CN1590761A - 用于精密泵设备的泵调节器 - Google Patents

用于精密泵设备的泵调节器 Download PDF

Info

Publication number: CN1590761A
Authority: CN; China
Prior art keywords: fluid; distributor chamber; feeder house; petcock; valve
Prior art date: 1998-11-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

CNA2004100791930A

Other languages

English (en)

Chinese (zh)

Inventor

雷蒙德·A·扎加尔

罗伯特·F·麦克洛克林

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Entegris Inc

Original Assignee

Millipore Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-11-23

Filing date

1999-11-23

Publication date

2005-03-09

1999-11-23 Application filed by Millipore Corp filed Critical Millipore Corp

2005-03-09 Publication of CN1590761A publication Critical patent/CN1590761A/zh

Status Pending legal-status Critical Current

Links

238000005086 pumping Methods 0.000 title abstract description 13
239000012530 fluid Substances 0.000 claims abstract description 102
238000000034 method Methods 0.000 claims abstract description 30
230000008569 process Effects 0.000 claims description 9
239000000463 material Substances 0.000 description 10
238000010586 diagram Methods 0.000 description 8
238000001914 filtration Methods 0.000 description 8
239000004065 semiconductor Substances 0.000 description 7
239000000126 substance Substances 0.000 description 7
239000007788 liquid Substances 0.000 description 6
238000004140 cleaning Methods 0.000 description 5
230000001276 controlling effect Effects 0.000 description 4
229920002120 photoresistant polymer Polymers 0.000 description 4
230000000630 rising effect Effects 0.000 description 4
230000003068 static effect Effects 0.000 description 4
238000009423 ventilation Methods 0.000 description 4
239000011248 coating agent Substances 0.000 description 2
238000000576 coating method Methods 0.000 description 2
230000002950 deficient Effects 0.000 description 2
238000003754 machining Methods 0.000 description 2
238000005259 measurement Methods 0.000 description 2
239000002699 waste material Substances 0.000 description 2
206010044565 Tremor Diseases 0.000 description 1
239000004568 cement Substances 0.000 description 1
238000004590 computer program Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
230000006837 decompression Effects 0.000 description 1
238000007599 discharging Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
230000008570 general process Effects 0.000 description 1
239000012535 impurity Substances 0.000 description 1
231100000614 poison Toxicity 0.000 description 1
230000007096 poisonous effect Effects 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
231100000331 toxic Toxicity 0.000 description 1
230000002588 toxic effect Effects 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
- F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0601—Opening times
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Reciprocating Pumps (AREA)
Control Of Positive-Displacement Pumps (AREA)
Control Of Non-Positive-Displacement Pumps (AREA)
Details Of Reciprocating Pumps (AREA)
Cleaning Or Drying Semiconductors (AREA)

CNA2004100791930A 1998-11-23 1999-11-23 用于精密泵设备的泵调节器 Pending CN1590761A (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US10956898P	1998-11-23	1998-11-23
US60/109,568		1998-11-23

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
CNB998150533A Division CN1175182C (zh)	1998-11-23	1999-11-23	用于精密泵设备的泵调节器

Publications (1)

Publication Number	Publication Date
CN1590761A true CN1590761A (zh)	2005-03-09

Family

ID=22328367

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
CNA2004100791930A Pending CN1590761A (zh)	1998-11-23	1999-11-23	用于精密泵设备的泵调节器
CNB998150533A Expired - Fee Related CN1175182C (zh)	1998-11-23	1999-11-23	用于精密泵设备的泵调节器

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
CNB998150533A Expired - Fee Related CN1175182C (zh)	1998-11-23	1999-11-23	用于精密泵设备的泵调节器

Country Status (6)

Country	Link
EP (1)	EP1133639B1 (de)
CN (2)	CN1590761A (de)
AT (1)	ATE268867T1 (de)
DE (1)	DE69917927T2 (de)
TW (1)	TW593888B (de)
WO (1)	WO2000031416A1 (de)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7850431B2 (en)	2005-12-02	2010-12-14	Entegris, Inc.	System and method for control of fluid pressure
US7878765B2 (en)	2005-12-02	2011-02-01	Entegris, Inc.	System and method for monitoring operation of a pump
US7897196B2 (en)	2005-12-05	2011-03-01	Entegris, Inc.	Error volume system and method for a pump
CN101460742B (zh) *	2006-06-02	2011-06-08	诺迈特管理服务有限公司	包括驱动机构的容积泵
US8025486B2 (en)	2005-12-02	2011-09-27	Entegris, Inc.	System and method for valve sequencing in a pump
US8029247B2 (en)	2005-12-02	2011-10-04	Entegris, Inc.	System and method for pressure compensation in a pump
US8083498B2 (en)	2005-12-02	2011-12-27	Entegris, Inc.	System and method for position control of a mechanical piston in a pump
US8087429B2 (en)	2005-11-21	2012-01-03	Entegris, Inc.	System and method for a pump with reduced form factor
US8172546B2 (en)	1998-11-23	2012-05-08	Entegris, Inc.	System and method for correcting for pressure variations using a motor
CN101495756B (zh) *	2005-12-02	2012-07-04	恩特格里公司	使用电机校正压力变化的系统和方法
US8292598B2 (en)	2004-11-23	2012-10-23	Entegris, Inc.	System and method for a variable home position dispense system
CN103133331A (zh) *	2006-11-30	2013-06-05	恩特格里公司	用于在半导体制造过程中监测泵的操作的计算机系统
CN103801146A (zh) *	2012-11-12	2014-05-21	帕尔公司	用于调节过滤组件的系统和方法
US8753097B2 (en)	2005-11-21	2014-06-17	Entegris, Inc.	Method and system for high viscosity pump
CN106662083A (zh) *	2014-05-28	2017-05-10	恩特格里斯公司	用于操作具有进给与施配传感器、过滤与施配确认及过滤器的减压注给的泵的系统及方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7029238B1 (en)	1998-11-23	2006-04-18	Mykrolis Corporation	Pump controller for precision pumping apparatus
US6325932B1 (en)	1999-11-30	2001-12-04	Mykrolis Corporation	Apparatus and method for pumping high viscosity fluid
CN100374768C (zh) *	2002-07-19	2008-03-12	诚实公司	液体流动控制设备及方法
JP5339915B2 (ja) *	2005-11-21	2013-11-13	インテグリス・インコーポレーテッド	ポンプの機械式ピストンのピストン制御システムおよび方法
EP1958039B9 (de)	2005-12-02	2011-09-07	Entegris, Inc.	E/a-systeme, verfahren und einrichtungen zur anschaltung einer pumpensteuerung
JP5302002B2 (ja)	2005-12-02	2013-10-02	インテグリス・インコーポレーテッド	Ｏリング無し薄型取付部品および取付部品アセンブリ
US7684446B2 (en)	2006-03-01	2010-03-23	Entegris, Inc.	System and method for multiplexing setpoints
US7494265B2 (en)	2006-03-01	2009-02-24	Entegris, Inc.	System and method for controlled mixing of fluids via temperature
CN101936276B (zh) *	2008-11-20	2013-08-21	张家口百通环保科技有限公司	内燃机尾气净化的后处理系统过程中用于还原剂溶液抽取、计量并释放的计量泵
DE202010002145U1 (de)	2010-02-09	2011-09-07	Vacuubrand Gmbh + Co Kg	Membranvakuumpumpe
US9421498B2 (en) *	2012-11-12	2016-08-23	Pall Corporation	Systems and methods for conditioning a filter assembly
US10132309B2 (en) *	2013-03-15	2018-11-20	Integrated Designs, L.P.	Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59177929A (ja) *	1983-03-28	1984-10-08	Canon Inc	サツクバツクポンプ
JP2803859B2 (ja) *	1989-09-29	1998-09-24	株式会社日立製作所	流動体供給装置およびその制御方法
JPH0727150U (ja) *	1993-10-07	1995-05-19	大日本スクリーン製造株式会社	シリカ系被膜形成用塗布液吐出装置
EP0863538B1 (de) *	1997-03-03	2003-05-21	Tokyo Electron Limited	Beschichtungs-Vorrichtung und Verfahren
JP3940854B2 (ja) *	1997-03-25	2007-07-04	Ｓｍｃ株式会社	サックバックバルブ

1999
- 1999-11-23 CN CNA2004100791930A patent/CN1590761A/zh active Pending
- 1999-11-23 WO PCT/US1999/028002 patent/WO2000031416A1/en not_active Ceased
- 1999-11-23 CN CNB998150533A patent/CN1175182C/zh not_active Expired - Fee Related
- 1999-11-23 AT AT99965911T patent/ATE268867T1/de not_active IP Right Cessation
- 1999-11-23 TW TW088120448A patent/TW593888B/zh not_active IP Right Cessation
- 1999-11-23 EP EP99965911A patent/EP1133639B1/de not_active Expired - Lifetime
- 1999-11-23 DE DE69917927T patent/DE69917927T2/de not_active Expired - Fee Related

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US8172546B2 (en)	1998-11-23	2012-05-08	Entegris, Inc.	System and method for correcting for pressure variations using a motor
US9617988B2 (en)	2004-11-23	2017-04-11	Entegris, Inc.	System and method for variable dispense position
US8814536B2 (en)	2004-11-23	2014-08-26	Entegris, Inc.	System and method for a variable home position dispense system
US8292598B2 (en)	2004-11-23	2012-10-23	Entegris, Inc.	System and method for a variable home position dispense system
US8651823B2 (en)	2005-11-21	2014-02-18	Entegris, Inc.	System and method for a pump with reduced form factor
US9399989B2 (en)	2005-11-21	2016-07-26	Entegris, Inc.	System and method for a pump with onboard electronics
US8753097B2 (en)	2005-11-21	2014-06-17	Entegris, Inc.	Method and system for high viscosity pump
US8087429B2 (en)	2005-11-21	2012-01-03	Entegris, Inc.	System and method for a pump with reduced form factor
US8382444B2 (en)	2005-12-02	2013-02-26	Entegris, Inc.	System and method for monitoring operation of a pump
US7878765B2 (en)	2005-12-02	2011-02-01	Entegris, Inc.	System and method for monitoring operation of a pump
CN101356715B (zh) *	2005-12-02	2012-07-18	恩特格里公司	用于泵中的阀的排序的系统和方法
US9816502B2 (en)	2005-12-02	2017-11-14	Entegris, Inc.	System and method for pressure compensation in a pump
US8029247B2 (en)	2005-12-02	2011-10-04	Entegris, Inc.	System and method for pressure compensation in a pump
CN102705209B (zh) *	2005-12-02	2015-09-30	恩特格里公司	用于泵中压力补偿的系统和方法
CN101495754B (zh) *	2005-12-02	2013-05-29	恩特格里公司	用于泵的操作的系统和方法
CN101495756B (zh) *	2005-12-02	2012-07-04	恩特格里公司	使用电机校正压力变化的系统和方法
US7850431B2 (en)	2005-12-02	2010-12-14	Entegris, Inc.	System and method for control of fluid pressure
US8662859B2 (en)	2005-12-02	2014-03-04	Entegris, Inc.	System and method for monitoring operation of a pump
US8678775B2 (en)	2005-12-02	2014-03-25	Entegris, Inc.	System and method for position control of a mechanical piston in a pump
US8025486B2 (en)	2005-12-02	2011-09-27	Entegris, Inc.	System and method for valve sequencing in a pump
US8083498B2 (en)	2005-12-02	2011-12-27	Entegris, Inc.	System and method for position control of a mechanical piston in a pump
US9309872B2 (en)	2005-12-02	2016-04-12	Entegris, Inc.	System and method for position control of a mechanical piston in a pump
US8870548B2 (en)	2005-12-02	2014-10-28	Entegris, Inc.	System and method for pressure compensation in a pump
CN101360678B (zh) *	2005-12-05	2013-01-02	恩特格里公司	用于泵的误差容积系统和方法
US7897196B2 (en)	2005-12-05	2011-03-01	Entegris, Inc.	Error volume system and method for a pump
CN101460742B (zh) *	2006-06-02	2011-06-08	诺迈特管理服务有限公司	包括驱动机构的容积泵
CN103133331B (zh) *	2006-11-30	2015-11-18	恩特格里公司	用于在半导体制造过程中监测泵的操作的计算机系统
CN103133331A (zh) *	2006-11-30	2013-06-05	恩特格里公司	用于在半导体制造过程中监测泵的操作的计算机系统
US9631611B2 (en)	2006-11-30	2017-04-25	Entegris, Inc.	System and method for operation of a pump
CN103801146B (zh) *	2012-11-12	2016-01-20	帕尔公司	用于调节过滤组件的系统和方法
CN103801146A (zh) *	2012-11-12	2014-05-21	帕尔公司	用于调节过滤组件的系统和方法
CN106662083A (zh) *	2014-05-28	2017-05-10	恩特格里斯公司	用于操作具有进给与施配传感器、过滤与施配确认及过滤器的减压注给的泵的系统及方法
CN106662083B (zh) *	2014-05-28	2018-11-27	恩特格里斯公司	用于操作具有进给与施配传感器、过滤与施配确认及过滤器的减压注给的泵的系统及方法

Also Published As

Publication number	Publication date
CN1331783A (zh)	2002-01-16
DE69917927D1 (de)	2004-07-15
ATE268867T1 (de)	2004-06-15
WO2000031416A1 (en)	2000-06-02
CN1175182C (zh)	2004-11-10
TW593888B (en)	2004-06-21
EP1133639A1 (de)	2001-09-19
EP1133639B1 (de)	2004-06-09
DE69917927T2 (de)	2005-06-23

Legal Events

Date	Code	Title	Description
2005-03-09	C06	Publication
2005-03-09	PB01	Publication
2005-05-11	C10	Entry into substantive examination
2005-05-11	SE01	Entry into force of request for substantive examination
2005-08-24	ASS	Succession or assignment of patent right	Owner name: MYKROLIS CORP. Free format text: FORMER OWNER: MILLIPORE CORP. Effective date: 20050722
2005-08-24	C41	Transfer of patent application or patent right or utility model
2005-08-24	TA01	Transfer of patent application right	Effective date of registration: 20050722 Address after: Massachusetts USA Applicant after: Mykrolis Corp. Address before: Massachusetts USA Applicant before: Millipore Corp.
2006-06-21	C41	Transfer of patent application or patent right or utility model
2006-06-21	TA01	Transfer of patent application right	Effective date of registration: 20060519 Address after: Minnesota, USA Applicant after: MYKROLIS Corp. Address before: Massachusetts USA Applicant before: Mykrolis Corp.
2009-10-07	C12	Rejection of a patent application after its publication
2009-10-07	RJ01	Rejection of invention patent application after publication

Publication	Publication Date	Title
CN1590761A (zh)	2005-03-09	用于精密泵设备的泵调节器
US7476087B2 (en)	2009-01-13	Pump controller for precision pumping apparatus
KR101212824B1 (ko)	2012-12-14	가변 홈 위치 토출 장치용 시스템 및 방법
US8172546B2 (en)	2012-05-08	System and method for correcting for pressure variations using a motor
US8870548B2 (en)	2014-10-28	System and method for pressure compensation in a pump
CN101356715B (zh)	2012-07-18	用于泵中的阀的排序的系统和方法
JPS59177929A (ja)	1984-10-08	サツクバツクポンプ
CN103133331A (zh)	2013-06-05	用于在半导体制造过程中监测泵的操作的计算机系统
TWI443482B (zh)	2014-07-01	用以改正使用一馬達之壓力變化之系統及方法，與電腦可讀媒體
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CN101356373B (zh)	2013-07-17	用于泵中的机械活塞的位置控制的系统
US20190249651A1 (en)	2019-08-15	Dual pump system and control thereof
JPH08100773A (ja)	1996-04-16	高粘度材料定量吐出装置
JPS63319078A (ja)	1988-12-27	吐出装置