CN116445878B - Adsorption parts, molds, adsorption structures and coating devices - Google Patents

Adsorption parts, molds, adsorption structures and coating devices

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Publication number
CN116445878B
CN116445878B CN202310427538.XA CN202310427538A CN116445878B CN 116445878 B CN116445878 B CN 116445878B CN 202310427538 A CN202310427538 A CN 202310427538A CN 116445878 B CN116445878 B CN 116445878B
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CN
China
Prior art keywords
adsorption
coated
outer contour
dimension
abutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202310427538.XA
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Chinese (zh)
Other versions
CN116445878A (en
Inventor
林瓘丞
周宗震
吴景扬
简昆峰
高维笛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interface Optoelectronics Shenzhen Co Ltd
Interface Technology Chengdu Co Ltd
General Interface Solution Ltd
Original Assignee
Interface Optoelectronics Shenzhen Co Ltd
Interface Technology Chengdu Co Ltd
Yecheng Optoelectronics Wuxi Co Ltd
General Interface Solution Ltd
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Publication date
Application filed by Interface Optoelectronics Shenzhen Co Ltd, Interface Technology Chengdu Co Ltd, Yecheng Optoelectronics Wuxi Co Ltd, General Interface Solution Ltd filed Critical Interface Optoelectronics Shenzhen Co Ltd
Priority to CN202310427538.XA priority Critical patent/CN116445878B/en
Publication of CN116445878A publication Critical patent/CN116445878A/en
Application granted granted Critical
Publication of CN116445878B publication Critical patent/CN116445878B/en
Active legal-status Critical Current
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4586Elements in the interior of the support, e.g. electrodes, heating or cooling devices

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Manipulator (AREA)

Abstract

本申请涉及一种吸附件、模具、吸附结构及镀膜装置,吸附件包括:吸附本体,具有第一表面和贯穿第一表面的第一吸附通道;多个抵接部,多个抵接部间隔布置于第一表面上;隔绝部,设于第一表面的周缘;隔绝部和全部抵接部背离吸附本体的一侧表面用于抵接待镀膜件;在待镀膜件抵接于隔绝部和全部抵接部时,待镀膜件、隔绝部和吸附本体之间界定出吸附腔室。上述吸附件、模具、吸附结构及镀膜装置中,通过设置隔绝部,以使待镀膜件、隔绝部和吸附本体之间界定出吸附腔室,隔绝部能够改善吸附腔室的密封性;通过设置多个抵接部,从而将待镀膜件固定在吸附件上。吸附结构的结构简单,有利于节省吸附结构与待镀膜件的装配时间,提高镀膜效率。

The present application relates to an adsorption part, a mold, an adsorption structure and a coating device, wherein the adsorption part comprises: an adsorption body having a first surface and a first adsorption channel passing through the first surface; a plurality of abutting portions, the plurality of abutting portions being arranged at intervals on the first surface; an insulating portion, provided on the periphery of the first surface; the insulating portion and all the abutting portions having a side surface facing away from the adsorption body for abutting the part to be coated; when the part to be coated abuts against the insulating portion and all the abutting portions, an adsorption chamber is defined between the part to be coated, the insulating portion and the adsorption body. In the above-mentioned adsorption part, mold, adsorption structure and coating device, the insulating portion is provided so that the adsorption chamber is defined between the part to be coated, the insulating portion and the adsorption body, and the insulating portion can improve the sealing of the adsorption chamber; the plurality of abutting portions are provided so that the part to be coated is fixed on the adsorption part. The adsorption structure has a simple structure, which is conducive to saving assembly time of the adsorption structure and the part to be coated and improving coating efficiency.

Description

Adsorption piece, die, adsorption structure and coating device
Technical Field
The application relates to the technical field of coating, in particular to an adsorption piece, a die, an adsorption structure and a coating device.
Background
Before coating the surface of the workpiece to be coated, the workpiece to be coated needs to be fixed by a vacuum adsorption technology. After the vacuum adsorption structure and the to-be-coated piece are assembled, a vacuum chamber is defined, the to-be-coated piece is adsorbed on the vacuum adsorption structure by vacuumizing the vacuum chamber, and the adsorption effect of the to-be-coated piece is influenced by the tightness of the vacuum chamber, so that the coating quality is influenced.
In the related art, in order to improve the tightness of the vacuum chamber, a vacuum adsorption structure with a complex structure needs to be arranged, so that the assembly time of the vacuum adsorption structure and a piece to be coated is long, and the coating efficiency is low.
Disclosure of Invention
Based on this, it is necessary to provide an adsorption member, a mold, an adsorption structure and a coating device, so as to simplify the structure of the adsorption member, thereby saving the assembly time of the adsorption structure and the member to be coated and improving the coating efficiency.
According to one aspect of the present application, there is provided an adsorbent comprising:
An adsorption body having a first surface and a first adsorption passage extending through the first surface;
A plurality of abutting portions spaced apart on the first surface, and
The insulation part and one side surface of all the abutting parts, which is away from the adsorption body, are used for abutting against a piece to be coated;
When the to-be-coated piece is abutted against the isolation part and all the abutting parts, an adsorption cavity is defined among the to-be-coated piece, the isolation part and the adsorption body, the orthographic projection of the isolation part on the first surface is provided with an inner contour, and the orthographic projection of the first adsorption channel on the first surface and the orthographic projections of the plurality of abutting parts on the first surface are all located in the inner contour.
In one embodiment, a dimension of each of the abutment portions in the first direction is not greater than a dimension of the isolation portion in the first direction;
Wherein the first direction is perpendicular to the first surface.
In one embodiment, the difference between the dimension of the abutment portion along the first direction and the dimension of the isolation portion along the first direction is 0.1 to 3 millimeters.
In one embodiment, the adsorption body has a second surface facing away from the first surface in the first direction, and the insulation has a third surface facing away from the first surface in the first direction;
a spacing between the second surface and the third surface in the first direction is less than 20 millimeters.
In one embodiment, the orthographic projection of the insulating portion on the first surface has an outer contour, and the maximum distance between the outer contour and the inner contour is less than 10 mm.
In one embodiment, the spacing between the outer profile and the inner profile is equal.
In one embodiment, the spacing between the outer profile and the inner profile is 2 millimeters.
In one embodiment, the insulating portion has a central axis, and the inner contour has a dimension in a reference direction that is perpendicular to the central axis in a range of 20 mm to 60 mm.
In one embodiment, all of the abutment and isolation portions are configured to be capable of recoverable deformation in response to an external force.
In one embodiment, the material of the abutting part and the isolation part is rubber, or
The material of the abutting part and the isolation part is silica gel, or
The abutting part and the isolation part are made of acrylic.
In one embodiment, the outer contour of the orthographic projection of the adsorption body on the first surface and the outer contour of the orthographic projection of the isolation part on the first surface coincide.
According to another aspect of the present application, there is also provided a mold for manufacturing the absorbent member of any of the above embodiments;
The die is provided with a die cavity, and the die cavity is matched with the external shape of the adsorption piece.
According to yet another aspect of the present application, there is provided an adsorption structure, including a fixing base and the adsorption element in any of the above embodiments, which are connected to each other, and the fixing base is located on a side of the adsorption body away from the first surface;
the fixing seat is penetrated with a second adsorption channel communicated with the first adsorption channel.
In one embodiment, the outer contour of the orthographic projection of the adsorption body on the first surface coincides with the outer contour of the orthographic projection of the fixing seat on the first surface, or
The outer contour of the orthographic projection of the adsorption body on the first surface is positioned inside the outer contour of the orthographic projection of the fixing seat on the first surface, or
The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface.
According to still another aspect of the present application, there is also provided a plating apparatus including the adsorption structure in the above embodiment.
In the adsorption piece, the die, the adsorption structure and the coating device, the adsorption piece at least comprises an adsorption body, a plurality of abutting parts and an isolation part, the isolation part is arranged around all the abutting parts, one side surface of the isolation part, which is away from the first surface, is also abutted against the piece to be coated, so that an adsorption cavity is defined among the piece to be coated, the isolation part and the adsorption body, the tightness of the adsorption cavity can be improved, and the first adsorption channel is vacuumized through the plurality of abutting parts, so that one side surface of the abutting part, which is away from the first surface, is adsorbed with the piece to be coated, and the piece to be coated is fixed on the adsorption piece. The adsorption structure at least comprises an adsorption part and a fixing seat which are connected with each other, the structure is simple, the assembly time of the adsorption structure and the part to be coated is saved, and the coating efficiency is improved.
Drawings
Fig. 1 is an axial schematic view showing a vacuum suction structure in an embodiment of the related art.
Fig. 2 is a schematic front view showing a vacuum suction structure in an embodiment of the related art.
Fig. 3 shows a schematic top view of an absorbent member according to an embodiment of the related art.
Fig. 4 is a schematic axial view showing an assembly of the adsorption structure and a member to be coated according to an embodiment of the application.
Fig. 5 is a schematic front view illustrating an assembly of an adsorption structure and a piece to be coated according to an embodiment of the application.
Fig. 6 shows a schematic top view of an absorbent member in accordance with an embodiment of the present application.
Fig. 7 is a schematic front view illustrating an assembly of an adsorption structure and a member to be coated according to another embodiment of the present application.
Fig. 8 is a schematic front view illustrating an assembly of an adsorption structure and a member to be coated according to another embodiment of the present application.
Fig. 9 shows a schematic front view of a mold in an embodiment of the application.
Fig. 10 is a schematic axial view showing an assembly of a plurality of vacuum suction structures and a member to be coated in an embodiment of the related art.
FIG. 11 is a schematic axial view showing the assembly of a plurality of suction structures and a member to be coated according to an embodiment of the present application.
Reference numerals illustrate:
10. vacuum adsorption structure 11 and fixing seat
B2, second adsorption passage 12, adsorbent
121. Adsorption body A, first surface
B1, a first adsorption channel B3, a gap
122. Adsorption part 13 and isolation member
B. vacuum chamber X, first direction
3. To-be-coated piece D1 and first size
D2, a second dimension D3, a third dimension;
2. Coating device 20 and adsorption structure
21. Fixing seat b2 and second adsorption channel
F1, first mounting groove 22, adsorbing member
221. Adsorption body a1, first surface
A2, a second surface b1, a first adsorption channel
F2, second mounting groove 222, abutment portion
B3, gap 223, insulation
A3, third surface c1, inner contour
C2, outer contour b, adsorption chamber
B4, third adsorption channel X, first direction
D1, a first dimension d2, a second dimension
D3, third dimension d4, fourth dimension
D5, fifth dimension d6, sixth dimension
M, central axis n, reference direction
30. Mold 31, cavity
40. And (5) coating a piece to be coated.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.
In the description of the present application, it should be understood that, if any, these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., are used herein with respect to the orientation or positional relationship shown in the drawings, these terms refer to the orientation or positional relationship for convenience of description and simplicity of description only, and do not indicate or imply that the apparatus or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application.
Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.
In the present application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, they may be fixedly connected, detachably connected or integrally formed, mechanically connected, electrically connected, directly connected or indirectly connected through an intermediate medium, and communicated between two elements or the interaction relationship between two elements unless clearly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.
In order to meet the requirements of use, many components are produced by coating a thin film on one side surface or two opposite sides of the component, and the edges of the component cannot have an ineffective area (an ineffective area refers to an area where the surface of the component should be coated but not coated). When coating a film on one surface of the element, the element needs to be fixed first, and the other surface of the element is generally fixed by a colloid bonding or vacuum adsorption technology, but the colloid remains on the surface of the element in a colloid bonding and fixing mode, and cleaning is not easy, so that the element is generally fixed by adopting the vacuum adsorption technology.
Fig. 1 is a schematic axial view of a vacuum suction structure according to an embodiment of the related art, and fig. 2 is a schematic front view of the vacuum suction structure according to an embodiment of the related art. Fig. 1 shows a portion of the vacuum suction structure 10 blocked by the member to be coated 3 with a broken line in order to clearly show the connection relationship between the vacuum suction structure 10 and the member to be coated 3.
In an embodiment of the related art, referring to fig. 1 and 2, in order to improve the sealing property of the vacuum chamber B, the vacuum suction structure 10 is provided with an isolation member 13, that is, the vacuum suction structure 10 includes a fixing base 11, a suction member 12, and the isolation member 13. The adsorption member 12 includes an adsorption body 121 and a plurality of adsorption portions 122, the adsorption body 121 is disposed on the fixing base 11, all the adsorption portions 122 are disposed on a first surface a of one side of the adsorption body 121 along the first direction X at intervals, and the adsorption body 121 is disposed between the adsorption portion 122 and the fixing base 11 along the first direction X. The insulating member 13 is disposed around the absorbent member 12 at an end of the holder 11 adjacent to the absorbent member 12 in the first direction X. The adsorption body 121 is provided with a first adsorption channel B1 along a first direction X, the fixing base 11 is provided with a second adsorption channel B2 communicated with the first adsorption channel B1 along the first direction X, when the film coating is required to be performed on the film coating member 3, the vacuum adsorption structure 10 and the film coating member 3 need to be assembled, that is, the film coating member 3 is arranged on one side surface of the adsorption member 12 and the isolation portion, which is away from the fixing base 11 along the first direction X, the film coating member 3, the isolation member 13 and the fixing base 11 together define a vacuum chamber B, and vacuum is pumped through the first adsorption channel B1 and the second adsorption channel B2, so that the film coating member 3, the isolation member 13 and all the adsorption portions 122 are tightly adsorbed, and the film coating member 3 is fixed on the vacuum adsorption structure 10. In order to improve the coating quality, it is necessary to check the air tightness of the vacuum chamber B after the vacuum is drawn to determine whether the air tightness of the vacuum chamber B meets the requirement, which results in long assembly time of the vacuum suction structure 10 and the member 3 to be coated, and low coating efficiency. Moreover, if the air tightness of the vacuum chamber B is poor, the plasma for forming the film enters the vacuum chamber B during the film plating process, and the plasma etches the adsorption member 12 due to the characteristics of the plasma, so that the adsorption stability of the adsorption member 12 and the member to be plated 3 is affected, and the film plating quality is further affected.
Fig. 3 shows a schematic top view of an absorbent member according to an embodiment of the related art. In fig. 3, the gap B3 is shown as white lines in order to clearly show the gap B3 formed by the plurality of suction portions 122 disposed at intervals.
The present inventors have noted that referring to fig. 1 and 2, in one embodiment of the related art, the suction member 12 and the insulating member 13 are two independent structures, and there are production tolerances and assembly tolerances, which are one of the main reasons for affecting the air tightness of the vacuum chamber B after assembly. Referring to fig. 3, since all the adsorption parts 122 are disposed on the adsorption body 121 at intervals, and the gap B3 between the adsorption parts 122 and the first adsorption channel B1 are mutually communicated, if the isolation member 13 is not disposed (refer to fig. 1 and 2 in combination), the vacuum chamber B (refer to fig. 1 and 2 in combination) meeting the sealing requirement cannot be defined, and plasma can easily enter the vacuum chamber B (refer to fig. 1 and 2 in combination) to etch the adsorption member 12, so that the adsorption stability of the adsorption member 12 and the member to be coated 3 (refer to fig. 1 and 2 in combination) is affected, and the member to be coated 3 (refer to fig. 1 and 2 in combination) cannot be fixed, thereby affecting the coating quality.
Fig. 4 is a schematic axial side view of an adsorption structure assembled with a workpiece to be coated according to an embodiment of the application, and fig. 5 is a schematic front view of an adsorption structure assembled with a workpiece to be coated according to an embodiment of the application. Fig. 4 shows a portion of the adsorption structure 20 shielded by the member to be coated 40 with a broken line in order to clearly show the connection relationship between the adsorption structure 20 and the member to be coated 40.
Referring to fig. 4 and 5, the present application provides an adsorbing member 22, wherein the adsorbing member 22 includes an adsorbing body 221, a plurality of abutting portions 222 and an isolating portion 223. The adsorption body 221 has a first surface a1 and a first adsorption channel b1 penetrating the first surface a1, all the abutting portions 222 are spaced apart on the first surface a1, and the isolation portion 223 is disposed at the periphery of the first surface a 1. The isolation portion 223 and all the abutting portions 222 are used for abutting the member to be coated 40 on one side surface facing away from the adsorption body 221. When the member to be coated 40 abuts against the isolation portion 223 and all the abutting portions 222, an adsorption chamber b is defined among the member to be coated 40, the isolation portion 223 and the adsorption body 221, the front projection of the isolation portion 223 on the first surface a1 has an inner contour c1, and the front projection of the first adsorption channel b1 on the first surface a1 and the front projection of the plurality of abutting portions 222 on the first surface a1 are all located in the inner contour c 1.
It is understood that the specific shape of the abutting portions 222 may be a stripe shape, a cylinder shape, a prism shape, or any other irregular pattern, and the specific shapes of all the abutting portions 222 may be uniform or different from each other, and the dimensions of all the abutting portions 222 along the first direction X may be uniform, so that all the abutting portions 222 can abut against the member 40 to be coated when coating. For ease of manufacturing, the specific shape and dimensions of all the abutment portions 222 in the first direction X may be kept uniform, i.e., all the abutment portions 222 are identical, thereby saving production costs and facilitating processing when the adsorbing member 22 is provided in an integrally formed structure.
The adsorbing member 22 at least includes an adsorbing body 221, a plurality of abutting portions 222 and an isolating portion 223, and by providing the isolating portion 223, when the member 40 to be coated abuts against the isolating portion 223 and all the abutting portions 222, one side surface of the isolating portion 223 facing away from the first surface a1 abuts against the member 40 to be coated, so that an adsorbing chamber b is defined among the member 40 to be coated, the isolating portion 223 and the adsorbing body 221. In this way, the sealing performance of the adsorption chamber b can be improved by the isolation portion 223, so that the workpiece 40 to be coated can be firmly adsorbed on the adsorption member 22, and plasma is blocked from entering the adsorption chamber b to a certain extent, which is beneficial to improving the coating quality. And, the isolation portion 223 is disposed around all the abutment portions 222, so that the isolation portion 223 can protect the abutment portions 222 to improve the condition that the abutment portions 222 are subjected to plasma etching. Through setting up a plurality of butt portions 222 to carry out the evacuation to first adsorption channel b1, so that the butt portion 222 deviate from the first surface a1 one side surface and wait the adsorption of coating film piece 40, thereby will wait to coat film piece 40 and fix on adsorbing piece 22, set up a plurality of butt portions 222 moreover and also can improve the stability of waiting to coat film piece 40's absorption.
The first surface a1 refers to a side surface of the adsorption body 221 along the first direction X, and the first surface a1 is provided with a plurality of abutting portions 222 and isolation portions 223. The first adsorption channel b1 refers to a channel through which gas flows, and the first adsorption channel b1 may be vacuumized to enable the to-be-coated piece 40 and the adsorption structure 20 to be adsorbed, or gas with a certain pressure may be filled into the first adsorption channel b1 to break the vacuum, so that the to-be-coated piece 40 and the adsorption structure 20 are separated. The abutment portion 222 refers to that, during film plating, after the suction chamber b is vacuumized, a side surface of the abutment portion 222 facing away from the suction body 221 along the first direction X can abut against the to-be-plated film member 40, that is, the to-be-plated film member 40 can be adsorbed on the abutment portion 222. The isolation portion 223 is a structure that surrounds all the abutting portions 222 and is disposed on the first surface a1, and the isolation portion 223, the adsorption body 221, and the to-be-coated member 40 can jointly define an adsorption chamber b. The peripheral edge refers to the circumferential edge of the suction body 221, that is, the isolation portion 223 is provided around all the abutting portions 222 at the circumferential edge of the first surface a 1. The orthographic projection of the isolation portion 223 on the first surface a1 has an inner contour c1, which means that the isolation portion 223 is configured in a ring-shaped structure, so as to have the inner contour c1. The fact that the orthographic projection of the first adsorption passage b1 on the first surface a1 and the orthographic projection of all the abutting portions 222 on the first surface a1 are located within the inner contour c1 means that the isolation portion 223 is disposed around the first adsorption passage b1 and all the abutting portions 222. The adsorption chamber b refers to a chamber in which gas flows, and includes a first adsorption passage b1, a gap b3 between all the insulation parts 223, a second adsorption passage b2, and a third adsorption passage b4 in the present application, and the gas in the adsorption chamber b is extruded by vacuum pumping so that the member to be coated 40 is adsorbed on the adsorption member 22.
With continued reference to fig. 5, in some embodiments, a dimension of each abutment 222 along the first direction X is not greater than a dimension of the isolation portion 223 along the first direction X. The dimension of the abutting portion 222 along the first direction X is denoted as a fifth dimension d5, and the dimension of the insulating portion 223 along the first direction X is denoted as a sixth dimension d6. In the schematic diagram of the embodiment shown in fig. 5, the fifth dimension d5 and the sixth dimension d6 are equal, so the marks are at the same place.
Thus, when coating, the isolation part 223 can define the adsorption cavity b meeting the air tightness requirement together with the adsorption body 221 and the member 40 to be coated, thereby being beneficial to fixing the member 40 to be coated and improving the coating quality.
It is understood that, since the isolating portion 223 mainly isolates the abutting portion 222 from the plasma and defines the adsorption chamber b together with the adsorption body 221 and the workpiece 40 to be coated, a side surface of the isolating portion 223 facing away from the adsorption body 221 along the first direction X must abut against the workpiece 40 to be coated when coating. That is, if the size of the abutting portion 222 along the first direction X is greater than the size of the insulating portion 223 along the first direction X, the insulating portion 223 may not abut against the to-be-coated member 40, so that the insulating portion 223, the adsorbing body 221 and the to-be-coated member 40 may not define the adsorption chamber b that meets the requirement, which affects the coating quality. In order to facilitate processing and manufacturing, the fifth dimension d5 and the sixth dimension d6 can be equal, so that the processing difficulty is reduced and the manufacturing cost is saved while the air tightness requirement of the adsorption chamber b is met.
With continued reference to fig. 5, in some embodiments, the difference between the dimension of the abutting portion 222 along the first direction X and the dimension of the isolating portion 223 along the first direction X is 0.1 mm to 3 mm. That is, the difference between the fifth dimension d5 and the sixth dimension d6 is 0.1 mm to 3 mm.
It is understood that the difference between the size of the abutting portion 222 along the first direction X and the size of the isolating portion 223 along the first direction X may be determined according to the material of the abutting portion 222 and the isolating portion 223, and the difference between the fifth size d5 and the sixth size d6 is different for the abutting portion 222 and the isolating portion 223 with different materials. That is, if the materials of the abutting portion 222 and the isolation portion 223 are relatively soft, the difference between the fifth dimension d5 and the sixth dimension d6 may be set to be slightly larger, and if the materials of the abutting portion 222 and the isolation portion 223 are relatively hard, the difference between the fifth dimension d5 and the sixth dimension d6 needs to be set to be slightly smaller, so that when the to-be-coated member 40 abuts against the isolation portion 223 and all the abutting portion 222, both the third surface a3 of the isolation portion 223 and the surface of the abutting portion 222 on the side facing away from the first surface a1 along the first direction X can abut against the to-be-coated member 40, thereby making the tightness of the adsorption chamber b meet the requirement and improving the coating quality.
With continued reference to fig. 5, in some embodiments, the adsorption body 221 has a second surface a2 facing away from the first surface a1 along the first direction X, and the isolation portion 223 has a third surface a3 facing away from the first surface a1 along the first direction X. The spacing between the second surface a2 and the third surface a3 in the first direction X is less than 20 mm. Wherein the spacing between the second surface a2 and the third surface a3 is noted as a fourth dimension d4, i.e. the fourth dimension d4 is smaller than 20 mm.
It will be appreciated that the spacing between the second surface a2 and the third surface a3 along the first direction X is the thickness dimension of the absorbent member 22 along the first direction X. The larger the distance between the second surface a2 and the third surface a3 in the first direction X, the higher the cost of the adsorbing member 22, and the space of the coating device 2 (refer to fig. 11, which will be described later) for providing the coating cavity (not shown) of the adsorbing structure 20 is limited, and if the thickness dimension of the adsorbing member 22 in the first direction X is too large, the adsorbing structure 20 may not be provided in the coating cavity.
Fig. 6 shows a schematic top view of an absorbent member in accordance with an embodiment of the present application. In fig. 6, in order to clearly show the gap b3 and the third suction passage b4 formed by the interval between the plurality of abutting portions 222, the gap b3 and the third suction passage b4 are shown as white lines.
Referring to fig. 6, all the abutting portions 222 are disposed on the first surface a1 at intervals, and the gap b3 between the abutting portions 222 communicates with the first suction passage b 1. In order to facilitate the circulation of the gas, all the abutting portions 222 together define four third adsorption channels b4, the four third adsorption channels b4 are all communicated with the first adsorption channel b1, all the third adsorption channels b4 are all arranged along a straight line in an extending manner, and the included angle between any two adjacent third adsorption channels b4 is 90 degrees. It is understood that the number, arrangement position and extending direction of the third suction passages b4 may be set as desired.
Thus, by providing the third adsorption channel b4, the time of vacuumizing is advantageously shortened, the coating efficiency is improved, and the stability of adsorption between the member 40 to be coated (refer to fig. 4 and 5 in combination) and the adsorption member 22 can be improved by providing the third adsorption channel b4, so that the coating quality can be improved.
With continued reference to fig. 6, in some embodiments, the front projection of the isolation portion 223 on the first surface a1 has an outer contour c2, and the maximum distance between the outer contour c2 and the inner contour c1 is less than 10 mm. The distance between the outer contour c2 and the inner contour c1 is denoted as the second dimension d2, i.e. the maximum value of the second dimension d2 is less than 10 mm.
It will be appreciated that, if the distance between the outer contour c2 and the inner contour c1 is too large, the surface area of the third surface a3 of the isolation portion 223 is larger, resulting in a larger contact area between the isolation portion 223 and the member 40 to be coated (refer to fig. 4 and 5 in combination), and also resulting in a larger adsorption force between the isolation portion 223 and the member 40 to be coated, which is detrimental to separating the member 40 to be coated (refer to fig. 4 and 5 in combination) from the adsorption member 22 after coating.
Note that, the orthographic projection of the isolation portion 223 on the first surface a1 has an outer contour c2, which means that the isolation portion 223 is configured as a ring structure, and thus has the outer contour c2. The number of times the abutment portion 222 can be reused is generally less than 1000 times, the isolation portion 223 is also worn during repeated use, the isolation portion 223 is also subject to plasma etching, and as the use time increases, both the abutment portion 222 and the isolation portion 223 fail, so that when the interval between the inner contour c1 and the outer contour c2 of the isolation portion 223 is designed, the number of times the abutment portion 223 is used and the number of times the abutment portion 222 is used are kept consistent as much as possible, so that the number of times the abutment portion 222 is used is fully utilized, and meanwhile, the cost is not increased due to the excessive interval between the inner contour c1 and the outer contour c2 of the isolation portion 223.
With continued reference to fig. 6, in some embodiments, the spacing between the outer contour c2 and the inner contour c1 is equal. That is, the isolation portion 223 is configured in a ring shape.
It should be noted that, the annular shape refers to a closed structure of a closed loop, and the space between the outer contour c2 and the inner contour c1 is the annular width, but the annular shape does not represent the circumferential direction of the isolation portion 223, and the annular widths are equal everywhere, so that the structure of the isolation portion 223 can be flexibly set according to the actual use situation. In the case where the annular widths of the isolation portions 223 are equal everywhere, for example, the isolation portions 223 are configured in a circular ring shape, the manufacturing of the isolation portions 223 is facilitated, and the attachment and fixation of the absorbent member 22 is facilitated.
With continued reference to fig. 6, in some embodiments, when the isolation 223 is configured as a ring, the spacing between the outer contour c2 and the inner contour c1 is 2 millimeters, i.e., the second dimension d2 is 2 millimeters.
With continued reference to fig. 4 and 5, in some embodiments, the isolation portion 223 has a central axis m, and the inner profile c1 (see fig. 6 above in combination) has a dimension in the reference direction n that is in the range of 20mm to 60mm, the reference direction n being perpendicular to the central axis m. Wherein the dimension of the inner contour c1 (see also fig. 6 above) in the reference direction n is denoted as third dimension d3, i.e. the third dimension d3 ranges from 20mm to 60 mm.
The central axis m of the isolation portion 223 refers to a line passing through the central point of the isolation portion 223. For example, when the isolation portion 223 is configured in a circular shape, the central axis m of the isolation portion 223 refers to a line passing through the center of the isolation portion 223, and for example, when the isolation portion 223 is configured in a circular parallelogram, the central axis m of the isolation portion 223 refers to a line passing through the intersection of two diagonal lines of the parallelogram, and when the isolation portion 223 is configured in an irregular shape, the central axis m refers to a line passing through the geometric center of the isolation portion 223, which refers to the geometric center of a certain cross section of the isolation portion 223. The reference direction n refers to a direction perpendicular to the central axis m of the isolation portion 223, but there are many directions perpendicular to the central axis m (the reference direction n shown in fig. 4 to 6 is only one of the reference directions n, and only an example is given), that is, a line of any two points on the inner contour c1 (refer to fig. 6 above) intersects with the central axis m, the line of the two points is parallel to the reference direction n, a dimension of the inner contour c1 (refer to fig. 6 above) along the reference direction n refers to a dimension of a line of any two points on the inner contour c1 (refer to fig. 6 above) intersecting with the central axis m, and a dimension of a line segment between the two points in the corresponding reference direction n parallel to the line of the two points is the third dimension d3.
With continued reference to fig. 6, in some embodiments, when the isolation portion 223 is configured as a ring, the dimension of the outer contour c2 of the isolation portion 223 is 35 millimeters, and the dimension of the outer contour c2 of the isolation portion 223 is denoted as a first dimension d1, that is, the first dimension d1 is 35 millimeters.
The inner diameter of the isolation portion 223 is calculated based on the outer diameter of the isolation portion 223 and the annular width of the isolation portion 223, for example, when the isolation portion 223 is configured in a circular ring shape, the outer diameter of the isolation portion 223 is 35 mm, the annular width of the isolation portion 223 is 2 mm, and the inner diameter of the isolation portion 223 is 31 mm. It will be appreciated that the dimensions of the isolation portion 223 may be flexibly set according to actual needs.
Referring again to fig. 2, in the related art embodiment, the absorbent member 12, the isolation member 13 and the fixing base 11 are all configured as a solid of revolution, the outer peripheral diameter of the absorbent member 12 is denoted as a first dimension D1, the first dimension D1 is 31 mm, the outer peripheral diameter of the isolation member 13 is denoted as a second dimension D2, the second dimension D2 is 55 mm, the inner peripheral diameter of the isolation member 13 is denoted as a third dimension D3, and the third dimension D3 is 35 mm. With continued reference to fig. 5, in an embodiment of the present application, the suction member 22 and the fixing base 21 are both configured as a solid of revolution, the outer peripheral diameter of the suction member 22 is 35 mm, that is, the outer peripheral diameters of the suction body 221 and the isolation portion 223 are equal, and the first dimension d1 is 35 mm (refer to fig. 6 in combination). That is, in the case where the fixing base 21 and the member to be coated 40 are kept the same, the overall size of the suction structure 20 in this embodiment of the present application is reduced by about 36% as compared with the overall size of the vacuum suction structure 10 in the related art (the maximum outer peripheral diameter of the related art vacuum suction structure 10 is 55 mm, and the maximum outer peripheral diameter of the suction structure 20 of the present application is 35 mm, as compared). As such, the absorbent structure 20 of the present application is smaller in overall size and lighter in overall weight.
With continued reference to fig. 4 and 5, in some embodiments, all of the abutments 222 and the insulators 223 are configured to be capable of restorable deformation in response to an external force. That is, the abutting portion 222 and the isolation portion 223 each have a certain softness, and can be deformed to a certain extent by an external force.
It should be noted that softness means that the abutment portion 222 and the isolation portion 223 may be deformed to some extent by external force. The abutting portion 222 and the isolation portion 223 are capable of being deformed by external force in a recoverable manner, but the deformation is relatively small, unlike a large deformation amount caused by deformation of a so-called spring.
In this way, by configuring the abutting portion 222 and the isolation portion 223 to be capable of undergoing recoverable deformation in response to the action of external force, when the adsorption structure 20 and the member 40 to be coated are assembled, external force can be applied to the member 40 to be coated while vacuumizing, so that the member 40 to be coated and the abutting portion 222 abut against the isolation portion 223, and the gas in the adsorption chamber b is also facilitated to be extruded out of the adsorption chamber b, so that the member 40 to be coated can be adsorbed on the adsorption member 22 more stably.
In some embodiments, the abutting portion 222 and the isolation portion 223 are made of rubber. Alternatively, both the abutting portion 222 and the insulating portion 223 are made of a fluorine-containing rubber, and the fluorine-containing rubber is better in both high temperature resistance and vacuum resistance than rubber without fluorine.
In some embodiments, the abutting portion 222 and the isolation portion 223 are made of silicone.
In some embodiments, the material of the contact portion 222 and the isolation portion 223 is acrylic.
The material of the adsorption body 221 may be the same as that of the contact portion 222 and the isolation portion 223. The specific materials of the contact portion 222 and the isolation portion 223 are not limited to rubber, fluorine-containing rubber, silica gel and acryl, but may be other materials having a certain softness, and the contact portion 222, the isolation portion 223 and the adsorption body 221 may be flexibly provided according to actual use conditions. The acrylic is a generic name of acrylic, and raw materials with different proportions and formulas can be prepared according to requirements to obtain the acrylic with different hardness, namely, the acrylic adopted by the application is a material with certain softness, can be subjected to recoverable deformation under the action of external force, and the material of the acrylic can not generate gas due to heating, so that the quality of a coating film is also improved.
With continued reference to fig. 4 and 5, in some embodiments, an outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the drawings) and an outer contour of the orthographic projection of the isolation portion 223 on the first surface a 1c 2 (see fig. 6 above in combination) overlap. That is, the outer shape and the outer circumferential dimension of the adsorption body 221 are the same as those of the isolation portion 223. Thus, the manufacturing of the absorbent member 22 is facilitated.
It should be noted that, although the outer contour of the front projection of the suction body 221 on the first surface a1 is not shown in the drawings of the present application, referring to fig. 4 and 5, it may be determined whether the outer contour of the front projection of the suction body 221 on the first surface a1 (not shown in the drawings) and the outer contour c2 of the front projection of the isolation portion 223 on the first surface a1 (see fig. 6 above) are disposed in a superposed manner according to the positional relationship between the outer peripheral surface of the suction body 221 and the outer peripheral surface of the isolation portion 223.
Referring to fig. 4 and 5 again, the present application further provides an adsorption structure 20, where the adsorption structure 20 includes a fixing base 21 and an adsorption member 22 that are connected to each other, and the fixing base 21 is located at a side of the adsorption body 221 away from the first surface a1, and the fixing base 21 is penetrated with a second adsorption channel b2 that is communicated with the first adsorption channel b 1.
It will be appreciated that the adsorption body 221 and the fixing base 21 may be adhered by using adhesive tape or glue, or may be connected by using other connection methods or connection members, which are not limited herein.
The above-mentioned adsorption structure 20, the adsorption structure 20 at least includes the adsorption member 22 and the fixing seat 21 that are connected with each other, and is simple in structure, is favorable to saving the assembly time of adsorption structure 20 and the piece 40 that waits to be coated, thereby be favorable to improving coating efficiency.
With continued reference to fig. 4 and 5, in some embodiments, an outer contour (not shown) of the orthographic projection of the suction body 221 on the first surface a1 coincides with an outer contour (not shown) of the orthographic projection of the fixing base 21 on the first surface a 1.
It should be noted that, the outline of the front projection of the suction body 221 on the first surface a1 is not shown in the drawings of the present application, and the outline of the front projection of the fixing base 21 on the first surface a1 is not shown in the drawings of the present application, but referring to fig. 4 and 5, it may be determined whether the outline of the front projection of the suction body 221 on the first surface a1 (not shown in the drawings) and the outline of the front projection of the fixing base 21 on the first surface a1 (not shown in the drawings) are overlapped according to the positional relationship between the outer peripheral surface of the suction body 221 and the outer peripheral surface of the fixing base 21.
Fig. 7 is a schematic front view illustrating an assembly of an adsorption structure and a member to be coated according to another embodiment of the present application.
Referring to fig. 7, in some embodiments, an outer contour (not shown) of the front projection of the suction body 221 on the first surface a1 is located within an outer contour (not shown) of the front projection of the fixing base 21 on the first surface a 1. Specifically, in the present embodiment, the fixing base 21 is provided with a first mounting groove f1 along the first direction X near an end of the absorbing member 22, and an end of the absorbing body 221 away from the first surface a1 along the first direction X is disposed in the first mounting groove f 1. It will be appreciated that the first mounting groove f1 and the adsorption body 221 are adapted in external shape and size to an end facing away from the first surface a1 in the first direction X.
Fig. 8 is a schematic front view illustrating an assembly of an adsorption structure and a member to be coated according to another embodiment of the present application.
Referring to fig. 8, in some embodiments, the outer contour (not shown) of the front projection of the suction body 221 on the first surface a1 is outside the outer contour (not shown) of the front projection of the fixing base 21 on the first surface a 1. Specifically, in the present embodiment, the adsorption body 221 is provided with a second mounting groove f2 at an end facing away from the first surface a1 along the first direction X, and the adsorption body 221 is disposed on the fixing base 21 via the second mounting groove f 2. It will be appreciated that the external shape and size of the second mounting groove f2 is adapted to the external shape and size of the end of the holder 21 adjacent to the suction member 22 in the first direction X.
The specific shape and structure of the portion where the suction body 221 and the fixing base 21 are connected are not limited to the above-described embodiment of the present application, and may be set as needed.
Fig. 9 shows a schematic front view of a mold 30 according to an embodiment of the application.
Referring to fig. 9, the present application also provides a mold 30, and the mold 30 is used to manufacture the adsorbing member 22 in the above embodiment. The mold 30 is provided with a cavity 31, and the cavity 31 is adapted to the outer shape of the suction member 22. In this way, the desired adsorbent member 22 is manufactured.
It will be appreciated that the suction member 22 may be of an integrally formed construction, formed by casting the mold 30, and that the specific shape and configuration of the mold 30 and the cavity 31 may be set according to the external shape of the suction member 22, and is not limited to the mold 30 shown in fig. 9 of the present application.
The mold 30 and the adsorbing member 22 shown in fig. 9 are only used as illustrations. The film-to-be-coated member 40 can be of a planar structure or a curved structure, and the film-to-be-coated member 40 can be used for a vehicle-mounted display screen or other electronic equipment such as a mobile phone.
Fig. 10 is a schematic axial view showing an assembly of a plurality of vacuum suction structures and a member to be coated in an embodiment of the related art. For convenience of explanation, only the contents related to the related art embodiment are shown.
Referring to fig. 10, in an embodiment of the related art, in order to more stably adsorb the to-be-coated member 3, a plurality of vacuum adsorption structures 10 are disposed at intervals in a coating cavity of the coating device to commonly adsorb the to-be-coated member 3. Because a plurality of vacuum adsorption structures 10 are arranged, each vacuum adsorption structure 10 and the piece 3 to be coated are all provided with one vacuum chamber B, when two vacuum adsorption structures 10 are arranged, the volume of the two vacuum chambers B is about 791 cubic millimeters, the time spent for vacuumizing is long, and the efficiency of coating is low.
FIG. 11 is a schematic axial view showing the assembly of a plurality of suction structures and a member to be coated according to an embodiment of the present application. For convenience of explanation, only matters related to the embodiments of the present application are shown.
Referring to fig. 11, the present application further provides a coating apparatus 2, which includes the adsorption structure 20 in the above embodiment. It will be appreciated that the coating device 2 has all the advantages of the adsorption structure 20 of the present application, and will not be described herein.
With continued reference to fig. 11, in some embodiments, the coating apparatus 2 includes a plurality of adsorption structures 20, and all of the adsorption structures 20 are disposed in a coating cavity (not shown) of the coating apparatus 2 at intervals and are used to commonly adsorb the to-be-coated member 40. Wherein each of the adsorption structures 20 and the member 40 to be coated define an adsorption chamber b.
It will be appreciated that the number of vacuum structures may be set according to the overall size of the part 40 to be coated, and that adjacent vacuum structures may or may not be spaced. For example, when two adsorption structures 20 are provided, the volume of the two adsorption chambers B is about 377 cubic millimeters, and compared with the two vacuum chambers B defined in the related art embodiment, the volume of the two adsorption chambers B defined by the present application is reduced by about half, that is, the time required for evacuating the adsorption structures 20 provided by the present application is shorter, and the efficiency of coating is higher.
In some embodiments, the coating apparatus 2 further includes a temperature measuring member disposed on the absorbing member 22 for measuring the real-time temperature of the absorbing member 22 during the coating process. For example, if the member 40 to be coated is made of plastic with poor heat resistance, the condition of coating the member 40 to be coated can be indirectly obtained by arranging the temperature measuring member, so that the member 40 to be coated is prevented from being damaged due to higher temperature to a certain extent, thereby being beneficial to improving the coating quality.
Thus, the real-time temperature of the absorbing member 22 is obtained through the temperature measuring member, so that the real-time temperature of the member 40 to be coated in the coating process is indirectly obtained, and the coating condition of the member 40 to be coated can be monitored.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (15)

1. An absorbent article, comprising:
An adsorption body having a first surface and a first adsorption passage extending through the first surface;
A plurality of abutting portions spaced apart on the first surface, and
The insulation part and one side surface of all the abutting parts, which is away from the adsorption body, are used for abutting against a piece to be coated;
When the piece to be coated is abutted against the isolation part and all the abutting parts, an adsorption cavity is defined among the piece to be coated, the isolation part and the adsorption body, wherein the orthographic projection of the isolation part on the first surface is provided with an inner contour, and the orthographic projection of the first adsorption channel on the first surface and the orthographic projections of the plurality of abutting parts on the first surface are all positioned in the inner contour;
the adsorption cavity comprises a first adsorption channel and gaps among all the isolation parts, the gaps are positioned among the isolation parts, the abutting parts and the abutting parts, the gaps are communicated with the first adsorption channel, and the adsorption part is of an integrated structure.
2. The absorbent member of claim 1, wherein a dimension of each of the abutments in a first direction is no greater than a dimension of the insulation in the first direction;
Wherein the first direction is perpendicular to the first surface.
3. An absorbent member according to claim 2, wherein the difference between the dimension of the abutment in the first direction and the dimension of the insulation in the first direction is 0.1 to 3 mm.
4. The absorbent member of claim 1, wherein the absorbent body has a second surface facing away from the first surface in a first direction, and the insulation has a third surface facing away from the first surface in the first direction;
a spacing between the second surface and the third surface in the first direction is less than 20 millimeters.
5. An absorbent member according to any of claims 1-4, wherein the front projection of the insulation on the first surface has an outer contour, the maximum spacing between the outer contour and the inner contour being less than 10 mm.
6. An absorbent member according to claim 5, wherein the spacing between the outer contour and the inner contour is equal.
7. An absorbent member according to claim 6, wherein the spacing between the outer contour and the inner contour is 2 mm.
8. An absorbent member according to any of claims 1-4, wherein the insulating portion has a central axis, and the inner contour has a dimension in a reference direction, the reference direction being perpendicular to the central axis, in the range of 20mm to 60 mm.
9. An absorbent member according to any of claims 1-4, wherein all of said abutment and said insulation are configured to be capable of recoverable deformation in response to an external force.
10. An absorbent member according to any of claims 1 to 4, wherein the abutment and the insulation are made of rubber, or
The material of the abutting part and the isolation part is silica gel, or
The abutting part and the isolation part are made of acrylic.
11. The absorbent member of any of claims 1-4, wherein the outer contour of the orthographic projection of the absorbent body on the first surface and the outer contour of the orthographic projection of the insulation on the first surface coincide.
12. A mould for manufacturing an absorbent article according to any one of claims 1-11;
The die is provided with a die cavity, and the die cavity is matched with the external shape of the adsorption piece.
13. An adsorption structure comprising a holder and an adsorption element according to any one of claims 1-11 connected to each other, wherein the holder is located on a side of the adsorption body remote from the first surface;
the fixing seat is penetrated with a second adsorption channel communicated with the first adsorption channel.
14. The suction structure as claimed in claim 13, wherein the outer contour of the orthographic projection of the suction body on the first surface coincides with the outer contour of the orthographic projection of the fixing seat on the first surface, or
The outer contour of the orthographic projection of the adsorption body on the first surface is positioned inside the outer contour of the orthographic projection of the fixing seat on the first surface, or
The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface.
15. A coating device comprising an adsorption structure according to claim 13 or 14.
CN202310427538.XA 2023-04-20 2023-04-20 Adsorption parts, molds, adsorption structures and coating devices Active CN116445878B (en)

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Publication number Priority date Publication date Assignee Title
CN218402681U (en) * 2022-11-08 2023-01-31 宁德时代新能源科技股份有限公司 Adsorption component and adsorption device
CN218859755U (en) * 2022-11-22 2023-04-14 阳程科技股份有限公司 Adsorption device

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