CN116445878A - Adsorption piece, die, adsorption structure and coating device - Google Patents

Abstract

The application relates to an adsorption element, mould, adsorption structure and coating film device, the adsorption element includes: the adsorption body is provided with a first surface and a first adsorption channel penetrating through the first surface; a plurality of abutting portions arranged on the first surface at intervals; an isolation part arranged at the periphery of the first surface; the isolation part and one side surface of all the abutting parts, which deviate from the adsorption body, are used for abutting the piece to be coated; when the piece to be coated is abutted against the isolation part and all the abutting parts, an adsorption cavity is defined among the piece to be coated, the isolation part and the adsorption body. In the adsorption piece, the die, the adsorption structure and the coating device, the isolation part is arranged to define the adsorption cavity between the piece to be coated, the isolation part and the adsorption body, and the isolation part can improve the tightness of the adsorption cavity; the to-be-coated piece is fixed on the adsorption piece by arranging a plurality of abutting parts. The adsorption structure has a simple structure, is favorable for saving the assembly time of the adsorption structure and the piece to be coated, and improves the coating efficiency.

Description

Adsorption piece, mold, adsorption structure and coating device

technical field

The present application relates to the field of coating technology, in particular to an adsorption piece, a mould, an adsorption structure and a coating device.

Background technique

Before coating the surface of the object to be coated, it is necessary to fix the object to be coated by vacuum adsorption technology. After the vacuum adsorption structure and the parts to be coated are assembled, a vacuum chamber will be defined. By vacuuming the vacuum chamber, the parts to be coated will be adsorbed on the vacuum adsorption structure, and the sealing of the vacuum chamber will affect the adsorption effect of the parts to be coated. Thus affecting the coating quality.

In the related art, in order to improve the sealing performance of the vacuum chamber, it is necessary to set up a vacuum adsorption structure with a complex structure, which results in long assembly time between the vacuum adsorption structure and the object to be coated, and low coating efficiency.

Contents of the invention

Based on this, it is necessary to provide an adsorption member, a mold, an adsorption structure and a coating device to simplify the structure of the adsorption member, thereby saving the assembly time of the adsorption structure and the member to be coated, and improving the coating efficiency.

According to one aspect of the present application, there is provided an adsorbent, comprising:

an adsorption body having a first surface and a first adsorption channel running through the first surface;

a plurality of abutting portions arranged at intervals on the first surface; and

The insulating part is arranged on the periphery of the first surface; the insulating part and all the abutting parts are used for abutting against the part to be coated;

Wherein, when the member to be coated abuts against the insulating part and all the abutting parts, an adsorption chamber is defined between the member to be coated, the insulating part and the adsorption body; The orthographic projection of the portion on the first surface has an inner contour; the orthographic projection of the first adsorption channel on the first surface, the orthographic projection of the plurality of abutting portions on the first surface are located within the inner contour.

In one of the embodiments, the size of each abutting portion along the first direction is not larger than the size of the insulating portion along the first direction;

Wherein, the first direction is perpendicular to the first surface.

In one embodiment, the difference between the dimension of the abutting portion along the first direction and the dimension of the insulating portion along the first direction is 0.1 mm to 3 mm.

In one of the embodiments, the adsorption body has a second surface facing away from the first surface along the first direction, and the insulating part has a third surface facing away from the first surface along the first direction ;

Along the first direction, the distance between the second surface and the third surface is less than 20 millimeters.

In one of the embodiments, the orthographic projection of the insulating portion on the first surface has an outer contour, and the maximum distance between the outer contour and the inner contour is less than 10 mm.

In one of the embodiments, the distance between the outer contour and the inner contour is equal.

In one embodiment, the distance between the outer contour and the inner contour is 2 millimeters.

In one embodiment, the insulating portion has a central axis, and the size of the inner contour along a reference direction ranges from 20 mm to 60 mm; the reference direction is perpendicular to the central axis.

In one of the embodiments, all the abutting parts and the insulating parts are configured to be capable of recoverable deformation in response to an external force.

In one of the embodiments, the materials of the abutting part and the insulating part are both rubber; or

The materials of the abutting part and the insulating part are both silica gel; or

Both the abutting portion and the isolating portion are made of acrylic.

In one of the embodiments, the outer contour of the orthographic projection of the adsorption body on the first surface coincides with the outer contour of the orthographic projection of the insulating part on the first surface.

According to another aspect of the present application, the present application also provides a mold, which is used to manufacture the adsorbent in any of the above embodiments;

The mold is provided with a cavity, and the cavity is adapted to the external shape of the absorber.

According to still another aspect of the present application, the present application also provides an adsorption structure, comprising interconnected fixing seats and the absorbing piece in any one of the above embodiments, and the fixing seats are located away from the first adsorption body. one side of the surface;

A second adsorption channel communicated with the first adsorption channel is formed through the fixed seat.

In one of the embodiments, the outer contour of the orthographic projection of the adsorption body on the first surface coincides with the outer contour of the orthographic projection of the fixing seat on the first surface; or

The outer contour of the orthographic projection of the adsorption body on the first surface is located within the outer contour of the orthographic projection of the fixing seat on the first surface; or

The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface.

According to still another aspect of the present application, the present application also provides a film coating device, including the adsorption structure in the above embodiment.

In the above-mentioned adsorption piece, mould, adsorption structure and coating device, the adsorption piece at least includes an adsorption body, a plurality of abutting parts, and an insulating part. By setting the insulating part, the insulating parts are arranged around all the abutting parts, and the insulating parts are away from the first One side surface of the surface also abuts against the piece to be coated, so that an adsorption chamber is defined between the piece to be coated, the insulating part and the adsorption body, and the insulating part can improve the sealing of the adsorption chamber; by arranging a plurality of abutting parts , and vacuumize the first adsorption channel, so that the side surface of the abutting portion away from the first surface is adsorbed by the object to be coated, so that the object to be coated is fixed on the adsorption object. The adsorption structure at least includes an adsorption piece and a fixing seat connected to each other, and has a simple structure, which is beneficial to saving the assembly time of the adsorption structure and the piece to be coated, and improving the coating efficiency.

Description of drawings

Fig. 1 shows a schematic axial side view of a vacuum adsorption structure in an embodiment of the related art.

Fig. 2 shows a schematic front view of a vacuum adsorption structure in an embodiment of the related art.

Fig. 3 shows a schematic top view of an adsorbent in an embodiment of the related art.

Fig. 4 shows a schematic perspective view of the assembly of the adsorption structure and the object to be coated in an embodiment of the present application.

Fig. 5 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in an embodiment of the present application.

Fig. 6 shows a schematic top view of an adsorbent in an embodiment of the present application.

Fig. 7 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in another embodiment of the present application.

Fig. 8 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in another embodiment of the present application.

Fig. 9 shows a schematic front view of a mold in an embodiment of the present application.

Fig. 10 shows a schematic perspective view of the assembly of multiple vacuum adsorption structures and the parts to be coated in an embodiment of the related art.

Fig. 11 shows a schematic perspective view of the assembly of multiple adsorption structures and the parts to be coated in an embodiment of the present application.

Explanation of reference numbers:

10. Vacuum adsorption structure 11. Fixed seat

B2, the second adsorption channel 12, the adsorption piece

121. Adsorption body A. First surface

B1, the first adsorption channel B3, the gap

122. Adsorption part 13. Insulator

B. Vacuum chamber X. The first direction

3. Part to be coated D1, the first size

D2, the second dimension D3, the third dimension;

2. Coating device 20. Adsorption structure

21. Fixing seat b2, second adsorption channel

f1, the first installation groove 22, the adsorption piece

221. Adsorption body a1, first surface

a2, the second surface b1, the first adsorption channel

f2, the second installation groove 222, the contact part

b3, gap 223, isolation part

a3, third surface c1, inner contour

c2. Outer contour b. Adsorption chamber

b4, the third adsorption channel X, the first direction

d1, first dimension d2, second dimension

d3, third dimension d4, fourth dimension

d5, fifth dimension d6, sixth dimension

m, central axis n, reference direction

30. Mold 31. Cavity

40. The piece to be coated.

Detailed ways

In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

In the description of the present application, it should be understood that if any of these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", " Front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating Or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the application.

In addition, if these terms "first" and "second" appear, these terms are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

In this application, unless otherwise clearly specified and limited, if any terms such as "mounted", "connected", "connected" and "fixed" appear, these terms should be interpreted in a broad sense. For example, it can be a fixed connection, or a detachable connection, or integrated; it can be a mechanical connection, or it can be an electrical connection; it can be a direct connection or an indirect connection through an intermediary, or it can be the internal communication of two components Or the interaction relationship between two elements, unless expressly defined otherwise. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application according to specific situations.

In this application, unless otherwise clearly specified and limited, if there is a similar description that the first feature is "on" or "under" the second feature, the meaning may be that the first and second features are in direct contact, or The first and second features are in indirect contact through an intermediary. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

It should be noted that, if an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions are used for purposes of illustration only and are not intended to be exclusive implementation.

In order to meet the requirements of use, many components need to be coated with a thin film on one side surface or two opposite sides of the component during production, and there should be no invalid area on the edge of the component (the invalid area refers to the surface of the component that should be coated but not uncoated area). When coating one side of the component, it is necessary to fix the component first. Generally, the other side of the component is fixed by colloidal bonding or vacuum adsorption technology, but the fixation method of colloidal bonding will leave colloid on the surface of the component. , It is not easy to clean, so vacuum adsorption technology is generally used to fix the components.

Fig. 1 shows a schematic axial view of a vacuum adsorption structure in an embodiment of the related technology; Fig. 2 shows a schematic front view of the vacuum adsorption structure in an embodiment of the related technology. In order to clearly show the connection relationship between the vacuum adsorption structure 10 and the film-to-be-coated piece 3 in FIG. 1 , the part of the vacuum-suction structure 10 that is shielded by the film-to-be-coated piece 3 is shown by dotted lines.

In an embodiment of the related art, referring to Fig. 1 and Fig. 2, in order to improve the sealing performance of the vacuum chamber B, the vacuum adsorption structure 10 is provided with an insulator 13, that is, the vacuum adsorption structure 10 includes a fixed seat 11, an adsorption member 12 And spacer 13. The adsorption piece 12 includes an adsorption body 121 and a plurality of adsorption parts 122. The adsorption body 121 is arranged on the fixed seat 11, and all the adsorption parts 122 are arranged at intervals on the first surface A of the adsorption body 121 along the first direction X, and along the first direction X. In one direction X, the adsorption body 121 is located between the adsorption part 122 and the fixing seat 11 . The insulating element 13 is disposed around the absorbing element 12 at an end of the fixing base 11 along the first direction X that is close to the absorbing element 12 . The adsorption body 121 is provided with a first adsorption channel B1 along the first direction X, and the fixed base 11 is provided with a second adsorption channel B2 communicating with the first adsorption channel B1 along the first direction X. When coating, it is necessary to assemble the vacuum adsorption structure 10 and the piece 3 to be coated first, that is, the piece 3 to be coated is arranged on the side surface of the adsorption piece 12 and the insulating part away from the fixed seat 11 along the first direction X. At this time, the piece to be coated is The part 3, the insulating part 13 and the fixed seat 11 jointly define a vacuum chamber B, and vacuumize through the first adsorption channel B1 and the second adsorption channel B2, so that the film-to-be-coated part 3 and the insulating part 13 and all the adsorption parts 122 are tightly adsorbed, In this way, the object 3 to be coated is fixed on the vacuum adsorption structure 10 . In order to improve the coating quality, it is necessary to check the airtightness of the vacuum chamber B after vacuuming to determine whether the airtightness of the vacuum chamber B meets the requirements, which leads to a longer assembly time of the vacuum adsorption structure 10 and the film-to-be-coated part 3, and the coating low efficiency. Moreover, if the airtightness of the vacuum chamber B is not good, it will also cause the plasma used to form the film to enter the medium vacuum chamber B during the coating process. Etching will affect the stability of adsorption between the adsorption member 12 and the member to be coated 3 , which in turn will affect the coating quality.

Fig. 3 shows a schematic top view of an adsorbent in an embodiment of the related art. In FIG. 3 , in order to clearly show the gap B3 formed by the spaced arrangement of the plurality of adsorption parts 122 , the gap B3 is shown as a white line.

The inventors of the present application have noticed that referring to Fig. 1 and Fig. 2, in an embodiment of the related art, the absorber 12 and the insulating member 13 are two independent structures, and there are production tolerances and assembly tolerances, which are also factors that affect the vacuum after assembly. One of the main reasons for the airtightness of chamber B. Referring to Fig. 3, since all the adsorption parts 122 are arranged at intervals on the adsorption body 121, and the gap B3 between the adsorption parts 122 and the first adsorption channel B1 are connected to each other, if the insulating member 13 is not provided (refer to the above figure in conjunction with 1 and Fig. 2), then it is impossible to define the vacuum chamber B that meets the sealing requirements (combined with reference to Fig. 1 and Fig. 2 above), and the plasma will easily enter the vacuum chamber B (combined with Fig. 1 and Fig. Fig. 2) carries out etching to adsorbent 12, influences the stability of the adsorption of adsorbent 12 and to-be-coated piece 3 (in conjunction with referring to Fig. 1 and Fig. 2 above), causes to-be-coated piece 3 (in conjunction with referring to figure in the above) 1 and Figure 2) cannot be fixed, thus affecting the coating quality.

Fig. 4 shows an axial schematic diagram of the assembly of the adsorption structure and the object to be coated in an embodiment of the present application; Fig. 5 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in an embodiment of the application. In FIG. 4 , in order to clearly show the connection relationship between the adsorption structure 20 and the object to be coated 40 , the part of the adsorption structure 20 that is covered by the object to be coated 40 is shown by a dotted line.

Referring to FIG. 4 and FIG. 5 , the present application provides an adsorption piece 22 . The adsorption piece 22 includes an adsorption body 221 , a plurality of abutting portions 222 and an isolation portion 223 . The adsorption body 221 has a first surface a1 and a first adsorption channel b1 passing through the first surface a1, all abutting portions 222 are arranged at intervals on the first surface a1, and the isolation portion 223 is disposed on the periphery of the first surface a1. The insulating part 223 and all the abutting parts 222 are used for abutting against the film-to-be-coated part 40 on a side surface away from the adsorption body 221 . Wherein, when the film-to-be-coated part 40 abuts against the insulating part 223 and all the abutting parts 222, an adsorption chamber b is defined between the film-to-be-coated part 40, the insulating part 223 and the adsorption body 221; the insulating part 223 is on the first surface a1 The orthographic projection on has an inner contour c1; the orthographic projection of the first adsorption channel b1 on the first surface a1 and the orthographic projections of the plurality of abutting portions 222 on the first surface a1 are all located within the inner contour c1.

It can be understood that the specific shape of the abutting portion 222 can be striped, cylindrical, prism or any other irregular pattern, and the specific shapes of all the abutting portions 222 can be consistent or different from each other. The size of the first direction X can be kept consistent, so that all the abutting portions 222 can abut against the object to be coated 40 during coating. In order to facilitate processing and manufacturing, the specific shape of all the abutting parts 222 and the size along the first direction X can be consistent, that is, all the abutting parts 222 are the same, thereby saving production costs, and when the adsorbent 22 is set as one The molded structure is easy to process.

The above-mentioned adsorbent 22, the adsorbent 22 at least includes an adsorption body 221, a plurality of abutting parts 222 and an insulating part 223, by setting the insulating part 223, when the coating part 40 abuts against the insulating part 223 and all the abutting parts 222, The side surface of the insulating portion 223 away from the first surface a1 is in contact with the object to be coated 40 , so that an adsorption chamber b is defined between the object to be coated 40 , the insulating portion 223 and the adsorption body 221 . Like this, just can improve the airtightness of adsorption chamber b by insulating part 223, so that to-be-coated piece 40 can be firmly adsorbed on the adsorption piece 22, and prevents plasma from entering adsorption chamber b to a certain extent, is conducive to improving Coating quality. Moreover, the isolation part 223 is disposed around all the abutment parts 222 , so that the isolation part 223 can protect the abutment part 222 to improve the situation that the abutment part 222 is subjected to plasma etching. By arranging a plurality of abutting parts 222, and vacuumizing the first adsorption channel b1, so that the side surface of the abutting part 222 away from the first surface a1 is adsorbed by the part 40 to be coated, thereby fixing the part 40 to be coated on the On the adsorption member 22 , a plurality of abutting portions 222 can also be provided to improve the stability of the adsorption of the member 40 to be coated.

It should be noted that the first surface a1 refers to a side surface of the adsorption body 221 along the first direction X, and a plurality of abutting portions 222 and isolation portions 223 are disposed on the first surface a1. The first adsorption channel b1 refers to the channel through which the gas circulates. The first adsorption channel b1 can be evacuated so that the workpiece 40 to be coated and the adsorption structure 20 can be adsorbed, or a certain pressure can be filled into the first adsorption channel b1. The gas is used to break the vacuum, so that the object to be coated 40 and the adsorption structure 20 are separated. The abutting portion 222 refers to that the surface of the abutting portion 222 facing away from the adsorption body 221 along the first direction X can be in contact with the object 40 to be coated after vacuuming the adsorption chamber b during film coating, that is, , the object to be coated 40 can be adsorbed on the abutting portion 222 . The isolation part 223 refers to the structure disposed on the first surface a1 around all the abutting parts 222 , and the isolation part 223 , the adsorption body 221 , and the object to be coated 40 can jointly define the adsorption chamber b. The peripheral edge refers to the peripheral edge of the adsorption body 221 , that is, the insulating portion 223 is disposed on the first surface a1 around the entire abutting portion 222 and is located at the peripheral edge of the first surface a1 . The orthographic projection of the insulating portion 223 on the first surface a1 has an inner contour c1 means that the insulating portion 223 is configured as a ring structure and thus has an inner contour c1. The orthographic projection of the first adsorption channel b1 on the first surface a1 and the orthographic projections of all abutting portions 222 on the first surface a1 are located within the inner contour c1, which means that the partition 223 surrounds the first adsorption channel b1 and the entire The abutting portion 222 is provided. The adsorption chamber b refers to the chamber where the gas flows, including the first adsorption channel b1 in this application, the gap b3 between all the isolation parts 223, the second adsorption channel b2 and the third adsorption channel b4, and is squeezed by vacuuming. The gas in the adsorption chamber b is released, so that the object to be coated 40 is adsorbed on the adsorption member 22 .

Continuing to refer to FIG. 5 , in some embodiments, the size of each abutting portion 222 along the first direction X is not larger than the size of the insulating portion 223 along the first direction X. Referring to FIG. Wherein, the first direction X is perpendicular to the first surface a1; the dimension of the abutting portion 222 along the first direction X is marked as the fifth dimension d5, and the dimension of the insulating portion 223 along the first direction X is marked as the sixth dimension d6. In the schematic diagram of an embodiment shown in FIG. 5 , the fifth dimension d5 and the sixth dimension d6 are equal, so they are marked at the same place.

In this way, during coating, the insulating part 223 can jointly define the adsorption chamber b meeting the airtight requirements with the adsorption body 221 and the object to be coated 40, thereby facilitating fixing the object to be coated 40 and improving the coating quality.

It can be understood that since the function of the isolation part 223 is mainly to isolate the abutting part 222 and the plasma, and jointly define the adsorption chamber b together with the adsorption body 221 and the film-to-be-coated piece 40, the isolation part 223 along the first The side surface of the adsorption body 221 facing away from the direction X must be in contact with the object to be coated 40 . That is to say, if the size of the abutting portion 222 along the first direction X is greater than the size of the isolation portion 223 along the first direction X, the isolation portion 223 may not be able to abut against the object 40 to be coated, thereby causing the isolation portion 223 to fail. A satisfactory adsorption chamber b is defined together with the adsorption body 221 and the film-to-be-coated piece 40, which will affect the coating quality. In order to facilitate processing and manufacturing, the fifth dimension d5 and the sixth dimension d6 can be made equal, so that the adsorption chamber b meets the airtightness requirements while reducing processing difficulty and saving manufacturing costs.

Continuing to refer to FIG. 5 , in some embodiments, the difference between the dimension of the abutting portion 222 along the first direction X and the dimension of the insulating portion 223 along the first direction X is 0.1 mm to 3 mm. That is, the difference between the fifth dimension d5 and the sixth dimension d6 is 0.1 mm to 3 mm.

It can be understood that the difference between the size of the abutting portion 222 along the first direction X and the size of the insulating portion 223 along the first direction X can be determined according to the materials of the abutting portion 222 and the insulating portion 223. For the abutting portion 222 made of different materials Compared with the insulating portion 223, the difference between the fifth dimension d5 and the sixth dimension d6 is also different. That is to say, if the material of the abutting portion 222 and the insulating portion 223 is relatively soft, the difference between the fifth dimension d5 and the sixth dimension d6 can be set slightly larger. If the material of the abutting portion 222 and the insulating portion 223 Relatively hard, then the difference between the fifth dimension d5 and the sixth dimension d6 needs to be set slightly smaller, so that when the object to be coated 40 abuts against the isolation part 223 and all the contact parts 222, the first part of the isolation part 223 The surface of the three surfaces a3 and the abutting portion 222 facing away from the first surface a1 along the first direction X can all be in contact with the object to be coated 40, so that the airtightness of the adsorption chamber b meets the requirements and improves the coating quality.

Continuing to refer to FIG. 5 , in some embodiments, the adsorption body 221 has a second surface a2 facing away from the first surface a1 along the first direction X, and the insulating portion 223 has a third surface a3 facing away from the first surface a1 along the first direction X. Along the first direction X, the distance between the second surface a2 and the third surface a3 is less than 20 millimeters. Wherein, the distance between the second surface a2 and the third surface a3 is recorded as a fourth dimension d4, that is, the fourth dimension d4 is smaller than 20 millimeters.

It can be understood that the distance between the second surface a2 and the third surface a3 along the first direction X is also the thickness dimension of the adsorbent 22 along the first direction X. The larger the distance along the first direction X between the second surface a2 and the third surface a3, the higher the cost of the adsorption member 22, and the coating device 2 (with reference to Figure 11 shown below) is used to set the adsorption The space of the coating cavity (not shown in the figure) of the structure 20 is limited, and if the thickness dimension of the adsorption member 22 along the first direction X is too large, the adsorption structure 20 may not be placed in the coating cavity.

Fig. 6 shows a schematic top view of an adsorbent in an embodiment of the present application. In FIG. 6 , in order to clearly show the gap b3 and the third adsorption channel b4 formed by the intervals between the plurality of abutting parts 222 , the gap b3 and the third adsorption channel b4 are shown in white lines.

Referring to FIG. 6 , all the abutting portions 222 are arranged at intervals on the first surface a1 , and the gap b3 between the abutting portions 222 communicates with the first adsorption channel b1 . In order to facilitate the circulation of gas, all the abutting parts 222 jointly define and form four third adsorption channels b4, and the four third adsorption channels b4 are all connected to the first adsorption channel b1, and all the third adsorption channels b4 are arranged along a straight line, and any The included angles between two adjacent third adsorption channels b4 are both 90 degrees. It can be understood that the number, location and extension direction of the third adsorption channels b4 can be set as required.

Thus, by arranging the third adsorption channel b4, it is beneficial to shorten the time of vacuuming and improve the efficiency of coating, and setting the third adsorption channel b4 can also improve the relationship between the workpiece 40 to be coated (with reference to Fig. 4 and Fig. 5 above) and The adsorption stability of the adsorption member 22 can improve the coating quality.

Continuing to refer to FIG. 6 , in some embodiments, the orthographic projection of the insulating portion 223 on the first surface a1 has an outer contour c2 , and the maximum distance between the outer contour c2 and the inner contour c1 is less than 10 mm. Wherein, the distance between the outer contour c2 and the inner contour c1 is recorded as the second dimension d2, that is, the maximum value of the second dimension d2 is less than 10 mm.

It can be understood that if the distance between the outer contour c2 and the inner contour c1 is too large, the surface area of the third surface a3 of the insulating portion 223 will be larger, resulting in the separation between the insulating portion 223 and the object to be coated 40 (refer to FIG. 4 and FIG. 5) The abutting area between them is relatively large, which will also cause the adsorption force between the insulating part 223 and the piece to be coated 40 to be relatively large, which is not conducive to separating the piece to be coated 40 after the coating is completed (in conjunction with reference to Fig. 4 and FIG. 5 ) and adsorbent 22.

It should be noted that the orthographic projection of the isolating portion 223 on the first surface a1 has an outer contour c2 means that the isolating portion 223 is configured as a ring structure and therefore has an outer contour c2. The number of times that the abutting portion 222 can be reused is usually less than 1000 times, and the insulating portion 223 will also be worn during repeated use, and the insulating portion 223 will also be etched by plasma. As the use time increases, the abutting portion 222 and the insulating part 223 will fail, so when designing the distance between the inner contour c1 and the outer contour c2 of the insulating part 223, it is mainly to keep the number of times of use of the insulating part 223 consistent with the number of times of use of the contact part 222 so that The usage times of the abutting portion 222 can be fully utilized, and at the same time, the cost will not be increased due to the excessive distance between the inner contour c1 and the outer contour c2 of the insulating portion 223 .

Continuing to refer to FIG. 6 , in some embodiments, the distance between the outer contour c2 and the inner contour c1 is equal. That is, the insulating portion 223 is configured in a ring shape.

It should be noted that the ring shape refers to a closed-loop closed structure, and the distance between the outer contour c2 and the inner contour c1 is the ring width, but the ring shape does not mean that along the circumferential direction of the insulating part 223, the ring width is everywhere Equally, the structure of the isolating portion 223 can be flexibly set according to actual usage conditions. In the case that the ring width of the insulating part 223 is equal everywhere, for example, the insulating part 223 is configured as a circular ring, and the ring width is equal everywhere, it is more convenient for the processing and manufacturing of the insulating part 223, and it is also conducive to the installation and fixing of the adsorption part 22.

Continuing to refer to FIG. 6 , in some embodiments, when the insulating portion 223 is configured in a ring shape, the distance between the outer contour c2 and the inner contour c1 is 2 mm, that is, the second dimension d2 is 2 mm.

Continuing to refer to Fig. 4 and Fig. 5, in some embodiments, the insulating portion 223 has a central axis m, and the size of the inner contour c1 (referring to Fig. 6 above) along the reference direction n ranges from 20 mm to 60 mm, refer to The direction n is perpendicular to the central axis m. Wherein, the dimension of the inner contour c1 (refer to FIG. 6 above) along the reference direction n is marked as the third dimension d3, that is, the range of the third dimension d3 is 20 mm to 60 mm.

It should be noted that the central axis m of the isolation portion 223 refers to a line passing through the center point of the isolation portion 223 . For example, when the insulating portion 223 is configured as a ring, the central axis m of the insulating portion 223 refers to a line passing through the center of the insulating portion 223; The central axis m of 223 refers to the line passing through the intersection of the two diagonals of the parallelogram; when the partition 223 is configured as an irregular shape, the central axis m roughly passes through the line of the geometric center of the partition 223, and the geometric center refers to is the geometric center of a certain cross-section of the insulating portion 223 . The reference direction n refers to the direction perpendicular to the central axis m of the insulating portion 223, but there are many directions perpendicular to the central axis m (the reference direction n shown in FIGS. 4 to 6 is only one of the reference directions n, and only Example), that is to say, if the line connecting any two points on the inner contour c1 (combined with reference to Figure 6 above) intersects the central axis m, then the line connecting these two points is parallel to the reference direction n, and the inner contour c1 ( Refer to Fig. 6 above) The size along the reference direction n refers to the intersection of any two points on the inner contour c1 (refer to Fig. 6 above) and the central axis m, and the line segment between these two points is at The corresponding dimension in the reference direction n parallel to the line connecting these two points is the third dimension d3.

Continuing to refer to FIG. 6 , in some embodiments, when the insulating portion 223 is configured in a ring shape, the size of the outer contour c2 of the insulating portion 223 is 35 mm, and the size of the outer contour c2 of the insulating portion 223 is recorded as the first dimension d1, That is, the first dimension d1 is 35 mm.

It should be noted that the diameter of the inner ring of the isolation part 223 is calculated based on the diameter of the outer ring of the isolation part 223 and the ring width of the isolation part 223. For example, when the isolation part 223 is configured as a ring, the outer ring of the isolation part 223 The diameter is 35 mm, and the ring width of the isolation part 223 is 2 mm, so the diameter of the inner circle of the isolation part 223 is 31 mm. It can be understood that the size of the insulating portion 223 can be flexibly set according to actual needs.

Referring to Fig. 2 again, in an embodiment of the related art, the adsorption member 12, the insulating member 13 and the fixed seat 11 are all constructed as a structure of revolution, and the outer peripheral diameter of the adsorption member 12 is recorded as the first dimension D1, and the first dimension D1 is 31 mm , The outer peripheral diameter of the insulating member 13 is recorded as the second dimension D2, and the second dimension D2 is 55 mm. The inner peripheral diameter of the insulating member 13 is recorded as the third dimension D3, and the third dimension D3 is 35 mm. Continuing to refer to Fig. 5, in one embodiment of the present application, both the adsorption part 22 and the fixed seat 21 are configured as a rotary structure, and the outer diameter of the adsorption part 22 is 35 millimeters, that is, the outer circumference of the adsorption body 221 and the insulating part 223 The diameters are equal, and the first dimension d1 is 35 mm (combined with reference to FIG. 6 ). That is to say, under the condition that the fixing seat 21 and the workpiece 40 to be coated remain the same, compared with the overall size of the vacuum adsorption structure 10 in an embodiment of the related art, the overall size of the adsorption structure 20 in this embodiment of the present application is reduced. About 36% (compared here is that the vacuum adsorption structure 10 of the related art has a maximum outer diameter of 55 millimeters, while the maximum outer diameter of the adsorption structure 20 of the present application is 35 millimeters). In this way, the overall size of the adsorption structure 20 of the present application is smaller, and the overall weight is lighter.

Continuing to refer to FIG. 4 and FIG. 5 , in some embodiments, all the abutting portion 222 and the insulating portion 223 are configured to be capable of recoverable deformation in response to an external force. That is to say, both the abutting portion 222 and the insulating portion 223 have a certain degree of softness, and can undergo a certain deformation under the action of an external force.

It should be noted that the softness means that the abutting portion 222 and the insulating portion 223 can undergo a certain recoverable deformation under the action of an external force. Although the abutting portion 222 and the insulating portion 223 can undergo a recoverable deformation under the action of an external force, this deformation is relatively small, which is different from the relatively large deformation produced by the deformation of a spring as it is generally said.

In this way, by configuring the abutting portion 222 and the insulating portion 223 to be capable of recoverable deformation in response to an external force, when the adsorption structure 20 and the object to be coated 40 are assembled, an external force can be applied to the object to be coated 40 while vacuuming , so that the object to be coated 40 and the abutting portion 222 are in contact with the insulating portion 223, and it is also beneficial to squeeze the gas in the adsorption chamber b out of the adsorption chamber b, so that the object to be coated 40 can be more stably adsorbed on the adsorption Item 22 on.

In some embodiments, the abutting portion 222 and the insulating portion 223 are both made of rubber. Optionally, the materials of the abutting part 222 and the insulating part 223 are both fluorine-containing rubber, and the high temperature resistance and vacuum performance of fluorine-containing rubber are better than those of non-fluorine-containing rubber.

In some embodiments, the abutting portion 222 and the insulating portion 223 are made of silica gel.

In some embodiments, the abutting portion 222 and the insulating portion 223 are both made of acrylic.

It should be noted that the material of the adsorption body 221 may also be the same as that of the abutting portion 222 and the isolation portion 223 . The specific materials of the abutment part 222 and the isolation part 223 are not limited to rubber, fluorine-containing rubber, silicone and acrylic, and can also be other materials with a certain degree of softness, and the abutment part 222 can be flexibly set according to actual usage conditions. , the material of the insulating part 223 and the adsorption body 221 . Acrylic is another name for acrylic. Raw materials with different proportions and formulas can be prepared according to needs to obtain acrylic with different hardness. That is to say, the acrylic used in this application is a material with a certain degree of softness. Recoverable deformation can occur under the environment, and the acrylic material will not generate gas due to heating, which is also conducive to improving the quality of the coating.

Continuing to refer to FIG. 4 and FIG. 5 , in some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour c2 of the orthographic projection of the insulating portion 223 on the first surface a1 (See in conjunction with Figure 6 above) Coincident. That is, the external shape and peripheral dimensions of the adsorption body 221 are the same as the external shape and peripheral dimensions of the insulating portion 223 . In this way, the processing and manufacturing of the adsorbent 22 is facilitated.

It should be noted that the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 is not shown in the drawings of this application, but reference can be made to Fig. 4 and Fig. 5 , according to the outer peripheral surface of the adsorption body 221 and the insulating part The positional relationship of the outer peripheral surface of 223 determines the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour c2 of the orthographic projection of the insulating part 223 on the first surface a1 (see above in conjunction with Figure 6) Whether to overlap the settings.

Referring to Fig. 4 and Fig. 5 again, the present application also provides an adsorption structure 20, the adsorption structure 20 includes a fixed seat 21 and an adsorbent 22 connected to each other, and the fixed seat 21 is located on the side of the adsorption body 221 away from the first surface a1 The second adsorption channel b2 communicating with the first adsorption channel b1 penetrates the fixing base 21 .

It can be understood that the adsorption body 221 and the fixing seat 21 can be bonded by adhesive tape or glue, or can be connected by other connection methods or connectors, which are not limited here.

The above-mentioned adsorption structure 20, the adsorption structure 20 at least includes the interconnected adsorption member 22 and the fixing seat 21, has a simple structure, which is beneficial to save the assembly time of the adsorption structure 20 and the member to be coated 40, thereby improving the coating efficiency.

Continuing to refer to Fig. 4 and Fig. 5, in some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) is the same as the outer contour of the orthographic projection of the fixing seat 21 on the first surface a1. The contours (not shown in the figure) coincide.

It should be noted that the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 is not shown in the drawings of this application, and the outer contour of the orthographic projection of the fixing seat 21 on the first surface a1 is shown in the drawings of this application. It is not shown in the accompanying drawings, but referring to FIG. 4 and FIG. 5 , the outer contour ( (not shown in the figure) and the outer contour (not shown in the figure) of the orthographic projection of the fixing seat 21 on the first surface a1 are set to coincide.

Fig. 7 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in another embodiment of the present application.

7, in some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) is located at the outer contour of the orthographic projection of the fixing seat 21 on the first surface a1 (in the figure). not shown). Specifically, in this embodiment, the end of the fixing seat 21 along the first direction X close to the adsorption piece 22 is provided with a first installation groove f1, and the end of the adsorption body 221 along the first direction X away from the first surface a1 is provided on the first surface a1. Install in groove f1. It can be understood that the first installation groove f1 matches the external shape and size of the end of the adsorption body 221 along the first direction X away from the first surface a1.

Fig. 8 shows a schematic front view of the assembly of the adsorption structure and the object to be coated in another embodiment of the present application.

8, in some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour of the orthographic projection of the fixing seat 21 on the first surface a1 (in the figure) not shown). Specifically, in this embodiment, the end of the adsorption body 221 facing away from the first surface a1 along the first direction X is provided with a second mounting groove f2, and the adsorption body 221 is disposed on the fixing seat 21 via the second mounting groove f2. It can be understood that the external shape and size of the second installation groove f2 are adapted to the external shape and size of the end of the fixing seat 21 along the first direction X that is close to the absorbing piece 22 .

It should be noted that the specific shape and structure of the part where the adsorption body 221 and the fixing seat 21 are connected is not limited to the above-mentioned embodiments of the present application, and can also be set as required.

FIG. 9 shows a schematic front view of the mold 30 in an embodiment of the present application.

Referring to FIG. 9 , the present application also provides a mold 30 , which is used to manufacture the adsorption member 22 in the above embodiment. The mold 30 is provided with a cavity 31 , and the cavity 31 is adapted to the external shape of the absorber 22 . In this way, the required adsorbent 22 can be manufactured.

It can be understood that the adsorbent 22 can be an integrally formed structure formed by pouring the mold 30, and the specific shape and structure of the mold 30 and the cavity 31 can be set according to the external shape of the adsorbent 22, and is not limited to that shown in FIG. 9 of the present application. The mold 30.

It should be noted that the mold 30 and the adsorbent 22 shown in FIG. 9 are only for illustration. The article to be coated 40 mentioned in this application can be a planar structure or a curved surface structure, and the article to be coated 40 can be used for a vehicle display screen or other electronic equipment such as a mobile phone.

Fig. 10 shows a schematic perspective view of the assembly of multiple vacuum adsorption structures and the parts to be coated in an embodiment of the related art. For ease of description, only the content related to the embodiment of the related technology is shown.

Referring to FIG. 10 , in an embodiment of the related art, in order to more stably absorb the object 3 to be coated, a plurality of vacuum adsorption structures 10 are arranged at intervals in the coating cavity of the coating device to jointly absorb the object 3 to be coated. Since a plurality of vacuum adsorption structures 10 are set, each vacuum adsorption structure 10 and a vacuum chamber B defined by the coating member 3, when two vacuum adsorption structures 10 are set, the volume of the two vacuum chambers B is about 791 For a cubic millimeter, it takes a long time to evacuate, resulting in low coating efficiency.

Fig. 11 shows a schematic perspective view of the assembly of multiple adsorption structures and the parts to be coated in an embodiment of the present application. For ease of description, only content related to the embodiment of the present application is shown.

Referring to FIG. 11 , the present application also provides a coating device 2 , including the adsorption structure 20 in the above embodiment. It can be understood that the film coating device 2 has all the advantages of the adsorption structure 20 in the present application, which will not be repeated here.

Continue to refer to Fig. 11, in some embodiments, coating device 2 comprises a plurality of adsorption structures 20, and all adsorption structures 20 are arranged at intervals in the coating cavity (not shown in the figure) of coating device 2, and are used for jointly adsorbing the workpiece to be coated 40. Wherein, each adsorption structure 20 and the object to be coated 40 define an adsorption chamber b.

It can be understood that the number of vacuum structures can be set according to the overall size of the object to be coated 40 , and adjacent vacuum structures can be set at intervals or not. For example, when two adsorption structures 20 are provided, the volume of the two adsorption chambers b is about 377 cubic millimeters. Compared with the two vacuum chambers B defined in an embodiment of the related art, the two vacuum chambers defined in this application The volume of each adsorption chamber b is reduced by about half, which means that the vacuuming time required by the adsorption structure 20 provided in the present application is shorter and the coating efficiency is higher.

In some embodiments, the film coating device 2 further includes a temperature measuring part, which is arranged on the adsorption part 22 and used to measure the real-time temperature of the adsorption part 22 during the coating process. For example, if the piece to be coated 40 is a plastic material with poor heat resistance, the coating situation of the piece to be coated 40 can be obtained indirectly by setting the temperature measuring piece, so as to avoid the high temperature of the piece to be coated 40 to a certain extent. damage, which is beneficial to improve the coating quality.

In this way, the real-time temperature of the adsorption member 22 is obtained through the temperature measuring member, so as to indirectly obtain the real-time temperature of the member to be coated 40 during the coating process, so that the coating condition of the member to be coated 40 can be monitored.

The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is relatively specific and detailed, but should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of protection of the patent application should be based on the appended claims.

Claims (15)

1. An adsorbent, characterized in that it comprises: an adsorption body having a first surface and a first adsorption channel running through the first surface; a plurality of abutting portions arranged at intervals on the first surface; and The insulating part is arranged on the periphery of the first surface; the insulating part and all the abutting parts are used for abutting against the part to be coated; Wherein, when the member to be coated abuts against the insulating part and all the abutting parts, an adsorption chamber is defined between the member to be coated, the insulating part and the adsorption body; The orthographic projection of the portion on the first surface has an inner contour; the orthographic projection of the first adsorption channel on the first surface, the orthographic projection of the plurality of abutting portions on the first surface are located within the inner contour. 2. The adsorbent according to claim 1, wherein the size of each abutment portion along the first direction is not larger than the size of the insulating portion along the first direction; Wherein, the first direction is perpendicular to the first surface. 3 . The adsorbent according to claim 2 , wherein the difference between the dimension of the abutting portion along the first direction and the dimension of the insulating portion along the first direction is 0.1 mm to 3 mm. mm. 4. The adsorption piece according to claim 1, wherein the adsorption body has a second surface facing away from the first surface along the first direction, and the insulating part has a second surface facing away from the first surface along the first direction. a third surface of the first surface; Along the first direction, the distance between the second surface and the third surface is less than 20 millimeters. 5. The adsorbent according to any one of claims 1-4, characterized in that, the orthographic projection of the insulating portion on the first surface has an outer contour, and the difference between the outer contour and the inner contour is The maximum distance between them is less than 10mm. 6. The adsorption member according to claim 5, wherein the distance between the outer contour and the inner contour is equal. 7. The adsorption part according to claim 6, characterized in that, the distance between the outer contour and the inner contour is 2 millimeters. 8. The adsorption piece according to any one of claims 1-4, wherein the insulating part has a central axis, and the size of the inner contour along the reference direction ranges from 20 mm to 60 mm; The reference direction is perpendicular to said central axis. 9. The adsorption piece according to any one of claims 1-4, characterized in that, all the abutting parts and the insulating parts are configured to be capable of recoverable deformation in response to external force. 10. The adsorption piece according to any one of claims 1-4, characterized in that, the materials of the abutting part and the insulating part are both rubber; or The materials of the abutting part and the insulating part are both silica gel; or Both the abutting portion and the isolating portion are made of acrylic. 11. The adsorption piece according to any one of claims 1-4, characterized in that, the outer contour of the orthographic projection of the adsorption body on the first surface and the orthographic projection of the insulating part on the first surface The projected outer contours coincide. 12. A mold, characterized in that the mold is used to manufacture the adsorption piece according to any one of claims 1-11; The mold is provided with a cavity, and the cavity is adapted to the external shape of the absorber. 13. An adsorption structure, characterized in that it comprises a fixed seat connected to each other and the adsorption piece according to any one of claims 1-11, and the fixed seat is located at the side of the adsorption body away from the first surface side; A second adsorption channel communicated with the first adsorption channel is formed through the fixed seat. 14. The adsorption structure according to claim 13, characterized in that, the outer contour of the orthographic projection of the adsorption body on the first surface is the same as the outer contour of the orthographic projection of the fixing seat on the first surface. Contour coincidence; or The outer contour of the orthographic projection of the adsorption body on the first surface is located within the outer contour of the orthographic projection of the fixing seat on the first surface; or The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface. 15. A coating device, characterized by comprising the adsorption structure according to claim 13 or 14.