DD237932B1 - Elektronenkanone fuer hohe strahlleistungen - Google Patents

Elektronenkanone fuer hohe strahlleistungen

Info

Publication number
DD237932B1
DD237932B1 DD85276845A DD27684585A DD237932B1 DD 237932 B1 DD237932 B1 DD 237932B1 DD 85276845 A DD85276845 A DD 85276845A DD 27684585 A DD27684585 A DD 27684585A DD 237932 B1 DD237932 B1 DD 237932B1
Authority
DD
German Democratic Republic
Prior art keywords
radiation power
high radiation
electronic cannon
cannon
electronic
Prior art date
Application number
DD85276845A
Other languages
English (en)
Other versions
DD237932A1 (de
Inventor
Alexander Von Ardenne
Guenter Jaesch
Siegfried Schiller
Original Assignee
Ardenne Forschungsinst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Forschungsinst filed Critical Ardenne Forschungsinst
Priority to DD85276845A priority Critical patent/DD237932B1/de
Priority to US06/851,650 priority patent/US4665297A/en
Priority to JP61122385A priority patent/JPS61284036A/ja
Publication of DD237932A1 publication Critical patent/DD237932A1/de
Publication of DD237932B1 publication Critical patent/DD237932B1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DD85276845A 1985-05-31 1985-05-31 Elektronenkanone fuer hohe strahlleistungen DD237932B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DD85276845A DD237932B1 (de) 1985-05-31 1985-05-31 Elektronenkanone fuer hohe strahlleistungen
US06/851,650 US4665297A (en) 1985-05-31 1986-04-14 High power electron gun
JP61122385A JPS61284036A (ja) 1985-05-31 1986-05-29 高い電子ビ−ム出力のための電子銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD85276845A DD237932B1 (de) 1985-05-31 1985-05-31 Elektronenkanone fuer hohe strahlleistungen

Publications (2)

Publication Number Publication Date
DD237932A1 DD237932A1 (de) 1986-07-30
DD237932B1 true DD237932B1 (de) 1988-06-22

Family

ID=5568198

Family Applications (1)

Application Number Title Priority Date Filing Date
DD85276845A DD237932B1 (de) 1985-05-31 1985-05-31 Elektronenkanone fuer hohe strahlleistungen

Country Status (3)

Country Link
US (1) US4665297A (de)
JP (1) JPS61284036A (de)
DD (1) DD237932B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4430534A1 (de) * 1994-08-27 1996-04-11 Hell Ag Linotype Elektronenstrahl-Erzeuger
DE4428508C2 (de) * 1994-08-11 1999-07-29 Fraunhofer Ges Forschung Elektronenkanone
DE4104845C5 (de) * 1991-02-16 2004-09-09 PTR Präzisionstechnik GmbH Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4443830C1 (de) * 1994-12-09 1996-05-23 Ardenne Anlagentech Gmbh Vorrichtung zur Elektronenstrahlerzeugung
DE19730855C1 (de) * 1997-07-18 1999-02-11 Audi Ag Strahlerzeugungssystem für Elektronenkanonen
DE19815456C2 (de) * 1998-04-07 2001-07-05 Ardenne Anlagentech Gmbh Verfahren zum Betreiben einer Elektronenkanone
US6196889B1 (en) 1998-12-11 2001-03-06 United Technologies Corporation Method and apparatus for use an electron gun employing a thermionic source of electrons
US6455990B1 (en) 1998-12-11 2002-09-24 United Technologies Corporation Apparatus for an electron gun employing a thermionic electron source
DE10242538B4 (de) * 2002-09-12 2008-07-17 Von Ardenne Anlagentechnik Gmbh Verfahren zur Regelung der Elektronenstrahlleistung von Elektronenquellen
RU2296038C2 (ru) * 2005-04-15 2007-03-27 Закрытое акционерное общество Научно-производственный центр "Элионная техника" (ЗАО "НПЦ "ЭТ") Электронно-лучевая установка
US8159118B2 (en) * 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
JP5099756B2 (ja) * 2007-06-18 2012-12-19 Ｊｆｅエンジニアリング株式会社 電子線発生装置およびその制御方法
RU2348086C1 (ru) * 2007-06-29 2009-02-27 Федеральное государственное унитарное предприятие "Всероссийский электротехнический институт им. В.И. Ленина" Инжектор электронов с выводом электронного пучка в среду с повышенным давлением и электронно-лучевая установка на его основе
CN103474308A (zh) * 2013-09-30 2013-12-25 桂林狮达机电技术工程有限公司 带有电磁合轴装置的电子枪
CN105702545B (zh) * 2016-04-07 2017-11-07 桂林狮达机电技术工程有限公司 带有聚焦补偿功能的电子束快速成型机电子枪系统
CN106024561B (zh) * 2016-08-04 2018-01-05 桂林狮达机电技术工程有限公司 大气电子束加工设备用电子枪
US9934933B1 (en) * 2017-01-19 2018-04-03 Kla-Tencor Corporation Extractor electrode for electron source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD112879A1 (de) * 1974-07-22 1975-05-05
DD132380A1 (de) * 1977-04-25 1978-09-20 Siegfried Schiller Elektronenkanone hoher leistung
DD134168A1 (de) * 1978-01-20 1979-02-07 Siegfried Schiller Elektronenkanone fuer hohe strahlleistungen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104845C5 (de) * 1991-02-16 2004-09-09 PTR Präzisionstechnik GmbH Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone
DE4428508C2 (de) * 1994-08-11 1999-07-29 Fraunhofer Ges Forschung Elektronenkanone
DE4430534A1 (de) * 1994-08-27 1996-04-11 Hell Ag Linotype Elektronenstrahl-Erzeuger

Also Published As

Publication number Publication date
US4665297A (en) 1987-05-12
JPS61284036A (ja) 1986-12-15
DD237932A1 (de) 1986-07-30

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Legal Events

Date Code Title Description
NPI Change in the person, name or address of the patentee (addendum to changes before extension act)
ASS Change of applicant or owner

Owner name: VON ARDENNE ANLAGENTECHNIK GMBH, DRESDEN

Effective date: 19920910

IF04 In force in the year 2004

Expiry date: 20050601