CN118695453A - A three-dimensional topological insulator spin plasma detection method and device - Google Patents
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Abstract
本发明提供了一种三维拓扑绝缘体自旋等离子体探测方法及设备，其包括：S1、在待检测样品表面制备耦合光栅；S2、通过太赫兹光持续照射耦合光栅，将探测偏振激光照射所述反射区后，得到携带反射区震荡信息的探测偏振激光；S3、对得到携带反射区震荡信息的探测偏振激光偏振分束后，测量各分离光束的光信号强度，当各分离光束的光信号强度不同时，待检测样品表面发生自旋波震荡。本发明使用太赫兹光激发特殊材料表面等离子体，并使用激光探测该等离子体振荡的自旋波特性的方法实现了基于磁光克尔效应的自旋波探测过程，此技术有效地形成传播型狄拉克等离激元，弥补了当前自旋波探测手段的空白，对于自旋等离激元的产生和利用具有重要意义。
The present invention provides a three-dimensional topological insulator spin plasma detection method and device, which includes: S1, preparing a coupling grating on the surface of a sample to be detected; S2, continuously irradiating the coupling grating with terahertz light, irradiating the reflection area with a detection polarized laser, and obtaining a detection polarized laser carrying the oscillation information of the reflection area; S3, after polarization beam splitting the detection polarized laser carrying the oscillation information of the reflection area, measuring the light signal intensity of each separated light beam, when the light signal intensity of each separated light beam is different, spin wave oscillation occurs on the surface of the sample to be detected. The present invention uses terahertz light to excite surface plasma of special materials, and uses a method of laser to detect the spin wave characteristics of the plasma oscillation to realize a spin wave detection process based on the magneto-optical Kerr effect. This technology effectively forms a propagating Dirac plasmon, fills the gap in the current spin wave detection means, and is of great significance for the generation and utilization of spin plasmons.
Description
技术领域Technical Field
本发明涉及半导体技术领域，具体指一种三维拓扑绝缘体自旋等离子体探测方法及设备。The present invention relates to the field of semiconductor technology, and in particular to a three-dimensional topological insulator spin plasma detection method and equipment.
背景技术Background Art
自旋等离子体（spin-plasmons）作为一种涉及电子自旋的集体振荡现象，其独特的物理性质和潜在的应用价值在近年来受到了广泛关注。这种现象的产生源于电子自旋在外部电磁场激发下的集体运动，从而引起等离子体波动，实现了等离子体振荡与自旋波的有机结合。在自旋电子器件、量子计算等先进技术领域，自旋等离子体展现出极大的应用前景。Spin-plasmons, as a collective oscillation phenomenon involving electron spins, has attracted widespread attention in recent years for its unique physical properties and potential application value. This phenomenon originates from the collective motion of electron spins under the excitation of an external electromagnetic field, which causes plasma fluctuations and realizes the organic combination of plasma oscillations and spin waves. In advanced technology fields such as spintronic devices and quantum computing, spin plasmas show great application prospects.
在众多材料体系中，石墨烯、拓扑绝缘体表面态等材料因其特殊的电子结构和自旋特性，成为了研究自旋等离子体的理想平台。已有大量文献报道了在这些材料体系中成功观测到的自旋等离子体现象，以及对其潜在应用的初步探索。然而，当前的自旋等离子体观测技术尚存在一定的局限性，主要体现在对激发局限震荡波的依赖和在原位使用吸收光谱进行观测的不足。Among many material systems, materials such as graphene and topological insulator surface states have become ideal platforms for studying spin plasmons due to their special electronic structures and spin properties. A large number of literature has reported on the successful observation of spin plasma phenomena in these material systems, as well as preliminary explorations of their potential applications. However, current spin plasma observation technology still has certain limitations, mainly reflected in the reliance on excitation confined oscillation waves and the inadequacy of in-situ observation using absorption spectroscopy.
具体而言，现有的自旋等离子体观测主要受制于激发局限震荡波，这种震荡波在空间中传播受限，导致自旋等离子体的应用范围受到制约。此外，由于自旋波在非激发区域快速衰减，原位吸收光谱观测方法难以捕捉到完整的自旋等离子体信号，这无疑增加了观测的难度。更重要的是，自旋震荡波的不传播性使得其在实际应用中的探测和利用面临巨大挑战，这在很大程度上限制了自旋等离子体技术的发展。Specifically, existing spin plasma observations are mainly limited by the excitation-localized oscillation waves, which are limited in propagation in space, resulting in restrictions on the application scope of spin plasma. In addition, since spin waves decay rapidly in non-excited regions, in-situ absorption spectroscopy observation methods are difficult to capture complete spin plasma signals, which undoubtedly increases the difficulty of observation. More importantly, the non-propagation of spin oscillation waves makes their detection and utilization in practical applications face huge challenges, which greatly limits the development of spin plasma technology.
发明内容Summary of the invention
为此，本发明所要解决的技术问题在于克服现有技术中震荡波在空间中传播受限导致自旋等离子体难以观测的问题，提供一种三维拓扑绝缘体自旋等离子体探测方法及设备。To this end, the technical problem to be solved by the present invention is to overcome the problem in the prior art that the propagation of oscillation waves in space is limited, resulting in the difficulty in observing spin plasma, and to provide a three-dimensional topological insulator spin plasma detection method and equipment.
为解决上述技术问题，本发明提供了一种三维拓扑绝缘体自旋等离子体探测方法，其包括：步骤S1、在待检测样品表面划分光栅区及反射区，在所述光栅区中制备耦合光栅；步骤S2、通过太赫兹光持续照射所述耦合光栅，同时，将探测偏振激光照射所述反射区后，得到携带反射区震荡信息的探测偏振激光；步骤S3、对所述得到携带反射区震荡信息的探测偏振激光进行偏振分束后，分别测量各分离光束的光信号强度，当各分离光束的光信号强度相同时，认为所述待检测样品表面未发生自旋波震荡；当各分离光束的光信号强度不同时，认为所述待检测样品表面发生自旋波震荡。To solve the above technical problems, the present invention provides a three-dimensional topological insulator spin plasma detection method, which includes: step S1, dividing a grating area and a reflection area on the surface of a sample to be detected, and preparing a coupling grating in the grating area; step S2, continuously irradiating the coupling grating with terahertz light, and at the same time, irradiating the reflection area with a detection polarized laser to obtain a detection polarized laser carrying the oscillation information of the reflection area; step S3, after polarization beam splitting the detection polarized laser carrying the oscillation information of the reflection area, respectively measuring the light signal intensity of each separated light beam, when the light signal intensity of each separated light beam is the same, it is considered that no spin wave oscillation occurs on the surface of the sample to be detected; when the light signal intensity of each separated light beam is different, it is considered that spin wave oscillation occurs on the surface of the sample to be detected.
在本发明的一个实施例中，步骤S1中，所述待检测样品为三维拓扑绝缘体Bi2Se3薄膜，其厚度不低于300nm，所述光栅区与所述反射区面积相同，所述耦合光栅周期为400~700nm。In one embodiment of the present invention, in step S1, the sample to be detected is a three-dimensional topological insulator Bi2Se3 thin film, the thickness of which is not less than 300nm, the grating area and the reflection area have the same area, and the coupling grating period is 400~700nm.
在本发明的一个实施例中，步骤S1具体为：先通过分子束外延生长三维拓扑绝缘体Bi2Se3薄膜，之后通过电子束刻蚀和电子束蒸镀在所述光栅区上制作耦合光栅。In one embodiment of the present invention, step S1 specifically comprises: firstly growing a three-dimensional topological insulator Bi 2 Se 3 thin film by molecular beam epitaxy, and then manufacturing a coupled grating on the grating region by electron beam etching and electron beam evaporation.
在本发明的一个实施例中，步骤S2中：所述太赫兹光被引导至所述耦合光栅，至所述光栅区被激发出狄拉克等离激元，以形成自旋波，当所述待检测样品发生自旋波震荡时，所述光栅区将所述自旋波传递至所述反射区。In one embodiment of the present invention, in step S2: the terahertz light is guided to the coupling grating, until the Dirac plasmon is excited in the grating area to form a spin wave, and when the sample to be detected undergoes spin wave oscillation, the grating area transmits the spin wave to the reflection area.
在本发明的一个实施例中，步骤S2中，所述探测偏振激光为脉冲激光，其波长为750~800nm；其脉冲持续时间小于100飞秒，重复频率为75~85MHz。In one embodiment of the present invention, in step S2, the detection polarization laser is a pulsed laser with a wavelength of 750-800 nm; a pulse duration of less than 100 femtoseconds, and a repetition frequency of 75-85 MHz.
在本发明的一个实施例中，步骤S2中，在所述探测偏振激光分束前，对所述探测偏振激光依次进行固定频率调制以及噪声过滤。In one embodiment of the present invention, in step S2, before the detection polarized laser beam is split, the detection polarized laser is subjected to fixed frequency modulation and noise filtering in sequence.
在本发明的一个实施例中，其还包括步骤S4、通过制造所述太赫兹光与所述探测偏振激光之间的光程差，使二者之间产生时延，当所述待检测样品发生自旋波震荡时通过所述时延计算所述自旋波随时间变化关系。In one embodiment of the present invention, it also includes step S4, creating an optical path difference between the terahertz light and the detection polarized laser to generate a time delay between the two, and when the spin wave oscillates in the sample to be detected, the relationship between the spin wave and time is calculated through the time delay.
本发明还提供一种三维拓扑绝缘体自旋等离子体探测设备，其用以通过上述的三维拓扑绝缘体自旋等离子体探测方法进行三维拓扑绝缘体自旋等离子体探测，其包括：承载机构，待检测样品设置于所述承载机构中，所述待检测样品包括本体、光栅区以及反射区，所述光栅区及所述反射区分别设置于所述本体表面，其中，所述光栅区设置为耦合光栅；激发机构,所述激发机构设置于所述待检测样品与激光光源之间，其包括太赫兹发射器，所述激光光源中的一束光路通过所述太赫兹发射器到达所述耦合光栅；探测机构，所述探测机构包括偏振片、第一分束器、偏振分束器以及平衡检测器，所述激光光源中的另一束光路经过所述偏振片后照射所述反射区，使携带反射区震荡信息的探测偏振激光经过所述偏振分束器分束后分别输入所述平衡检测器的两个探端。The present invention also provides a three-dimensional topological insulator spin plasma detection device, which is used to perform three-dimensional topological insulator spin plasma detection through the above-mentioned three-dimensional topological insulator spin plasma detection method, and comprises: a carrying mechanism, in which a sample to be detected is arranged in the carrying mechanism, and the sample to be detected comprises a body, a grating area and a reflection area, and the grating area and the reflection area are respectively arranged on the surface of the body, wherein the grating area is arranged as a coupling grating; an excitation mechanism, which is arranged between the sample to be detected and a laser light source, and comprises a terahertz emitter, and a beam path in the laser light source reaches the coupling grating through the terahertz emitter; a detection mechanism, which comprises a polarizer, a first beam splitter, a polarization beam splitter and a balanced detector, and another beam path in the laser light source irradiates the reflection area after passing through the polarizer, so that the detection polarization laser carrying the oscillation information of the reflection area is split by the polarization beam splitter and then input into the two probe ends of the balanced detector respectively.
在本发明的一个实施例中，其还包括激光发射机构，所述激光发射机构包括激光发射器以及第二分束器，所述第二分束器将所述激光发射器的光源分为至少两束光路。In one embodiment of the present invention, it also includes a laser emitting mechanism, which includes a laser emitter and a second beam splitter, and the second beam splitter divides the light source of the laser emitter into at least two light paths.
在本发明的一个实施例中，所述探测机构还包括光学斩波器以及锁相放大器，所述光学斩波器设置于所述第二分束器与所述偏振片之间的传输光路上，所述锁相放大器设置于所述平衡检测器的输出端，且与所述光学斩波器信号连接。In one embodiment of the present invention, the detection mechanism also includes an optical chopper and a phase-locked amplifier. The optical chopper is arranged on the transmission light path between the second beam splitter and the polarizer. The phase-locked amplifier is arranged at the output end of the balanced detector and is connected to the optical chopper signal.
在本发明的一个实施例中，所述激发机构还包括至少一个球面反射镜；所述探测机构还包括移动反射组件以及至少一个固定反射镜，所述移动反射组件相对于至少一个所述固定反射镜移动。In one embodiment of the present invention, the excitation mechanism further includes at least one spherical reflector; the detection mechanism further includes a movable reflective component and at least one fixed reflector, and the movable reflective component moves relative to at least one of the fixed reflectors.
在本发明的一个实施例中，所述移动反射组件包括滑轨、驱动器以及移动反射镜，所述移动反射镜连接于所述滑轨一端，以驱动所述移动反射镜沿所述滑轨移动。In one embodiment of the present invention, the movable reflective assembly includes a slide rail, a driver, and a movable reflective mirror, and the movable reflective mirror is connected to one end of the slide rail to drive the movable reflective mirror to move along the slide rail.
在本发明的一个实施例中，其还包括中控系统，所述探测机构连接所述中控系统。In one embodiment of the present invention, it also includes a central control system, and the detection mechanism is connected to the central control system.
本发明的上述技术方案相比现有技术具有以下优点：The above technical solution of the present invention has the following advantages compared with the prior art:
本发明所述的三维拓扑绝缘体自旋等离子体探测方法及设备，使用太赫兹光激发特殊材料表面等离子体，并使用激光探测该等离子体振荡的自旋波特性的方法实现了基于磁光克尔效应的自旋波探测过程，此项发明技术可以有效地对待检测材料表面态的电子产生激发，形成传播型狄拉克等离激元，并对相应产生的自旋振荡波进行探测，弥补了当前自旋波探测手段的空白，对于自旋等离激元的产生和利用具有重要的启示和指导意义。The three-dimensional topological insulator spin plasma detection method and device described in the present invention use terahertz light to excite surface plasma of special materials, and use laser to detect the spin wave characteristics of the plasma oscillation to realize the spin wave detection process based on the magneto-optical Kerr effect. This invention technology can effectively excite the electrons in the surface state of the material to be detected to form propagating Dirac plasmons, and detect the corresponding spin oscillation waves, which fills the gap in current spin wave detection methods and has important enlightenment and guiding significance for the generation and utilization of spin plasmons.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了使本发明的内容更容易被清楚的理解，下面根据本发明的具体实施例并结合附图，对本发明作进一步详细的说明。In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.
图1是本发明优选实施例中待检测样品结构示意图；FIG1 is a schematic diagram of the structure of a sample to be detected in a preferred embodiment of the present invention;
图2是本发明优选实施例中三维拓扑绝缘体自旋等离子体探测设备结构示意图；FIG2 is a schematic diagram of the structure of a three-dimensional topological insulator spin plasma detection device in a preferred embodiment of the present invention;
图3是图2中移动反射组件及固定反射镜的结构示意图。FIG. 3 is a schematic structural diagram of the movable reflective assembly and the fixed reflective mirror in FIG. 2 .
说明书附图标记说明：100、承载机构；110、样品台；120、待检测样品；121、本体；122、光栅区；123、反射区；200、激光发射机构；210、激光发射器；220、第一分束器；300、激发机构；310、太赫兹发射器；320、球面反射镜；400、探测机构；410、固定反射镜；420、移动反射组件；421、滑轨；422、驱动器；423、移动反射镜；430、光学斩波器；440、偏振片；450、第二分束器；460、偏振分束器；470、平衡检测器；480、锁相放大器；490、中控系统。Explanation of the reference numerals in the specification: 100, supporting mechanism; 110, sample stage; 120, sample to be detected; 121, main body; 122, grating area; 123, reflection area; 200, laser emitting mechanism; 210, laser emitter; 220, first beam splitter; 300, excitation mechanism; 310, terahertz emitter; 320, spherical reflector; 400, detection mechanism; 410, fixed reflector; 420, movable reflector assembly; 421, slide rail; 422, driver; 423, movable reflector; 430, optical chopper; 440, polarizer; 450, second beam splitter; 460, polarization beam splitter; 470, balanced detector; 480, phase-locked amplifier; 490, central control system.
具体实施方式DETAILED DESCRIPTION
下面结合附图和具体实施例对本发明作进一步说明，以使本领域的技术人员可以更好地理解本发明并能予以实施，但所举实施例不作为对本发明的限定。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.
实施例一Embodiment 1
参见图1及图2所示，本实施例提供一种三维拓扑绝缘体自旋等离子体探测设备，其用以进行三维拓扑绝缘体Bi2Se3薄膜的自旋等离子体探测，其包括：Referring to FIG. 1 and FIG. 2 , this embodiment provides a three-dimensional topological insulator spin plasma detection device, which is used to perform spin plasma detection of a three-dimensional topological insulator Bi 2 Se 3 thin film, and includes:
承载机构100，待检测样品120设置于所述承载机构100中，所述待检测样品120包括本体121、光栅区122以及反射区123，所述光栅区122及所述反射区123分别设置于所述本体121表面，其中，所述光栅区122设置为耦合光栅；A carrying mechanism 100, in which a sample 120 to be detected is arranged. The sample 120 to be detected includes a body 121, a grating area 122 and a reflection area 123. The grating area 122 and the reflection area 123 are respectively arranged on the surface of the body 121, wherein the grating area 122 is arranged as a coupling grating;
激发机构300，所述激发机构300设置于所述待检测样品120与所述激光光源之间，其包括太赫兹发射器310，所述激光光源中的一束光路通过所述太赫兹发射器310到达所述耦合光栅；An excitation mechanism 300, which is disposed between the sample to be detected 120 and the laser light source, and includes a terahertz emitter 310, through which a beam of light in the laser light source reaches the coupling grating;
探测机构400，所述探测机构400包括偏振片440、第一分束器220、偏振分束器460以及平衡检测器470，所述激光光源中的另一束光路经过所述偏振片440后，通过所述第一分束器220照射所述反射区123，使携带反射区震荡信息的探测偏振激光经过所述偏振分束器460分束后分别输入所述平衡检测器470的两个探端。The detection mechanism 400 includes a polarizer 440, a first beam splitter 220, a polarization beam splitter 460 and a balanced detector 470. After another light beam in the laser light source passes through the polarizer 440, it irradiates the reflection area 123 through the first beam splitter 220, so that the detection polarized laser carrying the oscillation information of the reflection area is split by the polarization beam splitter 460 and then input into the two probe ends of the balanced detector 470 respectively.
本实施例所述的三维拓扑绝缘体自旋等离子体探测设备，使用太赫兹光激发三维拓扑绝缘体Bi2Se3薄膜表面的等离子体，并使用激光探测该等离子体振荡的自旋波特性的方法实现了基于磁光克尔效应的自旋波探测过程，此项发明技术可以有效地对待检测材料表面态的电子产生激发，形成传播型狄拉克等离激元，并对相应产生的自旋振荡波进行探测，弥补了当前自旋波探测手段的空白，对于自旋等离激元的产生和利用具有重要的启示和指导意义。The three-dimensional topological insulator spin plasma detection device described in this embodiment uses terahertz light to excite plasma on the surface of the three -dimensional topological insulator Bi2Se3 film, and uses a laser to detect the spin wave characteristics of the plasma oscillation to realize a spin wave detection process based on the magneto-optical Kerr effect. This invention technology can effectively excite the electrons in the surface state of the material to be detected to form propagating Dirac plasmons, and detect the corresponding spin oscillation waves, which fills the gap in the current spin wave detection means and has important enlightenment and guiding significance for the generation and utilization of spin plasmons.
本实施例中，承载机构100还包括样品台110，三维拓扑绝缘体Bi2Se3薄膜放置于样品台110上，具体地，本实施例中的样品台110优选为液氦制冷台，其可用于容纳尺寸为1cm×1cm的待测试样品，在其他实施例中也可以选择其他低温样品台110，本申请对此不做具体限制。进一步地，本实施例中样品台110的透光窗口需要可同时透过3-5THz(60-100um)及780nm短波红外激光，由此与后续检测过程相适配。In this embodiment, the carrier mechanism 100 further includes a sample stage 110, and the three-dimensional topological insulator Bi2Se3 film is placed on the sample stage 110. Specifically, the sample stage 110 in this embodiment is preferably a liquid helium refrigeration stage, which can be used to accommodate a sample to be tested with a size of 1cm×1cm. In other embodiments, other low-temperature sample stages 110 can also be selected, and this application does not make specific restrictions on this. Further, in this embodiment, the light-transmitting window of the sample stage 110 needs to be able to simultaneously transmit 3-5THz (60-100um) and 780nm short-wave infrared lasers, thereby adapting to the subsequent detection process.
参见图1所示，本实施例中的待检测样品120通过分子束外延加工得到，为确保检测质量，其厚度需要达到300nm及以上，进一步地，本实施例中的光栅区122以及反射区123设置于本体121的同一表面，其中，光栅区122上通过电子束刻蚀（E-beam lithography）和电子束蒸镀（E-beam evaporation）相结合的方法制作耦合光栅，由此能够为激发具有特定震荡周期的传播性狄拉克等离激元提供平台，更进一步地，本实施例中的耦合光栅的周期为400-700nm，其中，任意金属栅的宽度与空隙的宽度均占其周期的一半，由此可以产生较为均匀的光学响应，进而提高其使用稳定性。同时，金属栅和空隙的均匀分布有助于增强电磁场在光栅表面的耦合，从而提高光学器件的效率。As shown in FIG. 1 , the sample 120 to be detected in this embodiment is obtained by molecular beam epitaxy. To ensure the detection quality, its thickness needs to reach 300 nm or more. Further, the grating area 122 and the reflection area 123 in this embodiment are arranged on the same surface of the body 121, wherein the coupling grating is made on the grating area 122 by combining electron beam lithography (E-beam lithography) and electron beam evaporation (E-beam evaporation), thereby providing a platform for exciting propagating Dirac plasmons with a specific oscillation period. Further, the period of the coupling grating in this embodiment is 400-700 nm, wherein the width of any metal grating and the width of the gap are half of its period, thereby generating a relatively uniform optical response, thereby improving its use stability. At the same time, the uniform distribution of the metal grating and the gap helps to enhance the coupling of the electromagnetic field on the grating surface, thereby improving the efficiency of the optical device.
参见图2所示，本实施例还包括激光发射机构200，所述激光发射机构200包括激光发射器210以及第二分束器450，所述第二分束器450将所述激光发射器210的光源分为至少两束光路，其中一路为经过激发机构300的激发光路，另一路为经过激发机构300的探测光路。具体地，本实施例中的激光发射器210能够产生波长780nm、脉冲持续时间小于100飞秒，且重复频率为80MHz的脉冲激光。2 , the present embodiment further includes a laser emitting mechanism 200, the laser emitting mechanism 200 includes a laser emitter 210 and a second beam splitter 450, the second beam splitter 450 divides the light source of the laser emitter 210 into at least two light paths, one of which is an excitation light path passing through the excitation mechanism 300, and the other is a detection light path passing through the excitation mechanism 300. Specifically, the laser emitter 210 in the present embodiment can generate a pulsed laser with a wavelength of 780 nm, a pulse duration of less than 100 femtoseconds, and a repetition frequency of 80 MHz.
本实施例中，所述激发机构300还包括两个球面反射镜320，经过太赫兹发射器310的激发光路通过两个球面反射镜320对其光路传输方向进行导向，具体地，本实施例中，激光发射器210所产生的一条飞秒脉冲激光光束进入太赫兹发射器310以产生平行发射的太赫兹脉冲辐射，随后再通过球面反射镜320的导向作用下，到达待检测样品120中的耦合光栅上，以此实现对拓扑绝缘体表面态中的狄拉克等离激元的激发。具体地，本实施例中太赫兹发射器310的工作原理是：高速脉冲激光的照射在其内部的半导体晶体（低温生长的GaAs或InGaAs材料）中生成电子-空穴对，然后这些光激发载流子被施加的外电场加速，电子和空穴的物理分离形成与偏置电场相反的宏观场。该电场的快速上升和衰减产生瞬态电流，从而在太赫兹频率范围内产生一个同频率或相近频率的电磁辐射脉冲。In this embodiment, the excitation mechanism 300 further includes two spherical mirrors 320, and the excitation light path of the terahertz emitter 310 is guided by the two spherical mirrors 320 to guide the transmission direction of the light path. Specifically, in this embodiment, a femtosecond pulse laser beam generated by the laser emitter 210 enters the terahertz emitter 310 to generate parallel terahertz pulse radiation, and then reaches the coupling grating in the sample to be detected 120 under the guidance of the spherical mirror 320, so as to achieve the excitation of the Dirac plasmon in the surface state of the topological insulator. Specifically, the working principle of the terahertz emitter 310 in this embodiment is: the irradiation of the high-speed pulse laser generates electron-hole pairs in the semiconductor crystal (GaAs or InGaAs material grown at low temperature) inside it, and then these photoexcited carriers are accelerated by the applied external electric field, and the physical separation of electrons and holes forms a macroscopic field opposite to the bias electric field. The rapid rise and decay of the electric field generates a transient current, which in turn generates an electromagnetic radiation pulse with the same or similar frequency in the terahertz frequency range.
进一步地，本实施例中，当太赫兹脉冲辐射到达待检测样品120中的耦合光栅后，待检测样品120的光栅区122上会产生特定的电子自选排布，并在磁光克尔效应（MOKE）的作用下传递至反射区123。从具有特定电子自旋排布的材料表面反射的光，其偏振状态和强度都会发生变化，因此通过检测这种变化可以直观的推算出材料表面的自旋波状态。Furthermore, in this embodiment, when the terahertz pulse radiation reaches the coupled grating in the sample to be detected 120, a specific electron self-selected arrangement will be generated on the grating area 122 of the sample to be detected 120, and will be transferred to the reflection area 123 under the action of the magneto-optical Kerr effect (MOKE). The polarization state and intensity of the light reflected from the surface of the material with a specific electron spin arrangement will change, so by detecting this change, the spin wave state of the material surface can be intuitively inferred.
参见图2所示，经过第一分束器220的探测偏振激光向偏振分束器460传输，并到达反射区123，此时，其的偏振状态和强度都会发生变化，因此可证实待检测材料表面存在自旋波，接下来，携带反射区震荡信息的探测偏振激光达到偏振分束器460，并由偏振分束器460将不同的光信号分离出来，由此，通过比较分离后各个光束的光信号强度即可得知待检测样品120表面是否存在自旋震荡，以及自选震荡的相对强度。As shown in Figure 2, the detection polarized laser passes through the first beam splitter 220 and is transmitted to the polarization beam splitter 460 and reaches the reflection area 123. At this time, its polarization state and intensity will change, so it can be confirmed that there are spin waves on the surface of the material to be detected. Next, the detection polarized laser carrying the oscillation information of the reflection area reaches the polarization beam splitter 460, and the polarization beam splitter 460 separates the different light signals. Therefore, by comparing the light signal intensity of each light beam after separation, it can be known whether there is spin oscillation on the surface of the sample 120 to be detected, as well as the relative intensity of the spin oscillation.
进一步地，所述探测机构400还包括移动反射组件420以及至少一个固定反射镜410，所述移动反射组件420相对于至少一个所述固定反射镜410移动。本实施例中，基于移动反射组件420的设置，本申请能够通过比较不同位置以及不同的激发-探测的时间延迟条件下的光束状态变化，反应出待检测样品120的自旋波强度、相位等信息。具体地，参见图3所示，本实施例中所述移动反射组件420包括滑轨421、驱动器422以及移动反射镜423，所述移动反射镜423连接于所述滑轨421一端，以驱动所述移动反射镜423沿所述滑轨421移动，在探测光路的传输过程中可以通过移动反射组件420的位移方向和大小，实现整个探测光路光程的微米级控制。更进一步地，本实施例中随着移动反射镜423的移动，探测光路与激发光路中可以产生一个微米至毫米级的光程差，以此产生飞秒级别的时延。需要说明的是，在实际操作过程中，用于接收移动反射镜423反射光线的固定反射镜410的实际位置会随着移动反射镜423进行相应调节，以确保后续光路不受影响。Further, the detection mechanism 400 also includes a mobile reflection component 420 and at least one fixed reflection mirror 410, and the mobile reflection component 420 moves relative to at least one of the fixed reflection mirrors 410. In this embodiment, based on the setting of the mobile reflection component 420, the present application can reflect the spin wave intensity, phase and other information of the sample 120 to be detected by comparing the changes in the state of the light beam at different positions and under different excitation-detection time delay conditions. Specifically, as shown in FIG3, the mobile reflection component 420 in this embodiment includes a slide rail 421, a driver 422 and a mobile reflection mirror 423, and the mobile reflection mirror 423 is connected to one end of the slide rail 421 to drive the mobile reflection mirror 423 to move along the slide rail 421. During the transmission of the detection light path, the displacement direction and size of the mobile reflection component 420 can be used to achieve micron-level control of the optical path of the entire detection light path. Furthermore, in this embodiment, with the movement of the mobile reflection mirror 423, a micron-to-millimeter-level optical path difference can be generated in the detection light path and the excitation light path, thereby generating a femtosecond-level time delay. It should be noted that, in actual operation, the actual position of the fixed reflector 410 for receiving the light reflected by the movable reflector 423 will be adjusted accordingly with the movable reflector 423 to ensure that the subsequent light path is not affected.
参见图2所示，本实施例中的所述探测机构400还包括光学斩波器430以及锁相放大器480，所述光学斩波器430设置于所述第二分束器450与所述偏振片440之间的传输光路上，所述锁相放大器480设置于所述平衡检测器470的输出端，且与所述光学斩波器430信号连接。其中，光学斩波器430通过周期性的遮盖光源对探测光路激光产生一个频率的调制，该调制频率将同步输入到锁相放大器480中。进一步地，探测激光经过材料表面后通过偏振分束器460后，被分为偏振状态垂直的两束光，同时被引导至平衡检测器470的两端，平衡检测器470可以输出两束正交偏振光的信号差值，基于平衡检测器470产生的信号被导入至锁相放大器480，实现提取光学斩波器430调制频率的信号信息过程中噪音的最小化。进一步地，本申请还包括中控系统490，所述探测机构400连接所述中控系统490，光学斩波器430产生的调制信号从锁相放大器480输入至中控系统490，并实现光信号读取，至此完成一次完整的探测过程。其中，驱动器422也连接于中控系统490，以便于对反射移动组件的适应性调节，具体地，中控系统490优选为计算机。As shown in FIG. 2 , the detection mechanism 400 in this embodiment further includes an optical chopper 430 and a phase-locked amplifier 480. The optical chopper 430 is arranged on the transmission optical path between the second beam splitter 450 and the polarizer 440. The phase-locked amplifier 480 is arranged at the output end of the balanced detector 470 and is connected to the optical chopper 430 signal. The optical chopper 430 generates a frequency modulation on the detection optical path laser by periodically covering the light source, and the modulation frequency is synchronously input into the phase-locked amplifier 480. Further, after the detection laser passes through the material surface and passes through the polarization beam splitter 460, it is divided into two beams of light with perpendicular polarization states, and is guided to the two ends of the balanced detector 470 at the same time. The balanced detector 470 can output the signal difference of the two beams of orthogonal polarized light, and the signal generated by the balanced detector 470 is introduced into the phase-locked amplifier 480, so as to minimize the noise in the process of extracting the signal information of the modulation frequency of the optical chopper 430. Furthermore, the present application also includes a central control system 490, the detection mechanism 400 is connected to the central control system 490, the modulation signal generated by the optical chopper 430 is input from the phase-locked amplifier 480 to the central control system 490, and the optical signal is read, thus completing a complete detection process. The driver 422 is also connected to the central control system 490 to facilitate the adaptive adjustment of the reflective moving component. Specifically, the central control system 490 is preferably a computer.
实施例二Embodiment 2
本实施例提供一种三维拓扑绝缘体自旋等离子体探测方法，其通过实施例一所述的三维拓扑绝缘体自旋等离子体探测设备进行三维拓扑绝缘体自旋等离子体探测：具体包括如下步骤：This embodiment provides a three-dimensional topological insulator spin plasma detection method, which performs three-dimensional topological insulator spin plasma detection by using the three-dimensional topological insulator spin plasma detection device described in Embodiment 1, and specifically comprises the following steps:
步骤S1、在待检测样品120表面划分光栅区122及反射区123，在所述光栅区122中制备耦合光栅；本实施例中，所述待检测样品120为三维拓扑绝缘体Bi2Se3薄膜，其厚度不低于300nm，所述光栅区122与所述反射区123面积相同，所述耦合光栅周期为400~700nm。进一步地，上述过程中，先通过分子束外延生长三维拓扑绝缘体Bi2Se3薄膜，之后通过电子束刻蚀和电子束蒸镀在所述光栅区122上制作耦合光栅。Step S1, dividing the surface of the sample 120 to be detected into a grating area 122 and a reflection area 123, and preparing a coupling grating in the grating area 122; in this embodiment, the sample 120 to be detected is a three-dimensional topological insulator Bi 2 Se 3 film, whose thickness is not less than 300nm, the grating area 122 and the reflection area 123 have the same area, and the coupling grating period is 400~700nm. Further, in the above process, the three-dimensional topological insulator Bi 2 Se 3 film is first grown by molecular beam epitaxy, and then the coupling grating is made on the grating area 122 by electron beam etching and electron beam evaporation.
步骤S2、通过太赫兹光持续照射所述耦合光栅，同时，将探测偏振激光照射所述反射区后，得到携带反射区震荡信息的探测偏振激光；本实施例中，所述探测偏振激光为脉冲激光，其波长为750~800nm；其脉冲持续时间小于100飞秒，重复频率为75~85MHz。具体地，所述太赫兹光被引导至所述耦合光栅，至所述光栅区122被激发出狄拉克等离激元，以形成自旋波，当所述待检测样品120发生自旋波震荡时，所述光栅区122将所述自旋波传递至所述反射区123。更进一步地，步骤S2中，在所述探测偏振激光分束前，对所述探测偏振激光依次进行固定频率调制以及噪声过滤。Step S2, continuously irradiate the coupling grating with terahertz light, and at the same time, irradiate the reflection area with the detection polarization laser to obtain the detection polarization laser carrying the oscillation information of the reflection area; in this embodiment, the detection polarization laser is a pulsed laser with a wavelength of 750~800nm; its pulse duration is less than 100 femtoseconds, and the repetition frequency is 75~85MHz. Specifically, the terahertz light is guided to the coupling grating, and the Dirac plasmon is excited in the grating area 122 to form a spin wave. When the spin wave oscillates in the sample 120 to be detected, the grating area 122 transmits the spin wave to the reflection area 123. Furthermore, in step S2, before the detection polarization laser is split, the detection polarization laser is sequentially subjected to fixed frequency modulation and noise filtering.
步骤S3、对所述混合光束进行偏振分束后，分别测量各分离光束的光信号强度，Step S3: After polarization splitting the mixed light beam, measure the light signal intensity of each separated light beam respectively.
当各分离光束的光信号强度相同时，认为所述待检测样品120表面未发生自旋波震荡；When the light signal intensities of the separated light beams are the same, it is considered that no spin wave oscillation occurs on the surface of the sample 120 to be detected;
当各分离光束的光信号强度不同时，认为所述待检测样品120表面发生自旋波震荡；When the light signal intensities of the separated light beams are different, it is considered that spin wave oscillation occurs on the surface of the sample 120 to be detected;
本实施例还包括步骤S4、通过制造所述太赫兹光与所述探测偏振激光之间的光程差，使二者之间产生时延，当所述待检测样品120发生自旋波震荡时通过所述时延计算所述自旋波随时间变化关系。此外，通过移动反射组件420还可以控制探测光束的照射位点，由此产生一个自旋波在某一特定时延状态下的强度地图。This embodiment also includes step S4, creating an optical path difference between the terahertz light and the detection polarized laser to generate a time delay between the two, and calculating the time-dependent relationship of the spin wave when the spin wave oscillates in the sample to be detected 120 through the time delay. In addition, the irradiation position of the detection beam can also be controlled by moving the reflective component 420, thereby generating an intensity map of the spin wave under a certain time delay state.
综上，本发明所述的三维拓扑绝缘体自旋等离子体探测方法及设备，使用太赫兹光激发特殊材料表面等离子体，并使用激光探测该等离子体振荡的自旋波特性的方法实现了基于磁光克尔效应的自旋波探测过程，此项发明技术可以有效地对待检测材料表面态的电子产生激发，形成传播型狄拉克等离激元，并对相应产生的自旋振荡波进行探测，弥补了当前自旋波探测手段的空白，对于自旋等离激元的产生和利用具有重要的启示和指导意义。In summary, the three-dimensional topological insulator spin plasma detection method and equipment described in the present invention use terahertz light to excite surface plasma of special materials, and use laser to detect the spin wave characteristics of the plasma oscillation to realize the spin wave detection process based on the magneto-optical Kerr effect. This invention technology can effectively excite the electrons in the surface state of the material to be detected to form propagating Dirac plasmons, and detect the corresponding spin oscillation waves, which fills the gap in current spin wave detection methods and has important enlightenment and guiding significance for the generation and utilization of spin plasmons.
显然，上述实施例仅仅是为清楚地说明所作的举例，并非对实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引申出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.
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