CN1448043A - 用于带引线的集成电路的三维检测 - Google Patents

用于带引线的集成电路的三维检测 Download PDF

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Publication number
CN1448043A
CN1448043A CN01814393A CN01814393A CN1448043A CN 1448043 A CN1448043 A CN 1448043A CN 01814393 A CN01814393 A CN 01814393A CN 01814393 A CN01814393 A CN 01814393A CN 1448043 A CN1448043 A CN 1448043A
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CN
China
Prior art keywords
prism
projection
optical
light
central
Prior art date
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Pending
Application number
CN01814393A
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English (en)
Chinese (zh)
Inventor
黄济刚
王英建
涂编生
谭其平
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Agilent Technologies Inc
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Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of CN1448043A publication Critical patent/CN1448043A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring

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  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN01814393A 2000-08-22 2001-08-22 用于带引线的集成电路的三维检测 Pending CN1448043A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG2000042242 2000-08-22
SG200004224 2000-08-22

Publications (1)

Publication Number Publication Date
CN1448043A true CN1448043A (zh) 2003-10-08

Family

ID=20430635

Family Applications (1)

Application Number Title Priority Date Filing Date
CN01814393A Pending CN1448043A (zh) 2000-08-22 2001-08-22 用于带引线的集成电路的三维检测

Country Status (3)

Country Link
CN (1) CN1448043A (fr)
AU (1) AU2001282842A1 (fr)
WO (1) WO2002017357A2 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101603926A (zh) * 2008-05-09 2009-12-16 半导体技术设备私人有限公司 多表面检测系统及方法
CN102116745A (zh) * 2009-12-30 2011-07-06 上海允科自动化有限公司 一种ic元件检测系统
CN101305259B (zh) * 2005-11-15 2012-07-04 株式会社尼康 面位置检测装置、曝光装置以及元件制造方法
CN102788554A (zh) * 2007-04-05 2012-11-21 联达科技控股有限公司 多表面检测系统及方法
CN103249293A (zh) * 2012-02-08 2013-08-14 Juki株式会社 电子部件安装装置、电子部件安装系统以及电子部件安装方法
CN112888913A (zh) * 2018-10-18 2021-06-01 赛博光学公司 具有对列通道的三维传感器
CN114167622A (zh) * 2021-12-14 2022-03-11 樊宸 一种用于获取被拍摄物表面三维信息的光学系统

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001336919A (ja) * 2000-03-31 2001-12-07 Agilent Technol Inc リード付き集積回路の検査システム
ATE432483T1 (de) * 2003-03-07 2009-06-15 Ismeca Semiconductor Holding Optische einrichtung und inspektionsmodul
WO2014020733A1 (fr) * 2012-08-01 2014-02-06 富士機械製造株式会社 Appareil de montage de composants
EP2838333B1 (fr) * 2012-04-12 2019-08-21 FUJI Corporation Machine de montage de composant

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4660496A (en) * 1996-02-12 1997-09-02 Icos Vision Systems N.V. Process for forming on an opto-electronic transducer a shadow image of at least a part of an electronic component
JPH1093846A (ja) * 1996-09-12 1998-04-10 Copal Co Ltd 撮像装置
US5909285A (en) * 1997-05-05 1999-06-01 Beaty; Elwin M. Three dimensional inspection system
US5910844A (en) * 1997-07-15 1999-06-08 Vistech Corporation Dynamic three dimensional vision inspection system
SG72860A1 (en) * 1998-08-27 2001-03-20 Agilent Technologies Inc Leaded components inspection system

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101305259B (zh) * 2005-11-15 2012-07-04 株式会社尼康 面位置检测装置、曝光装置以及元件制造方法
CN102788554A (zh) * 2007-04-05 2012-11-21 联达科技控股有限公司 多表面检测系统及方法
CN102788554B (zh) * 2007-04-05 2017-04-12 联达科技控股有限公司 多表面检测系统及方法
CN101603926A (zh) * 2008-05-09 2009-12-16 半导体技术设备私人有限公司 多表面检测系统及方法
CN102116745A (zh) * 2009-12-30 2011-07-06 上海允科自动化有限公司 一种ic元件检测系统
CN103249293A (zh) * 2012-02-08 2013-08-14 Juki株式会社 电子部件安装装置、电子部件安装系统以及电子部件安装方法
CN103249293B (zh) * 2012-02-08 2018-05-29 Juki株式会社 电子部件安装装置、电子部件安装系统以及电子部件安装方法
CN112888913A (zh) * 2018-10-18 2021-06-01 赛博光学公司 具有对列通道的三维传感器
CN112888913B (zh) * 2018-10-18 2023-05-02 赛博光学公司 具有对列通道的三维传感器
CN114167622A (zh) * 2021-12-14 2022-03-11 樊宸 一种用于获取被拍摄物表面三维信息的光学系统

Also Published As

Publication number Publication date
AU2001282842A1 (en) 2002-03-04
WO2002017357A2 (fr) 2002-02-28
WO2002017357A3 (fr) 2002-11-28

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