CS208619B1 - Method of coating the material - Google Patents

Description

(54)

Material application method

The invention relates to a method of depositing material by a vacuum steaming process from a directly heated boat.

The prior art method of vapor deposition of a material from a heated boat, as is common with materials that readily evaporate under vacuum, is extremely difficult for materials with a higher melting point. In such cases, it is necessary to heat the boat to a high temperature, which places particular demands on the quality of the boat, removal of excessive heat, maintaining a high vacuum, suppressing the formation of oxides, etc. The solution to these problems is so difficult. they prefer other deposition routes, such as discharge sputtering, electron gun deposition, etc. However, these methods require adequate steam treatment and expensive new attachments. Moreover, these methods also impose various limitations (in the thickness and unevenness of the deposited layer, etc.).

In accordance with the invention, the above-mentioned drawbacks are substantially eliminated by the use of a boil for deposition of the material by a vacuum vapor deposition process, in which the material is chemically, galvanically, or sedimented prior to the actual vapor deposition process. The material is deposited on the entire surface of the boat or only on the active evaporating portion of the surface, so that the formed homogeneous layer of material forms a compact unit with the boat.

The fact that the material to be evaporated forms a compact unit with the boat is achieved

208 619

208 819 very good heat transfer from the boat to the material. In addition, the material heats up quickly and evenly because it is formed in a thin uniform homogeneous layer. In this way, it is also possible to steam materials that are otherwise difficult to steam, with acceptable heat of the boat, without the risk of excessive heat gradients at the boat-material contact causing surface oxidation or other material change. This can greatly extend the applicability of the vapor deposition technology to cases that are otherwise solved by the use of sputtering technology, the use of an electron gun, etc. This particular application method is particularly advantageous for metal materials that form with the metal of which the boat is made, they have a sufficient vapor pressure only at temperatures substantially higher than the eutectic point or even the melting point of the metal material to be considered. The prior art methods of conventional vapor deposition lead to rapid destruction of the boat, since the eutectic alloy can be formed with an unlimited amount of boat metal. The method according to the invention makes it possible to apply homogeneous layers of metal material in limited thickness on the surface of the boat, and thus only a layer of eutectic of limited thickness can be formed which does not compromise the life of the boat. Therefore, it is possible in this way to achieve a high boiling rate and the formation of high-quality layers even when steaming e.g. nickel layers.

FIG. 1 shows one exemplary embodiment of a boat with an excluded layer of material 2 on the active portion of the boat surface.

In Fig. 2, a boat 1 (eg of tungsten) is in the form of a strip on which a layer of material 2 (eg 5 / a. Nickel) is deposited over the entire surface of the strip.

As one possible example of the deposition of the material according to the invention, the case where, according to Fig. 2, the tungsten boat 1, the material 2 is nickel. Nickel is deposited chemically on the surface of the boat and, when the boat is heated, it evaporates from the boat under vacuum and is applied to the object to be metallized.

The method of applying the material according to the invention can also be advantageously used, for example, in some materials which are subject to chemical granules in other application methods. The method is also advantageous where stricter requirements are placed on the uniformity of the applied layer, or a higher layer thickness, a higher vaporization rate and the like are required, which is relatively difficult to achieve by other methods, such as cathodic sputtering.

Claims (5)

SUBJECT OF THE INVENTION A method of applying a material by a vacuum steaming process from a directly heated boat, characterized in that the material to be steamed is deposited in a homogeneous layer on the surface of the boat, at least on its active part, prior to the steaming process itself. 2. A method according to claim 1, wherein the material deposited on the surface of the boat is metal. 3. A method according to claim 1, wherein the material is on the boat 208 019 galvanized, 4. A method according to claim 1, characterized in that the material is deposited chemically on the boat, 5. The method according to claim 1, wherein the material is deposited on the boat by sedimentation from the suspension and subsequently sintered.