CS239890A3 - Negative photoresist for photolithographic process - Google Patents

Negative photoresist for photolithographic process

Info

Publication number
CS239890A3
CS239890A3 CS902398A CS239890A CS239890A3 CS 239890 A3 CS239890 A3 CS 239890A3 CS 902398 A CS902398 A CS 902398A CS 239890 A CS239890 A CS 239890A CS 239890 A3 CS239890 A3 CS 239890A3
Authority
CS
Czechoslovakia
Prior art keywords
negative photoresist
photolithographic process
photolithographic
photoresist
negative
Prior art date
Application number
CS902398A
Other languages
English (en)
Inventor
Adolf Ing Mistr
Marie Rndr Pracharova
Jaromir Ing Klimek
Michal Ing Klein
Michal Ing Szabo
Original Assignee
Lachema Np
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lachema Np filed Critical Lachema Np
Priority to CS902398A priority Critical patent/CS239890A3/cs
Publication of CS239890A3 publication Critical patent/CS239890A3/cs

Links

CS902398A 1990-05-17 1990-05-17 Negative photoresist for photolithographic process CS239890A3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS902398A CS239890A3 (en) 1990-05-17 1990-05-17 Negative photoresist for photolithographic process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS902398A CS239890A3 (en) 1990-05-17 1990-05-17 Negative photoresist for photolithographic process

Publications (1)

Publication Number Publication Date
CS239890A3 true CS239890A3 (en) 1992-02-19

Family

ID=5361019

Family Applications (1)

Application Number Title Priority Date Filing Date
CS902398A CS239890A3 (en) 1990-05-17 1990-05-17 Negative photoresist for photolithographic process

Country Status (1)

Country Link
CS (1) CS239890A3 (cs)

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