CN1669332A - 滤色器成像阵列和形成方法 - Google Patents

滤色器成像阵列和形成方法 Download PDF

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CN1669332A
CN1669332A CNA038166364A CN03816636A CN1669332A CN 1669332 A CN1669332 A CN 1669332A CN A038166364 A CNA038166364 A CN A038166364A CN 03816636 A CN03816636 A CN 03816636A CN 1669332 A CN1669332 A CN 1669332A
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K·文卡塔拉曼
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Abstract

本发明公开了一种用于在固态成像器中使用的滤色器阵列图案，其包括位于每隔一个阵列位置上的红色感光元件，并且在其余的阵列位置上交替设置的蓝色感光元件和绿色感光元件。由于对红色采样最频繁，该滤色器可以是用于对人体内的器官或组织进行成像的体内相机系统的一部分。

Description

滤色器成像阵列和形成方法
技术领域
本发明涉及一种在固态图像传感器中使用的滤色器，并且特别地涉及具有图案的滤色器阵列，其对红色的采样相比于蓝色和绿色更加频繁，以及形成方法。
背景技术
固态图像传感器，也就是公知的成像器，其发展于1960年年代末和1970年年代初，主要用于电视图像获取、传输和显示。成像器吸收特定波长(诸如光量子、x-射线等)的入射射线，并产生对应于所吸收射线的电信号。现有多种不同类型的基于半导体的成像器，包括电荷耦合器件(CCD)、光电二极管阵列、电荷注入器件(CID)、混合焦平面阵列、和CMOS成像器。固态成像器的当前应用包括相机、扫描器、机器可视系统、车辆导航系统、视频电话、计算机输入装置、监视系统、自动对焦系统、星象跟踪仪(star tracker)、运动检测器系统、图像稳定系统、和用于高清晰度电视的数据压缩系统等等。
这些成像器典型地由包含光传感器的象素单元阵列组成，其中当图像聚焦到该阵列上时，每一象素产生对应于入射到该元件上的光的强度的信号。然后可以存储这些信号，例如用于在监视器上显示对应的图像，或者用来提供关于该光学图像的信息。光传感器典型地是光电晶体管、光电导体或光电二极管。因此每一象素所产生的信号的幅度正比于入射到该光传感器上的光量。
为了让光传感器捕获彩色图像，该光传感器必须能够分别地检测红(R)光子、绿(G)光子和蓝(B)光子。相应地，每一象素必须只对一种颜色或一种光谱带感光。因此，典型地将每一滤色器阵列(CFA)放置在象素前面，使得每一象素测量其相关的滤色器的颜色的光。于是，彩色图像传感器的每一象素根据具体的图案被红、绿或蓝滤色器覆盖。
图1描述了一种这样的滤色器阵列图案，也就是熟知的“Bayer”图案，在美国专利US3,971,065(其全部内容在此引作参考)中对其进行了更详细的描述。在Bayer图案中，设置红、绿和蓝象素，使得红和绿象素在图像的第一行上交替出现，并且蓝和绿象素在图像的下一行上交替出现。于是，当逐线地读取该图像传感器时，第一线的象素序列读为GRGRGR等，并且然后交替的线序列读为BGBGBG等。该输出称为顺序RGB或sRGB。
在Bayer图案中，根据人的视觉系统的敏感度调节三基色矢量的采样率。也就是，人的眼睛对绿色最是敏感和响应，对绿色采样最频繁，而人的视觉对蓝色的分辨率最低，对蓝色采样最不频繁。这就是在Bayer图案中，每隔一个阵列位置就出现用于检测亮度(提供亮度信息的颜色矢量)的绿色感光元件，而红色感光元件与蓝色感光元件交替的原因。
这些特征的结果就是，Bayer图案大量用于或多或少具有在整个可见光谱上的统一颜色表示的成像对象。这样，以两倍于其它两个基色的频率对绿色进行采样就可以产生被成像的特定对象的亮度分量的良好表示。但是，如果被成像的对象在绿色部分波长上具有相对较低的光谱反射率，那么使用采用Bayer滤色器图案的成像器捕获的图像可能不是最佳的。
因此，需要一种CMOS传感器的滤色器阵列图案，用于感测不具有可见光谱上统一颜色表示的对象，例如肉眼不可见的人体部分，诸如胃肠道的内脏。也需要一种制造这种滤色器的方法。
发明内容
本发明的一方面提供一种在对内脏进行成像的固态成像器中使用的滤色器阵列图案，包括每隔一个阵列位置设置的红色感光元件，和在阵列的其余位置交替设置的蓝色和绿色感光元件。这样，红色采样最频繁，而蓝色和绿色采样最不频繁。
本发明的另一方面提供一种使用固态成像器的滤色器阵列图案的方法，用于对不具有可见光谱上统一颜色表示的成像对象进行成像，例如人的胃肠道的内脏。例如通过在医疗过程中、诸如在胃肠道内窥镜检查中所使用的体内视频相机系统或在小型CCD或CMOS成像器胶囊相机中采用本发明的滤色器图案，以两倍于其它两个基色蓝和绿色的频率对人的胃肠道器官进行主要红色的采样。
也提供一种用于形成本发明的滤色器阵列图案的方法。从下面的详细描述和描述本发明优选实施例的附图可以明显看到发明的这些和其它优点和特征。
附图说明
图1描述了Bayer颜色图案的示意性表示。
图2描述了本发明的滤色器图案的示意性表示。
图3是图2的滤色器图案的三维分解表示。
图4描述了固态成像器的主要元件的侧边截面图，其构建有根据本发明的滤色器阵列。
图5描述了CMOS成像器象素单元的示意性截面图，其构建有根据本发明的滤色器阵列。
图6是图5的CMOS成像器象素单元的代表性结构图。
图7描述了根据本发明的实施例进行形成颜色图案层过程的半导体晶片的截面图。
图8描述了图7的半导体晶片处于图7所示阶段之后的处理阶段中。
图9描述了图7的半导体晶片处于图8所示阶段之后的处理阶段中。
图10是成像系统的说明，其具有根据本发明的滤色器图案的成像器。
具体实施方式
下面参照附图对本发明进行详细说明，附图是本发明的一部分，并且其中通过说明的方式描述了可以实施本发明的具体实施例。这些实施例被足够详细地描述，使得本领域的技术人员能够实施本发明，需要理解的是，不脱离本发明的精神和范围，可以使用其它实施例，并且也可以对结构、逻辑和电子线路做出改变。
词语“晶片”和“衬底”应该理解为包括绝缘体上硅(SOI)或硅蓝宝石(SOS)技术、掺杂或未掺杂的半导体、由半导体基片支持的硅外延层、以及其它半导体结构。而且，当在下面的描述中提到“晶片”或“衬底”时，可以利用前面的处理步骤来在基底半导体结构或基片中或其上形成区域或结。另外，该半导体并非必须是基于硅的，也可以是基于硅-锗、锗、或砷化镓。
词语“象素”指的是图像元件单元，其包含用于将电磁射线转换为电子信号的光传感器或晶体管。为了说明，此处在附图和说明中描述了代表性的CMOS成像器象素。然而，这只是本发明的该类型成像器和象素的一个范例，其可以用于本发明。因此下面的详细描述并不是限制性的，而是本发明的示范说明。
现在参照附图，其中相同的部件用相同的附图标记表示，在图2-3中描述了本发明的图像采样阵列图案(滤色器图案)10。分别对应于基色矢量的三组传感器阵列11、13和15(图3)交叠形成图像采样阵列图案10(图2-3)。传感器阵列11由用“R”表示的红色感光元件(也称为亮度元件)组成，并且在采样阵列的元件位置上间隔设置。由于传感器图案11具有数量最多的颜色感光元件，因此传感器图案11称为亮度图案。如图2-3中所述，传感器图案11的亮度元件出现在该阵列的半数元件位置上，并且均匀地分布在整个采样阵列10上。于是，就通过元件数量最多的红色元件对亮度情况进行采样。
传感器图案13具有用“G”表示的绿色元件，其与传感器图案11的红色亮度元件在交替行中交替出现。类似地，传感器图案15具有用“B”表示的蓝色元件，其与传感器图案11的红色亮度元件在交替行上交替出现。这样，传感器图案13和15在两个相互垂直的方向上，水平和垂直方向上形成对称和均匀布置，如图2中所示。当逐线地读出图像传感器时，象素序列读为RGRGRG等，并且然后交替线的序列读为BRBRBR等。
在图2-3的设置中，红色元件的数量占元件数量的半数，而蓝色和绿色元件占元件数量的另一半。于是，蓝色感光元件占元件数量的四分之一，而绿色感光元件也占元件数量的四分之一。红色元件的数量是蓝色和绿色元件的每一个的两倍，其结果就是对红色情况进行采样的频率是蓝色情况或绿色情况的采样频率的两倍。这种红色亮度图案的结果就是，对缺乏三基色的图像的采样在水平和垂直方向上都是对称和均匀的，例如对红色和红色色调占主要的图像进行采样。于是，该颜色采样阵列图案10优选地用于根据人体内的、趋向是在红色光谱中的原色对全部三基色矢量进行采样。以两倍于其它两个原色的频率对红色进行采样就能够产生被成像的特定体内部分、器官、组织或部件的亮度分量的良好表示。
在图4-6中示意性地描述了固态成像器20，其包括具有根据本发明的滤色器图案10的滤色器层100。成像器20包括形成在象素阵列26上作为相同衬底30的一部分的滤色器层100，该衬底可以是上述任何类型的衬底。象素阵列26包括形成在该衬底中和其上的多个象素传感器单元28，并且被用作成像器20的钝化和平面化层的保护层24覆盖。保护层24可以是一层BPSG、PSG、BSG、二氧化硅、氮化硅、聚酰亚胺、或其它公知的光透射绝缘体。
具有上述滤色器图案10的滤色器层100形成在钝化层24上。该滤色器层100包括每间隔一个阵列位置设置的红色感光元件阵列、和在其余的阵列位置上交替设置的蓝色感光和绿色感光元件，如上参照颜色成像阵列图案10的详述。这样，滤色器层100对红色采样最频繁，而对蓝色和绿色采样最不频繁。
也如图4-6中所述，形成微透镜阵列22，使得微透镜70形成在每一象素单元28的上面。形成微透镜阵列22，使得该阵列的焦点集中在每一象素单元28中的感光元件上。该器件也包括隔离层25，其位于微透镜阵列22之下和滤色器层100之上。调节隔离层25的厚度，使得感光元件处在对于传播通过微透镜阵列22的透镜70的光线的焦点上。
也如图5-6中所示，每一象素传感器单元28包含光传感器34，其可以是光电二极管、光电门(photogate)等。在图5-6中所描述为光电门光传感器34。施加一个应用控制信号PG到该光电门34上，使得当光子形式的入射射线101通过滤色器层100并撞击到光传感器34上时，光产生的电子累积在光传感器34下面的掺杂区域36中。传送晶体管38与光传感器34相邻设置，并且其具有源和漏区域36、40以及被传送信号TX控制的栅叠层42。漏区域40也称为漂移扩散区域或漂移扩散节点，并且其将从光传感器34接收到的电荷传送到输出晶体管44、46，并且然后传送到读出电路48。通过复位信号RST控制包括掺杂区域40、52和栅叠层54的复位晶体管50，该复位信号用于将漂移扩散区域40复位到刚好在信号读出之前的预定初始电压。例如也可以在美国专利US6,376,868和US6,333,205中找到上述象素传感器单元的元件的详细形成和功能，它们全部在此引作参考。
如图5中所示，用于传送晶体管38和复位晶体管50的象素单元28的栅叠层42、54包括在衬底30上的二氧化硅或氮化硅绝缘体56、在绝缘层56上面的掺杂多晶硅、钨、或其它适当材料的导电层58，和绝缘盖帽层(insulating cap layer)60，例如为二氧化硅、氮化硅、或ONO(氧化物-氮化物-氧化物)，衬底30在该范例中为p型衬底。如果需要的话，可以在多晶硅层58与盖帽层60之间使用硅化物层59。在栅叠层42、54的侧边上也形成有绝缘侧壁62。这些侧壁例如可以由二氧化硅、氮化硅、或ONO形成。象素单元28周围的场氧化层64将其与阵列中的其它象素单元隔离开。可以在硅衬底上生长第二栅氧化层57，并且从该层形成该光电门半透明导体66的图案。在该光传感器是光电二极管的情况下，不需要第二栅氧化层57和光电门半透明导体66。而且，传送晶体管38是可选的，在这种情况下，扩散区域36和40连接在一起。
上述实施例的滤色器层100通过如下所述过程制造，并且如图7-9中所述。现在参照图7，设置衬底30，其可以是上述任何类型的衬底，并且具有通过公知方法在其上形成的象素阵列26、外围电路、接触和连线。在象素阵列26上形成有BPSG、BSG、PSG、二氧化硅、氮化硅等的保护层24，以将其钝化，并提供平面化的表面。
在钝化层24上形成有滤色器层100，也如图7中所示。滤色器层100可以由用作光透射材料的色阻或丙烯酸材料制成。例如，滤色器层100可以由多个滤色器层形成，该多个滤色器层的每一个分别由红滤色区(未示出)、绿滤色区(未示出)、和蓝滤色区(未示出)组成，其例如由相应滤色品质的色阻或丙烯酸材料形成。这样，形成滤色器层100的多个滤色器层的每一个的红色、蓝色和绿色感光元件可以采用红色感光色阻材料、蓝色感光色阻材料和绿色感光色阻材料来形成。并排并且按照上述滤色器图案10布置这些红、蓝和绿色元件，使得红色感光元件位于在每间隔一个阵列位置上，并且蓝色感光元件和绿色感光元件在其余的阵列位置上交替布置。其它实施例可以采用其它颜色材料，诸如本领域熟知的涂料或染料。例如可以通过常规的沉积或旋转涂布(spin-on)方法在钝化层24上形成滤色器层100。
红、蓝和绿色滤色器元件通常优选是小于50微米宽的正方形，但是也可以使用其它的几何形状，并且与半导体层的感光元件(例如光电二极管)对准放置。
接着如图8中所示，在保护层24上形成隔离层25。如图9中所示，然后可以从透镜形成层中形成折射透镜70，例如使得每一透镜70覆盖在象素单元28上。本发明也包括透镜70覆盖多个象素单元28的替换结构。
在该阶段基本上完成了滤色器层100，并且现在可以执行常规的处理方法来封装成像器20。可以进一步如本领域所熟知的对参照图2-9所描述的具有本发明滤色器阵列图案的象素阵列进行处理以产生CMOS成像器。
本发明的滤色器阵列也可以使用其它类型成像器的象素，例如CCD成像器。如果需要的话，成像器20可以结合有处理器，诸如CPU、数字信号处理器或微处理器。成像器20和微处理器可以形成在单个的集成电路中。如图10中所示为示范性的处理器系统400，其使用具有根据本发明的滤色器阵列的CMOS成像器。基于处理器的系统是具有数字电路的示范性系统，其可以包括CMOS或其它成像器装置。不是进行限制，这种系统可以包括计算机系统、相机系统、扫描器、机器可视系统、车辆导航系统、视频电话、监视系统、自动对焦系统、星象跟踪仪系统、运动检测系统、图像稳定系统和用于高清晰度电视的数据压缩系统，它们都可以使用本发明。
如图10中所示，示范性处理器系统400一般包括，诸如微处理器的中央处理单元(CPU)444，其通过总线452与输入/输出(I/O)设备446通信。成像器20也通过总线452与该系统通信。计算机系统400也包括随机存取存储器(RAM)448，并且也可以包括外围设备，诸如软盘驱动454、光盘(CD)ROM驱动456或闪存458，其也通过总线452与CPU 444通信。软盘454、CD ROM 456或闪存458存储由成像器20捕获的图像。成像器20优选地被构造成为集成电路，具有或不具有存储器，其包括具有本发明滤色器图案10的滤色器层100，如前关于图2-9所描述。
如上所述，由于用在固态成像器中的滤色器图案包括位于每间隔一个阵列位置上的红色感光元件，和在其余阵列位置上交替设置的蓝色感光元件和绿色感光元件，所以红色采样最频繁，并且蓝色和绿色采样最不频繁。因此，本发明的滤色器阵列图案可以用于内脏学(内脏研究)、神经学(神经系统研究)、骨学(骨骼研究)、韧带学(韧带和关节研究)和肌肉学(肌肉研究)等，从各种器官系统、组织和细胞中获得图像和数据测量。这样，对红色(体内器官、组织和细胞的原色)采样的频率是其它两个原色的两倍，从而可以产生所成像的体内器官、组织和细胞的亮度分量的良好表示。
相应的，并且特别是在本发明的优选实施例中，成像器20被构造成为具有本发明的滤色器层100和滤色器图案10的集成电路，并进一步作为体内视频相机系统或体内测量系统的一部分，其可以检测图像和分析人体各种系统的数据，例如消化或肌肉系统。体内视频相机和测量系统典型地包括可吞服的电子胶囊，其可以从各种体内器官或组织中收集数据并进一步将数据传送到接收器系统。这些可吞服的肠内胶囊也可以包括传送系统，用于以各种无线电频率将所测量的数据发送到接收器系统。
可以将包括具有本发明滤色器图案10的滤色器层100的成像器20附加到其它体内检测和测量系统，包括典型地为患者所吞下的长导管的内诊镜，可以产生上胃肠道或下胃肠道的图像。内诊镜可以是光纤内诊镜或视频内诊镜。例如在视频内诊镜中，在感兴趣的区域处放置有小型的电子相机，并该电子相机存储图像，直至该测试结束。
例如，在授予Iddan等人的美国专利US 5,604,531、授予Mizumoto的美国专利US 4,278,077、授予Hoshino的美国专利US 5,267,033和E.N.Rowland和H.S.Wolf的The Radio Pill：Telemetering fromthe Digestive Tract，British Communi cations and Electronics(1960年8月，598-601页)中提供有关于体内视频相机和可吞服胶囊的更加详细情况，其内容在此引作参考。
再次应该注意到的是，虽然已经具体地参照具有象素阵列的成像电路描述了本发明，但是本发明具有更宽广的可应用性并可以用于任何成像设备中。同样的，制造上述滤色器层100的过程只是多个可以使用的方法之一。上面的说明和附图描述了实现本发明目的、特征和优点的优选实施例。本发明并不仅限于所描述的实施例。在下面的权利要求的精神和范围内对本发明所做出的任何修改都应该认为是本发明的一部分。

Claims (51)

1.一种在成像装置中使用的滤色器阵列，包括：
成像阵列；和
设置在所述成像阵列上的感光元件阵列，所述感光元件阵列包括红色感光元件，所述红色感光元件出现在所述感光元件阵列的每隔一个元件位置上。
2.权利要求1的滤色器阵列，其中所述感光元件阵列进一步包括蓝色感光元件和绿色感光元件，其关于所述红色感光元件以重复图案设置。
3.权利要求1的滤色器阵列，其中所述蓝色感光元件和所述绿色感光元件分别在所述感光元件阵列的交替行中与所述红色感光元件交替设置。
4.权利要求3的滤色器阵列，其中在所述元件位置的四分之一处出现有所述蓝色感光元件。
5.权利要求1的滤色器阵列，其中所述成像装置是体内相机系统的一部分。
6.权利要求1的滤色器阵列，其中所述成像装置是体内CMOS胶囊相机的一部分。
7.权利要求1的滤色器阵列，其中所述成像装置是内诊镜的一部分。
8.一种在成像装置中使用的滤色器图案，包括：
多个感光元件，包括以预定图案设置的红色感光元件、蓝色感光元件和绿色感光元件，所述红色感光元件出现在所述预定图案的每隔一个元件位置上。
9.权利要求8的滤色器图案，其中所述蓝色感光元件和绿色感光元件关于所述红色感光元件以重复的顺序设置。
10.权利要求9的滤色器图案，其中所述蓝色感光元件和绿色感光元件分别在所述预定图案的交替行中与所述红色感光元件交替设置。
11.权利要求8的滤色器图案，其中在所述元件位置的四分之一处出现有所述蓝色感光元件。
12.权利要求8的滤色器图案，其中所述成像装置是体内相机系统的一部分。
13.权利要求8的滤色器图案，其中所述成像装置是体内CMOS胶囊相机的一部分。
14.权利要求8的滤色器图案，其中所述成像装置是内诊镜的一部分。
15.一种在可吞服胶囊成像装置中使用的滤色器图案，包括：
设置在所述可吞服胶囊成像装置的成像区域上的多个感光元件，所述多个感光元件包括以预定图案设置的红色感光元件、蓝色感光元件和绿色感光元件，所述红色感光元件出现在所述预定图案的每隔一个元件位置上，并且其中所述蓝色感光元件和绿色感光元件分别在所述预定图案的交替行中与所述红色感光元件交替设置。
16.权利要求15的滤色器图案，其中在所述元件位置的八分之一处出现有所述蓝色感光元件。
17.权利要求15的滤色器图案，其中所述胶囊成像装置是体内相机系统的一部分。
18.一种成像器，包括：
成像阵列，其具有形成在衬底的上表面处的多个象素传感器单元，并提供表示图像的输出数据；和
形成在所述成像阵列上的滤色器层，所述滤色器层包括多个红色感光元件、蓝色感光元件和绿色感光元件，所述多个红色、蓝色和绿色感光元件以滤色器图案设置，使得所述红色感光元件在所述滤色器图案的每隔一个元件位置上出现。
19.权利要求18的成像器，其中所述蓝色感光元件和所述绿色感光元件分别在所述滤色器图案的交替行中与所述红色感光元件交替设置。
20.权利要求18的成像器，其中在所述元件位置的四分之一处出现有所述蓝色感光元件。
21.权利要求18的成像器，其中所述象素传感器单元是体内相机系统的一部分。
22.权利要求18的成像器，其中所述象素传感器单元是体内CMOS胶囊相机的一部分。
23.权利要求18的成像器，其中所述象素传感器单元是内诊镜的一部分。
24.权利要求18的成像器，其中所述象素传感器单元提供表示体内器官的图像的输出数据。
25.权利要求18的成像器，其中所述象素传感器单元提供表示体内肌肉的图像的输出数据。
26.权利要求18的成像器，其中所述象素传感器单元提供表示体内组织的图像的输出数据。
27.一种CMOS成像器，包括：
形成在衬底的上表面处的象素传感器单元的阵列；
形成在所述阵列上的保护层；和
形成在所述保护层上的滤色器层，所述滤色器层包括多个红色感光元件、蓝色感光元件和绿色感光元件，所述多个红色、蓝色和绿色感光元件以滤色器图案设置，使得所述红色感光元件在所述滤色器图案的每隔一个元件位置上出现。
28.权利要求27的CMOS成像器，其中所述蓝色感光元件和所述绿色感光元件分别在所述滤色器图案的交替行中与所述红色感光元件交替设置。
29.权利要求27的CMOS成像器，其中在所述元件位置的四分之一处出现有所述蓝色感光元件。
30.权利要求27的CMOS成像器，其中所述象素传感器单元是体内相机系统的一部分。
31.权利要求27的CMOS成像器，其中所述象素传感器单元是内诊镜的一部分。
32.权利要求27的CMOS成像器，其中所述象素传感器单元提供表示体内器官的图像的输出数据。
33.权利要求27的CMOS成像器，其中所述象素传感器单元提供表示体内组织的图像的输出数据。
34.一种形成用于在成像装置中使用的滤色器阵列的方法，所述方法包括步骤：
提供在其上形成有象素传感器单元阵列的衬底；
在所述象素传感器单元上提供保护层；和
在所述保护层上形成滤色器层，所述滤色器层由多个感光元件形成，包括红色感光元件、蓝色感光元件和绿色感光元件，所述多个感光元件以预定的图案设置，使得所述红色感光元件在所述预定图案的每隔一个元件位置上出现。
35.权利要求34的方法，其中所述蓝色感光元件和所述绿色感光元件分别在所述滤色器图案的交替行中与所述红色感光元件交替设置。
36.权利要求35的方法，其中在所述元件位置的八分之一处出现有所述蓝色感光元件。
37.权利要求34的方法，其中所述象素传感器单元形成体内相机系统的一部分。
38.权利要求37的方法，其中所述象素传感器单元形成体内CCD胶囊相机的一部分。
39.权利要求34的方法，其中所述象素传感器单元形成内诊镜的一部分。
40.权利要求34的方法，其中所述象素传感器单元提供表示体内器官的图像的输出数据。
41.权利要求40的方法，其中所述象素传感器单元提供表示体内肌肉的图像的输出数据。
42.权利要求34的方法，其中所述象素传感器单元提供表示体内组织的图像的输出数据。
43.权利要求34的方法，其中所述象素传感器单元提供表示人的心血管系统的图像的输出数据。
44.一种形成用于在体内视频相机系统中使用的滤色器阵列的方法，所述方法包括步骤：
提供在其上形成有象素传感器单元阵列的半导体衬底，所述象素传感器单元提供表示人体内的图像的输出数据；
在所述象素传感器单元上提供保护层；和
在所述保护层上形成滤色器层，所述滤色器层由多个感光元件形成，包括红色感光元件、蓝色感光元件和绿色感光元件，所述多个感光元件以预定的图案设置，使得所述红色感光元件在所述预定图案的每隔一个元件位置上出现。
45.权利要求44的方法，其中所述蓝色感光元件和所述绿色感光元件分别在所述滤色器图案的交替行中与所述红色感光元件交替设置。
46.权利要求45的方法，其中在所述元件位置的八分之一处出现有所述蓝色感光元件。
47.权利要求44的方法，其中所述体内视频相机是CMOS胶囊相机。
48.权利要求44的方法，其中所述体内视频相机是内诊镜的一部分。
49.权利要求44的方法，其中所述象素传感器单元提供表示体内肌肉的图像的输出数据。
50.权利要求44的方法，其中所述象素传感器单元提供表示人的心血管系统的图像的输出数据。
51.权利要求44的方法，其中所述象素传感器单元提供表示胃肠系统的图像的输出数据。
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US20040234873A1 (en) 2004-11-25
US20030211405A1 (en) 2003-11-13
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ATE349861T1 (de) 2007-01-15
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JP2005526458A (ja) 2005-09-02
US6783900B2 (en) 2004-08-31
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AU2003269305A1 (en) 2003-12-02
EP1506679B1 (en) 2006-12-27
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