CN1216285A - 包括设有操作装置的通道的储存设备 - Google Patents

包括设有操作装置的通道的储存设备 Download PDF

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Publication number
CN1216285A
CN1216285A CN98108399A CN98108399A CN1216285A CN 1216285 A CN1216285 A CN 1216285A CN 98108399 A CN98108399 A CN 98108399A CN 98108399 A CN98108399 A CN 98108399A CN 1216285 A CN1216285 A CN 1216285A
Authority
CN
China
Prior art keywords
transport box
robot
transported
transport
common
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN98108399A
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English (en)
Chinese (zh)
Inventor
朴权洙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN1216285A publication Critical patent/CN1216285A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN98108399A 1997-10-31 1998-05-20 包括设有操作装置的通道的储存设备 Pending CN1216285A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR57376/97 1997-10-31
KR1019970057376A KR19990035554A (ko) 1997-10-31 1997-10-31 스토커 설비 구조

Publications (1)

Publication Number Publication Date
CN1216285A true CN1216285A (zh) 1999-05-12

Family

ID=19523941

Family Applications (1)

Application Number Title Priority Date Filing Date
CN98108399A Pending CN1216285A (zh) 1997-10-31 1998-05-20 包括设有操作装置的通道的储存设备

Country Status (3)

Country Link
JP (1) JPH11157610A (ja)
KR (1) KR19990035554A (ja)
CN (1) CN1216285A (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100333950C (zh) * 2002-06-06 2007-08-29 村田机械株式会社 无人搬运车系统
CN100349787C (zh) * 2001-02-08 2007-11-21 奇美电子股份有限公司 库存传输系统
CN100517566C (zh) * 2006-08-02 2009-07-22 台湾积体电路制造股份有限公司 电子货架
CN1727265B (zh) * 2004-07-28 2011-04-20 株式会社日立工业设备技术 输送装置
CN103269958A (zh) * 2010-08-03 2013-08-28 I-Collector国际有限责任公司 存放和有序收集系统
CN105121309A (zh) * 2013-03-14 2015-12-02 布鲁克斯自动化公司 用于传送托盘的托盘发动机
US9254958B2 (en) 2009-02-04 2016-02-09 I-Collector Holding B.V. Storage and order collection system
CN105593143A (zh) * 2013-10-11 2016-05-18 株式会社日立制作所 搬运机器人系统
CN107708940A (zh) * 2015-06-11 2018-02-16 自动存储科技股份有限公司 储存系统
US10322875B2 (en) 2015-01-30 2019-06-18 I-Collector Holding B.V. Apparatus and method for managing the storage of articles

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5332930B2 (ja) * 2009-06-15 2013-11-06 村田機械株式会社 自動倉庫
KR102160106B1 (ko) * 2014-07-03 2020-09-25 세메스 주식회사 웨이퍼 이송 장치

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100349787C (zh) * 2001-02-08 2007-11-21 奇美电子股份有限公司 库存传输系统
CN100333950C (zh) * 2002-06-06 2007-08-29 村田机械株式会社 无人搬运车系统
CN1727265B (zh) * 2004-07-28 2011-04-20 株式会社日立工业设备技术 输送装置
CN100517566C (zh) * 2006-08-02 2009-07-22 台湾积体电路制造股份有限公司 电子货架
US9975697B2 (en) 2009-02-04 2018-05-22 I-Collector Holding B.V. Storage and order collection system
US9254958B2 (en) 2009-02-04 2016-02-09 I-Collector Holding B.V. Storage and order collection system
CN103269958A (zh) * 2010-08-03 2013-08-28 I-Collector国际有限责任公司 存放和有序收集系统
CN103269958B (zh) * 2010-08-03 2016-03-30 I-Collector控股有限责任公司 用于物品存放和由此形成物品组的装置及存放物品的方法
US10092929B2 (en) 2013-03-14 2018-10-09 Brooks Automation, Inc. Wafer tray sorter with door coupled to detector
CN105121309A (zh) * 2013-03-14 2015-12-02 布鲁克斯自动化公司 用于传送托盘的托盘发动机
CN105593143B (zh) * 2013-10-11 2018-02-23 株式会社日立制作所 搬运机器人系统及搬运装置
CN105593143A (zh) * 2013-10-11 2016-05-18 株式会社日立制作所 搬运机器人系统
US10322875B2 (en) 2015-01-30 2019-06-18 I-Collector Holding B.V. Apparatus and method for managing the storage of articles
CN107708940A (zh) * 2015-06-11 2018-02-16 自动存储科技股份有限公司 储存系统
US10947042B2 (en) 2015-06-11 2021-03-16 Autostore Technology AS Storage system with robot device
CN107708940B (zh) * 2015-06-11 2021-10-01 自动存储科技股份有限公司 储存系统
US11702284B2 (en) 2015-06-11 2023-07-18 Autostore Technology AS Storage system
US12187535B2 (en) 2015-06-11 2025-01-07 Autostore Technology AS Storage system

Also Published As

Publication number Publication date
KR19990035554A (ko) 1999-05-15
JPH11157610A (ja) 1999-06-15

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