SE7813216L - Piezzoresistivt tojningselement - Google Patents

Piezzoresistivt tojningselement

Info

Publication number
SE7813216L
SE7813216L SE7813216A SE7813216A SE7813216L SE 7813216 L SE7813216 L SE 7813216L SE 7813216 A SE7813216 A SE 7813216A SE 7813216 A SE7813216 A SE 7813216A SE 7813216 L SE7813216 L SE 7813216L
Authority
SE
Sweden
Prior art keywords
tojningselement
piezzo
resistant
resistant tojningselement
piezzo resistant
Prior art date
Application number
SE7813216A
Other languages
English (en)
Swedish (sv)
Inventor
F Loffler
Original Assignee
Teltov Geraete Regler
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teltov Geraete Regler filed Critical Teltov Geraete Regler
Publication of SE7813216L publication Critical patent/SE7813216L/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
SE7813216A 1977-12-29 1978-12-21 Piezzoresistivt tojningselement SE7813216L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD7700202998A DD133714A1 (de) 1977-12-29 1977-12-29 Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen

Publications (1)

Publication Number Publication Date
SE7813216L true SE7813216L (sv) 1979-06-30

Family

ID=5511095

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7813216A SE7813216L (sv) 1977-12-29 1978-12-21 Piezzoresistivt tojningselement

Country Status (5)

Country Link
DD (1) DD133714A1 (de)
DE (1) DE2844893A1 (de)
GB (1) GB2011707B (de)
IT (1) IT1158180B (de)
SE (1) SE7813216L (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
FR2653197B1 (fr) * 1989-10-12 1991-12-27 Vulcanic Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
FR2653271B1 (fr) * 1989-10-13 1994-06-10 Schlumberger Ind Sa Capteur a semi-conducteurs.
US5397911A (en) * 1991-04-02 1995-03-14 Honda Giken Kogyo Kabushiki Kaisha Semiconductor sensor with plural gate electrodes
JP3009239B2 (ja) * 1991-04-02 2000-02-14 本田技研工業株式会社 半導体センサ
CN105318830B (zh) * 2015-12-04 2018-03-02 浙江工业大学 横向偏差六敏感栅全桥混合叉指金属应变片
CN105333812B (zh) * 2015-12-04 2018-06-29 浙江工业大学 横向分布五敏感栅中叉指金属应变片
US10296148B2 (en) 2016-08-31 2019-05-21 Synaptics Incorporated Full-bridge strain-gauge array of finger thermal compensation

Also Published As

Publication number Publication date
GB2011707B (en) 1982-06-16
DD133714A1 (de) 1979-01-17
IT1158180B (it) 1987-02-18
DE2844893A1 (de) 1979-07-05
GB2011707A (en) 1979-07-11
IT7852392A0 (it) 1978-12-20

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