes to clean the impurities on the surface of the target material, and the target base distance is adjusted to 30 mm. The HBN-Cu film is made of bamboo, and the thickness of the HBN layer is 20 μm.
本实施例中首先,大气等离子体清洗输出功率200W、输入气体压力0.3Pa、处理时间10min,工艺参数会影响离子、电子、活性基团组分与自由基性质。In this embodiment, firstly, the output power of atmospheric plasma cleaning is 200W, the input gas pressure is 0.3Pa, and the processing time is 10min. The process parameters will affect the properties of ions, electrons, active radical components and free radicals.
其次,溅射Cu薄膜的厚度3~5μm,由于竹材表面自身的粗糙度较大,直接溅射HBN的薄膜致密性、粗糙度、连续性不好,会影响薄膜性质,所以在竹材与HBN薄膜中间必须要有均匀薄膜以降低竹材表面粗糙度。Cu膜的膨胀系数、热导系数、晶格结构更利于HBN的形核,薄膜生长,并且Cu膜会使射频溅射HBN靶材时,电势更加平衡。Secondly, the thickness of the sputtered Cu film is 3-5 μm. Due to the roughness of the bamboo surface itself, the density, roughness and continuity of the film directly sputtered with HBN are not good, which will affect the properties of the film. Therefore, the bamboo and HBN film There must be a uniform film in the middle to reduce the roughness of the bamboo surface. The expansion coefficient, thermal conductivity, and lattice structure of the Cu film are more conducive to the nucleation of HBN and the growth of the film, and the Cu film will make the potential more balanced when the RF sputtering HBN target.
最后,溅射HBN靶,加热至磁控溅射腔体升至350~450℃,控制射频溅射功率为400~600W,自偏压为120~160V(对衬底施加偏压,可使Ar+受衬底电场的吸引,对正在生长的薄膜产生一定的轰击,轰击能量的大小通过控制偏压来调节,并且存在阈值偏压),氩气流量为20sccm,氮气流量为30sccm(氮气流量范围的合理选择,有利于降低薄膜的C含量,使薄膜空隙率减小,更加致密),进行预溅射处理20分钟(清除靶材表面杂质,得到的HBN薄膜纯度更高),调整靶基距30mm(根据样品尺寸大小,选择合适靶基距,有利于薄膜平整、均匀)。Finally, sputter the HBN target, heat the magnetron sputtering chamber to 350-450°C, control the RF sputtering power to 400-600W, and the self-bias voltage to 120-160V (applying a bias voltage to the substrate can make Ar + Attracted by the electric field of the substrate, a certain amount of bombardment is produced on the growing film, the size of the bombardment energy is adjusted by controlling the bias voltage, and there is a threshold bias voltage), the flow rate of argon gas is 20sccm, and the flow rate of nitrogen gas is 30sccm (the range of nitrogen gas flow rate Reasonable selection of the film will help reduce the C content of the film, reduce the porosity of the film and make the film more dense), perform pre-sputtering treatment for 20 minutes (remove impurities on the surface of the target, and obtain a higher purity HBN film), adjust the target base distance 30mm (according to the size of the sample, choose the appropriate target base distance, which is conducive to the flatness and uniformity of the film).
防腐、净化空气功能:由于磁控溅射镀膜过程是在短时高温、无氧、无水条件中进行,该环境可使竹材表面形成炭化层,炭化层中纤维孔密集、集中。水液很难浸入竹材里面,并且碳化使竹材表面的有机物全部分解,阻断腐朽必需的营养链,使其具有防腐功能,延长使用寿命。同时碳化层也是活性炭生产的中间体,具有净化空气的功能。Anti-corrosion and air-purifying functions: Since the magnetron sputtering coating process is carried out under short-term high temperature, oxygen-free and water-free conditions, this environment can form a carbonized layer on the surface of bamboo, and the fiber holes in the carbonized layer are dense and concentrated. It is difficult for water to immerse into the bamboo, and the carbonization will decompose all the organic matter on the surface of the bamboo, blocking the nutrient chain necessary for decay, making it antiseptic and prolonging its service life. At the same time, the carbonized layer is also an intermediate in the production of activated carbon, which has the function of purifying air.
耐火、易修复功能:耐火功能主要由于溅射的HBN层具有各向异性热性能,横向平面和纵向平面的热导率分别为390W/m/K和2W/m/K,可有效地将传入热量沿着HBN薄膜表面传递,限制垂直内部方向的热传导,降低热释放速率,延长点火时间。在溅射制备防火HBN层时,竹材表面发生碳化,碳化层限制O2和热量的内向传递,减缓放热反应。Fire-resistant and easy-to-repair function: The fire-resistant function is mainly due to the anisotropic thermal properties of the sputtered HBN layer. The thermal conductivity of the transverse plane and the longitudinal plane are 390W/m/K and 2W/m/K respectively, which can effectively transfer the The input heat is transferred along the surface of the HBN film, limiting the heat conduction in the vertical internal direction, reducing the heat release rate and prolonging the ignition time. When the fireproof HBN layer was prepared by sputtering, the surface of bamboo was carbonized, and the carbonized layer limited the inward transfer of O2 and heat, slowing down the exothermic reaction.
易修复功能:与热压法相比,溅射工艺不破坏样品结构,工艺过程无压力荷载。与喷涂法相比,溅射法适用对象广,对于古建筑、古装饰、特殊异形中空结构样品,喷涂法无法实现的工艺,溅射法均可,并且所制备的薄膜更均匀。Easy repair function: Compared with the hot pressing method, the sputtering process does not damage the sample structure, and there is no pressure load during the process. Compared with the spraying method, the sputtering method is applicable to a wide range of objects. For ancient buildings, ancient decorations, and special shaped hollow structure samples, the sputtering method can be used for processes that cannot be realized by the spraying method, and the prepared film is more uniform.
当燃烧1s时,溅射有HBN-Cu薄膜的竹材(图6)与原始竹材(图5)对比,形貌外观上原始竹材表面已变黑,溅射有HBN-Cu薄膜的竹材表面依然呈现HBN薄膜的原白色。当燃烧8s时,原始竹材的损烧程度较大,样品表面全部被火焰吞噬。溅射有HBN-Cu薄膜的竹材表面略微变黑,火焰并未完全燃着。When burning for 1s, the bamboo material sputtered with HBN-Cu film (Fig. 6) is compared with the original bamboo material (Fig. 5). The surface of the original bamboo material has turned black in appearance, while the surface of the bamboo material sputtered with HBN-Cu film still appears Original white color of HBN film. When burning for 8s, the degree of burning of the original bamboo is relatively large, and the surface of the sample is completely engulfed by the flame. The surface of bamboo sputtered with HBN-Cu thin film turned slightly black, and the flame was not completely ignited.
图9防霉变的实验条件:以大肠杆菌为测试菌种,采用抑菌圈法检测样品的抗菌性。Fig. 9 Experimental conditions for anti-mildew: Escherichia coli is used as the test strain, and the antibacterial property of the sample is tested by the zone of inhibition method.
从图9可以看出未处理的竹材表面长出了很多的菌落,表面变黑,被霉菌侵蚀较为严重。溅射有HBN-Cu薄膜的竹材未发现明显的菌落腐蚀,表明其有一定的抗菌效果。It can be seen from Figure 9 that many colonies grew on the surface of untreated bamboo, the surface turned black, and was severely eroded by mold. No obvious colony corrosion was found on the bamboo sputtered with HBN-Cu film, indicating that it has a certain antibacterial effect.
图10划痕损伤实验条件:样品表面施加500g重砝码,在粗砂纸表面滑行50cm,再以同样的实验条件溅射修复HBN薄膜。Figure 10 Scratch damage test conditions: a 500g heavy weight was applied to the surface of the sample, and the HBN film was repaired by sputtering on the surface of coarse sandpaper for 50 cm.
从图10可以看出HBN-Cu薄膜表面划痕损伤后,在不破坏样品的同时,可再次选择溅射法修复凸凹不平的破损表面,修复后表面均匀平整,粗糙度明显降低。It can be seen from Figure 10 that after the scratches on the surface of the HBN-Cu film are damaged, the sputtering method can be selected again to repair the uneven damaged surface without destroying the sample. After the repair, the surface is even and smooth, and the roughness is significantly reduced.
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