CN119268564B - A device and method for calibrating delay amount of adjustable optical fiber delay line based on laser circular polarization displacement measurement - Google Patents

A device and method for calibrating delay amount of adjustable optical fiber delay line based on laser circular polarization displacement measurement Download PDF

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CN119268564B
CN119268564B CN202411659647.5A CN202411659647A CN119268564B CN 119268564 B CN119268564 B CN 119268564B CN 202411659647 A CN202411659647 A CN 202411659647A CN 119268564 B CN119268564 B CN 119268564B
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optical fiber
laser
signals
signal
optical path
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CN119268564A (en
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崔建军
陈恺
楼盈天
邱尔康
曾德培
杨品澒
张燚浩
罗贤欢
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National Institute of Metrology
Zhejiang Sci Tech University ZSTU
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National Institute of Metrology
Zhejiang Sci Tech University ZSTU
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The invention discloses an adjustable optical fiber delay line delay amount calibration device and method based on laser circular polarization displacement measurement, comprising the steps of generating interference signals through a Michelson interferometer module, wherein a reference mirror uses an optical fiber reflector which does not change the phase, a measuring mirror uses a Faraday rotating mirror which can change the phase of light by 90 degrees, the two mirrors are matched to realize the 90-degree phase difference of the measuring signals and the reference signals, then the signals enter a laser circular polarization displacement measurement module, the signals are processed through an interference fringe processing method based on sine and cosine signal switching, the phase change amount is obtained, and the total displacement amount can be obtained through a relational expression. The total displacement can be used for calculating the optical delay quantity to realize the measurement and calibration of the delay quantity of the adjustable optical fiber delay line.

Description

Adjustable optical fiber delay line delay amount calibration device and method based on laser circular polarization displacement measurement
Technical Field
The invention belongs to the technical field of geometric measurement, and particularly relates to an adjustable optical fiber delay line delay amount calibration device and method based on laser circular polarization displacement measurement.
Background
The delay-quantity-adjustable optical fiber delay line consists of an input optical fiber collimator, an output optical fiber collimator and a motion device, and is used for projecting light into free space and collecting the light into an optical fiber again, and the optical path delay time can be controlled by changing the propagation distance of the light through the motion device. Controlling the relative distance between the input and output optical ports (single pass), or the distance that light travels when passing through the movable mirror (double pass), can precisely control the distance that light travels in free space. Essentially, the spatial distance value and the displacement in a variable range are accurately measured.
The existing performance test method of the optical fiber delay line is mainly estimated by methods such as time reflection, displacement comparison and the like, and the absolute time delay measurement precision is low, so that the technical requirement cannot be met, so that an effective calibration method is not yet available, the traceability technology is blank, the quality and precision improvement of related products of the optical fiber delay line are severely limited, and a plurality of key technologies or key technical indexes applied in related industries are difficult to break through.
Disclosure of Invention
In order to solve the technical problems, the invention provides an adjustable optical fiber delay line delay amount calibration device and method based on laser circular polarization displacement measurement, so as to solve the problems in the prior art.
In order to achieve the above object, the present invention provides an adjustable optical fiber delay line delay amount calibration device based on laser circular polarization displacement measurement, comprising:
the laser is used for emitting laser to the Michelson interferometer module;
A moving module for generating an optical path difference by moving a retardation amount of the control light;
The Michelson interferometer module is used for changing the optical path difference in the moving process of the moving module to generate an interference signal containing a phase difference, wherein the moving process is driven by the moving module;
and the processing module is used for analyzing and processing the interference signals and completing calibration.
Optionally, the Michelson interferometer module includes a fiber coupler, a fiber optic mirror, a first collimator, a Faraday rotator mirror, and a reflecting prism.
Optionally, the fiber coupler is a 50/50 fiber coupler.
Optionally, in the michelson interferometer module, after the movement of the movement module is completed, the optical path generated by the laser emitted by the laser in the michelson interferometer module includes a displacement reference optical path and a displacement measurement optical path, wherein,
The trend of the displacement reference light path comprises an optical fiber coupler and an optical fiber reflector;
the trend of the displacement measuring light path comprises an optical fiber coupler, a first collimator, a reflecting prism and a Faraday rotating mirror.
Optionally, in the michelson interferometer module, the laser signal reflected by the optical fiber mirror is a reference signal, the laser signal reflected by the faraday rotation mirror is a measurement signal, and a phase difference between the reference signal and the measurement signal is 90 °.
Optionally, the processing module comprises a plurality of collimators, a plurality of analyzers and a plurality of photodetectors, wherein,
The photoelectric detector is used for analyzing and processing the interference signals passing through the collimator and the analyzer to obtain optical path difference, processing the optical path difference to obtain time delay amount, and completing calibration based on the time delay amount.
The invention also provides a method for calibrating the delay amount of the adjustable optical fiber delay line based on laser circular polarization displacement measurement, which comprises the following steps:
After the moving module finishes moving, the laser emits laser, the delay amount of the light is controlled through moving, optical path difference is generated, interference signals containing the phase difference are obtained through an optical path, analysis processing is carried out on the interference signals, and calibration is completed.
Optionally, the optical path comprises an optical fiber coupler, an optical fiber reflector, a first collimator, a Faraday rotator mirror and a reflecting prism.
The invention also provides a computer terminal device, comprising:
One or more processors;
A memory coupled to the processor for storing one or more programs;
The one or more programs, when executed by the one or more processors, cause the one or more processors to perform various steps of a method for calibrating the delay amount of an adjustable optical fiber delay line, such as a method based on laser circular polarization displacement measurement.
The present invention also provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of a method for calibrating the retardation of an adjustable optical fiber retardation line, such as a method based on laser circular polarization displacement measurement.
Compared with the prior art, the invention has the following advantages and technical effects:
The device comprises a laser used for emitting laser to a Michelson interferometer module, a moving module used for generating optical path difference by moving to control the delay of light, the Michelson interferometer module used for generating interference signals containing phase difference in the moving process of the moving module, and a processing module used for analyzing and processing the interference signals and completing calibration. The invention adopts the laser circular polarization displacement measurement method to process and demodulate the signals, and adopts the interference fringe processing method of sine and cosine signal switching, thereby improving the measurement precision. The invention adopts the Michelson interferometer with the all-fiber structure to convert the displacement measurement result into the light propagation time delay quantity, thereby innovating and enriching the design of laser displacement interference. The invention combines a Michelson interferometer and a laser circular polarization displacement measurement method, and realizes the purpose of calibrating the optical delay of the adjustable optical fiber delay line.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:
FIG. 1 is a schematic diagram of a measurement calibration apparatus according to an embodiment of the present invention;
The laser device comprises a reference numeral 1, a laser device, a2, an optical isolator, a 3, an optical fiber coupler, a 4, an optical fiber reflector, a 5, a first collimator, a 6, a Faraday rotary mirror, a 7, a reflecting prism, a 8, a guide rail, a 9, a second collimator, a 10, a quarter wave plate, a 11, a first common light splitting prism, a 12, a second common light splitting prism, a 13, a first analyzer, a 14, a second analyzer, a 15, a third analyzer, a 16, a first photoelectric detector, a 17, a second photoelectric detector and a 18, a third photoelectric detector.
Detailed Description
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
It should be noted that the steps illustrated in the flowcharts of the figures may be performed in a computer system such as a set of computer executable instructions, and that although a logical order is illustrated in the flowcharts, in some cases the steps illustrated or described may be performed in an order other than that illustrated herein.
Example 1
As shown in fig. 1, the present embodiment provides an adjustable optical fiber delay line delay amount calibration device based on laser circular polarization displacement measurement, which includes:
a laser 1 for emitting laser light to the michelson interferometer module;
A moving module for generating an optical path difference by moving a retardation amount of the control light;
The Michelson interferometer module is used for generating interference signals containing phase differences in the moving process, wherein the moving process is driven by the moving module;
and the processing module is used for analyzing and processing the interference signals and completing calibration.
In an alternative implementation, when the mobile module controls the delay amount of light through movement, in order to simulate an optical fiber delay line and provide an optical path difference for the Michelson interferometer, specifically, in the measuring process, the upper computer controls the guide rail 8 to move in the mobile module to generate the optical path difference.
As an optional implementation mode, the processing module adopts a laser circular polarization displacement measurement mode to process, and the processing module comprises a signal processing method adopting sine-cosine switching to reduce errors generated by A/D and DC signal noise and improve measurement accuracy, and the measured signal is demodulated to realize adjustable optical fiber delay line delay amount calibration.
Specifically, an optical isolator 2 is connected between the laser 1 and the michelson interferometer module.
As an alternative embodiment the michelson interferometer module comprises a fiber coupler 3, a fiber mirror 4, a first collimator 5, a faraday rotator mirror 6 and a reflecting prism 7.
As an alternative embodiment, the optical fiber coupler 3 is any one of a 50/50 optical fiber coupler, a 70/30 optical fiber coupler and an 80/20 optical fiber coupler, and preferably a 50/50 optical fiber coupler.
In an alternative embodiment, in the michelson interferometer module, during the movement of the movement module, the optical path generated by the laser 1 in the michelson interferometer module includes a displacement reference optical path and a displacement measurement optical path, where,
The trend of the displacement reference light path comprises an optical fiber coupler 3 and an optical fiber reflector 4;
the trend of the displacement measuring light path comprises an optical fiber coupler 3, a first collimator 5, a reflecting prism 7 and a Faraday rotary mirror 6.
The optical fiber mirror 4 does not change the phase, and the faraday rotator 6 can change the phase by 90 °.
As an alternative embodiment, in the michelson interferometer module, the laser signal reflected by the fiber optic mirror 4 is a reference signal, and the laser signal reflected by the faraday rotator mirror 6 is a measurement signal, and the phase difference between the reference signal and the measurement signal is 90 °.
As an incremental implementation manner, the interference signals formed by the reference light path and the measuring light path are subjected to a laser circular polarization interference nano displacement measurement system to obtain the displacement of the movement of the guide rail 8, and then the corresponding delay amount, namely the optical delay amount of the optical fiber delay line, is calculated.
As an alternative embodiment, the processing module comprises a plurality of collimators, a plurality of analyzers and a plurality of photodetectors, wherein,
The photoelectric detector is used for analyzing and processing the interference signals passing through the collimator and the analyzer to obtain optical path difference, processing the optical path difference to obtain time delay amount, and completing calibration based on the time delay amount.
As an added embodiment, the processing module includes a second collimator 9, a quarter wave plate 10, a first ordinary beam splitter prism 11, a first analyzer 13, a first photodetector 16, a second ordinary beam splitter prism 12, a second analyzer 14, a third analyzer 15, a second photodetector 17, and a third photodetector 18.
The following describes the optical path in the processing module with reference to the components specifically included in the processing module:
as an added embodiment, the measuring light signal trend of the first photodetector 16 comprises a fiber coupler 3, a second collimator 9, a quarter wave plate 10, a first common beam splitter prism 11, a first analyzer 13 and a first photodetector 16.
The measuring light signal trend of the second photoelectric detector 17 comprises an optical fiber coupler 3, a second collimator 9, a quarter wave plate 10, a first common beam splitting prism 11, a second common beam splitting prism 12, a second analyzer 14 and the second photoelectric detector 17.
The measuring light signal trend of the third photoelectric detector 18 comprises an optical fiber coupler 3, a second collimator 9, a quarter wave plate 10, a first common beam splitting prism 11, a second common beam splitting prism 12, a third analyzer 15 and the third photoelectric detector 18.
As an additional embodiment, the light passing direction of the first analyzer 13 is parallel to the horizontal direction, the light passing direction of the second analyzer 14 is 45 ° to the horizontal direction, and the light passing direction of the third analyzer 15 is 90 ° to the horizontal direction.
Based on the above, the device for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement provided by the embodiment of the invention comprises a laser used for emitting laser to a Michelson interferometer module, a moving module used for generating an optical path difference by moving the delay amount of control light, the Michelson interferometer module used for generating an interference signal containing the phase difference in the moving process of the moving module, and a processing module used for analyzing and processing the interference signal and completing calibration. The invention adopts the laser circular polarization displacement measurement method to process and demodulate the signals, and adopts the interference fringe processing method of sine and cosine signal switching, thereby improving the measurement precision. The invention adopts the Michelson interferometer with the all-fiber structure to convert the displacement measurement result into the light propagation time delay quantity, thereby innovating and enriching the design of laser displacement interference. The invention combines a Michelson interferometer and a laser circular polarization displacement measurement method, and realizes the purpose of calibrating the optical delay of the adjustable optical fiber delay line.
Example two
Based on the same inventive concept, the invention also provides a method for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement. The method for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement, which is provided by the invention, is described below, and the method for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement and the device for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement, which are described above, can be correspondingly referred to each other, and the method comprises the following steps:
After the moving module finishes moving, the laser emits laser, the delay amount of the light is controlled through moving, optical path difference is generated, interference signals containing the phase difference are obtained through an optical path, analysis processing is carried out on the interference signals, and calibration is completed.
As an alternative embodiment, the optical path includes a fiber coupler 3, a fiber mirror 4, a first collimator 5, a faraday rotator mirror 6, and a reflecting prism 7.
The specific process comprises the following steps:
step1, adjusting an initial state before measurement:
under the normal working condition of the laser light source module, the displacement value of the guide rail is adjusted to be zero through the upper computer, and the laser light source module adopts a laser.
Step 2, displacement measurement:
The laser 1 generates a beam of laser and is coupled into an optical fiber, the laser is divided into two beams of light through an optical fiber coupler 3 after passing through an optical isolator, one beam of light is emitted from the optical fiber and then emitted to a reference mirror, namely an optical fiber reflector 4, and then reflected back to the optical fiber, and the other beam of light is emitted to a measuring mirror, namely a Faraday rotator 6 after passing through a reflecting prism 7, and the phase is changed by 90 degrees and then re-enters the optical fiber. The two paths of laser are coupled at the optical fiber coupler 3 and then enter the displacement measuring module. In the measuring process, the upper computer controls the guide rail in the moving module to move, so that optical path difference is generated. The optical fiber coupler 3 is preferably a 50:50 optical fiber coupler, and can be any one of a 70/30 optical fiber coupler and an 80/20 optical fiber coupler.
Step 3, signal processing:
The three paths of signals measured by the photoelectric detector firstly pass through the proportional operational amplifier circuit to make the amplitudes of the alternating current components of the three paths of signals equal, then the first path of signals, the second path of signals and the direct current flow pass through the addition and subtraction circuit, and the second path of signals, the third path of signals and the other direct current flow pass through the addition and subtraction circuit to eliminate the direct current component in the output signals. And then processing the signals by using an interference fringe processing method based on sine and cosine signal switching to obtain a phase variation, and obtaining the total displacement through a relational expression. The optical delay amount can be calculated from the total displacement amount.
As an alternative embodiment, the signals received by the three photodetectors are respectively:
Wherein a 1、a2、a3 is the direct current component of the three signals, b 1、b2、b3 is the alternating current component amplitude of the three signals, θ=4pi/λx, and x represents the displacement.
The three paths of signals firstly pass through the proportional operational amplifier circuit so that the amplitudes of the alternating current components are equal. Let the output signals be D 11、D12、D13 respectively. And then the first path of signals, the second path of signals and the direct current flow pass through an addition and subtraction circuit, and the second path of signals, the third path of signals and the other direct current flow pass through the addition and subtraction circuit.
As an incremental implementation, let the output signals be S1 and S2, respectively, with the formula:
S2＝bcos(θ+3π/4)-bcos(θ+π/4)+(a6-a5+c2)=-Acosθ (3)
wherein b is the amplitude of the alternating current signal, θ is the phase, A is A 4、a5、a6 is the dc component of D 11、D12、D13, c 1＝a5-a4、c2＝a6-a5.
As an incremental implementation mode, the signal is processed by an interference fringe processing method based on sine and cosine signal switching, the total phase change quantity is pi/4 multiplied by the value n of a counter, and the phase theta less than one counting period pi/4 is added, wherein the phase theta less than one counting period is calculated by adopting a corrected theta formula.
The expression of the total displacement x is:
Where λ is the laser wavelength, θ is the phase, and pi/4 is the counting period.
Step 4, measuring time delay amount:
The time delay amount can be calculated from the relationship between the displacement amount x measured by signal demodulation and the time delay amount Δt.
As an incremental embodiment, the relationship between the displacement x measured by signal demodulation and the time delay Δt is:
Where c is the speed of light, and the amount of time delay can be calculated from equation (5).
The invention generates interference signals through a Michelson interferometer module, wherein a reference mirror uses an optical fiber reflector which does not change the phase, a measuring mirror uses a Faraday rotating mirror which can change the phase of light by 90 degrees, the Faraday rotating mirror and the measuring mirror are matched to realize the 90-degree phase difference of a measuring signal and the reference signal, the signals enter a laser circular polarization displacement measuring module, the signals are processed by an interference fringe processing method based on sine and cosine signal switching, the phase change quantity is obtained, and the total displacement quantity can be obtained through a relation. The total displacement can be used for calculating the optical delay quantity to realize the measurement and calibration of the delay quantity of the adjustable optical fiber delay line.
It should be understood that the method for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement provided by the embodiment of the invention has all the advantages of the device for calibrating the delay amount of the adjustable optical fiber delay line based on the laser circular polarization displacement measurement provided by the embodiment.
The invention also provides a computer terminal device, comprising:
One or more processors;
A memory coupled to the processor for storing one or more programs;
The one or more programs, when executed by the one or more processors, cause the one or more processors to perform various steps of a method for calibrating the delay amount of an adjustable optical fiber delay line, such as a method based on laser circular polarization displacement measurement.
The present invention also provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of a method for calibrating the retardation of an adjustable optical fiber retardation line, such as a method based on laser circular polarization displacement measurement.
The present application is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present application are intended to be included in the scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims (9)

1.一种基于激光圆偏振位移测量的可调光纤延迟线延迟量校准装置，其特征在于，包括：1. A delay calibration device for an adjustable optical fiber delay line based on laser circular polarization displacement measurement, characterized in that it comprises: 激光器(1)，用于向迈克尔逊干涉仪模块发出激光；A laser (1) for emitting laser light to a Michelson interferometer module; 移动模块，用于通过移动控制光的延迟量，产生光程差；A moving module, used for controlling the delay amount of light by moving to generate an optical path difference; 迈克尔逊干涉仪模块，用于在移动过程中，产生含有相位差的干涉信号，其中移动过程由所述移动模块驱动；A Michelson interferometer module, used to generate an interference signal containing a phase difference during a moving process, wherein the moving process is driven by the moving module; 处理模块，用于对干涉信号进行分析处理，完成校准；A processing module is used to analyze and process the interference signal and complete the calibration; 所述处理模块包括多个准直器、多个检偏器和多个光电探测器；其中，The processing module includes a plurality of collimators, a plurality of analyzers and a plurality of photodetectors; wherein, 所述光电探测器用于对通过准直器、检偏器后的干涉信号进行分析处理获得光程差，并基于所述光程差进行处理获得时间延迟量，基于时间延迟量完成校准；The photoelectric detector is used to analyze and process the interference signal after passing through the collimator and the analyzer to obtain the optical path difference, and to process based on the optical path difference to obtain the time delay, and to complete the calibration based on the time delay; 处理模块包括第二准直器(9)、四分之一波片(10)、第一普通分光棱镜(11)、第一检偏器(13)、第一光电探测器(16)、第二普通分光棱镜(12)、第二检偏器(14)、第三检偏器(15)、第二光电探测器(17)和第三光电探测器(18)；The processing module comprises a second collimator (9), a quarter wave plate (10), a first ordinary beam splitter prism (11), a first polarizer (13), a first photodetector (16), a second ordinary beam splitter prism (12), a second polarizer (14), a third polarizer (15), a second photodetector (17) and a third photodetector (18); 第一光电探测器(16)的测量光信号走向包括：光纤耦合器(3)、第二准直器(9)、四分之一波片(10)、第一普通分光棱镜(11)、第一检偏器(13)、第一光电探测器(16)；The direction of the measurement light signal of the first photodetector (16) includes: a fiber coupler (3), a second collimator (9), a quarter-wave plate (10), a first ordinary beam splitter (11), a first polarizer (13), and a first photodetector (16); 第二光电探测器(17)的测量光信号走向包括：光纤耦合器(3)、第二准直器(9)、四分之一波片(10)、第一普通分光棱镜(11)、第二普通分光棱镜(12)、第二检偏器(14)、第二光电探测器(17)；The measurement optical signal direction of the second photoelectric detector (17) includes: an optical fiber coupler (3), a second collimator (9), a quarter-wave plate (10), a first ordinary beam splitter prism (11), a second ordinary beam splitter prism (12), a second polarizer (14), and a second photoelectric detector (17); 第三光电探测器(18)的测量光信号走向包括：光纤耦合器(3)、第二准直器(9)、四分之一波片(10)、第一普通分光棱镜(11)、第二普通分光棱镜(12)、第三检偏器(15)、第三光电探测器(18)；The measurement optical signal direction of the third photoelectric detector (18) includes: a fiber coupler (3), a second collimator (9), a quarter wave plate (10), a first ordinary beam splitter prism (11), a second ordinary beam splitter prism (12), a third polarizer (15), and a third photoelectric detector (18); 第一检偏器(13)的通光方向与水平方向成平行，第二检偏器(14)的通光方向与水平方向成45°，第三检偏器(15)的通光方向与水平方向成90°。The light transmission direction of the first polarizer (13) is parallel to the horizontal direction, the light transmission direction of the second polarizer (14) is 45 degrees to the horizontal direction, and the light transmission direction of the third polarizer (15) is 90 degrees to the horizontal direction. 2.根据权利要求1所述的装置，其特征在于，迈克尔逊干涉仪模块包括：光纤耦合器(3)、光纤反射镜(4)、第一准直器(5)、法拉第旋转镜(6)和反射棱镜(7)。2. The device according to claim 1 is characterized in that the Michelson interferometer module comprises: a fiber coupler (3), a fiber reflector (4), a first collimator (5), a Faraday rotator mirror (6) and a reflecting prism (7). 3.根据权利要求2所述的装置，其特征在于，所述光纤耦合器(3)为50/50光纤耦合器(3)。3. The device according to claim 2, characterized in that the optical fiber coupler (3) is a 50/50 optical fiber coupler (3). 4.根据权利要求1所述的装置，其特征在于，所述迈克尔逊干涉仪模块中，在移动模块完成移动后，所述激光器(1)发出的激光在所述迈克尔逊干涉仪模块中产生的光路包括：位移参考光路和位移测量光路；其中，4. The device according to claim 1, characterized in that, in the Michelson interferometer module, after the moving module completes the movement, the optical path generated by the laser emitted by the laser (1) in the Michelson interferometer module comprises: a displacement reference optical path and a displacement measurement optical path; wherein, 所述位移参考光路的走向包括：光纤耦合器(3)、光纤反射镜(4)；The displacement reference optical path includes: an optical fiber coupler (3) and an optical fiber reflector (4); 所述位移测量光路的走向包括：光纤耦合器(3)、第一准直器(5)、反射棱镜(7)、法拉第旋转镜(6)。The displacement measurement optical path includes: an optical fiber coupler (3), a first collimator (5), a reflecting prism (7), and a Faraday rotating mirror (6). 5.根据权利要求4所述的装置，其特征在于，在迈克尔逊干涉仪模块中，经过光纤反射镜(4)反射回的激光信号为参考信号，经过法拉第旋转镜(6)反射回的激光信号为测量信号，所述参考信号和测量信号的相位差为90°。5. The device according to claim 4 is characterized in that, in the Michelson interferometer module, the laser signal reflected back by the fiber optic reflector (4) is a reference signal, and the laser signal reflected back by the Faraday rotator (6) is a measurement signal, and the phase difference between the reference signal and the measurement signal is 90°. 6.一种基于激光圆偏振位移测量的可调光纤延迟线延迟量校准方法，实施于权利要求1-5任意一项所述的基于激光圆偏振位移测量的可调光纤延迟线延迟量校准装置，其特征在于，所述方法包括：6. A method for calibrating the delay amount of an adjustable optical fiber delay line based on laser circular polarization displacement measurement, implemented in the device for calibrating the delay amount of an adjustable optical fiber delay line based on laser circular polarization displacement measurement according to any one of claims 1 to 5, characterized in that the method comprises: 激光器发出激光，通过移动模块的移动控制光的延迟量，从而产生光程差，通过光路获取含有相位差的干涉信号，对干涉信号进行分析处理，完成校准；The laser emits laser light, and the delay of the light is controlled by moving the moving module, thereby generating an optical path difference. The interference signal containing the phase difference is obtained through the optical path, and the interference signal is analyzed and processed to complete the calibration. 通过光路获取含有相位差的干涉信号，对干涉信号进行分析处理的过程包括：The interference signal containing phase difference is obtained through the optical path, and the process of analyzing and processing the interference signal includes: 三个光电探测器接收到的信号分别为：The signals received by the three photodetectors are: 其中，a1、a2、a3分别为三路信号的直流分量，b1、b2、b3分别为三路信号的交流分量幅值，θ＝4π/λx，x表示位移量；Wherein, a 1 , a 2 , a 3 are the DC components of the three signals, b 1 , b 2 , b 3 are the AC component amplitudes of the three signals, θ＝4π/λx, x represents the displacement; 三路信号先经过比例运放电路，使得交流分量的幅值相等，令输出的信号分别为D11、D12、D13，再将第一路和第二路信号和一直流量经过加减运算电路，第二路和第三路信号和另一个直流量经过加减运算电路；The three signals first pass through the proportional operational amplifier circuit to make the amplitude of the AC component equal, and the output signals are respectively D11 , D12 , and D13 . Then, the first and second signals and a DC quantity pass through the addition and subtraction circuit, and the second and third signals and another DC quantity pass through the addition and subtraction circuit. 令输出的信号分别为S1和S2，公式为：Let the output signals be S1 and S2 respectively, the formula is: S2＝bcos(θ+3π/4)-bcos(θ+π/4)+(a6-a5+c2)＝-Acosθ (3)S 2 =bcos(θ+3π/4)-bcos(θ+π/4)+(a 6 -a 5 +c 2 )=-Acosθ (3) 其中，b为交流信号的幅值，θ为相位，A为a4、a5、a6为D11、D12、D13的直流分量，c1＝a5-a4、c2＝a6-a5；Where b is the amplitude of the AC signal, θ is the phase, and A is a 4 , a 5 , a 6 are the DC components of D 11 , D 12 , D 13 , c 1 = a 5 -a 4 , c 2 = a 6 -a 5 ; 由基于正余弦信号切换的干涉条纹处理方法处理信号，总的相位变化量为π/4乘上计数器的值n，再加上不满一个计数周期π/4的相位θ，其中不满一个计数周期的相位θ采用修正后的θ公式进行计算；The signal is processed by the interference fringe processing method based on the switching of sine and cosine signals. The total phase change is π/4 multiplied by the counter value n, plus the phase θ that is less than one counting cycle π/4, where the phase θ that is less than one counting cycle is calculated using the modified θ formula; 总的位移量x的表达式为：The total displacement x is expressed as: 其中，λ为激光波长，θ为相位，π/4为计数周期。Among them, λ is the laser wavelength, θ is the phase, and π/4 is the counting period. 7.根据权利要求6所述的方法，其特征在于，光路中包括：光纤耦合器、光纤反射镜、第一准直器、法拉第旋转镜和反射棱镜。7. The method according to claim 6, characterized in that the optical path includes: a fiber coupler, a fiber reflector, a first collimator, a Faraday rotator mirror and a reflecting prism. 8.一种计算机终端设备，其特征在于，包括：8. A computer terminal device, comprising: 一个或多个处理器；one or more processors; 存储器，与所述处理器耦接，用于存储一个或多个程序；A memory, coupled to the processor, for storing one or more programs; 当所述一个或多个程序被所述一个或多个处理器执行，使得所述一个或多个处理器实现如权利要求6-7中任一项所述的基于激光圆偏振位移测量的可调光纤延迟线延迟量校准方法的各个步骤。When the one or more programs are executed by the one or more processors, the one or more processors implement the various steps of the method for calibrating the delay amount of an adjustable optical fiber delay line based on laser circular polarization displacement measurement as described in any one of claims 6 to 7. 9.一种计算机可读存储介质，其上存储有计算机程序，其特征在于，所述计算机程序被处理器执行时，实现如权利要求6-7中任一项所述的基于激光圆偏振位移测量的可调光纤延迟线延迟量校准方法的各个步骤。9. A computer-readable storage medium having a computer program stored thereon, characterized in that when the computer program is executed by a processor, the computer program implements the various steps of the method for calibrating the delay amount of an adjustable optical fiber delay line based on laser circular polarization displacement measurement as described in any one of claims 6 to 7.
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