DD236511A5 - Verfahren zur herstellung von siliciumtetrafluorid - Google Patents

Verfahren zur herstellung von siliciumtetrafluorid Download PDF

Info

Publication number: DD236511A5
Authority: DD; German Democratic Republic
Prior art keywords: fluoride; silicon; silicon tetrafluoride; sif; hydrolyzate
Prior art date: 1984-09-05

Application number

DD85275177A

Other languages

German (de)

English (en)

Inventor

Porcham

Original Assignee

�K@��@�K@��Kk��

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-09-05

Filing date

1985-04-15

Publication date

1986-06-11

1985-04-15 Application filed by �K@��@�K@��Kk�� filed Critical �K@��@�K@��Kk��

1986-06-11 Publication of DD236511A5 publication Critical patent/DD236511A5/de

Links

ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 title claims abstract description 25
238000000034 method Methods 0.000 title claims abstract description 19
238000002360 preparation method Methods 0.000 title description 3
239000007789 gas Substances 0.000 claims abstract description 13
229910001512 metal fluoride Inorganic materials 0.000 claims abstract description 9
OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims abstract description 7
229910001632 barium fluoride Inorganic materials 0.000 claims abstract description 7
NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Inorganic materials [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 claims abstract description 7
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims abstract description 5
239000011591 potassium Substances 0.000 claims abstract description 5
238000005979 thermal decomposition reaction Methods 0.000 claims abstract description 5
239000007795 chemical reaction product Substances 0.000 claims abstract description 3
PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Inorganic materials [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 abstract description 11
238000004519 manufacturing process Methods 0.000 abstract description 6
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 abstract description 5
239000011734 sodium Substances 0.000 abstract description 5
239000006227 byproduct Substances 0.000 abstract description 2
230000003301 hydrolyzing effect Effects 0.000 abstract description 2
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 12
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 12
150000004761 hexafluorosilicates Chemical class 0.000 description 8
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
229910019142 PO4 Inorganic materials 0.000 description 6
239000002253 acid Substances 0.000 description 6
-1 hexafluorosilicic acid Chemical compound 0.000 description 6
235000021317 phosphate Nutrition 0.000 description 6
241000196324 Embryophyta Species 0.000 description 5
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
229910052731 fluorine Inorganic materials 0.000 description 5
239000011737 fluorine Substances 0.000 description 5
229910004298 SiO 2 Inorganic materials 0.000 description 4
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
VDRSDNINOSAWIV-UHFFFAOYSA-N [F].[Si] Chemical compound [F].[Si] VDRSDNINOSAWIV-UHFFFAOYSA-N 0.000 description 4
229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
239000000463 material Substances 0.000 description 4
239000000203 mixture Substances 0.000 description 4
150000003013 phosphoric acid derivatives Chemical class 0.000 description 4
JTDPJYXDDYUJBS-UHFFFAOYSA-N quinoline-2-carbohydrazide Chemical compound C1=CC=CC2=NC(C(=O)NN)=CC=C21 JTDPJYXDDYUJBS-UHFFFAOYSA-N 0.000 description 4
235000013024 sodium fluoride Nutrition 0.000 description 4
239000011775 sodium fluoride Substances 0.000 description 4
239000002912 waste gas Substances 0.000 description 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
238000000209 wet digestion Methods 0.000 description 4
238000000354 decomposition reaction Methods 0.000 description 3
150000002222 fluorine compounds Chemical class 0.000 description 3
229910052710 silicon Inorganic materials 0.000 description 3
239000010703 silicon Substances 0.000 description 3
239000000725 suspension Substances 0.000 description 3
RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
150000007513 acids Chemical class 0.000 description 2
150000001875 compounds Chemical class 0.000 description 2
238000005260 corrosion Methods 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
238000001035 drying Methods 0.000 description 2
230000007613 environmental effect Effects 0.000 description 2
239000000706 filtrate Substances 0.000 description 2
239000011521 glass Substances 0.000 description 2
230000007062 hydrolysis Effects 0.000 description 2
238000006460 hydrolysis reaction Methods 0.000 description 2
NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
239000010452 phosphate Substances 0.000 description 2
238000005498 polishing Methods 0.000 description 2
239000000047 product Substances 0.000 description 2
238000005086 pumping Methods 0.000 description 2
229960004029 silicic acid Drugs 0.000 description 2
235000012239 silicon dioxide Nutrition 0.000 description 2
239000000377 silicon dioxide Substances 0.000 description 2
239000002699 waste material Substances 0.000 description 2
229910000990 Ni alloy Inorganic materials 0.000 description 1
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
238000009825 accumulation Methods 0.000 description 1
239000003513 alkali Substances 0.000 description 1
229910052783 alkali metal Inorganic materials 0.000 description 1
150000001340 alkali metals Chemical class 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
125000004122 cyclic group Chemical group 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
230000029087 digestion Effects 0.000 description 1
LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 1
150000002148 esters Chemical class 0.000 description 1
239000012065 filter cake Substances 0.000 description 1
229910021485 fumed silica Inorganic materials 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
230000002209 hydrophobic effect Effects 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000003446 ligand Substances 0.000 description 1
239000002808 molecular sieve Substances 0.000 description 1
229910021652 non-ferrous alloy Inorganic materials 0.000 description 1
238000005554 pickling Methods 0.000 description 1
229910052700 potassium Inorganic materials 0.000 description 1
235000003270 potassium fluoride Nutrition 0.000 description 1
239000011698 potassium fluoride Substances 0.000 description 1
239000000843 powder Substances 0.000 description 1
239000002244 precipitate Substances 0.000 description 1
238000000746 purification Methods 0.000 description 1
239000010453 quartz Substances 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000000926 separation method Methods 0.000 description 1
229910000077 silane Inorganic materials 0.000 description 1
229910002027 silica gel Inorganic materials 0.000 description 1
239000000741 silica gel Substances 0.000 description 1
RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
229960001866 silicon dioxide Drugs 0.000 description 1
229910052708 sodium Inorganic materials 0.000 description 1
URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
239000010959 steel Substances 0.000 description 1
238000003756 stirring Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
210000004127 vitreous body Anatomy 0.000 description 1
239000003643 water by type Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10B—DESTRUCTIVE DISTILLATION OF CARBONACEOUS MATERIALS FOR PRODUCTION OF GAS, COKE, TAR, OR SIMILAR MATERIALS
- C10B33/00—Discharging devices; Coke guides
- C10B33/08—Pushers, e.g. rams
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10705—Tetrafluoride
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Oil, Petroleum & Natural Gas (AREA)
Silicon Compounds (AREA)
Treating Waste Gases (AREA)
Silicon Polymers (AREA)

DD85275177A 1984-09-05 1985-04-15 Verfahren zur herstellung von siliciumtetrafluorid DD236511A5 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE3432678A DE3432678C2 (de)	1984-09-05	1984-09-05	Verfahren zur Herstellung von Siliciumtetrafluorid

Publications (1)

Publication Number	Publication Date
DD236511A5 true DD236511A5 (de)	1986-06-11

Family

ID=6244730

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DD85275177A DD236511A5 (de)	1984-09-05	1985-04-15	Verfahren zur herstellung von siliciumtetrafluorid

Country Status (12)

Country	Link
US (1)	US4615872A (fr)
EP (1)	EP0173793A3 (fr)
JP (1)	JPS6168315A (fr)
KR (1)	KR860002419A (fr)
CA (1)	CA1220322A (fr)
DD (1)	DD236511A5 (fr)
DE (1)	DE3432678C2 (fr)
DK (1)	DK133585A (fr)
ES (1)	ES8606828A1 (fr)
FI (1)	FI75330C (fr)
IN (1)	IN162367B (fr)
NO (1)	NO851213L (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB8614539D0 (en) *	1986-06-14	1986-07-23	Renishaw Plc	Coordinate positioning apparatus
US5165534A (en) *	1989-11-13	1992-11-24	Lauren Kaufman	Packaging cases incorporating elevating mechanism for displaying contents
US5242670A (en) *	1992-07-02	1993-09-07	Gehringer Ronald C	Method for hydrofluoric acid digestion of silica/alumina matrix material for the production of silicon tetrafluoride, aluminum fluoride and other residual metal fluorides and oxides
US5888468A (en) *	1998-06-05	1999-03-30	Starmet Corp.	Method for producing silicon tetrafluoride from uranium tetrafluoride
US5918106A (en) *	1998-06-05	1999-06-29	Starmet Corp.	Method for producing uranium oxide and a non-radioactive fluorine compound from uranium tetrafluoride and a solid oxide compound
US5901338A (en) *	1998-06-05	1999-05-04	Starmet Corporation	Method for producing uranium oxide and silicon tetrafluoride from uranium tetrafluoride, silicon, and a gaseous oxide
US6096281A (en) *	1999-03-29	2000-08-01	Starmet Corporation	Method for producing uranium oxide from uranium oxyfluoride
US6086836A (en) *	1999-03-29	2000-07-11	Starmet Corporation	Method for producing uranium oxide from uranium oxyfluoride and silicon
US6033642A (en) *	1999-03-29	2000-03-07	Starmet Corporation	Method for producing silicon tetrafluoride from uranium oxyfluoride
JP3909385B2 (ja) *	2001-07-12	2007-04-25	昭和電工株式会社	テトラフルオロシランの製造方法およびその用途
US7666379B2 (en) *	2001-07-16	2010-02-23	Voltaix, Inc.	Process and apparatus for removing Bronsted acid impurities in binary halides
JP4014451B2 (ja) *	2001-09-11	2007-11-28	セントラル硝子株式会社	四フッ化珪素の製造法
RU2182558C1 (ru) *	2001-09-28	2002-05-20	Зао "Астор-Электроникс"	Способ получения тетрафторида кремния
TW200512159A (en) *	2003-09-25	2005-04-01	Showa Denko Kk	Method for producing tetrafluorosilane
US20110101273A1 (en) *	2005-09-16	2011-05-05	Robert Rewick	Process and Composition for Making Rare Earth Doped Particles and Methods of Using Them
KR100831060B1 (ko)	2006-12-29	2008-05-20	대일개발 주식회사	실리콘이 함유된 반도체 에칭 폐액의 재생방법
WO2010025277A2 (fr) *	2008-08-28	2010-03-04	Sri International	Méthode et système de production de fluor gazeux, et verres ou céramiques dopés au fluor
SG172067A1 (en) *	2008-12-17	2011-07-28	Memc Electronic Materials	Processes and systems for producing silicon tetrafluoride from fluorosilicates in a fluidized bed reactor
RU2549415C2 (ru) *	2012-12-05	2015-04-27	Открытое акционерное общество "Ведущий научно-исследовательский институт химической технологии" (ОАО "ВНИИХТ")	Способ получения тетрафторида кремния и октаоксида триурана из тетрафторида урана
DE102013104398A1 (de) *	2013-04-30	2014-10-30	Spawnt Private S.À.R.L.	Verfahren zur Herstellung von Siliziumtetrafluorid
CN114380304B (zh) *	2022-01-21	2023-05-30	云南磷化集团有限公司	一种对氟硝基苯用原料氟化钾的短流程制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DD67408A (fr) *
US1247165A (en) *	1917-03-17	1917-11-20	Karl F Stahl	Method of making sodium silicofluorid.
US2833628A (en) *	1954-06-09	1958-05-06	Grace W R & Co	Manufacture of silicon tetrafluoride
US2933374A (en) *	1955-03-29	1960-04-19	Gen Electric	Process of treating fluorosilanes to form monosilane
GB1254785A (en) *	1968-03-28	1971-11-24	Degussa	A process for the production of silicon tetrahalides
US3674431A (en) *	1970-07-01	1972-07-04	Cities Service Co	Generation of silicon tetrafluoride
US3969485A (en) *	1971-10-28	1976-07-13	Flemmert Goesta Lennart	Process for converting silicon-and-fluorine-containing waste gases into silicon dioxide and hydrogen fluoride
US4262409A (en) *	1978-04-24	1981-04-21	Robroy Industries	Cable connector
US4282196A (en) *	1979-10-12	1981-08-04	Bell Telephone Laboratories, Incorporated	Method of preparing optical fibers of silica

1984
- 1984-09-05 DE DE3432678A patent/DE3432678C2/de not_active Expired
1985
- 1985-03-20 EP EP85103264A patent/EP0173793A3/fr not_active Withdrawn
- 1985-03-25 DK DK133585A patent/DK133585A/da not_active Application Discontinuation
- 1985-03-26 FI FI851215A patent/FI75330C/fi not_active IP Right Cessation
- 1985-03-26 NO NO851213A patent/NO851213L/no unknown
- 1985-03-27 US US06/716,390 patent/US4615872A/en not_active Expired - Fee Related
- 1985-03-28 KR KR1019850002064A patent/KR860002419A/ko not_active Withdrawn
- 1985-04-04 IN IN256/CAL/85A patent/IN162367B/en unknown
- 1985-04-11 ES ES542159A patent/ES8606828A1/es not_active Expired
- 1985-04-15 DD DD85275177A patent/DD236511A5/de unknown
- 1985-05-29 CA CA000482735A patent/CA1220322A/fr not_active Expired
- 1985-06-21 JP JP60134400A patent/JPS6168315A/ja active Pending

Also Published As

Publication number	Publication date
DE3432678C2 (de)	1986-11-20
FI851215L (fi)	1986-03-06
FI75330C (fi)	1988-06-09
JPS6168315A (ja)	1986-04-08
KR860002419A (ko)	1986-04-26
US4615872A (en)	1986-10-07
ES542159A0 (es)	1986-05-01
DK133585D0 (da)	1985-03-25
ES8606828A1 (es)	1986-05-01
FI75330B (fi)	1988-02-29
EP0173793A3 (fr)	1989-03-22
EP0173793A2 (fr)	1986-03-12
NO851213L (no)	1986-03-06
CA1220322A (fr)	1987-04-14
FI851215A0 (fi)	1985-03-26
IN162367B (fr)	1988-05-14
DK133585A (da)	1986-03-06
DE3432678A1 (de)	1986-04-17

Publication	Publication Date	Title
DD236511A5 (de)	1986-06-11	Verfahren zur herstellung von siliciumtetrafluorid
DE3635064C2 (fr)	1991-11-07
DE2944975A1 (de)	1980-05-22	Verfahren zur reinigung von silizium
DE2651384C2 (de)	1984-03-15	Verfahren zur Aufbereitung von Siliziumdioxid enthaltenden Abfallstäuben zu kristallinem zeolithischem Molekularsieb vom Typ A
DE69132718T2 (de)	2002-07-04	Herstellung von Phosphorsäure
DE3125989A1 (de)	1982-03-18	Verfahren zur praeparierung von silizium-tetrafluoridunter benutzung von gasfoermigem fluorwasserstoff
DE3311650A1 (de)	1983-10-13	Verfahren zur herstellung von hoch reinem silan sowie hoch reinem polykristallinem und einkristallinem silicium fuer solarzellen und halbleiter
DE2609831B2 (de)	1979-05-23	Verfahren zur Aufbereitung von Siliciumdioxid enthaltenden Abfallflugstäuben zu Fällungskieselsäuren und Silikaten
DE102012200992A1 (de)	2013-07-25	Dotierstoffarmes polykristallines Siliciumstück
DE2247873C3 (de)	1981-10-29	Verfahren zur Herstellung von Silanen
DE69124638T2 (de)	1997-09-04	Verfahren zur Reinigung von Alkoxysilanen
DE2651446C2 (de)	1984-04-19	Verfahren zur Aufbereitung von Siliziumdioxid enthaltenden Abfallflugstäuben zu kristallinem zeolithischen Molekularsieb vom Typ Y mit Faujasit Struktur
US4465657A (en)	1984-08-14	Process for the preparation of pure silicon dioxide and silicon dioxide obtained by applying this process
EP0527309A1 (fr)	1993-02-17	Méthode de traitement des déchets de la distillation de chlorosilanes avec l'acide chlorhydrique, sans production d'eau résiduaire
DE2753868A1 (de)	1978-06-08	Verfahren zur reinigung von gips enthaltendem natriumhexafluorosilikat
DE2800272A1 (de)	1978-07-20	Verfahren zur herstellung von fluorwasserstoff und siliziumdioxid aus siliziumtetrafluorid
EP1880042B1 (fr)	2010-10-20	Electrolyse du quartz en bain de sels fondus, à basse température
JP2864617B2 (ja)	1999-03-03	珪弗化水素酸、珪弗化アンモニウム及び高純度シリカの製造法
DD240729A1 (de)	1986-11-12	Verfahren zur gewinnung von hochreinem siliziumpulver
WO1991017953A1 (fr)	1991-11-28	Procede simplifie pour la production de silicates stratifies aptes au gonflement
US4180546A (en)	1979-12-25	Process for removing phosphorus from phosphorus-containing fluorite
DE112006001649T5 (de)	2008-05-08	Verfahren zur Herstellung von Silicium hoher Reinheit
DE3228177A1 (de)	1984-02-09	Verfahren zur herstellung von silicium
DE2704074C3 (de)	1983-06-09	Verfahren zur Reinigung von Phosphorsäure durch Inberührungbringen mit Silicagel
DE3604732C2 (de)	1994-07-28	Verfahren zur Herstellung von wasserhaltiger Kieselsäure