DD133714A1 - Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen - Google Patents

Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen

Info

Publication number: DD133714A1
Authority: DD; German Democratic Republic
Prior art keywords: piezoresistival; integrated; bending plate; measuring elements; semiconductor measuring
Prior art date: 1977-12-29

Application number

DD7700202998A

Other languages

English (en)

Inventor

Frank Loeffler

Original Assignee

Frank Loeffler

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-12-29

Filing date

1977-12-29

Publication date

1979-01-17

1977-12-29 Application filed by Frank Loeffler filed Critical Frank Loeffler

1977-12-29 Priority to DD7700202998A priority Critical patent/DD133714A1/de

1978-10-14 Priority to DE19782844893 priority patent/DE2844893A1/de

1978-11-07 Priority to GB7843496A priority patent/GB2011707B/en

1978-12-20 Priority to IT52392/78A priority patent/IT1158180B/it

1978-12-21 Priority to SE7813216A priority patent/SE7813216L/xx

1979-01-17 Publication of DD133714A1 publication Critical patent/DD133714A1/de

Links

XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
229910052710 silicon Inorganic materials 0.000 title 1
239000010703 silicon Substances 0.000 title 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Pressure Sensors (AREA)
Force Measurement Appropriate To Specific Purposes (AREA)
Measuring Fluid Pressure (AREA)

DD7700202998A 1977-12-29 1977-12-29 Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen DD133714A1 (de)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
DD7700202998A DD133714A1 (de)	1977-12-29	1977-12-29	Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen
DE19782844893 DE2844893A1 (de)	1977-12-29	1978-10-14	Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen
GB7843496A GB2011707B (en)	1977-12-29	1978-11-07	Silicon diaphragm with integrated piezo resistive semi conductor strain gauge elements
IT52392/78A IT1158180B (it)	1977-12-29	1978-12-20	Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati
SE7813216A SE7813216L (sv)	1977-12-29	1978-12-21	Piezzoresistivt tojningselement

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DD7700202998A DD133714A1 (de)	1977-12-29	1977-12-29	Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen

Publications (1)

Publication Number	Publication Date
DD133714A1 true DD133714A1 (de)	1979-01-17

Family

ID=5511095

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DD7700202998A DD133714A1 (de)	1977-12-29	1977-12-29	Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen

Country Status (5)

Country	Link
DD (1)	DD133714A1 (de)
DE (1)	DE2844893A1 (de)
GB (1)	GB2011707B (de)
IT (1)	IT1158180B (de)
SE (1)	SE7813216L (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60128673A (ja) *	1983-12-16	1985-07-09	Hitachi Ltd	半導体感圧装置
US4672853A (en) *	1984-10-30	1987-06-16	Burr-Brown Corporation	Apparatus and method for a pressure-sensitive device
FR2653197B1 (fr) *	1989-10-12	1991-12-27	Vulcanic	Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
FR2653271B1 (fr) *	1989-10-13	1994-06-10	Schlumberger Ind Sa	Capteur a semi-conducteurs.
JP3009239B2 (ja) *	1991-04-02	2000-02-14	本田技研工業株式会社	半導体センサ
US5397911A (en) *	1991-04-02	1995-03-14	Honda Giken Kogyo Kabushiki Kaisha	Semiconductor sensor with plural gate electrodes
CN105333812B (zh) *	2015-12-04	2018-06-29	浙江工业大学	横向分布五敏感栅中叉指金属应变片
CN105318830B (zh) *	2015-12-04	2018-03-02	浙江工业大学	横向偏差六敏感栅全桥混合叉指金属应变片
US10296148B2 (en)	2016-08-31	2019-05-21	Synaptics Incorporated	Full-bridge strain-gauge array of finger thermal compensation

1977
- 1977-12-29 DD DD7700202998A patent/DD133714A1/de unknown
1978
- 1978-10-14 DE DE19782844893 patent/DE2844893A1/de not_active Withdrawn
- 1978-11-07 GB GB7843496A patent/GB2011707B/en not_active Expired
- 1978-12-20 IT IT52392/78A patent/IT1158180B/it active
- 1978-12-21 SE SE7813216A patent/SE7813216L/xx unknown

Also Published As

Publication number	Publication date
SE7813216L (sv)	1979-06-30
IT1158180B (it)	1987-02-18
DE2844893A1 (de)	1979-07-05
GB2011707B (en)	1982-06-16
IT7852392A0 (it)	1978-12-20
GB2011707A (en)	1979-07-11

Publication	Publication Date	Title
IT1123147B (it)	1986-04-30	Dispositivo di misurazione
SE7803106L (sv)	1978-10-19	Halvledaranordning
AT373075B (de)	1983-12-12	Lastmessvorrichtung
IT1060985B (it)	1982-09-30	Dispositivo di misurazione
BR7808124A (pt)	1979-07-31	Dispositivo semicondutor
SE7709326L (sv)	1978-02-26	Elektronisk vegningsanordning
SE7701316L (sv)	1977-08-10	Halvledaranordning
SE7810315L (sv)	1979-04-04	Halvledaranordning
SE7709146L (sv)	1978-02-17	Halvledaranordning
FI783324A7 (fi)	1979-05-03	Maetningsanordning
SE435656B (sv)	1984-10-08	Elektronisk vegningsanordning
AT377084B (de)	1985-02-11	Messeinrichtung
IT1082072B (it)	1985-05-21	Dispositivo di pesatura
BE863929A (fr)	1978-05-29	Dispositif semi-conducteur
SE7800782L (sv)	1978-07-25	Halvledarelement
SE7709019L (sv)	1978-03-01	Halvledaranordning
SE8001068L (sv)	1980-02-11	Pejlapparat
BR7800627A (pt)	1978-10-10	Dispositivo semicondutor
NL7810677A (nl)	1979-05-08	Geintegreerde halfgeleiderinrichting.
IT7852392A0 (it)	1978-12-20	Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati
SE7805782L (sv)	1978-11-26	Halvledaranordning
IT1061169B (it)	1982-10-20	Dispositivo di misura
IT1074514B (it)	1985-04-20	Dispositivo di pesatura
BR7800732A (pt)	1978-10-10	Dispositivo semi-condutor
SE7801698L (sv)	1978-09-18	Halvledaranordning