CN1908738A - 有源矩阵式液晶电光器件以及具备该器件的摄象机 - Google Patents

有源矩阵式液晶电光器件以及具备该器件的摄象机 Download PDF

Info

Publication number
CN1908738A
CN1908738A CNA2006100934473A CN200610093447A CN1908738A CN 1908738 A CN1908738 A CN 1908738A CN A2006100934473 A CNA2006100934473 A CN A2006100934473A CN 200610093447 A CN200610093447 A CN 200610093447A CN 1908738 A CN1908738 A CN 1908738A
Authority
CN
China
Prior art keywords
tft
liquid crystal
forms
region
interlayer dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006100934473A
Other languages
English (en)
Chinese (zh)
Inventor
山崎舜平
间濑晃
广木正明
竹村保彦
张宏勇
鱼地秀贵
根本英树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17010420&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1908738(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of CN1908738A publication Critical patent/CN1908738A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0314Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral top-gate TFTs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon

Landscapes

  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
CNA2006100934473A 1991-08-23 1992-08-22 有源矩阵式液晶电光器件以及具备该器件的摄象机 Pending CN1908738A (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP23710091 1991-08-23
JP237100/1991 1991-08-23
JP340336/1991 1991-11-29
JP34194/1992 1992-01-24
JP38637/1992 1992-01-29
JP54322/1992 1992-02-05

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN200410088064.8A Division CN1603924B (zh) 1991-08-23 1992-08-22 有源矩阵式液晶电光器件以及具备该器件的摄象机

Publications (1)

Publication Number Publication Date
CN1908738A true CN1908738A (zh) 2007-02-07

Family

ID=17010420

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006100934473A Pending CN1908738A (zh) 1991-08-23 1992-08-22 有源矩阵式液晶电光器件以及具备该器件的摄象机

Country Status (2)

Country Link
JP (3) JPH05267666A (ja)
CN (1) CN1908738A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020253246A1 (zh) * 2019-06-18 2020-12-24 京东方科技集团股份有限公司 顶栅结构及其制备方法、阵列基板、显示设备
CN118629752A (zh) * 2024-08-13 2024-09-10 东莞市郡嘉电子科技有限公司 一种具有散热结构的平面变压器

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0499979A3 (en) 1991-02-16 1993-06-09 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
JP2540688B2 (ja) * 1991-08-23 1996-10-09 株式会社半導体エネルギー研究所 半導体装置とその作製方法
JP2794678B2 (ja) 1991-08-26 1998-09-10 株式会社 半導体エネルギー研究所 絶縁ゲイト型半導体装置およびその作製方法
JP2845303B2 (ja) 1991-08-23 1999-01-13 株式会社 半導体エネルギー研究所 半導体装置とその作製方法
US5485019A (en) 1992-02-05 1996-01-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for forming the same
JP3587537B2 (ja) 1992-12-09 2004-11-10 株式会社半導体エネルギー研究所 半導体装置
US6544825B1 (en) 1992-12-26 2003-04-08 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a MIS transistor
DE4435461C2 (de) * 1993-10-06 2001-09-20 Micron Technology Inc N D Ges Dünnfilmtransistor und dessen Herstellverfahren
KR100291971B1 (ko) 1993-10-26 2001-10-24 야마자끼 순페이 기판처리장치및방법과박막반도체디바이스제조방법
US7081938B1 (en) 1993-12-03 2006-07-25 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
JP2873660B2 (ja) 1994-01-08 1999-03-24 株式会社半導体エネルギー研究所 半導体集積回路の作製方法
JP3312083B2 (ja) 1994-06-13 2002-08-05 株式会社半導体エネルギー研究所 表示装置
TW344901B (en) * 1995-02-15 1998-11-11 Handotai Energy Kenkyusho Kk Active matrix display device
TW345654B (en) 1995-02-15 1998-11-21 Handotai Energy Kenkyusho Kk Active matrix display device
US5757456A (en) 1995-03-10 1998-05-26 Semiconductor Energy Laboratory Co., Ltd. Display device and method of fabricating involving peeling circuits from one substrate and mounting on other
US5834327A (en) 1995-03-18 1998-11-10 Semiconductor Energy Laboratory Co., Ltd. Method for producing display device
KR100456394B1 (ko) * 1997-07-08 2005-04-06 삼성전자주식회사 반도체제조장치및이를채용한반도체소자의배선형성방법
JP3370029B2 (ja) 1999-09-13 2003-01-27 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4094539B2 (ja) * 2003-12-12 2008-06-04 株式会社半導体エネルギー研究所 半導体集積回路の作製方法
JP4339102B2 (ja) * 2003-12-12 2009-10-07 株式会社半導体エネルギー研究所 表示装置の作製方法
JP4799509B2 (ja) * 2007-08-16 2011-10-26 株式会社半導体エネルギー研究所 剥離方法
US9287405B2 (en) * 2011-10-13 2016-03-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising oxide semiconductor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823478A (ja) * 1981-08-04 1983-02-12 Mitsubishi Electric Corp 電荷結合素子
JPS5823479A (ja) * 1981-08-05 1983-02-12 Fujitsu Ltd 半導体装置の製造方法
JPS5827365A (ja) * 1981-08-10 1983-02-18 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JPS5921067A (ja) * 1982-07-27 1984-02-02 Fujitsu Ltd 半導体装置およびその製造方法
JPS63219152A (ja) * 1987-03-06 1988-09-12 Matsushita Electronics Corp Mos集積回路の製造方法
JPH03165575A (ja) * 1989-11-24 1991-07-17 Nec Corp 薄膜トランジスタとその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020253246A1 (zh) * 2019-06-18 2020-12-24 京东方科技集团股份有限公司 顶栅结构及其制备方法、阵列基板、显示设备
CN118629752A (zh) * 2024-08-13 2024-09-10 东莞市郡嘉电子科技有限公司 一种具有散热结构的平面变压器

Also Published As

Publication number Publication date
JP2585158B2 (ja) 1997-02-26
JPH11163369A (ja) 1999-06-18
JP3109051B2 (ja) 2000-11-13
JPH05267666A (ja) 1993-10-15
JPH05267667A (ja) 1993-10-15

Similar Documents

Publication Publication Date Title
CN1908738A (zh) 有源矩阵式液晶电光器件以及具备该器件的摄象机
CN100352022C (zh) 半导体器件及其制造方法
DE102013022607B4 (de) Anzeigevorrichtung
CN1043704C (zh) 半导体器件及其形成方法
CN1161646C (zh) 有源矩阵显示器和电光元件
CN1078386C (zh) 制造半导体器件的方法
US8088652B2 (en) Electron device using oxide semiconductor and method of manufacturing the same
CN1078014C (zh) 半导体器件及其制造方法
CN1421726A (zh) 有源矩阵型显示设备
CN1041873C (zh) 半导体器件及其形成方法
CN1221223A (zh) 半导体器件及其制造方法
CN1444288A (zh) 薄膜晶体管及其制造方法
CN101345261A (zh) 薄膜晶体管及其制造方法
CN1603924B (zh) 有源矩阵式液晶电光器件以及具备该器件的摄象机
US9773921B2 (en) Combo amorphous and LTPS transistors
CN103208528B (zh) 半导体器件、半导体器件制造方法、液晶显示装置和电子设备
CN1245976A (zh) 半导体器件
CN1324388C (zh) 低温多晶矽薄膜电晶体液晶显示器的制造方法
CN1790723A (zh) 薄膜晶体管阵列面板及其制造方法
TW560001B (en) Method of forming reflective liquid crystal display and driving circuit
CN1530718A (zh) 反射式液晶显示器及周边电路的制造方法
CN1213338C (zh) 使用具有多晶半导体层的晶体管的图象显示装置
CN1933164A (zh) 半导体器件及其制造方法
JPH0697443A (ja) 半導体装置の作製方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20070207