DE69322115D1 - Herstellung von Ausrichtmarken für holographische Lithographie - Google Patents

Herstellung von Ausrichtmarken für holographische Lithographie

Info

Publication number
DE69322115D1
DE69322115D1 DE69322115T DE69322115T DE69322115D1 DE 69322115 D1 DE69322115 D1 DE 69322115D1 DE 69322115 T DE69322115 T DE 69322115T DE 69322115 T DE69322115 T DE 69322115T DE 69322115 D1 DE69322115 D1 DE 69322115D1
Authority
DE
Germany
Prior art keywords
manufacture
registration marks
holographic lithography
holographic
lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322115T
Other languages
English (en)
Other versions
DE69322115T2 (de
Inventor
Basil Arthur Omar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOLTRONIC TECHNOLOGIES PLC, LONDON, GB
Original Assignee
HOLTRONICS TECHNOLOGIES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOLTRONICS TECHNOLOGIES Ltd filed Critical HOLTRONICS TECHNOLOGIES Ltd
Application granted granted Critical
Publication of DE69322115D1 publication Critical patent/DE69322115D1/de
Publication of DE69322115T2 publication Critical patent/DE69322115T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0402—Recording geometries or arrangements
    • G03H1/0408—Total internal reflection [TIR] holograms, e.g. edge lit or substrate mode holograms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2249—Holobject properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Holo Graphy (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69322115T 1992-03-16 1993-03-12 Herstellung von Ausrichtmarken für holographische Lithographie Expired - Fee Related DE69322115T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85202492A 1992-03-16 1992-03-16

Publications (2)

Publication Number Publication Date
DE69322115D1 true DE69322115D1 (de) 1998-12-24
DE69322115T2 DE69322115T2 (de) 1999-06-24

Family

ID=25312322

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69322115T Expired - Fee Related DE69322115T2 (de) 1992-03-16 1993-03-12 Herstellung von Ausrichtmarken für holographische Lithographie

Country Status (4)

Country Link
EP (1) EP0561302B1 (de)
KR (1) KR100258265B1 (de)
DE (1) DE69322115T2 (de)
GB (1) GB2272535B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5606434A (en) * 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
DE10116060B4 (de) * 2001-03-30 2005-01-13 Tesa Scribos Gmbh Lithograph mit Triggermaske und Verfahren zum Herstellen digitaler Hologramme in einem Speichermedium
DE10116058B4 (de) 2001-03-30 2006-05-11 Tesa Scribos Gmbh Verfahren zum Herstellen digitaler Hologramme in einem Speichermedium und Lithograph zum Herstellen digitaler Hologramme in einem Speichermedium
KR100727777B1 (ko) 2006-03-03 2007-06-14 주식회사 대우일렉트로닉스 전반사를 이용한 광정보 복제방법 및 복제장치
DE102019220511A1 (de) * 2019-12-23 2021-06-24 Robert Bosch Gmbh Vorrichtung und Verfahren zur Herstellung holographischer optischer Elemente

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8615908D0 (en) * 1986-06-30 1986-08-06 Hugle W B Integrated circuits
GB8802333D0 (en) * 1988-02-03 1988-03-02 Holtronic Technologies Ltd Improvements in manufacture of integrated circuits using holographic techniques

Also Published As

Publication number Publication date
GB9304716D0 (en) 1993-04-28
EP0561302A1 (de) 1993-09-22
GB2272535B (en) 1995-06-07
KR930020241A (ko) 1993-10-19
DE69322115T2 (de) 1999-06-24
KR100258265B1 (ko) 2000-06-01
GB2272535A (en) 1994-05-18
EP0561302B1 (de) 1998-11-18

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HOLTRONIC TECHNOLOGIES PLC, LONDON, GB

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee