CS220686A1 - Nosic na hromadne istenie najmae kremikovych dosiek v akustickom prostredi - Google Patents

Nosic na hromadne istenie najmae kremikovych dosiek v akustickom prostredi

Info

Publication number
CS220686A1
CS220686A1 CS862206A CS220686A CS220686A1 CS 220686 A1 CS220686 A1 CS 220686A1 CS 862206 A CS862206 A CS 862206A CS 220686 A CS220686 A CS 220686A CS 220686 A1 CS220686 A1 CS 220686A1
Authority
CS
Czechoslovakia
Prior art keywords
prostredi
najmae
kremikovych
istenie
hromadne
Prior art date
Application number
CS862206A
Other languages
Czech (cs)
Other versions
CS257114B1 (en
Inventor
Ivan Haban
Dominik Ing Jankech
Miroslav Pavlik
Original Assignee
Ivan Haban
Jankech Dominik
Miroslav Pavlik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ivan Haban, Jankech Dominik, Miroslav Pavlik filed Critical Ivan Haban
Priority to CS862206A priority Critical patent/CS257114B1/en
Publication of CS220686A1 publication Critical patent/CS220686A1/en
Publication of CS257114B1 publication Critical patent/CS257114B1/en

Links

CS862206A 1986-03-28 1986-03-28 Carrier for bulk cleaning, especially silicon wafers in an acoustic environment CS257114B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS862206A CS257114B1 (en) 1986-03-28 1986-03-28 Carrier for bulk cleaning, especially silicon wafers in an acoustic environment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS862206A CS257114B1 (en) 1986-03-28 1986-03-28 Carrier for bulk cleaning, especially silicon wafers in an acoustic environment

Publications (2)

Publication Number Publication Date
CS220686A1 true CS220686A1 (en) 1987-09-17
CS257114B1 CS257114B1 (en) 1988-04-15

Family

ID=5358521

Family Applications (1)

Application Number Title Priority Date Filing Date
CS862206A CS257114B1 (en) 1986-03-28 1986-03-28 Carrier for bulk cleaning, especially silicon wafers in an acoustic environment

Country Status (1)

Country Link
CS (1) CS257114B1 (en)

Also Published As

Publication number Publication date
CS257114B1 (en) 1988-04-15

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